Related Manuals for Aerotech ECO165SL Series
Summary of Contents for Aerotech ECO165SL Series
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Page 1: Eco165Sl Series Mechanical Bearing, Ball-Screw Stage
ECO165SL Series Mechanical Bearing, Ball-Screw Stage HARDWARE MANUAL Revision 2.01... - Page 2 Global Technical Support Portal for information and support about your Aerotech, Inc. products. The website supplies software, product manuals, Help files, training schedules, and PC-to-PC remote technical support. If necessary, you can complete Product Return (RMA) forms and get information about repairs and spare or replacement parts.
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Page 3: Table Of Contents
ECO165SL Hardware Manual Table of Contents Table of Contents ECO165SL Series Mechanical Bearing, Ball-Screw Stage Table of Contents List of Figures List of Tables EU Declaration of Incorporation Safety Procedures and Warnings Installation and Operation Electrical Warnings Motor-Related Warnings Pinch Points... -
Page 4: List Of Figures
Attach the Coupling Adapter to the Motor Shaft Figure 4-5: Attach the Motor the Stage Figure 4-6: Tighten the Shaft Coupling to the Drive Screw Figure 4-7: Foldback Motor Cover Removal Figure 4-8: Foldback Motor Part Callouts Figure 4-9: Lubricate the Pulley Flanges www.aerotech.com... -
Page 5: List Of Tables
List of Tables Table 1-1: Model Numbers and Ordering Options Table 1-2: Environmental Specifications Table 1-3: ECO165SL Series Specifications (-050 to -250) Table 1-4: ECO165SL Series Specifications (-300 to -600) Table 2-1: Stage Mounting Surface Flatness Requirement Table 2-2: Stage to Mounting Surface Hardware... -
Page 6: Eu Declaration Of Incorporation
EU Declaration of Incorporation ECO165SL Hardware Manual EU Declaration of Incorporation Manufacturer Aerotech, Inc. 101 Zeta Drive Pittsburgh, PA 15238-2811 herewith declares that the product: ECO165SL Linear Stage is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC as amended;... -
Page 7: Safety Procedures And Warnings
To find the newest information about this product, refer to www.aerotech.com. If you do not understand the information in this manual, contact Aerotech Global Technical Support. IMPORTANT: This product has been designed for light industrial manufacturing or laboratory environments. -
Page 8: Installation And Operation
WARNING: Trip Hazard! Route, house, and secure all cables, duct work, air, or water lines. Failure to do so could introduce trip hazards around the system that could result in physical injury or could damage the equipment. www.aerotech.com... -
Page 9: Electrical Warnings
It is the responsibility of the End User/System Integrator to make sure that stages are properly connected and grounded per Engineering Standards and applicable safety requirements. It is the responsibility of the End User/System Integrator to configure the system drive or controller within the Aerotech motor/stage electrical and mechanical specifications. www.aerotech.com... -
Page 10: Motor-Related Warnings
Motor-Related Warnings ECO165SL Hardware Manual Motor-Related Warnings Aerotech motors are capable of producing high forces and velocities. Obey all warnings and all applicable codes and standards when you operate a system that incorporates Aerotech motors. DANGER: Mechanical Hazard! Personnel must be made aware of the mechanical hazards during set up or when you do service to the stage. -
Page 11: Pinch Points
(during normal operation, for example). when the system is moved manually (during the installation process or when you do maintenance, for example). Motors are capable of very high speeds and acceleration rates. Figure 2: Typical Pinch Point Locations www.aerotech.com... -
Page 12: Handling And Storage
Lift this product only by the base. Use lifting hardware if it has been provided (refer to Figure For multi-axis assemblies, always lift the system by the lower axis. Use a cart, dolly, or similar device to move the stage to a new location. www.aerotech.com... - Page 13 Before you operate the stage, let it stabilize at room temperature for at least 12 hours. This will ensure that all of the alignments, preloads, and tolerances are the same as they were when they were tested at Aerotech. Each stage has a label listing the system part number and serial number. These numbers contain information necessary for maintenance or system hardware and software updates.
- Page 14 Handling and Storage ECO165SL Hardware Manual This page intentionally left blank. www.aerotech.com...
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Page 15: Chapter 1: Overview
Foldback Kit with Brake for .375 Inch Diameter Shaft NEMA 23 Motor Motor Orientation (Optional) Bottom cable exit (optional orientation) Left side cable exit (standard orientation) Top cable exit (optional orientation) Right side cable exit (optional orientation) Right side foldback (standard orientation) Left side foldback (optional orientation) www.aerotech.com... - Page 16 XZ or YZ assembly with L-bracket; 5 arc second orthogonality; alignment to within 5 µm ALIGN-PA5Z orthogonality for short travel stages Right angle L-bracket for 50 mm, 100 mm, and 150 mm travels only; HDZ165 NOTE: Requires a tabletop when mounting to an ECO series stage www.aerotech.com...
