The Standard User Interface - ADE ASC 2000 User Manual

The STANDARD USER INTERFACE

The STANDARD USER INTERFACE is the display portion of ADE's wafer
characterization software, known as the UNIVERSAL SYSTEM CONTROLLER. Its
main menu is shown below.
Menu items may be selected by positioning the cursor at that item (using the
keyboard cursor keys) and striking the <PAGE DOWN> key.
COMMAND MODE:
Used to define the manner in
which measurements are
made and reported, and the
manner in which sorting is
performed. Parameters are
called a "system setup" and
may be edited, recalled from
or stored to disk, and output
to the screen and/or printer.
AUTO MODE:
Used to initiate
automatic wafer
characterization,
storing/printing
of accumulated
statistics.
SELF TEST MODE:
Used to test the
system for measure-
ment repeatability.
GAGE MODE:
Used to set up, test,
and calibrate the
components of the
system (e.g. Flatness
station, AutoLoader,
Prealigner)
System Mode Menu
Command Mode
Gage Mode
Manual Mode
Auto Mode
Self Test
System Utilities
Remote Mode
REMOTE MODE:
Used to operate the
system via SECS
or HCA.
MANUAL MODE:
Used to examine a
single wafer, either one
stored on disk or one to
be measured.
SYSTEM UTILITIES:
Used to manipulate files
on disks, set the internal
system clock, set up and
test your printer, load new
code and set network
parameters.
ASC 2000 User's Guide- 43