Page 1 Operator's manual TruPlasma RF 1001 to 1003 (G2/13) Technical specifications and operator's manual...
Page 3 Operator's manual TruPlasma RF 1001 to 1003 (G2/13) Technical specifications and operator's manual Original operator's manual 2017-06-26 Edition...
Page 4 Please specify when ordering this document: Order Information Operator's manual TruPlasma RF 1001 to 1003 (G2/13) Edition 2017-06-26 Document number A04-0115-00.BKEN-001-07 TRUMPF Hüttinger GmbH + Co. KG Address for orders Technische Redaktion Bötzinger Straße 80 D-79111 Freiburg Fon: +49 761 8971 - 0 Fax: +49 761 8971 - 1299 Internet: http://www.trumpf-huettinger.com...
Page 5 The serial number can be found on the name plate of the device. How to reach our Service department: Telephone +49 761 8971-2170 +49 761 8971-1178 E-mail Service.Elektronik@de.trumpf.com Position of the serial number Serial number Name plate of the generator Fig. 10520 A04-0115-00.BKEN- 2017-06-26 Before you proceed ...
Page 6 Before you proceed ... 2017-06-26 A04-0115-00.BKEN- 001-07...
Page 7: Table Of Contents
Table of contents Chapter 1 Safety Safety 1‐3 For your own safety 1‐3 Warning signs and danger signs 1‐3 Using the generator 1‐5 Authorized personnel 1‐6 Warning signs on the generator 1‐7 What you must know as an operator 1‐8 Dangers from high voltages 1‐9 Protective measures taken by the manufacturer...
Page 8 Chapter 2 Description Fields of application 2‐3 Typical fields of application 2‐3 Property rights 2‐4 Function description 2‐5 Operation options 2‐6 Interlock 2‐6 Construction of the generator 2‐7 Front 2‐7 Rear side 2‐7 Device variants, options, accessories 2‐9 Device variants 2‐9 Options 2‐9...
Page 9 Dynamic behavior of the power signal at 3‐5 50 Ω load Mains connection data 3‐6 Clock 3‐7 Clock mode 3‐7 Clock input 3‐7 Clock output 3‐7 Clock offset mode 3‐8 Phase coupling of the output power at the 3‐8 internal or external clock signal (CEX) Frequency offset 3‐8 Frequency agility (optional)
Page 10 Air pressure value, dew point diagram 3‐17 Chapter 4 Interfaces RS-232/RS-485 interface 4‐6 RS-232/RS-485 standard interface 4‐6 View standard interface 4‐6 Standard connection 4‐6 Standard pin assignment 4‐6 Cable requirement sub-D RS-232/RS-485 4‐7 connection cable RS-232 interface customer variant 4‐8 View customer variant 4‐8 Connection customer variant...
Page 11 Pin assignment 4‐41 Signal description of the AD interface 4‐42 Specification of inputs and outputs 4‐44 AD interface – variant 3 4‐45 Pin assignment 4‐45 Signal description of the AD interface 4‐46 Specification of inputs and outputs 4‐48 Profibus (optional) 4‐50 View 4‐50...
Page 12 Explicit messages 4‐68 Device supervisor / Class 0x30 4‐68 Analog sensor / Class 0x31 4‐69 Single stage controller / Class 0x33 4‐70 Analog actuator / Class 0x32 4‐71 Selection / Class 0x2E 4‐72 Register / Class 0x07 4‐72 Bit coded values / Class 0x65 4‐73 Poll messages 4‐74...
Page 13 Manufacturer-specific objects 4‐103 Service interface 4‐108 View 4‐108 Connection 4‐108 Description 4‐108 Clock input/clock output (phase synchroni- 4‐109 zation) View 4‐109 Connection 4‐109 Cable requirement 4‐109 Sync input/sync output (arc synchronization 4‐110 or pulse mode) View 4‐110 Connection 4‐110 Cable requirement 4‐110 Matchbox connection (optional) 4‐111...
Page 14 Specific commands of the application 4‐126 Appendix 4‐149 Chapter 5 Standards and directives CE certification 5‐3 EU declaration of conformity 5‐4 TruPlasma RF 1001 to 1003 5‐4 Classification according to EN 55011 5‐5 SEMI standards 5‐6 SEMI S2 5‐6 SEMI S8 5‐6 SEMI S9 5‐6...
Page 15 Chapter 6 Installation After receiving the generator 6‐4 Inspecting the delivery 6‐4 Unpacking 6‐5 Disposing of packaging material 6‐5 Transport, storage 6‐6 Transport 6‐6 Storage conditions 6‐6 Requirements for the site 6‐7 Installing external mains separation device 6‐7 Selecting a suitable location 6‐7 Position during operation 6‐7...
Page 16 6‐20 RF output 6‐21 Connecting RF output 6‐21 Supply voltage 6‐22 10.1 Connecting the mains cable 6‐22 10.2 Mains connection for TruPlasma RF 1001 to 6‐23 1003 Matchbox (optional) 6‐24 11.1 Connection principle of a matchbox 6‐24 Dismantling 6‐25 12.1 Dismantling the generator 6‐25...
Page 17 Status display 7‐9 Messages 7‐10 Switching power on and off 7‐10 Main menu and submenu 7‐11 Selecting submenu items 7‐12 2.10 TruControl Power menu structure 7‐12 Operating via RS-232/RS-485 interface 7‐14 Switching between RS-232 and RS-485 7‐14 Setting slave address for RS-485 7‐14 Setting the watchdog 7‐15...
Page 18 Making settings for generator-internal clock 7‐27 signal Frequency offset 7‐28 Select frequency deviation 7‐28 Choosing between frequency offset and phase 7‐28 shift without the "Clock offset mode" selection field Frequency agility (optional) 7‐30 10.1 Activate frequency agility 7‐30 10.2 Description of the frequency agility function 7‐30 Pulse mode 7‐35...
Page 19 Run-time monitoring (watchdog) 7‐57 Matchbox operation 7‐58 User limit configuration 7‐60 Mixed Mode 7‐61 20.1 Activate mixed mode 7‐61 Factory setting 7‐63 21.1 Resetting to factory settings 7‐63 21.2 Default values 7‐63 Time synchronization 7‐67 22.1 Synchronizing time 7‐67 Diagnostics 7‐68 23.1 Displaying messages in TruControl Power...
Page 20 Overview of cooling water additives 8‐4 Chapter 9 Troubleshooting Warning and alarm messages 9‐2 Messages 9‐3 0‐14 Table of contents 2017-06-26 A04-0115-00.BKEN- 001-07...
Page 21: Safety
Chapter 1 Safety Safety 1‐3 For your own safety 1‐3 Warning signs and danger signs 1‐3 Using the generator 1‐5 Authorized personnel 1‐6 Warning signs on the generator 1‐7 What you must know as an operator 1‐8 Dangers from high voltages 1‐9 Protective measures taken by the manufacturer 1‐9...
Page 22 Hazard from weight 1‐12 Hazard from aggressive cooling water 1‐13 What you must note as an operator: 1‐14 10.1 Ensuring safe operation of the generator 1‐14 10.2 Safety inspection in accordance with 1‐14 IEC 61010-1 Performing a high-voltage test of the cus- 1‐14 tomer system Emergency measures...
Page 23: For Your Own Safety
Safety For your own safety This chapter points out measures for avoiding potential dangers. The overview of residual dangers includes measures the opera- tor is to take to reduce residual dangers. Note The operator must comply with the valid safety and accident-pre- vention laws of the delivery country and of the local government! Warning signs and danger signs Certain activities can cause danger during operation.
Page 24 Symbol Description Warning: Read operating instructions prior to use. Description of the symbols Tab. 1-2 1‐4 Safety 2017-06-26 A04-0115-00.BKEN- 001-07...
Page 25: Using The Generator
Liability exclusion Any use not listed under "Typical fields of application" contra- venes the intended purpose. TRUMPF is not liable for any ensu- ing damages, in particular for property damage, personal injury and loss of production. The operator bears all risks. The war- ranty is rendered null and void.
Page 26: Authorized Personnel
Authorized personnel Installation, operation, configuration and maintenance work may only be performed by authorized, trained and instructed person- nel. Authorized persons must be capable of understanding their tasks and recognizing potential dangers. Therefore, authorized persons must be trained and be familiar with the standards and regula- tions relevant to their tasks.
Page 27: Warning Signs On The Generator
Warning signs on the generator Not a lifting point Electromagnetic fields Weight Dangerous voltage Warning signs on the generator Fig. 10581 Pas de point de levage Champs électromagnétiques Poids Tension dangereuse Avertissements sur le générateur Fig. 10581 1‐7 A04-0115-00.BKEN- 2017-06-26 Warning signs on the generator 001-07...
Page 28: What You Must Know As An Operator
Ce que vous devez savoir en tant qu'exploitant Tous les panneaux d'avertissement doivent être présents et lisi- bles. Si un ou plusieurs panneaux d'avertissement manque ou n'est pas lisible, adressez-vous à TRUMPF pour en demander de nou- veaux. Warning sign Meaning...
Page 29: Dangers From High Voltages
Dangers from high voltages Life threatening voltage! DANGER The voltages present at the generator are life-threatening. Ø Only have work on the generator performed by trained per- sonnel. The generator produces voltages that can endanger human life and health. These voltages are present both inside the generator and at the power output of the generator.
Page 30: Dangers From Electromagnetic Fields
Dangers from electromagnetic fields Danger due to electromagnetic fields! DANGER Potentially harmful high-frequency electromagnetic fields occur close to the generator. Only have work on the generator performed by trained per- Ø sonnel. Electromagnetic fields are present both inside the generator and at the power output of the generator.
Page 31 However, this measure cannot prevent strong electromagnetic fields from occurring on the load side, e.g. at the plasma cham- ber. The effective mitigation of this danger is the responsibility of the operator, i.e., yours. Mesures de protection du Le générateur est intégré dans un boîtier métallique fermé. fabricant Toutefois, cette mesure n'empêche pas l'apparition de champs magnétiques élevés du côté...