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Page 17: Environmental Specifications
Indoor use only 1.2. Accuracy and Temperature Effects Aerotech products are designed for and built in a 20°C (68°F) environment. Temperature changes could cause a decrease in performance or permanent damage to the stage. At a minimum, the environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the stage specifications are repeatable over an extended period of time. -
Page 18: Basic Specifications
6. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system depend upon the payload and workpoint. Consult the Aerotech factory for multi-axis or non-standard applications. 7. Specifications listed are non-foldback kit options. Contact the factory for specifications when a foldback kit (-FBx) is used. -
Page 19: Table 1-4: Eco165Sl Series Specifications (-300 To -600)
6. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system depend upon the payload and workpoint. Consult the Aerotech factory for multi-axis or non-standard applications. 7. Specifications listed are non-foldback kit options. Contact the factory for specifications when a foldback kit (-FBx) is used. -
Page 20: Vacuum Operation
6. To reduce outgassing during the initial pump-down to vacuum pressure, Aerotech recommends that you bake out vacuum systems when you first install them into the vacuum chamber. Bake the vacuum components at 60 °C for 24 to 48 hours to desorb water vapor from surfaces and... -
Page 21: Chapter 2: Installation
IMPORTANT: The stage installation must be in accordance with the instructions provided by this manual and any accompanying documentation. Failure to follow these instructions could result in injury or damage to the equipment. 2.1. Dimensions Figure 2-1: ECO165SL Dimensions www.aerotech.com... -
Page 22: Figure 2-2: Tabletop Accessory Dimensions (-Tt3 Option)
2.1. Dimensions ECO165SL Hardware Manual Figure 2-2: Tabletop Accessory Dimensions (-TT3 Option) www.aerotech.com... -
Page 23: Figure 2-3: Z-Axis Bracket Dimensions
ECO165SL Hardware Manual 2.1. Dimensions Figure 2-3: Z-Axis Bracket Dimensions www.aerotech.com... -
Page 24: Securing The Stage To The Mounting Surface
Refer to Section 2.1. for mounting locations and dimensions. Table 2-2: Stage to Mounting Surface Hardware Mounting Hardware Typical Screw Torque M6 x 22 mm (or 1/4" x 7/8") SHCS with flat washers 7 N·m [5 ft·lb] www.aerotech.com... -
Page 25: Attaching The Payload To The Stage
If you start the ECO165SL without a payload, the servo gains provided by Aerotech with the shipment may not be appropriate and servo instability can occur. Refer to the controller help file for tuning assistance. -
Page 26: Figure 2-4: Stage Orientations
2.3. Attaching the Payload to the Stage ECO165SL Hardware Manual Figure 2-4: Stage Orientations www.aerotech.com... -
Page 27: Figure 2-5: Cantilevered Load Capability
ECO165SL Hardware Manual 2.3. Attaching the Payload to the Stage Figure 2-5: Cantilevered Load Capability The approximate amount of torque required to turn the ball screw of ECO165SL series stages can be found from Figure 2-7 or the following equation:... -
Page 28: Chapter 3: Electrical Installation
Aerotech motion control systems are adjusted at the factory for optimum performance. When the ECO165SL is part of a complete Aerotech motion control system, setup should only require that you connect the stage to the appropriate drive chassis with the cables provided. Labels on the system components should indicate the appropriate connections. -
Page 29: Motor And Feedback Connectors
Stages equipped with standard motors and encoders come from the factory completely wired and assembled. IMPORTANT: Refer to the other documentation accompanying your Aerotech equipment. Call your Aerotech representative if there are any questions on system configuration. IMPORTANT: If you are using standard Aerotech motors and cables, motor and encoder connection adjustments are not required. -
Page 30: Table 3-1: Brushless Motor Connector Pinout [-M1 To -M8]
Reserved Reserved Reserved Reserved Reserved Frame Ground (motor protective ground) Table 3-2: Mating Connector Part Numbers for the Brushless Motor Connector Mating Connector Aerotech P/N Third Party P/N Backshell ECK00656 Amphenol #17E-1726-2 Sockets [QTY. 4] ECK00659 ITT Cannon #DM53744-6 Connector... -
Page 31: Table 3-5: Brushless Motor Feedback Connector Pinout [-M1 To -M8]
Common ground Reserved Reserved Reserved Reserved Brake + (with Brake Option) Table 3-6: Mating Connector Part Numbers for the Brushless Motor Feedback Connector Mating Connector Aerotech P/N Third Party P/N 25-Socket D-Connector ECK00300 FCI DB25S064TLF Backshell ECK00656 Amphenol 17E-1726-2 www.aerotech.com... -
