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VARODRY OEM
VD65/VD100/VD160/
VD200
Operating instructions 300890265_002_C3
Part No.
111065v12
111065v13
111065v22
111100v12
111100v13
111100v22
111160v12
111160v13
111160v22
111200v12
111200v13
111200v22

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Summary of Contents for LEYBOLD VARODRY OEM VD65

  • Page 1 VARODRY OEM VD65/VD100/VD160/ VD200 Operating instructions 300890265_002_C3 Part No. 111065v12 111065v13 111065v22 111100v12 111100v13 111100v22 111160v12 111160v13 111160v22 111200v12 111200v13 111200v22...
  • Page 2 Copyright notice ©Leybold GmbH. All rights reserved. Trademark credit Leybold and the Leybold logo are trademarks of Leybold GmbH, Bonner Strasse 498, D-50968 Cologne.
  • Page 3: Table Of Contents

    Contents 1 Safety and compliance..... . . 6 1.1 Definition of Warnings and Cautions....6 2 Important Safety Information.
  • Page 4 9.1 Waste disposal....... . . 42 10 Leybold Service......43...
  • Page 5 List of Figures Figure 1. Dimensional drawing, dimensions in mm... . . 12 Figure 2. Correct lifting of pump....... . 13 Figure 3.
  • Page 6: Safety And Compliance

    Information about properties or instructions for an action which, if ignored, will cause damage to the pump or the system. We reserve the right to change the design and the stated data. The illustrations are not binding. Keep the instructions for future use. 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 7: Important Safety Information

    Never connect the pump to mains power when the motor junction box is not closed correctly. The electrical connection must only be provided by a trained person. 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 8: Thermal Hazards

    The exhaust line should be laid so that it slopes down and away from the pump so as to prevent condensate from back streaming into the pump. Avoid the entry of particles and fluids. 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 9 Important Safety Information The air intakes of the pump and the motor must remain free. 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 10: Description

    The pump is connected to a 3-phase network on the motor terminal board and operated directly from the mains. It is air-cooled and requires minimum maintenance. 3.1 Supplied equipment The pump is delivered ready for operation. Intake and exhaust flanges are covered with caps. 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 11: Technical Data

    4) Depending on installed configuration. See Gas ballast configuration on page 17 for details. 5) Up to 200 mbar possible depending on the inlet pressure of the pump. With higher outlet pressure, the ultimate pressure will be higher. 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 12: Accessories

    111005A23 Exhaust adapter NPT 1½ - 11.5 111005A31 Fail safe gear replacement kit EK6528264 Blow off valve replacement kit EK6525317 Replacement sealing plug for silencer E6542410 Outlet pipe VD65-100 E6536491 Outlet pipe VD160-200 E6536613 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 13: Transport And Storage

    Storage Store the pump in a dry place, preferably at room temperature. The pump must be sealed with the supplied end caps. Figure 2. Correct lifting of pump 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 14: Installation

    Make sure that there is a gap of minimum 50 mm from pump surfaces in the marked areas to assure sufficient cooling air flow. Make sure that there is enough free space around the pump for maintenance. 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 15: Conforming Use

    The operator must check, whether the pumped gases will lead to safety risks on the environment if the pump is operated without an exhaust line (for example risk of suffocation, risk of slipping due to condensing vapours, etc.). 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 16: Electrical Connection

    Figure 4. Arrow - direction of rotation 5.5 Optional VFD use If desired the pumps can be operated via an external variable frequency drive (VFD). However it is not allowed to run the pump with more than the 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 17: Gas Ballast

    Figure 5. Gas ballast configuration Vapour tolerance 60 mbar Vapour tolerance 60 mbar No gas ballast No gas ballast Non return valve Non return valve Nozzle Nozzle Silencer/Filter Silencer/Filter Plug (no gas ballast) Plug (no gas ballast) 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 18: Operation

    In order to avoid back-venting of the vacuum chamber close the inlet of the pump with a valve before switching off. A suitable inlet non return valve is available as optional accessory. 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 19: Maintenance

    4,800 hours or 25,000 start cycles cycles Overhaul 25,000 hours 20,000 hours Blow off valve inspection 6,000 hours 4,800 hours (applications which form de‐ posits only) 7.2 Tools required for maintenance Figure 6. Tools required for maintenance 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 20: Pump Timing Belt Change

    Loosening the hexagon nuts of rotors will cause severe bearing damages. 7.4.1 Disassemble drive enclosure Use a 5 mm Allen key to remove the 3 screws which secure the drive enclosure. Separate the drive enclosure from the pump. Remove the foam by hand. 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 21: Disassemble Rotor Disc, Screw And Fan

    Separate the fan from the pump. 7.4.3 Disassemble belt chamber cover Use a 5 mm Allen key to remove the 4 screws which secure the belt chamber cover. Separate the belt chamber cover from the pump. 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 22: Disassemble Fail Safe Gears