Page 32: Hazard From Weight
Hazard from weight The generator may cause injuries if carried! CAUTION Ø Do not carry or lift the generator alone. Always use a transport aid for carrying and lifting the generator. Components on the rear side of the generator, e.g., water con- nections, must not be used as lifting points.
Page 33: Hazard From Aggressive Cooling Water
Hazard from aggressive cooling water Cooling water is aggressive WARNING Injuries to skin and eyes are possible. Ø Avoid direct skin contact with cooling water and cooling water additives. Ø Wear protective gloves and safety glasses when working with cooling water and cooling water additives. Easy-Kits Observe all of the safety specifications included in the material safety data sheets (MSDS) of the manufacturer of the cooling...
Page 34: What You Must Note As An Operator
A safety inspection in accordance with IEC 61010-1 was per- formed on this TRUMPF device. Performing a high-voltage test of the customer system 1. Disconnect all electrical connections to the TRUMPF device. 2. Perform high-voltage test. 1‐14 What you must note as an operator: 2017-06-26 A04-0115-00.BKEN-...
Page 35: Emergency Measures
Emergency measures 11.1 In the event of an emergency, immediately take the following measures 1. Switch off external mains separation device of the generator. 2. Shut off the cooling water supply for the generator. 1‐15 A04-0115-00.BKEN- 2017-06-26 Emergency measures 001-07...
Page 36 1‐16 Emergency measures 2017-06-26 A04-0115-00.BKEN- 001-07...
Page 37 Chapter 2 Description Fields of application 2‐3 Typical fields of application 2‐3 Property rights 2‐4 Function description 2‐5 Operation options 2‐6 Interlock 2‐6 Construction of the generator 2‐7 Front 2‐7 Rear side 2‐7 Device variants, options, accessories 2‐9 Device variants 2‐9 Options 2‐9...
Page 38 Identifying the generator features 2‐11 2‐2 Description 2017-06-26 A04-0115-00.BKEN- 001-07...
Page 39 Fields of application Typical fields of application The generator is designed as a power supply for plasma excita- tion. Typical fields of application are: ■ Plasma-activated CVD processes (PECVD). ■ Reactive ion etching (RIE). ■ Sputter-etching (SE). ■ Magnetron sputtering (PVD). ■...
Page 40 Property rights The generator is protected by the following patents: ■ US6777881 ■ JP3641785 ■ DE10257147 ■ DE10262286 ■ US7477114 US7151422 ■ Further patents are pending. 2‐4 Property rights 2017-06-26 A04-0115-00.BKEN- 001-07...
Page 41 The generator delivers an adjustable RF output power at a fre- quency of 13.56 MHz to a 50 Ω load. If a matchbox from TRUMPF is connected to the generator, the matchbox can be controlled from the generator. The output frequency can be changed in the range of 13.56 MHz ±5%.
Page 42 Operation options ■ The generator can be operated using the TruControl Power operating software. For this purpose, a computer must be connected via one of the following interfaces: Digital data communication with a system controller via: ■ − RS-232/RS-485 interface (ASIP protocol) −...
Page 43 Construction of the generator Front Front Fig. 10344 Rear side The generator is built into a closed metal housing. All connection elements, indicator elements and operating elements are located on the rear side. 2‐7 A04-0115-00.BKEN- 2017-06-26 Construction of the generator 001-07...
Page 44 Interface variants Matchbox connection (System- 13 RF output Port) (optional) LEDs Generator status 14 Mains connection EtherCAT variant Clock input 15 AD interface Profibus variant Clock output 16 Digital interface (RS-232/ 10 DeviceNet variant RS-485) Sync/pulse input 11 Cooling water inflow 17 Service interface Sync/pulse output 12 Protection switch...
Page 45 Device variants, options, accessories Device variants Device name Nominal power Supply voltage TruPlasma RF 1001 1 kW 200 to 480 V TruPlasma RF 1002 2 kW 200 to 480 V TruPlasma RF 1003 3 kW 200 to 480 V Device variants Tab.
Page 46 Null modem cable for connecting a computer or a proc- ess control system to the RS-232/RS-485 interface. − SystemPort cable for connecting a matchbox from TRUMPF. Please contact TRUMPF to obtain more detailed information on the accessories. 2‐10 Device variants, options, accessories 2017-06-26 A04-0115-00.BKEN-...
Page 47 13.56 MHz Output frequency 200 to 220 V Supply voltage 200 to 480 V — 7 to 10 TRUMPF internal LEDs on the rear side Status LEDs LEDs on the rear side and front panel 12 to 14 TRUMPF internal —...
Page 48 Position Code Feature Feature group 22 to 25 TRUMPF internal Codes of the configuration word Tab. 2-3 Interface equipment (EtherCAT, see position 18) Posi- Code RS-232 RS-485 DeviceNet Profibus tion ● ● ● ● ● ● ● ● ● ●...
Page 49 Functions Posi- Code Interlock autorest Specification of the Arc management selection for tion AD interface: fast regulation analog ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ●...
Page 50 Functions Posi- Code EtherCAT EGT EtherCAT customer Control range of the Control range of the tion profile output frequency output frequency ±1% ±5% ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ●...
Page 51 Functions Posi- Code Pulse increase Mixed mode Frequency agil- Triggered pulse Simmer mode tion mode ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ●...
Page 52 Matchbox connection Posi- Code SysPort interface for matchbox regulation Bias tion ● ● ● ● Codes position 21 Tab. 2-9 2‐16 Identifying the generator features 2017-06-26 A04-0115-00.BKEN- 001-07...
Page 53 Chapter 3 Technical specifications RF output 3‐3 Accuracy of the output power 3‐4 Accuracy of the output power for digital control 3‐4 Accuracy of the output power for analog con- 3‐4 trol Dynamic behavior of the power signal at 3‐5 50 Ω...
Page 54 Clock offset mode 3‐8 Phase coupling of the output power at the 3‐8 internal or external clock signal (CEX) Frequency offset 3‐8 Frequency agility (optional) 3‐9 Pulse 3‐10 Pulse mode 3‐10 Pulse input 3‐10 Pulse output 3‐10 Arc synchronization 3‐11 Arc synchronization input 3‐11 Arc synchronization output...
Page 55 RF output Description TruPlasma RF 1001 1002 1003 Full nominal power at 50 Ω load 1 000 W 2 000 W 3 000 W Nominal power range 10 to 1 000 W 10 to 2 000 W 10 to 3 000 W Selectable power range 0 to 1 000 W 0 to 2 000 W...
Page 56 ≤ -26 dB for frequencies below 7.0 MHz Power accuracy at 50 Ω load ±1 W or ±1% of set value With TruPlasma RF 1001: ±1 W fluctuation on a 50 Ω load with 1000 W (short-term stability within 60 s measurement period) With TruPlasma RF 1001: ±1 W...
Page 57: Dynamic Behavior Of The Power Signal At 50 Ω Load
Dynamic behavior of the power signal at 50 Ω load Description Value < 1 ms Rise time of the power from 10 to 90% of the nominal power after power-on command. < 10 ms Rise time of the power from 10 to 90% of the nominal power after a set value change of 200 W.
Page 58: Mains Connection Data
Mains connection data Description TruPlasma RF 1001 1002 1003 Mains voltage 3/PE AC 200 to 480 V ±10% Mains frequency 50/60 Hz ±3 Hz Current consumption per phase with 50 Ω 6 A at 200 V 9.5 A at 200 V 11.4 A at 200 V load 3 A at 400 V...
Page 59: Clock
Clock Clock mode Description Value Clock mode Phase: In this mode, the RF output power signal is phase- locked to the selected clock signal. Frequency: The RF output power deviates in frequency from the clock signal. The phase of the RF output power is not phase-locked.
Page 60: Clock Offset Mode
Clock offset mode Phase coupling of the output power at the internal or external clock signal (CEX) Description Value Adjustment range of the phase shift of the output 0 to 359.9° power Phase shifter function resolution 0.1° Maximum phase error ±5°...
Page 61: Frequency Agility (Optional)
Frequency agility (optional) Automatic regulation of the output frequency. Description Value Covered frequency range ±678 kHz (±5%) Reference input Reflected power P Operation modes ■ Continuous operation (CW) ■ Pulse Adaptive regulation speed (dependent on the reflected power) Update time 60 µs per step Adjustable ignition period (measurement delay) ■...
Page 62: Pulse
Pulse Pulse mode Description Value Pulse frequency 10 to 50 000 Hz Duty cycle 1 to 99% in steps of 1% Pulse signal source Internal (default setting) External (Sync in) Min. pulse on time 10 μs Min. pulse off time 10 μs Pulse rise time <...
Page 63: Arc Synchronization
Arc synchronization Arc synchronization input Description Value Input level TTL input Frequency 13.56 MHz ±0.005% Impedance 50 Ω, VSWR ≤ 1.5 : 1 Connector Lemo #EPL.00.250.NTN (female connector) Arc synchronization input Tab. 3-15 Arc synchronization output Description Value Output level TTL output Frequency 13.56 MHz ±0.005%...
Page 64: Communication Interfaces
Communication interfaces Description Value RS-232 service interface 9-pin sub-D male connector Connection to the TruControl Power operating software RS-232/RS-485 interface 9-pin sub-D male connector Connection to the system master or the TruCon- trol Power operating software RS-232-interface (customer variant) 9-pin sub-D female connector AD interface 25-pin sub D female connector Profibus (option)
Page 65: Housing
Housing Description Value Dimensions (without con- 216 x 128.5 x 405 mm nectors) W x H x D Weight 18 kg Housing color RAL 9006 Protection class IP 30 Housing Tab. 3-18 3‐13 A04-0115-00.BKEN- 2017-06-26 Housing 001-07...
Page 66: Dimensional Drawing
Dimensional drawing Dimensional drawing TruPlasma RF 1003 to 1003 (example: DeviceNet variant) Fig. 10533 3‐14 Dimensional drawing 2017-06-26 A04-0115-00.BKEN- 001-07...