Page 32: Table 3-7: Stepper Motor Feedback Connector Pinout [-M9 And -M10]
SIN+ (Encoder Sine+) SIN- (Encoder Sine-) Reserved Common Common Reserved Reserved Reserved Reserved Table 3-8: Mating Connector Part Numbers for the Stepper Motor Feedback Connector Mating Connector Aerotech P/N Third Party P/N 25-Socket D-Connector ECK00300 FCI DB25S064TLF Backshell ECK00656 Amphenol 17E-1726-2 www.aerotech.com... -
Page 33: Table 3-9: Limit Connector Wiring
+Limit/CW (Positive/Clockwise Travel Limit) Home Limit -Limit/CCW (Negative/Counterclockwise Limit) Reserved Common ground Reserved Reserved Table 3-10: Mating Connector Part Numbers for the Limit Connector Mating Connector Aerotech P/N Third Party P/N 9-Pin D-Connector ECK00340 FCI DE09S064TLF Backshell ECK01021 Amphenol 17E-1724-2 www.aerotech.com... -
Page 34: Motor And Feedback Wiring
3.2. Motor and Feedback Wiring ECO165SL Hardware Manual 3.2. Motor and Feedback Wiring Shielded cables are required for the motor and feedback connections. Figure 3-1: Brushless Motor and Feedback Wiring [-M1 through -M8 Options] www.aerotech.com... -
Page 35: Figure 3-2: Stepper Motor And Feedback Wiring [-M9 And -M10 Options]
ECO165SL Hardware Manual 3.2. Motor and Feedback Wiring Figure 3-2: Stepper Motor and Feedback Wiring [-M9 and -M10 Options] www.aerotech.com... -
Page 36: Motor And Feedback Specifications
2. -LI1 and -LI2 must have an external pull-up to +5 V (10 kΩ recommended). Table 3-15: Brake Specifications Specification Supply Voltage 24 VDC Supply Current (typical) 250 mA (current required to release the brake and allow motion) www.aerotech.com... -
Page 37: Table 3-16: Eco165Sl Motor Specifications (Bms100)
5. All performance and electrical specifications ±10%. 6. Maximum winding temperature is 100 °C (thermistor trips at 100 °C). 7. Ambient operating temperature range 0 °C - 25 °C; consult Aerotech for performance in elevated ambient temperatures. 8. All Aerotech amplifiers are rated A ;... -
Page 38: Table 3-17: Eco165Sl Motor Specifications (Bm130)
5. Torque constant and motor constant specified at stall. 6. Maximum winding temperature is 130 °C. 7. Ambient operating temperature range 0 °C - 25 °C; consult Aerotech for performance in elevated ambient temperatures. 8. All Aerotech amplifiers are rated A ;... -
Page 39: Table 3-18: Eco165Sl Motor Specifications (Sm100-Vt2)
-M3, -M4, -M7, -M8 with 1000x Interpolation 5 µm 5 nm (1000 line 1Vpp Amplified Sine signal) -M3, -M4, -M7, -M8 with 4000x Interpolation 5 µm 1.25 nm (1000 line 1Vpp Amplified Sine signal) 1. Quadrature decoding included in interpolated resolution calculations www.aerotech.com... -
Page 40: Limits, Marker, And Machine Direction
ECO165SL Hardware Manual 3.4. Limits, Marker, and Machine Direction Aerotech stages are configured to have positive and negative "machine" directions. The machine direction defines the phasing of the feedback and motor signals and is dictated by the stage wiring (refer to Section 3.2.). -
Page 41: Motor And Feedback Phasing
ECO165SL Hardware Manual 3.5. Motor and Feedback Phasing 3.5. Motor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point. Figure 3-4: Hall Phasing Diagram www.aerotech.com... -
Page 42: Figure 3-5: Encoder Phasing Reference Diagram (Standard/Square Wave)
3.5. Motor and Feedback Phasing ECO165SL Hardware Manual Figure 3-5: Encoder Phasing Reference Diagram (Standard/Square Wave) Figure 3-6: Encoder Phasing Reference Diagram (Analog/Sine Wave) www.aerotech.com... -
Page 43: Chapter 4: Maintenance
Visually inspect the stage and cables. Re-tighten loose connectors. Replace or repair damaged cables. Clean the ECO165SL and any components and cables as needed. Repair any damage before operating the ECO165SL. Inspect and perform an operational check on all safeguards and protective devices. www.aerotech.com... -
Page 44: Cleaning And Lubrication
5. We recommend that you do not disassemble the stage beyond the instructions given in this manual. Proper assembly and calibration can only be done at the factory. Contact Aerotech for more information. For stages equipped with foldback motors, you should check the belt tension when you clean or lubricate the stage. - Page 45 8. Apply a thin, continuous film of lubricant to the ball-screw threads and linear bearing guides. Aerotech recommends that you use a good quality, natural bristle artist's brush. 9. Move the stage to the opposite end of travel. If the stage has an optional brake, the stage cannot be moved by hand.
