Related Manuals for Pfeiffer Vacuum FullRange PTR 91
Summary of Contents for Pfeiffer Vacuum FullRange PTR 91
- Page 1 OPERATING INSTRUCTIONS Translation of the Original PTR 91 Pirani/cold cathode gauge...
- Page 2 Dear Customer, Thank you for choosing a Pfeiffer Vacuum product. Your new gauge is designed to support you in your individual application with maximum performance and without malfunctions. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a comprehensive and complete range of top-quality products and first-class service.
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Page 3: Table Of Contents
Foreseeable improper use Responsibilities and warranty Owner requirements Personnel qualification 2.8.1 Ensuring personnel qualification 2.8.2 Personnel qualification for maintenance and repair 2.8.3 Advanced training with Pfeiffer Vacuum Operator requirements Product description Function Switch and status display Identifying the product Scope of delivery... - Page 4 Malfunctions Troubleshooting Identifying errors at the measurement chamber Shipping Recycling and disposal 11.1 General disposal information 11.2 Dispose of gauges Service solutions by Pfeiffer Vacuum Spare parts Accessories 14.1 Accessory information 14.2 Ordering accessories Technical data and dimensions 15.1 General 15.2 Technical data...
- Page 5 List of tables List of tables Tbl. 1: Applicable documents Tbl. 2: Variants Tbl. 3: Abbreviations used Tbl. 4: Tbl. 5: Operating modes Tbl. 6: Constants for converting measuring signal and pressure Tbl. 7: Calibration factors for the pressure range < 10 hPa Tbl.
- Page 6 List of figures List of figures Fig. 1: Measuring configuration Fig. 2: Switch and LED Fig. 3: Establishing the vacuum connection Fig. 4: Electronic unit Fig. 5: Connection diagram Fig. 6: Measurement cable FCC-68, 8-pin Fig. 7: Relation between measuring signal and pressure Fig.
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Page 7: About This Manual
Variants You can find the part number on the rating plate of the product. Pfeiffer Vacuum reserves the right to make technical changes without prior notification. Information that relates to only one of the products is indicated accordingly. The figures in this document are not to scale. -
Page 8: Conventions
About this manual 1.3 Conventions 1.3.1 Instructions in the text Usage instructions in the document follow a general structure that is complete in itself. The required ac- tion is indicated by an individual step or multi-part action steps. Individual action step A horizontal, solid triangle indicates the only step in an action. ►... -
Page 9: Trademark Proof
Trademark of the Swagelok Company Tbl. 3: Abbreviations used 1.4 Trademark proof ● FullRange ® is a trademark of Pfeiffer Vacuum GmbH. ● Hirschmann ® is a trademark of Hirschmann Electronics GmbH. ● Scotch-Brite ® is a registered trademark of the 3M Company. -
Page 10: Safety
Safety instructions according to product’s life stages All safety instructions in this document are based on the results of a risk assessment. Pfeiffer Vacuum has taken into account all the relevant life stages of the product. Risks during installation DANGER Risk to life due to electric shock An improperly earthed product is potentially fatal in the event of a fault. - Page 11 ► Only operate the device in a dry environment. ► Operate the device away from fluids and humidity sources. ► Do not switch on the device if fluid has penetrated into it, instead contact Pfeiffer Vacuum Serv- ice. ► Always disconnect the current supply before cleaning the device.