Page 67: Environmental Conditions
Environmental conditions Condition Temperature Humidity Air pressure Operation +5 … +40°C Relative: 5 to 85% 79.5 to 106 KPa Absolute: 1 g/ to 25 g/m Storage Relative: 5 to 95% -25 … +55°C 79.5 to 106 KPa Absolute: 1 g/ to 29 g/m Transport 70 to 106 KPa...
Page 68: Cooling Requirements
Cooling requirements Description Value Max. water pressure 7 bar Max. pressure difference 1.1 bar between cooling water inflow and cooling water outflow Min. throughput 4 l/min. Check external cooling water flow. Generator is protected against excessive temper- ature. Min. throughput during 6 l/min.
Page 69: Cooling Water Parameter
Cooling water parameter Parameter Unit Limit value (Cu cooling circuit) pH-value — 6 to 9 Conductivity range µS/cm (see "Cooling requirements", pg. 3‐16) Iron mg/l < 0.5 Copper mg/l < 0.2 Microbiology: Colony KBE/ml < 1000 count Sulfate — Not detectable reducer Suspended solids —...
Page 70 Example A room temperature of 35°C and a relative humidity of air of 50% yield a minimum permissible temperature of 23°C for the cooling water (small circle at the intersection of the 35°C and 50% lines). 3‐18 Cooling requirements 2017-06-26 A04-0115-00.BKEN- 001-07...
Page 71 Chapter 4 Interfaces RS-232/RS-485 interface 4‐6 RS-232/RS-485 standard interface 4‐6 View standard interface 4‐6 Standard connection 4‐6 Standard pin assignment 4‐6 Cable requirement sub-D RS-232/RS-485 4‐7 connection cable RS-232 interface customer variant 4‐8 View customer variant 4‐8 Connection customer variant 4‐8 Customer variant pin assignment 4‐8...
Page 72 Telegram: Read P value 4‐29 Telegram: Release control 4‐30 AD interface 4‐32 View 4‐32 Cable requirement 4‐32 Connection 4‐32 Meaning of the signals 4‐32 AD interface – standard version 4‐33 Pin assignment 4‐33 Signal description of the AD interface 4‐33 Specification of inputs and outputs 4‐36 AD interface –...
Page 73 Module 2 4‐55 Module 3 4‐56 Module 4 4‐57 Bit-coded commands 4‐58 Status bytes 4‐58 Return code 4‐59 3.10 Profibus commands 4‐59 DeviceNet (optional) 4‐66 Position 4‐66 Connection 4‐66 Pin assignment 4‐66 Status LEDs 4‐66 LED Net DeviceNet: network status 4‐67 DeviceNet LED Mod: module status 4‐67...
Page 74 EtherCAT (optional) 4‐89 View 4‐89 Connection 4‐89 Cable requirement 4‐89 EtherCAT objects 4‐90 Vendor ID and ESI file 4‐90 Data communication 4‐90 Meaning of EtherCAT indicator elements 4‐91 (LEDs) Objects 4‐92 Identification area 4‐92 PDO mapping 4‐92 Input area (generator → master control) 4‐94 Output area (master control →...
Page 75 LEDs Device status 4‐112 10.1 View 4‐112 10.2 Description of LEDs Device status 4‐112 Mains input 4‐113 11.1 View 4‐113 11.2 Connection 4‐113 11.3 Pin assignment 4‐113 RF output 4‐114 12.1 View 4‐114 12.2 Connection 4‐114 12.3 Cable requirement 4‐114 Cooling water 4‐115 13.1...
Page 76: Rs-232/Rs-485 Interface
RS-232/RS-485 interface RS-232/RS-485 standard interface View standard interface View of RS-232/RS-485 interface Fig. 10706 Standard connection ■ On the generator: 9-pin sub-D plug. ■ Necessary counterpart: 9-pin sub-D female connector. Standard pin assignment Pin assignment: 9-pin sub-D male connector Function —...
Page 77 Cable requirement sub-D RS-232/RS-485 connection cable Use a shielded cable with a maximum of 3 strands. A cable with more than 3 strands may cause errors. Length of the RS-232 The lower the set baud rate, the longer the cable may be. Guide connection cable values: ■...
Page 78: Interface Customer Variant
RS-232 interface customer variant View customer variant View of RS-232 interface Fig. 10707 Connection customer variant 9-pin sub-D female connector Customer variant pin assignment Pin assignment: 9-pin sub-D female connector Function — RS-232 RX RS-232 TX — — RS-232 RTS RS-232 CTS —...
Page 79: Description Of The Communication
Length of the RS-232 The lower the set baud rate, the longer the cable may be. Guide connection cable values: ■ 9600 baud: max. 20 m. ■ 57600 baud: max. 5 m. ■ 115200 baud: shorter than 2 m. RS-232 standard cable RS-232 standard cable Fig.
Page 80 Sub- Data Access Meaning Description index index index type 0xDC UINT32 LED Mod yellow. ■ 0 = LED off. ■ 1 = LED on. 0xDD UINT32 LED Mod green. ■ 0 = LED off. ■ 1 = LED on. 0xDE UINT32 LED Net yellow.
Page 81 Sub- Data Access Meaning Description index index index type 0x75 UINT32 Process status ■ 0x00000001 = Internal detection – voltage on. ■ 0x00000010 = Power output on. ■ 0x00000020 = Device is calibrated. 0x00000040 = Warning pending. ■ ■ 0x00000080 = Alarm pending. ■...
Page 82 Generic regulation channel (GRC) Sub- Data Access Meaning Description index index index type 0x308 SINT32 Set value GRC — 0x309 SINT32 Actual value GRC — Generic regulation channel (GRC) Tab. 4-6 Matchbox control Sub- Data Access Meaning Description index index index type 0x1B2...
Page 83 Sub- Data Access Meaning Description index index index type 0x2C7 SINT32 Actual value of Range: 0 to 1000. phase. 0x2CD SINT32 Status of the ■ Bit 0. matchbox. − 0 = No alarm. − 1 = Alarm. ■ Bit 1. −...
Page 84 Clock and pulse mode Sub- Data Access Meaning Description index index index type 0x168 SINT32 Pulse signal ■ 0 = Internal. source. ■ 1 = External. 0x169 SINT32 Clock source. Read clock source: ■ 1 = Internal. ■ 3 = External. 0x16A SINT32 Pulse mode.
Page 85 Sub- Data Access Meaning Description index index index type 0x254 SINT32 Triggered pulse Rising voltage edge activates the pulse mode. mode: ■ 0 = Inactive. ■ 1 = Active. 0x255 SINT32 Switch on delay. Time span between detection of the trigger signal and output of the pulse signal in µs.
Page 86 Sub- Data Access Meaning Description index index index type 0x284 SINT32 Joule mode. Activating Joule mode: ■ 0 = Inactive. ■ 1 = Active. Joule mode Tab. 4-11 Ramp Sub- Data Access Meaning Description index index index type 0x174 SINT32 Control channel ■...
Page 87 Sub- Data Access Meaning Description index index index type 0x1F0 SINT32 Maximum P Resolution 1 W. Example: 421 ≙ 421 W. start. ■ Min. value: 10 W. ■ Max. value: Prmax. 0x1F1 SINT32 Minimum Pi to Resolution 1 W. Example: 985 ≙ 985 W. start.
Page 88 Sub- Data Access Meaning Description index index index type 0x1EC SINT32 Threshold P Resolution 1 % Example: 45 ≙ 45%. ■ Min. value: 1 %. ■ Max. value: 100 %. 0x1EE SINT32 Slope P Resolution 1 %/µs. Example: 45 ≙ %/µs. ■...
Page 89 Frequency agility Sub- Data Access Meaning Description index index index type 0x204 SINT32 Activate clock ■ 0 = Phase offset. modes/frequency ■ 1 = Frequency offset. agility. ■ 2 = Frequency agility. 0x246 SINT32 Tuning start offset. Frequency offset with which automatic frequency tuning begins.
Page 90 Sub- Data Access Meaning Description index index index type 0x24D SINT32 Relative gain. Gamma-dependent value for the ampli- fication of the feedback loop of the fre- quency agility algorithm. ■ Min. value: 0. Default value: 50. ■ ■ Max. value: 1000. 0x24E SINT32 Modulation devia-...
Page 91 Interfaces Sub- Data Access Meaning Description index index index type SINT32 Standard inter- — face. 0x73 SINT32 Watchdog. Write watchdog/timeout value: ■ 0 = Watchdog disabled. ■ 30000 = 30000 ms. Maximum value: 30000 ms. After each switch-on of the generator, the timeout value is 3000 ms.
Page 92 Sub- Data Access Meaning Description index index index type 0x27E SINT32 Configuration of ■ Bit 0 = 1: Output AO_1 active. the analog outputs ■ Bit 1 = 1: Output AO_2 active. AO_1 to AO_3. ■ Bit 2 = 1: Output AO_3 active. 0x27F SINT32 Configuration of...
Page 93 Sub- Data Access Meaning Description index index index type 0x23C SINT32 Scaling factor for With the set value in W, the voltage at analog output P the analog output is 10 V. Example: With a value of 742, 10 V is present at the analog output if P 742 W.
Page 94 Device settings Sub- Data Access Meaning Description index index index type 0x63 — SINT32 Restore factory Reset generator to state on delivery. settings. 0x68 — SINT32 EEPROM initial ■ Value = 0 : Writing was successful. state. ■ Value ≠ 0: EEPROM was reset to original values.
Page 95: Telegram Examples
Identification Sub- Data Access Meaning Description index index index type SINT32 Integration level. Software version of the entire software package. 0x69 SINT32 Device model. — 0x6A SINT32 Serial number. — 0x1B3 vector Regulator Software version of the regulator. software version. 0x1B4 vector Regulator transfer...
Page 96: Telegram: Get Control
Read current P value. (see ■ Master to generator [0xAA][0x02][0x06][0x00][0x01][0x12][0x00][0x01][0xFF][0xCC] "Telegram: Read Pi value", [0xC6][0x55] pg. 4‐29) ■ Generator to master [0x06] ■ Generator to master [0xAA][0x01][0x0B][0x08][0x01][0x12][0x00][0x01][0x00][0x04] [0x58][0x02][0x00][0x00][0x8B][0xD2][0x55] Release control. (see ■ Master to generator "Telegram: Release control", [0xAA][0x02][0x06][0x00][0x05][0x02][0x00][0x00][0xFF][0xE8] pg. 4‐30) [0x11][0x55] ■...