    Maintenance Belt chamber cover Belt chamber cover 7.4.4 Disassemble fail safe gears Use the fail safe gear adjustment tool to interlock the rotors. 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 23 Maintenance Loosen the 4 bolts by 1 rotation with a 5 mm Allen key and remove the bolts. Remove the gear adjustment tool. Remove the bushing, o-ring and fail-safe gears. 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 24: Disassemble Belt

    Dispose of the old belt. 7.4.6 Assemble tooth belt Place the belt on the timing gears. Install the belt tighten tool and attach the VSM mini on the belt. Switch on the VSM mini. 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 25: Assemble Motor Screw

    Make sure that the frequency is 83±5 Hz. If the belt tension is not within range, unscrew the motor cap and repeat steps in Assemble tooth belt on page 24 and steps 1‑5 in this section. 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 26: Assemble Fail Safe Gear

    Tighten the plastic gear with 2 bolts to 10 Nm. Rotate the motor pulley by hand for 5 to 8 revolutions in counter- clockwise direction. Do not turn clockwise, until the fail-safe gears are fastened. 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 27: Assemble Belt Chamber Cover

    7.4.9 Assemble belt chamber cover Assemble the belt chamber cover onto the bearing flange with 4 cap screws with a 5 mm Allen key. Tighten the cap screws by hand and torque each screw to 2.5 Nm. 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 28: Assemble Fan

    Put the foam in place on the pump. Assemble the drive enclosure onto the bearing flange with 3 cap screws with a 5 mm Allen key. Tighten the cap screws by hand and torque each screw to 2.5 Nm. 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 29: Electric Connection

    Do not close the pump inlet with your hands or any other body part and avoid objects from being sucked inside the pump. To verify the correct rotating direction of the motor, start the pump and check that 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 30: Blow Off Valve Cleaning

    Check the valve ball and all O-rings for damage or wear, replace if necessary (EK6525317). Reassemble the components (a missing valve ball will destroy the pump). Tighten the 4 x M10 screws with 8 Nm. 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 31: Replace Electrical Motor

    Figure 7. Blow Off Valve Cleaning Note: VD 160/200 have two valve balls. 7.6 Replace electrical motor 7.6.1 Motor disassembly To replace the electric motor, do the steps that follow: Remove the fan cover (1). 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 32 Maintenance Remove the fan (2). Remove the belt enclosure (3). Block the fail safe gears with the gear adjustment tool (A). Loosen the centre screw. 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 33 Maintenance Loosen and remove the bolts of fail safe gears. Remove the gear fixation tool. Remove the fail safe gears. Remove the 4 motor screws. 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 34 Maintenance Push the motor gently and pull out the belt. Remove the centre screw. Install the M8 hexagonal bolt and washer. Install the gear puller into the middle of the pulley. 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 35: Motor Assembly

    Maintenance Remove the pulley with the gear puller tool. Unscrew the 4 motor screws. Remove the motor. 7.6.2 Motor assembly Place the new motor for installation. 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 36 Install the 4 motor screws and hand tighten. Install the pulley to the motor. Make sure that the key (1) and keyway are aligned correctly. Tap the pulley with a mallet gently to push the pulley. 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 37 Maintenance Insert the centre screw and hand tighten. Install the belt gears. Tighten the motor screws. Replace and assemble the fail-safe gear. 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 38 Install the gear adjustment tool on the fail safe gears. Assemble the fail safe gears bolts. Fix the centre nut. Use a torque wrench to tighten the screw to 25 Nm. Install the belt enclosure (3). 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 39 VARODRY VD 160 OEM, 60 Hz, 200/380 V VARODRY VD 200 OEM, 50 Hz, 200/400 V · · VARODRY VD 200 OEM, 60 Hz, 230/460 V · VARODRY VD 200 OEM, 60 Hz, 200/380 V 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 40: Troubleshooting

    Clean the inlet filter (if in use) Cause Gas leak at the pump inlet Remedy Check O-ring at inlet port or connections of accessories Cause Wrong rotational speed Remedy Check the mains frequency or inverter 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 41 Pump is noisy or has high vibration level Cause Pump is clogged with process deposition Remedy Follow the cleaning instructions Cause Belt is worn or defective Remedy Exchange the belt Contact us Cause Bearing is defective Remedy Contact us 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 42: Disposal

    Separate clean pumps according to their materials, and dispose of these accordingly. We offer this service. Further details are available on request. When sending us a pump, observe the regulations given in Leybold Service on page 43. 300890265_002_C3 - 09/2021 - © Leybold...
  • Page 43: Leybold Service

    10 Leybold Service Whenever you send us equipment, indicate whether the equipment is contaminated or is free of substances which could pose a health hazard. If it is contaminated, specify exactly which substances are involved. You must use the form we have prepared for this purpose.
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  • Page 48 Leybold GmbH Bonner Strasse 498 50968 Cologne GERMANY +49-(0)221-347-0 info@leybold.com Pioneering products. Passionately applied. www.leybold.com...

This manual is also suitable for:

Varodry oem vd100Varodry oem vd160Varodry oem vd200

Table of Contents