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Page 46: Figure 4-1: Hardcover Screw Removal
4.2. Cleaning and Lubrication ECO165SL Hardware Manual Figure 4-1: Hardcover Screw Removal www.aerotech.com... -
Page 47: Figure 4-2: Hardcover Removal
ECO165SL Hardware Manual 4.2. Cleaning and Lubrication Figure 4-2: Hardcover Removal www.aerotech.com... -
Page 48: Motor Mounting
4-3). Loctite products are printed with an expiration date. Before use, be sure that the expiration date is legible and the product has not expired. If your stage is used in a vacuum or cleanroom environment, contact Aerotech. Figure 4-3: Motor Mounting Overview www.aerotech.com... -
Page 49: Figure 4-4: Attach The Coupling Adapter To The Motor Shaft
6. Attach the Motor to the Stage in the correct orientation (Figure 4-5). Use a hex wrench to ensure that the motor flange is fully seated and the hardware is tight. The motor housing prevents the use of a torque wrench. Figure 4-5: Attach the Motor the Stage www.aerotech.com... -
Page 50: Figure 4-6: Tighten The Shaft Coupling To The Drive Screw
Tighten the Shaft Coupling to the Drive Screw 8. Rotate the drive screw by hand to ensure that the drive screw rotates freely. IMPORTANT: You must reapply Loctite to the mounting hardware if the Motor or Shaft Coupling screws are removed, adjusted, loosened, or replaced. www.aerotech.com... -
Page 51: Belt Adjustment
11. Check the pulley flanges for lubrication. 12. Add small amounts of Parker Super O-Lube lubricant around the circumference of both pulley flanges (Figure 4-9). 13. Replace the foldback cover and mounting screws. 14. Restore power to the stage and resume normal use. www.aerotech.com... -
Page 52: Figure 4-7: Foldback Motor Cover Removal
4.4. Belt Adjustment ECO165SL Hardware Manual Figure 4-7: Foldback Motor Cover Removal IMPORTANT: If the stage has been calibrated (-PL2 option), note the orientation of the two pulleys with regard to each other or recalibration might be required. www.aerotech.com... -
Page 53: Figure 4-8: Foldback Motor Part Callouts
ECO165SL Hardware Manual 4.4. Belt Adjustment Figure 4-8: Foldback Motor Part Callouts Figure 4-9: Lubricate the Pulley Flanges www.aerotech.com... -
Page 54: Troubleshooting
Chapter 3: Electrical Installation and Controller documentation). Stage moves uncontrollably Motor Connections (refer to Chapter 3: Electrical Installation and the Controller documentation). Gains misadjusted (refer to the Controller documentation). Stage oscillates or squeals Encoder signals (refer to the Controller documentation). www.aerotech.com... -
Page 55: Appendix A: Warranty And Field Service
All Other Repairs - After Aerotech's evaluation, the buyer shall be notified of the repair cost. At such time the buyer must issue a valid purchase order to cover the cost of the repair and freight, or authorize the product(s) to be shipped back as is, at the buyer's expense. - Page 56 Aerotech's approval. On-site Warranty Repair If an Aerotech product cannot be made functional by telephone assistance or by sending and having the customer install replacement parts, and cannot be returned to the Aerotech service center for...
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Page 57: Appendix B: Revision History
ECO165SL Hardware Manual Appendix B: Revision History Appendix B: Revision History Revision Description 2.01 Safety section updated Section 4.3. Motor Mounting 2.00 New Section: 1.02 Dimensions updated: Section 2.1. 1.01 Product updates 1.00 New Manual www.aerotech.com... - Page 58 Appendix B: Revision History ECO165SL Hardware Manual This page intentionally left blank. www.aerotech.com...
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Page 59: Index
Dimensions Directive 2006/42/EC packing list part number 12-13 Possible Cause Electrical Installation Protection Rating Electrical Warnings protective ground connection EN 60204-1 2010 EN ISO 12100 2010 Encoder Specifications Rotary Encoder Specifications EU 2015/863 www.aerotech.com... - Page 60 Rotary Encoder SM100-VT2 Motor Thermistor Specifications stabilizing stage stage distortion stabilizing standoffs Storage Symptom Table of Contents Temperature Effects thermal expansion coefficient Thermistor Specifications torque Troubleshooting vacuum guidelines vacuum lubricant (Braycote 602EF) Vacuum Operation Vibration Warnings Warranty and Field Service www.aerotech.com...
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