Page 97 Byte Value Meaning Other information 0x01 Address byte, master address is always — — 0x01. 0x06 Number of bytes in the following data — — unit. 0x08 [GS] Generator status: RS-232/RS-485 is (see "Generator status [GS]", [DTA] Data unit active interface. pg.
Page 98 Byte Value Meaning Other information 0x00 [GS] Generator status, always 0x00 if it (see "Generator status [GS]", [DTA] Data unit is sent by the master. pg. 4‐121) (see "Data unit type A", pg. 4‐125) 0x02 [CMD] Write parameter. (see "Command (Command) [CMD]", pg.
Page 99: Telegram: Read P I Value
Telegram: Read P value Example: P = 600 W Byte Value Meaning Other information Master to generator 0xAA Start byte — — 0x02 Address byte, always 0x02 with RS-232. — — 0x06 Number of bytes in the following data — —...
Page 100: Telegram: Release Control
Byte Value Meaning Other information 0x8B Checksum (see "CRC calculation", — pg. 4‐150) 0xD2 — 0x55 Stop byte — — Read current P value Tab. 4-24 Telegram: Release control RS-232/RS-485 should no longer be the active interface. Byte Value Meaning Other information Master to generator 0xAA...
Page 101 Byte Value Meaning Other information 0x00 [GS] Generator status: RS-232/RS-485 is (see "Generator status [GS]", [DTA] Data unit not the active interface. pg. 4‐121) (see "Data unit type A", pg. 4‐125) 0x05 [CMD] Repetition of command: "Control (see "Command (Command) of interface activity".
Page 102: Ad Interface
AD interface Note To determine with which interface variant your generator is equipped:(see "Identifying the generator features", pg. 2‐11). View View of 25-pin AD interface Fig. 10477 Cable requirement The male connectors and cables must be shielded. The shielding must be connected with the casing ground. Use a suitable male connector that connects the shielding with the generator casing.
Page 103: Ad Interface - Standard Version
AD interface – standard version Pin assignment AD interface pin assignment Fig. 10324 Signal description of the AD interface Reference Type Signal Description name DO_0 Power limit- Output shows whether the maximum power is reached. ■ Transistor conductive = Limit value reached, output power limited by regulator.
Page 104 Reference Type Signal Description name 15, 16, 19, AO_1 or P Output shows either actual value P or actual value P 21, 25 Depending on the wiring of digital input DI_1 (pins 6 and 8), the following value is displayed: ■...
Page 105 Reference Type Signal Description name DO_2 Over tem- Output shows temperature error. perature ■ Transistor conductive → Temperature error. ■ Transistor blocked → Temperature OK. Note: DO_2 can be configured with TruControl Power in such a way that an existing alarm message (com- bined alarm) is shown instead of a temperature error.
Page 106: Specification Of Inputs And Outputs
Reference Type Signal Description name 15, 16, 19, — 21, 25 — Not assigned Signal description of the 25-pin AD interface Tab. 4-26 Specification of inputs and outputs Variant fast analog Data Digital inputs Digital Analog Analog Interlock outputs inputs outputs DI_0 DI_1...
Page 107: Ad Interface - Variant 1
AD interface – variant 1 Pin assignment AD interface pin assignment Fig. 10421 Signal description of the AD interface Reference Type Signal Description name Signal con- — This contact can be integrated in an interlock circuit by tact the user. ■...
Page 108 Reference Type Signal Description name DI_4 Frequency Reserved for operation mode AFT (AutoFrequencyTun- agility on ing / frequency agility). Connection of a DC voltage of 15 V activates operation mode AFT. ■ Low = AFT off. ■ High = AFT on. DI_3 Pulse mode Pulse mode can be enabled at this input:...
Page 109 Reference Type Signal Description name DO_1 Power-on Output shows the status of the RF output. status ■ Transistor blocked = No power at output. ■ Transistor conductive = Power at output. ■ R1 = 940 Ω. DO_0 Alarm sta- Output shows whether alarm messages are currently pending.
Page 110: Specification Of Inputs And Outputs
Reference Type Signal Description name AO_3 Actual Output shows actual value P value P 0 to 10 V ≙ 0 to 100% of the nominal power ■ (default scaling). 0 to 10 V ≙ 0 to 10% of the nominal power (lower ■...
Page 111: Ad Interface - Variant
Data Digital Digital out- Analog Analog out- Signal con- inputs puts inputs puts tact Number Level +5 to +5 to Standard: 0 Standard: 0 30 V AC/DC +15 V DC +15 V DC to +10 V DC to +10 V DC +5 to +5 to Maximum: 0...
Page 112: Signal Description Of The Ad Interface
Signal description of the AD interface Reference Type Signal Description name DO_0 Power limit- Output shows whether the maximum power is reached. ■ Transistor conductive = Limit value reached, output power limited by regulator. ■ Transistor blocked = Limit value not reached. 15, 16, 19, AO_2 Output shows actual value P...
Page 113 Reference Type Signal Description name AI_1 RF set A DC voltage between 0 and 10 V at this input speci- value fies either set value P or set value P . Depending on the wiring of digital input DI_2 (pins 11 and 15), the fol- lowing value is displayed: ■...
Page 114: Specification Of Inputs And Outputs
Reference Type Signal Description name — Interlock Interlock circuit for switching RF power on and off. ■ Contacts open → Power off. ■ Contacts connected → Power on. The connection can consist of several external interlock contacts (N.C. contacts) connected in series. As soon as at least one of the contacts is open, the generator switches the output power off.
Page 115: Ad Interface - Variant 3
Data Digital inputs Digital Analog Analog Interlock outputs inputs outputs DI_0 DI_1 DI_2 Number Level +5 to +5 V DC +5 to +5 to Standard: Standard: ≈ 8 V DC +24 V DC internally +24 V DC +24 V DC 0 to 0 to con-...
Page 116: Signal Description Of The Ad Interface
Signal description of the AD interface Reference Type Signal Description name DO_0 Power limit- Output shows whether the maximum power is reached. ■ Transistor conductive = Limit value reached, output power limited by regulator. ■ Transistor blocked = Limit value not reached. 15, 16, 19, AO_2 Output shows actual value P...
Page 117 Reference Type Signal Description name AI_1 RF set A DC voltage between 0 and 10 V at this input speci- value fies either set value P or set value P . Depending on the wiring of digital input DI_1 (pins 6 and 8), the fol- lowing value is displayed: ■...
Page 118: Specification Of Inputs And Outputs
Reference Type Signal Description name — Interlock Interlock circuit for switching RF power on and off. ■ Contacts open → Power off. ■ Contacts connected → Power on. The connection can consist of several external interlock contacts (N.C. contacts) connected in series. As soon as at least one of the contacts is open, the generator switches the output power off.
Page 119 Data Digital inputs Digital out- Analog Analog Interlock puts inputs outputs DI_0 DI_1 Number Level +5 to GND inter- +5 to Standard: 0 Standard: 0 ≈ 8 V DC +24 V DC nally con- +24 V DC nected, +10 V DC +10 V DC open LED Maximum:...
Page 120: Profibus (Optional)
Profibus (optional) View Profibus view Fig. 10655 Connection ■ On the generator: 9-pin sub-D female connector. ■ Necessary counterpart: 9-pin sub-D male connector. Pin assignment Assignment + (positive data line) in/out RTS (ready to send) GND (ground) +5 V - (negative data line) in/out Profibus interface pin assignment Tab.
Page 121: Configuration With The Profibus Master
Configuration with the Profibus master Note See supplied GSD file. In the parameter telegram, 17 user-specific parameters are expected. The following parameters must be created: ■ Response time of the participant watchdog. Format toggle Intel — Motorola. ■ For all analog inputs and outputs (byte type AI and AO) with bit width 16, the format must be defined.
Page 122: Module 1
Conditions ■ Power is off. ■ No other interface is active, e.g., control unit or TruCon- trol Power. ■ Exception: mixed mode of the AD interface is permitted. ■ Parameters that are configured in the AD interface as input signal have priority over other interfaces. Ø...
Page 123: Module 3
Module 3 The module has the same structure as module 2 and also con- tains the actual values as in module 1. Module 4 The module is a combination of modules 1 and 2. Communication for module 2 and module 3 Data from the master to the A data packet, consisting of command word and data for the generator (modules 2 and 3):...
Page 124: Structure Of The Modules
commands and set values always have priority over the com- mand words. Structure of the modules The following tables show the structure of the modules according to the configuration bytes in the GSD file. Module 1 The left side of the table shows the data packet from master to generator.
Page 125: Module 2
Module 2 The left side of the table shows the data packet from master to generator. The right side of the table shows the response from the generator. Data from the master to the generator Data from generator to master Byte Meaning Value...
Page 126: Module 3
Module 3 The left side of the table shows the data packet from master to generator. The right side of the table shows the response from the generator. Data from the master to the generator Data from the generator to the master Byte Meaning Value...
Page 127: Module 4
Module 4 The left side of the table shows the data packet from master to generator. The right side of the table shows the response from the generator. Data from the master to the generator Data from the generator to the master Byte Meaning Value...
Page 128: Bit-Coded Commands
Bit-coded commands Byte Meaning 1 = Profibus is the active interface 1 = Power on (command only active if no alarm message pending) Not used (bit value = 0) Not used (bit value = 0) 1 = Reset of all alarm messages 1 = Reset of all warning messages Not used (bit value = 0) Not used (bit value = 0)
Page 129: Return Code
Byte Meaning Not used Not used 1 = Clock signal synchronized Not used 1 = Interlock closed Not used Not used Not used — Not used Not used Not used Arc suppression not possible Not used Not used Not used Not used Not used Status bytes...