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Page 12: Safety Precautions
Safety WARNING Health hazard through poisoning from toxic contaminated components or devices Toxic process media result in contamination of devices or parts of them. During maintenance work, there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub- stances causes environmental damage. -
Page 13: Proper Use
1000 hPa. Use the product according to its intended purpose ► Operate the gauge with a Pfeiffer Vacuum total pressure measuring and control unit or with an evaluation unit provided by the customer. ► Install, operate and maintain the gauge exclusively as prescribed in these operating instructions. -
Page 14: Personnel Qualification
─ Customer with Pfeiffer Vacuum service training ─ Pfeiffer Vacuum service technician 2.8.3 Advanced training with Pfeiffer Vacuum For optimal and trouble-free use of this product, Pfeiffer Vacuum offers a comprehensive range of courses and technical trainings. For more information, please contact Pfeiffer Vacuum technical training. -
Page 15: Operator Requirements
4. Comply with the application limits. 5. Observe the technical data. 6. Please contact the Pfeiffer Vacuum Service Center if your questions on operation or maintenance of the product are not answered by these operating instructions. – You can find information in the Pfeiffer Vacuum service area. -
Page 16: Product Description
Lights up yellow Measuring range exceeded Lights up yellow Lights up green Measuring range not reached Tbl. 4: 3.3 Identifying the product You will need all the data from the rating plate to safely identify the product when communicating with Pfeiffer Vacuum. 16/52... -
Page 17: Scope Of Delivery
Product description 1. Read the data on the product rating plate. 2. Record this data. 3. Always have all rating plate specifications to hand. 3.4 Scope of delivery The shipment includes the following parts: ● Gauge ● Stylus (Ø 1.1 mm) ●... -
Page 18: Transport And Storage
Transport and storage 4 Transport and storage 4.1 Transporting the product NOTICE Damage caused by incorrect transportation Transportation in unsuitable packaging, or failure to install all transport locks, can damage the prod- uct. ► Comply with the instructions for safe transportation. Packing We recommend keeping the transport packaging and original protective cover. -
Page 19: Installation
Installation 5 Installation 5.1 Establishing the vacuum connection DANGER Risk to life due to electric shock An improperly earthed product is potentially fatal in the event of a fault. ► Connect the product galvanically with the earthed vacuum chamber. ► Ensure that the connection complies with the requirements of a protective bonding according to EN 61010. -
Page 20: Electronic Unit
– This will facilitate assembly of the CF flange connection. Procedure 1. Remove the protective cap and store in a safe place. 2. Assemble the gauge with vacuum components from the Pfeiffer Vacuum Components Shop the vacuum system. 5.2 Electronic unit DANGER Risk to life due to electric shock An improperly earthed product is potentially fatal in the event of a fault. -
Page 21: Fig. 4: Electronic Unit
Installation NOTICE Impairment from contamination and damage Touching the devices or components with bare hands increases the desorption rate and leads to in- correct measurements. Dirt (e.g. dust, fingerprints, etc.) and damage impair the function. ► When working on high or ultra high vacuum systems, always wear clean, lint-free and powder- free laboratory gloves. -
Page 22: Establishing The Electric Connection
● RJ-45 plug Establishing the electric connection ► Connect the measurement cable to the gauge. ► Connect the gauge to a Pfeiffer Vacuum total pressure measuring and control unit or an evalua- tion unit provided by the customer. – Signal 4.7Ω... -
Page 23: Fig. 6: Measurement Cable Fcc-68, 8-Pin
Installation Fig. 6: Measurement cable FCC-68, 8-pin Manufacturing a measurement cable Additional information regarding measurement cable type and conductor cross-sections can be ob- tained in the technical data. 1. Observe the following steps to ensure optimum signal quality, whereby ground loops, differences in potential or EMC will influence the measuring signal. -
Page 24: Operation
Operation 6 Operation Once the supply voltage has been established, the measuring signal is available at the electrical con- nection between pins 3 and 5. Recommendations ► Respect the minimum stabilization period of 10 minutes. ► Respect the relation between measuring signal and pressure. ►... -
Page 25: Determining The Effective Pressure With Calibration Factors
Operation Measuring signal (U) Pressure (p) Constant (c) Constant (d) [hPa] 11.33 [mbar] [Torr] 6.875 11.46 [micron] 5.075 8.458 [Pa] 9.333 Tbl. 6: Constants for converting measuring signal and pressure Converting measuring signal and pressure Validity range ● 1 × 10 hPa <... -
Page 26: Tbl. 7: Calibration Factors For The Pressure Range < 10 Hpa
Operation Pressure range from 10 to 0.1 hPa p [hPa] –1 –2 –3 –4 –5 –6 –6 –5 –4 –3 –2 –1 4 6 8 [hPa] Fig. 9: Pressure range from 10 to 0.1 hPa Calibration factors In the pressure range < 10 hPa, the display is linear. -
Page 27: Observing The Ignition Delay
Operation Calculating pressure for gases other than air ► Calculate the effective pressure using the following formula: = C × p ● P = Effective pressure ● C = Calibration factor ● p = Displayed pressure (gauge calibrated for air) 6.4 Observing the ignition delay Cold cathode measurement systems have an ignition delay when they are switched on. - Page 28 Operation Influencing the degree of pollution It is possible to influence the level of contamination to a certain extent. Particular care should be taken in the case of vapors that deposit in the plasma (e.g. of the cold cathode measuring system). ►...