Page 130 Command word Data Meaning Data for the command word (4 bytes) (2 bytes) type write read — — Active interface ■ 1 = RS-232 interface. ■ 2 = Service interface. ■ 3 = DeviceNet. ■ 4 = AD interface. ■ 5 = RS-485 interface.
Page 131 Command word Data Meaning Data for the command word (4 bytes) (2 bytes) type write read — Mode selection - phase off- ■ 0 = Phase offset. set/frequency offset ■ 1 = Frequency offset. — Frequency (deviation from ■ -678 to +678 kHz. 13.56 MHz) ■...
Page 132 Command word Data Meaning Data for the command word (4 bytes) (2 bytes) type write read — -456 UINT16 Status display of the match- ■ Bit 0. box. − 0 = No alarm. − 1 = Alarm. ■ Bit 1. −...
Page 133 Command word Data Meaning Data for the command word (4 bytes) (2 bytes) type write read -459 UINT16 Set value of the tune capaci- Position C tor/ignition position. ■ Range: 0 to 1000. -460 UINT16 Set value of the load capaci- Position C tor/ignition position.
Page 134 Commands for arc management Command word Data Meaning Data for the command word (4 bytes) (2 bytes) type write read -290 SINT32 Arc detection. ■ 0 = Inactive. ■ 1 = Active. — -110 SINT32 Arc counter. -111 SINT32 Reset Arc counter. ■...
Page 135 Command word Data Meaning Data for the command word (4 bytes) (2 bytes) type write read -296 SINT32 Slope P Resolution 1 %/µs. Example: 45 ≙ 45 %/µs. ■ Min. value: 1 %/µs. ■ Max. value: 100 %/µs. -312 SINT32 Sample count.
Page 136: Devicenet (Optional)
DeviceNet (optional) Position DeviceNet view Fig. 10484 Connection ■ On the generator: 5-pin M12 SPEEDCON male connector, A- coded. ■ Necessary counterpart: 5-pin M12 SPEEDCON coupling, A- coded. Part numbers (Phoenix Contact): − 1432664 - straight − 1432677 - angled Pin assignment Assignment Shielding...
Page 137: Led Net Devicenet: Network Status
LED Net DeviceNet: network status The LED Net indicator displays bus activity during DeviceNet operation. Status Description The generator has no supply voltage. ■ ■ The device is not switched on, please observe status LED. ■ No network voltage present. ■...
Page 138: Protocol
■ Vendor name: Huettinger Elektronik GmbH + Co. KG. ■ Vendor ID: 464. Protocol ■ Both explicit and poll messages may be sent. ■ The generator operates as a Group 2 only server in accord- ance with the RF power generator device profile. ■...
Page 139: Analog Sensor / Class 0X31
Name Data length Access rule in bytes Revision Max Instance Instance Attributes DeviceType SEMI Standard Revision Level Manufacturer's Name Manufacturer's Model Number Software Revision Level Hardware Revision Level State of the instance Alarm Enable Bit Exception detail Alarm Exception detail Warning Alarm Enable Get/Set Warning Enable Bit...
Page 140: Single Stage Controller / Class 0X33
Name Data length Access rule in bytes Forward Power in percent Reflected Power in percent Delivered Power in percent Class Attributes Revision Max Instance Instance Attributes Data type See spec. Data Units See spec. Reading Valid Value Status Services Get_Attributes_Single 0x0E Set_Attributes_Single 0x10...
Page 141: Analog Actuator / Class 0X32
Name Data length Access rule in bytes Pulse DutyCycle Get/Set Sync Enable / Pulse Source Get/Set Ramp State Get/Set Subclass Services Get_Attributes_Single 0x0E Set_Attributes_Single 0x10 Single stage controller Tab. 4-50 Analog actuator / Class 0x32 Name Data length Access rule in bytes Instances Output Power...
Page 142: Selection / Class 0X2E
Selection / Class 0x2E Name Data length Access rule in bytes Instances Instance 1 Class Attributes Revision Max Instance Instance Attributes Status Max_destinations Number_of_destinations Destination_list Max_sources Number_of_sources Source_used Get/Set Algorithm type Object_source_list Destination_used Get/Set Input_data_value Get/Set Services Get_Attributes_Single 0x0E Set_Attributes_Single 0x10 Selection Tab.
Page 143 Name Data length Access rule in bytes Set_Attributes_Single 0x10 Register Tab. 4-53 Bit coded values / Class 0x65 Name Data length Access rule in bytes Instances Operational Control Get/Set Operational Status Pulse Duty Cycle Get/Set Pulse Frequency Get/Set Extended Control Get/Set Extenden Status Control for Assembly 125...
Page 144: Poll Messages
Poll messages Instance overview Assembly Data direction Number of bytes Type Data specification (master view) Instance 1 Output Necessary For type and range, see also ODVA Instance 2 Input Necessary DeviceNet Specifica- Instance 3 Output Necessary tion Volume 1, Edi- tion 3.11.
Page 145: Assembly Instance 3 (Output)
Byte Function 4 to 7 — not used 0 to 7 Power on Assembly instance 2 Tab. 4-57 Assembly instance 3 (output) Byte Function 0 to 7 power on Assembly instance 3 Tab. 4-58 Assembly instance 17 (input) Byte Function Alarm Device Common Alarm Device Specific Alarm Manufacturer Specific...
Page 146: Assembly Instance 19 (Input)
Byte Function not used Exception Detail Alarm 4 (device 0) 1 = Interlock open 1 = Device temp high 3 to 7 not used 0 to 7 not used Exception Detail Alarm 5 (device 1) 0 to 7 not used Exception Detail Alarm 6 (device 2) 0 to 7 not used...
Page 147 Byte Function 0 to 6 Depending on value of byte 4 / bit 7: ■ With regular pulse mode: Duty cycle. 0x01 to 0x63 ≙ 1% to 99%. − Example: 0x32 ≙ 50 % − ■ With triggered pulse mode: Pulse delay. Values: (see "Tab.
Page 148 CEX combinations Byte 4 Result Bit 4 Bit 3 Internal clock signal and frequency offset on. Internal clock signal and frequency agility on. External clock signal and phase offset on. External clock signal and phase offset on. CEX combinations Tab. 4-63 Value calculation The calculation method for values Pulse delay and Pulse dura- Pulse delay and...
Page 149: Assembly Instance 118 (Input)
Assembly instance 118 (input) Byte Function 0 to 7 Power in 12:: 0 to 3 ■ Display of the forward power or load power, depending on value of byte 8, bit 6. 0x0000 to 0xFFF ≙ 0% to 100%. ■ 4 to 7 not used 0 to 7...
Page 150: Assembly Instance 121 (Output)
Byte Function Power on/off message: ■ 1 = Power on. ■ 0 = Power off. Set value message: ■ 1 = Set value reached. ■ 0 = Set value not reached. Error status: ■ 1 = No error. ■ 0 = Alarm. Pulse error or CEX error message: 0 = ok.
Page 151: Assembly Instance 122 (Input)
Byte Function 0 to 7 Pulse frequency: ■ Adjustable in 50 Hz increments, minimum value is 50 Hz. 0x01 to 0xFF ≙ 50 Hz to 12 750 Hz. ■ ■ Example: 0xC8 = 10 000 Hz. Power on/off: ■ 1 = Power on. ■...
Page 152: Assembly Instance 123 (Output)
Byte Function Power on/off message: ■ 1 = Power on. ■ 0 = Power off. Set value message: ■ 1 = Set value reached. ■ 0 = Set value not reached. Temperature message: ■ 1 = Temperature ok. ■ 0 = Excessive temperature. Pulse error message: 0 = ok.
Page 153: Assembly Instance 124 (Input)
Byte Function Power on/off: ■ 1 = Power on. ■ 0 = Power off. 1 to 3 not used Pulse input: ■ 0 = Internal pulse input. ■ 1 = External pulse input. Switching to another pulse input is only possible while the power is off. Power type on byte 0 to 1: ■...
Page 154: Assembly Instance 125 (Output)
Byte Function Power on/off message: ■ 1 = Power on. ■ 0 = Power off. Set value message: ■ 1 = Set value reached. ■ 0 = Set value not reached. Temperature message: ■ 1 = Temperature ok. ■ 0 = Excessive temperature. Pulse error message: 0 = ok.
Page 155 Byte Meaning Low Byte Set value P in W High Byte 0 to 4095 ≙ 0% to 100% ■ ■ Bits 4 to 7 of the high byte are not used. Low Byte Set value P in W High Byte 0 to 4095 ≙...
Page 156: Assembly Instance 126 (Input)
Byte Meaning Bit 1-0 = Mode of the SystemPort matchbox ■ 0-0 = Automatic ■ 0-1 = DC Automatic ■ 1-0 = Recipe ■ 1-1 = Not used 2 to 3 not used Activity control ■ 0 = Off ■ 1 = Active Start SystemPort matchbox ■...
Page 157 Byte Meaning Low Byte Position C . Value is dependent on the connected SystemPort matchbox. High Byte 0 to 4095 ≙ 0% to 100% ■ ■ Bits 4 to 7 of the high byte are not used. Low Byte Position C .
Page 158 Byte Meaning Output power ■ 0 = Off ■ 1 = on Vacuum tube filament (only relevant for generators with tubes; for generators without tubes, the value is always "1"). ■ 0 = Off ■ 1 = on Warning messages ■...
Page 159: Ethercat (Optional)
EtherCAT (optional) View EtherCAT view Fig. 10492 Connection RJ-45 connector for EtherCAT input and EtherCAT output Cable requirement The RJ-45 plugs are properly shielded. Shielded cables should be used. Standard Beckhoff EtherCAT plugs and cables are sup- ported. In order to satisfy the EMC requirement, each EtherCAT cable must be equipped with a ferrite core (see "Fig.
Page 160: Ethercat Objects
The device uses a valid vendor ID to identify the device on the bus. TRUMPF's vendor ID is 0x00000260. TRUMPF provides a valid ESI file describing the functionality and capabilities of TRUMPF generators. Product code for the generator that is described in these operat- ing instructions: ■...