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Page 29: Removal
Removal 7 Removal DANGER Risk to life due to electric shock An improperly earthed product is potentially fatal in the event of a fault. ► Connect the product galvanically with the earthed vacuum chamber. ► Ensure that the connection complies with the requirements of a protective bonding according to EN 61010. -
Page 30: Fig. 10: Removing The Gauge
Removal Fig. 10: Removing the gauge 1 Seal with centering ring Tensioning piece 2 Protective cap Removing the gauge 1. Disconnect the measurement cable from the gauge. 2. Recommendation: Remove the electronic unit of the gauge temporarily if disassembling is only possible with the electronic unit removed. -
Page 31: Maintenance
The dominant cold cathode measurement system for the low pressure range (< 1 × 10 hPa) under- went a fixed calibration by Pfeiffer Vacuum ex factory. HV calibration of the Pirani measurement system is performed automatically during operation at pressures < 1 × 10 hPa. -
Page 32: Disassembling The Gauge
Maintenance Fig. 11: Calibrating the gauge Performing an HV calibration 1. Perform commissioning of the gauge. 2. Evacuate the vacuum system to p < 10 hPa. 3. Wait for at least 2 minutes. 4. Press the "ADJ" button briefly using a stylus. –... -
Page 33: Replacing The Ignition Aid
Maintenance Fig. 12: Disassembling the gauge 1 Circlip Set screw 2 Ionization chamber Electronic unit 3 Measurement chamber Disassembling the gauge 1. Remove the gauge from the vacuum system. 2. Loosen the set screw on the side of the electronic unit. 3. -
Page 34: Fig. 13: Removing The Ignition Aid
Maintenance Fig. 13: Removing the ignition aid 1 Ignition aid Mounting tool Removing the ignition aid ► Remove the ignition aid. Fig. 14: Inserting the ignition aid in the mounting tool 1 Ignition aid Mounting tool 2 Serrated end of ignition aid Inserting the ignition aid in the mounting tool 1. -
Page 35: Cleaning Of Components
► Only operate the device in a dry environment. ► Operate the device away from fluids and humidity sources. ► Do not switch on the device if fluid has penetrated into it, instead contact Pfeiffer Vacuum Serv- ice. ► Always disconnect the current supply before cleaning the device. -
Page 36: Gauge Assembling
Maintenance Cleaning of components 1. Disassemble the gauge to the degree required. – Do not bend the anode. 2. Remove the old ignition aid. 3. Only perform work on the sealing surfaces concentrically. 4. Rub the inside walls of the measurement chamber up to the groove of the circlip with the polishing cloth until shiny. -
Page 37: Fig. 17: Gauge Assembling
Maintenance Setting the calibration value of the replacement sensor When replacing the complete measurement chamber, the calibration value must be set on the replace- ment sensor. ► Set the calibration value for the replacement sensor at the switch for the calibration value (CAL) of the electronic unit. -
Page 38: Malfunctions
Malfunctioning of the equipment as a direct result of wear or wear parts (e.g. ionization chamber) is not covered by the warranty. Rectifying malfunctions (reset) In the event of a malfunction, Pfeiffer Vacuum recommends disconnecting the supply volt- age, and then reconnecting after 5 seconds. 9.1 Troubleshooting... -
Page 39: Tbl. 9: Measurement
Malfunctions Fig. 18: Contact pins of the measurement chamber 1 – 5 Contact pin Measurement chamber Measurement be- Setpoint range Causes of values being outside of setpoint tween range 1 and 4 39.5 – 40.5 Ω (at 20 °C) Faulty Pirani filament 1 and 2 1000 –... -