Page 161: Meaning Of Ethercat Indicator Elements
Meaning of EtherCAT indicator elements (LEDs) INTF Activity display Status LED LEDs EtherCAT Fig. 10303 INTF EtherCAT is powered up and operational. Status EtherCAT bus status: Display Description Initialization Flashing green Not yet operational Brief green flash Ready for safe operation Steady green Device in operation Flashing red...
Page 162: Objects
Objects Identification area Index Sub- Name Data index size in bytes 0x1000 — Device type UDINT 0x1008 — Device name variable 0x1009 — Hardware version variable 0x100A — Software version variable 0x1018 0x01 Vendor ID UDINT 0x02 Product code UDINT 0x03 Revision number UDINT...
Page 163 TPDO 0x01 0x6001 0x01 Pulse mode activation 0x02 0x02 Ramp operation status 0x1B00 0x03 0x05 CEX activated 0x04 0x06 CEX disabled 0x05 0x09 Process timer: End of process timer 0x06 0x6002 0x04 AC supply error 0x07 0x6003 0x04 AC supply warning 0x08 0x07 Warning "power limit exceeded"...
Page 164: Input Area (Generator → Master Control)
RPDO 0x01 0x7001 0x02 Arc detection on 0x02 0x03 Arc reaction on 0x1701 0x03 0x04 Arc counter reset 0x05 0x2001 0x04 Arc threshold value P 0x06 0x05 Arc gradient P 0x07 0x06 Arc threshold value P 0x08 0x07 Arc gradient P 0x09 0x01 Arc management time delay...
Page 165 Index Name Description Size Defa value 0x6002 — Device status error 0x01 Interlock open 1 = Interlock open BOOL RO P 1 bit 0x02 Overtemperature error 1 = Overtemperature error BOOL RO P 1 bit 0x04 AC supply error 1 = AC supply error BOOL RO P 1 bit...
Page 166: Output Area (Master Control → Generator)
Index Name Description Size Defa value 0x600B — Frequency actual value 0x01 Frequency actual Actual output frequency, in kHz REAL RO P 4 byte value Input area Tab. 4-77 Output area (master control → generator) Index Name Description Size Defa value 0x7000 —...
Page 167: Configuration Area
Index Name Description Size Defa value 0x7005 — Set value 0x01 Set value For 0x7004 = 0.1: The current REAL RW P 4 byte power set value in watts 0x7006 — Set value for automatic mode 0x01 Set value for forward Set value for forward power in REAL RW P...
Page 168 Index Name Description Defa value 0x8001 — Pulse configuration 0x01 Pulse mode Current pulse mode, defined UDINT RW P — as follows: ■ 0 = Master/internal. ■ 1 = Slave/external. ■ 2 = Reserved (for triggered slave). ■ 3...7 = Reserved. Pulse delay Pulse delay of input, in micro- UDINT...
Page 169 Index Name Description Defa value 0x8003 — Arc management configuration 0x01 Arc detection mode The current arc detection USINT mode is defined as the manu- facturer-specific mode SSM EtherCAT: ■ 0 = External detection. ■ 1 = P threshold detection. ■...
Page 170 Index Name Description Defa value 0x8008 — Process timer configuration 0x01 Process timer: timeout Process timer timeout, in sec- REAL — onds. If the timeout is 0, the process timer is disabled 0x9000 — Device rating 0x01 Max. forward nominal Maximum forward nominal REAL —...
Page 171 Index Name Description Defa value 0x9003 — Device temperatures 0x01 Power stage 1 Temperature of power stage 1 REAL — in °C 0x02 Power stage 2 Temperature of power stage 2 REAL — in °C 0x03 Ambient temperature 1 Ambient temperature 1 in °C REAL —...
Page 172: Exception Handling
Exception handling Index Name Description Defa value 0xF380 — Active Exception Sta- An abbreviated summary byte USINT RO P that describes the detection of active device exceptions. ■ Bit 0 Device warning ■ Bit 1 Manufacturer warning ■ Bit 2 Device error Bit 3 Manufacturer error ■...
Page 173: Manufacturer-Specific Objects
Manufacturer-specific objects Index Name Min. Max. Default Unit Value value value 0x2001 — Arc management parameters 0x2001 0x01 Arc management 10000 UINT RW P time delay 0x2001 0x02 Arc max. start Max. P UINT RW P value P 0x2001 0x03 Arc min.
Page 174 Index Name Min. Max. Default Unit Value value value 0x2002 0x02 Frequency offset -5000 5000 REAL RW P mode 0x2003 — Ramping configuration 0x2003 0x01 Ramp channel — USINT RW P 0x2004 — Device configuration 0x2004 0x01 Configured station 0xFFFF —...
Page 175 Index Name Description 0x2013 — Units for matchbox values 0x01 DC bias unit ■ 0 = This value is not measured in the DINT32 connected matchbox. ■ 1 = V. 10 = 0.1 V. ■ 0x02 Urf unit ■ 0 = This value is not measured in the DINT32 connected matchbox.
Page 176 Index Name Description 0x2029 — Current matchbox values 0x01 Matchbox found on Sys- ■ 0 = No matchbox found. DINT32 temPort ■ 1 = Matchbox found. 0x02 Ready status of the Parameter indicates whether the match- DINT32 matchbox box was found and correctly configured. 0x03 Actual value of the tune Position C...
Page 177 AFT objects Index Name Description 0x2024 — AFT adjustment parameters 0x01 Modulation deviation (see "Description of the frequency agility UINT32 function", pg. 7‐30) 0x02 Rel. mod. deviation UINT32 0x03 Modulation period UINT32 0x04 Gain UINT32 0x05 Rel. gain UINT32 0x06 Pullback to start freq.
Page 178: Service Interface
Service interface View View of service interface Fig. 10476 Connection ■ On the generator: 9-pin sub-D plug. ■ Necessary counterpart: 9-pin sub-D female connector. Description Interface for device configuration and service functions. 4‐108 Service interface 2017-06-26 A04-0115-00.BKEN- 001-07...
Page 179: Clock Input/Clock Output
Clock input/clock output (phase synchronization) View View of clock input / clock output Fig. 10640 Connection Lemo #EPL.00.250.NTN sockets Cable requirement Coaxial cable with 50 Ω characteristic impedance. The maximum length is dependent on the attenuation of the selected cable. The maximum length is to be selected so that the specification of the input level is maintained (see "Clock input", pg.
Page 180: Sync Input/Sync Output
Sync input/sync output (arc synchronization or pulse mode) View View of sync input/sync output Fig. 10639 Connection Lemo #EPL.00.250.NTN sockets Cable requirement Coaxial cable with 50 Ω characteristic impedance. The maximum length is dependent on the attenuation of the selected cable. The maximum length is to be selected so that the specification of the input level is maintained (see "Pulse input", pg.
Page 181: Matchbox Connection (Optional)
Fig. 10652 Connection ■ On the generator: 25-pin sub-D female connector. ■ Necessary counterpart: 25-pin sub-D male connector. Description A matchbox from TRUMPF can be controlled via this interface. Cable requirement SystemPort cable from TRUMPF. 4‐111 A04-0115-00.BKEN- 2017-06-26 Matchbox connection (optional)
Page 182: Leds Device Status
LEDs Device status 10.1 View View of device status LEDs Fig. 10493 For visual control of the generator modes and operation state, the generator has 6 LED indicators. 10.2 Description of LEDs Device status Description Color AC on green RF on green Power limit yellow...
Page 183: Mains Input
Mains input 11.1 View View of mains input for TruPlasma RF 1001 to 1003 Fig. 10485 11.2 Connection TruPlasma RF 1001 to 1003: 3-pin Harting male connector HAN C-modular (40 A) 11.3 Pin assignment Assignment Pin assignment of mains input Tab.
Page 184: Rf Output
Fig. 10489 View of RF output 7/16 Fig. 10490 12.2 Connection 7/16 HN socket 12.3 Cable requirement RF cable from TRUMPF. Please contact TRUMPF to obtain more detailed information about selecting the appropriate RF cable. 4‐114 RF output 2017-06-26 A04-0115-00.BKEN- 001-07...
Page 185: Cooling Water
Cooling water 13.1 View View of cooling water inflow/cooling water outflow Fig. 10658 Cooling water connections for inflow and outflow are located on the rear side. 13.2 Connection Screw-in thread G 1/4'' 4‐115 A04-0115-00.BKEN- 2017-06-26 Cooling water 001-07...
Page 186: Asip (Advanced Serial Interface Protocol)
ASIP (Advanced Serial Interface Protocol) 14.1 Introduction This chapter defines the protocol for the communication between the user (e.g. via an operating tool) and the generator. The pro- tocol is designed as a half duplex master/slave protocol, where the generator acts as slave. ASIP is available on RS-232, RS-485 and Ethernet interfaces.
Page 187: Settings/Standards
The fixed baud rate is not limited and must be consistent with the master hardware and generator that is used (at a minimum, baud rates 9,600, 57,600, and 115,200 should be supported). Settings/standards RS-232 operation ■ 1 start bit, 8 data bits, no parity, 1 stop bit, without direction switching.
Page 188: Framing (Data Link Layer)
Framing (data link layer) To match the data format of Intel processor-based master sys- tems (i.e., the majority of all master systems), the data is trans- mitted in little endian format. Addressing for RS-232 and RS-485 operation: The address consists of one byte contained in the data link ■...
Page 189 [Checksum] (2 bytes) The checksum is calculated as a 16-bit-CRC (CRC-CCITT 0xFFFF, non-reflected) of all bytes before the checksum itself (from the start byte to the last data byte). [Stop byte] (1 byte) The stop byte is always [0x55] Structure of a Type I Telegram Tab.
Page 190: Data Transmission (Application Layer)
■ : Normalized symbols for 1 start bit, 8 data bits and Norm 1 stop bit, resulting in 10 - [unit: symbols]). ■ : Maximum delay time between two bytes (limited to InterChar 0.025 - unit 1/s). ■ Ex: The master application sends a telegram with a length of 12 bytes (e.g., controlling the activity of the interface) at a baud rate of 9600 baud: = 0.150 + 12 * (10/9600 + 0.025) = 0.4625 s.