Page 40: Shipping
► Comply with the instructions for safe distribution. Decontamination subject to charge Pfeiffer Vacuum decontaminates products not clearly declared "Free of contamination" at your expense. Instructions for safe shipping ► Do not ship microbiological, explosive or radioactively contaminated products. -
Page 41: Recycling And Disposal
11.1 General disposal information Pfeiffer Vacuum products contain materials that you must recycle. ► Dispose of our products according to the following: – Iron –... -
Page 42: Service Solutions By Pfeiffer Vacuum
We are always focused on perfecting our core competence – servicing of vacuum components. Once you have purchased a product from Pfeiffer Vacuum, our service is far from over. This is often exactly where service begins. Obviously, in proven Pfeiffer Vacuum quality. - Page 43 Service solutions by Pfeiffer Vacuum 5. Prepare the product for transport in accordance with the provisions in the contamination declaration. a) Neutralize the product with nitrogen or dry air. b) Seal all openings with blind flanges, so that they are airtight.
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Page 44: Spare Parts
Spare parts 13 Spare parts Ordering spare parts ► Have the part number to hand, along with other details from the rating plate as required. ► Install original spare parts only. Fig. 19: Complete measurement chamber (replacement sensor) 1 Circlip Measurement chamber 2 Ionization chamber Description Order number... -
Page 45: Accessories
14.1 Accessory information Measurement cable Measurement cable in different lengths, for connecting to a Pfeiffer Vacuum total pressure measuring and control unit Seals with centering ring and filter Filters available in different pore sizes to protect the measuring system against contamination in the event of potential contaminating applications 14.2 Ordering accessories... -
Page 46: Technical Data And Dimensions
Technical data and dimensions 15 Technical data and dimensions 15.1 General mbar Torr | mm Hg mbar 1 · 10 0.75 1000 1000 1 · 10 0.01 0.01 1 · 10 1 · 10 7.5 · 10 0.75 1 · 10 0.01 1000 Torr | mm Hg 1.33... -
Page 47: Tbl. 14: Electrical Data
Ambient conditions Parameter Value Operation 5 to 55 °C Pirani filament 120 °C You must increase the minimum voltage for the supply unit in proportion to the cable length. Pfeiffer Vacuum measuring and control units comply with this requirement. 47/52... -
Page 48: Dimensions
Technical data and dimensions Parameter Value Storage -40 to +70 °C Bake out ≤ 150 °C Tbl. 17: Temperatures Parameter Value Flange Stainless steel (1.4435) Measurement chamber Stainless steel (1.4435) Pirani filament Tungsten (W) Feedthrough (insulation) Ceramic (Al ), glass Feedthrough (ring) Stainless steel (1.4435) Feedthrough (anode) -
Page 49: Etl Certification
ETL LISTED The product PTR 91 - conforms to the UL standard UL 61010-1. - is certified to the CAN/CSA standard CAN/CSA C22.2 No. 61010-1-12. 3103457... -
Page 50: Declaration Of Conformity
Restriction of the use of certain hazardous substances, delegated directive 2015/863/EU Harmonized standards and applied national standards and specifications: DIN EN 61000-6-2:2006-03 DIN EN 61000-6-3:2011-09 DIN EN 61010-1:2011-07 DIN EN 61326-1:2013-07 Signature: Pfeiffer Vacuum GmbH Berliner Straße 43 35614 Asslar Germany (Daniel Sälzer) Asslar, 2020-02-13 Managing Director... - Page 51 51/52...
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