Page 191: Timeout Behavior
Timeout behavior The generator requires at most one second (T ) to respond ALtimeout the master's request. If the master does not pass any requests over five seconds ), which were recognized as valid by the generator, ALtimeoutConn the generator will close the associated connection. E.g. open file handles are closed and a new connection attempt of the master is expected by the generator.
Page 192 an error telegram. In the opposite direction, the slave sends the generator status with the following meaning: MSB 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 LSB 0 Resv ActIfc Rdy2 Rdy1 Resv Status byte Tab.
Page 193 Data objects [DOB] Data objects encapsulate the data to be transferred into an infor- mation layer that makes them unequivocal for the communication partners. One can put as many data objects into a telegram as the maximum telegram length permits. The information layer is structured and is explained below.
Page 194 Description 0x33 Insufficient space available in the response telegram. 0x34 No free file handle available. 0x35 Unknown / incorrect file handle. Example: access after a timeout of 5000 ms. 0x36 Unknown file / unknown file name. 0x37 Illegal file attribute (e.g. attempt to write/read a file when file may only be read/written to;...
Page 195 Abbreviation Description 0x53 STRUC_PARAM_LOG (see "Structure definition", pg. 4‐149) 0x5F VECT 1 to 248 bytes of vector data; data field with length of 1 byte followed by up to 247 bytes of data Data types [TYP] Tab. 4-99 Note Other data types are not supported. They have to be handled as "Specific vector files", cf.
Page 196: Specific Commands Of The Application
below respective the index / sub-index selection. The list ele- ments form a sequence of status, data type and data. If an error is reported, it must be entered globally for the entire data object in the first status field directly after the index / sub- index section.
Page 197 ■ [GS] (1 byte) The first byte always represents the generator status. ■ [CMD] (1 byte) Telegram error [0xFE]. ■ [DOB] 1 data object with the following structure: − [IDX] (2 bytes) Unknown command [0x01] Parsing error [0x02] Generator status error [0x03] Telegram length error [0x04]...
Page 198 [DOB] (1 to n) Data objects with the following structure: ■ [IDX] (2 bytes) Index. ■ [SUBIDX] (1 byte) Sub-index. ■ [STAT] (1 byte) Status, only if [0x00]: ■ [TYP] (1 byte) Data type. ■ [DTA] (1 to 248 bytes) Data with the data type specified above.
Page 199 ■ [SUBIDX] (1 byte) Sub-index [0x01]. ■ [STAT] (1 byte) Status [0x00]. ■ [TYP] (1 byte) Data type [0x07]. ■ [DTA] (4 bytes) Data [0x00] [0x02] [0x05] [0xFF]. The parameter 0x0001 is of type UINT16 and has the value 0x0000. The parameter 0x0005 is of type UINT8 and has the value 0xE3.
Page 200 ■ [STAT] (1 byte) Status [0x00]. ■ [TYP] (1 byte) Data type [0x07]. ■ [DTA] (4 bytes) Data [0x00] [0x02] [0x05] [0xFF]. The parameter 0x0001 could not be read because the user role does not have read permission for this parameter. The other parameters were read successfully.
Page 201 Example for writing a parameter (success case): Write parameters 0x0001, 0x0005 and 0x2534 (assuming that sub-index 1 writes the value of the parameter). The master writes the following parameters: [GS] [0x00] [CMD] [0x02] [DOB] 3 Data objects with the following structure: ■...
Page 202 Example for writing a parameter (error case): Write parameters 0x0001, 0x0005 and 0x2534 (assuming that sub-index 1 writes the value of the parameter). The master writes the following parameters: [GS] [0x00] [CMD] [0x02] [DOB] 3 Data objects with the following structure: ■...
Page 203 ■ [SUBIDX] (1 byte) Sub-index [0x01]. ■ [STAT] (1 byte) Status [0xFF]. The parameter 0x0001 could not be written because the user role does not have write permission for the parameter. The other parameters were written successfully. File transfer [0x03] The transfer direction of the file from the generator to the master is defined as read file transfer and from the master to the gen- erator as write file transfer.
Page 204 ■ [IDX] (1 byte) Read mode selection [0x01] Write mode selection [0x02] First block [0x03] Next block [0x04] Repeat block [0x05] Close [0x06] (1 byte) Not used [0x00] Last data [0x01] More data [0x02]. ■ [SUBIDX] (1 byte) File handle [0x00…0xFF]. ■...
Page 205 Opening the file The master determines the reading file transfer via the transfer direction using "Select read" and the defined file name, as speci- fied in the file name list. The generator transmits the file size to the master and subse- quently acknowledges the selection.
Page 206 [GS] [0x00] [CMD] [0x03] [DOB] 1 data object with the following structure: ■ [IDX] (1 byte) Write mode selection [0x02], (1 byte) [0x00] not used. ■ [SUBIDX] (1 byte) File handle [0x00] not valid. ■ 1 variant list element. − [STAT] (1 byte) Status [0x00].
Page 207 ■ [IDX] (1 byte) First block [0x03], (1 byte) [0x00] not used. ■ [SUBIDX] (1 byte) File handle [0x01] valid. ■ 1 variant list element. − [STAT] (1 byte) Status [0xFF]. − [Typ] (1 byte) Vector [0x5F]. The master writes subsequent blocks until the last block: [GS] [0x00] [CMD] [0x03] [DOB] 1 data object with the following structure:...
Page 208 ■ [IDX] (1 byte) Close [0x06], (1 byte) [0x00] not used. ■ [SUBIDX] (1 byte) File handle [0x01] File handle is no longer valid. ■ 1 variant list element. − [STAT] (1 byte) Status [0xFF]. Example for a reading file transfer (error case): "/Test.txt"...
Page 209 the file name list that follows. In addition to the file name, the file size is transmitted to the generator. The generator's response includes the file handle that only can be set to "valid" by the generator. When the master receives a valid handle, it is the master's responsibility to close this handle in order to end the transfer in a controlled fashion.
Page 210 ■ If a change in the user role reduces the permissions and thus prevents the writing of a file to be continued, the handle becomes invalid and the file transfer is aborted. ■ 5,000 ms command timeout. Example for a writing file transfer via an active interface (success case) "/Test.txt"...
Page 211 ■ [IDX] (1 byte) First block [0x03], (1 byte) More data [0x02]. ■ [SUBIDX] (1 byte) File handle [0x01] valid. ■ 1 variant list element. − [STAT] (1 byte) Status [0x00]. − [Typ] (1 byte) Vector [0x5F]. − [DTA] (248 bytes) Data [0xF7, 0x41, …; 0x41) (The vec- tor defines its length with F7 byte, resulting in a data length of 248 bytes).
Page 212 ■ [IDX] (1 byte) Close [0x06], (1 byte) [0x00] not used. ■ [SUBIDX] (1 byte) File handle [0x01] valid. ■ 1 variant list element. − [STAT] (1 byte) Status [0xFF]. The generator acknowledges: [GS] [0x08] [CMD] [0x03] [DOB] 1 data object with the following structure: ■...
Page 213 ■ [IDX] (1 byte) Write mode selection [0x02], (1 byte) [0x00] not used. ■ [SUBIDX] (1 byte) File handle [0x00] not valid. ■ 1 variant list element. − [STAT] (1 byte) Status [0x37] (Illegal file attribute. File cannot be written, global status). File name list Each file is defined by its name, its attributes and its data type/ structure.
Page 214 Message read [0x04] This command reads the lists of pending messages. The reading process follows the file transfer, except without Select and Close - and with special data types. Reading a list using "Message read" must not be interrupted. If another request is placed before the "Message read"...
Page 215 ■ [IDX] (1 byte) First block [0x03] Next block [0x04] Repeat block [0x05] (1 byte) Last data [0x01] More data [0x02]. ■ [SUBIDX] (1 byte) Not used [0x00] Warnings [0x01] Alarms [0x02] Info [0x03] Messages [0x04]. ■ (1 to n) Variant list elements −...
Page 216 − [TYP] (1 byte) Structure [0x50]. − [DTA] (24 bytes) Data […]. Remark: For this data type, a maximum of 62 messages fit into a telegram: 255 - 1 [GS] - 1 [CMD] - 2 [IDX] - 1 [SUBIDX] = 250; 250 / (1 [STAT] + 1 [TYP] + 2 [DTA]) =>...
Page 217 ■ [IDX] (1 byte) Request activity [0x01] Cancel activity [0x02] (1 byte) Not used [0x00]. ■ [SUBIDX] (1 byte) Not used [0x00]. ■ 1 variant list element. − [STAT] (1 byte) Status [0xFF]. Example: Activating and deactivating interfaces (confirmed) The master activates the interface: [GS] [0x00] [CMD] [0x05] [DOB] 1 data object with the following structure:...
Page 218 [DOB] 1 data object with the following structure: ■ [IDX] (1 byte) Deactivate [0x02], (1 byte) [0x00]. ■ [SUBIDX] (1 byte) not used [0x00]. ■ 1 variant list element. − [STAT] (1 byte) Status [0xFF]. Example: Activating interfaces (rejected) … The master activates the interface: [GS] [0x00] [CMD] [0x05]...
Page 219: Appendix
STRUC_INDICATION TIM96 Time stamp — UINT32 Code ■ 12*1,000,000 + type * 100,000 + number ■ 12: = TRUMPF generator designator ■ Type: = 0->Warning, 1->Alarm, 3->Info ■ Number: = [0 … 99999] UINT32 Module ID — UINT32 Additional parame- —...
Page 220 Data type Length (bytes) Description Description UINT32 Function ID — STRUC_PARAM_LOG TIM96 Time stamp — UINT32 Interface - written — UINT32 User level — UINT32 ParamIndex — UINT32 SubIndex — UINT32 DataType — Structure definition Tab. 4-100 Timeout table Name Time (s) Description 0.15...
Page 221 Fig. 10525 Checking implementation: Calculation of the checksum using the string "123456789" must result in 0x29B1. Note that the string "123456789" is displayed in the byte format {0x31, 0x32, 0x33, …, 0x39}. The CRC in the telegram is displayed in little endian format. 4‐151 A04-0115-00.BKEN- 2017-06-26...
Page 222 4‐152 ASIP (Advanced Serial Interface Protocol) 2017-06-26 A04-0115-00.BKEN- 001-07...
Page 223 Chapter 5 Standards and directives CE certification 5‐3 EU declaration of conformity 5‐4 TruPlasma RF 1001 to 1003 5‐4 Classification according to EN 55011 5‐5 SEMI standards 5‐6 SEMI S2 5‐6 SEMI S8 5‐6 SEMI S9 5‐6 SEMI S10 5‐6 SEMI F47 5‐6...
Page 224 NRTL safety certification 5‐7 FCC 47 CFR Part 18 5‐8 Radio Wave Act (South Korea) 5‐9 5‐2 Standards and directives 2017-06-26 A04-0115-00.BKEN- 001-07...
Page 225: Ce Certification
CE certification EU directives: ■ 2014/35/EU ■ 2014/30/EU Standards taken into account: ■ EN 61000-6-2:2005/AC:2005 ■ EN 55011:2009/A1:2010 Group 2 Class A ■ EN 61010-1:2010 Important notes: ■ The products listed in the declaration of conformity are not independently operating products in the sense of the EMC directive.
Page 226: Eu Declaration Of Conformity
EU declaration of conformity TruPlasma RF 1001 to 1003 EC declaration of conformity TruPlasma RF 1001 to 1003 Fig. 10645 5‐4 CE certification 2017-06-26 A04-0115-00.BKEN- 001-07...
Page 227: Classification According To En 55011
Classification according to EN 55011 The EN 55011 standard groups ISM devices (industrial, scientific and medical high-frequency devices) into various classes. This generator is a device of Group 2, Class A. Class A devices are intended for operation in an industrial envi- ronment.
Page 228: Semi Standards
The generator was developed and manufactured in compliance with the requirements specified by SEMI F47 "Specification for semiconductor processing equipment voltage sag immunity". Tested by the TRUMPF test and qualification center and/or by an independent testing laboratory. 5‐6 SEMI standards 2017-06-26 A04-0115-00.BKEN-...
Page 229: Nrtl Safety Certification
NRTL safety certification The product was certified by an accredited testing laboratory. Standards taken into account: ■ UL 61010-1 3rd. Ed. May 2012. ■ IEC 61010-1 June 2010. ■ DIN EN 61010-1 July 2011. 5‐7 A04-0115-00.BKEN- 2017-06-26 NRTL safety certification 001-07...
Page 230: Fcc 47 Cfr Part
FCC 47 CFR Part 18 The product satisfies the requirements from "47 CFR part 18, Federal Communications Commision (FCC) rules". Tested by the TRUMPF EMC Test Center and/or by an inde- pendent testing laboratory. FCC conformity certificate Fig. 10759 5‐8...
Page 231: Radio Wave Act (South Korea)
Radio Wave Act (South Korea) Certification on request. 5‐9 A04-0115-00.BKEN- 2017-06-26 Radio Wave Act (South Korea) 001-07...
Page 232 5‐10 Radio Wave Act (South Korea) 2017-06-26 A04-0115-00.BKEN- 001-07...
Page 233: After Receiving The Generator Inspecting The Delivery
Chapter 6 Installation After receiving the generator 6‐4 Inspecting the delivery 6‐4 Unpacking 6‐5 Disposing of packaging material 6‐5 Transport, storage 6‐6 Transport 6‐6 Storage conditions 6‐6 Requirements for the site 6‐7 Installing external mains separation device 6‐7 Selecting a suitable location 6‐7 Position during operation 6‐7...
Page 234 6‐20 RF output 6‐21 Connecting RF output 6‐21 Supply voltage 6‐22 10.1 Connecting the mains cable 6‐22 10.2 Mains connection for TruPlasma RF 1001 to 6‐23 1003 Matchbox (optional) 6‐24 11.1 Connection principle of a matchbox 6‐24 Dismantling 6‐25 12.1 Dismantling the generator 6‐25...
Page 235 Disposal 6‐27 14.1 Disposal of generator 6‐27 6‐3 A04-0115-00.BKEN- 2017-06-26 Installation 001-07...
Page 236 2. In order to retain the right of recourse, report any shipping damages immediately in writing to the forwarding agent, the insurance company and TRUMPF. 6‐4 After receiving the generator 2017-06-26 A04-0115-00.BKEN-...
Page 237: Unpacking
Unpacking Disposing of packaging material If you do not want to keep the packaging material for a subse- quent transport: Ø Dispose of all packaging materials in compliance with the rel- evant regional waste disposal regulations. 6‐5 A04-0115-00.BKEN- 2017-06-26 Unpacking 001-07...
Page 238: Transport, Storage
Transport, storage Transport Risk of injury due to the weight of the generator CAUTION Ø Do not carry or lift the generator alone. Ø Do not lift the generator by the components on the rear side, e.g., water connections. Storage conditions If you do not install the generator immediately following delivery: 1.
Page 239: Requirements For The Site
Position during operation The generator is designed for installation and operation in any position. Note TRUMPF recommends an installation position in which the water connections are not at the top. 6‐7 A04-0115-00.BKEN- 2017-06-26 Requirements for the site...
Page 240: Installation
Installation Module fastening Located on the sides of the generator are threads that can be used for fastening. ■ M4 thread ■ Thread depth 8 mm ■ Torque 1.5 Nm Thread for fastening Installing the generator Fig. 10548 6‐8 Installation 2017-06-26 A04-0115-00.BKEN- 001-07...
Page 241: Connection Order
Connection order Connecting the generator When connecting the generator, observe the following sequential order: 1. Connect the cooling water. 2. Connect control lines (interfaces and interlock). 3. Connect the power output. 4. Connecting the supply voltage. 6‐9 A04-0115-00.BKEN- 2017-06-26 Connection order 001-07...
Page 242: Cooling Water
Cooling water Connecting the cooling water The generator's cooling water circuit consists of copper NOTICE components. The use of cooling water from aluminum systems damages the generator. Ø Take care to separate the generator cooling water strictly from cooling water from aluminum systems. Connecting cooling water pipes The connection for the cooling water pipes consists of connec- tion ports with 1/4"...
Page 243 Connection with 1/4" internal Water hose. thread for water return. Connection with 1/4" external Römer quick connector. thread for water inlet. Cooling water connection Fig. 10447 1. For generators with angular-shaped connection port: secure port with open-end wrench. 2. Screw Römer quick connector to the connection port. Observe torque indicated on the generator! 3.
Page 244: Connecting An Adapter
Open-end wrench for securing Römer quick connector Open-end wrench for tightening Hose Connection port on the genera- Fastening quick connector Fig. 10445 Connecting an adapter Various adapters are available for the cooling water connection. 6‐12 Cooling water 2017-06-26 A04-0115-00.BKEN- 001-07...
Page 245: Checking For Leaks
Connection port on the gen- Adapter G1/4 - NPT3/8 erator with 1/4" internal Adapter G1/4A - G3/8 thread Römer quick connector Adapter variants Fig. 10446 Ø Observe the torque indication when screwing on the adapter. Do not exceed the torque indication provided on the front panel of the generator.
Page 246: Definition Of Open/Closed System
A cooling water quality that prevents the formation cooling water of corrosion is to be ensured. Within the framework of the legal regulations, TRUMPF shall only be liable for damage which has been caused by faults in 6‐14...
Page 247: Cooling Water Parameter
To ensure the cooling water properties, we recommend the use of a recooling system. ■ The sales team at TRUMPF will gladly assist you in making the appropriate selection. Initial filling For the initial filling of the generator in a closed cooling water cir-...
Page 248: Cooling Water Additives
Cooling water additives for the chemical treatment of additional water and cooling water Description Apportionment Copper corrosion Water Care-Copper inhibitor for closed For concentration, see Easy-Kits Cu systems Copper corrosion Use suitable copper corrosion inhibitor. inhibitor for open sys- tems Oxidizing biocides <...
Page 249: Easy-Kits
Easy-Kits can be used for all cooling circuits on TRUMPF gener- ators and systems. Each Easy-Kit contains a bottle with biocide and a bottle with anticorrosive agent.
Page 250: 7.11 Utilization And Apportionment
Allocating Easy-Kit Different Easy-Kits are used in the cooling water circuits. Allocat- ing the correct Easy-Kit to be used in a cooling water circuit is dependent on cooling water volume. Each Easy-Kit comes pack- aged with a label which identifies the Easy-Kit. This label can, for example, be mounted on the chiller or on the cooling water tank.
Page 251: 7.12 Cleaning And Care
Easy-Kit Cu for approximately 2 hours prior to the initial commissioning and flushed with water in the quality specified for additional water. These products are available from TRUMPF. 7.13 Overview of cooling water additives Cooling water additives...
Page 252: Control Lines
Control lines Connecting the control lines Condition ■ The generator can only output power if the interlock circuit of the AD interface is closed. Connection of the interlock circuit: pin 23 and pin 10 of the AD interface. 1. Connect pin 23 and pin 10 of the AD interface. The connection can consist of: −...
Page 253: Rf Output
RF output Connecting RF output Life threatening voltage! DANGER Contact with live parts is life-threatening. Ø Only connect RF output if the generator is disconnected from mains. Electromagnetic fields! DANGER Electromagnetic fields can be harmful to health. Ø Only connect RF output if the generator is disconnected from mains.
Page 254: Supply Voltage
Supply voltage Life Threatening Voltage! DANGER Contact with live parts is life-threatening. Ø Open external mains separation device. Ø Check mains cables for absence of voltage. Note The device is a device of protection class I and requires a PE protective earth connection for safety.
Page 255: Mains Connection For Truplasma Rf 1001 To
5. Close interlock (see "Fig. 10439", pg. 6‐23). 10.2 Mains connection for TruPlasma RF 1001 to 1003 Mains connector coupling Panel connector Locking mechanism Mains connection TruPlasma RF 1001 to 1003 Fig. 10439 6‐23 A04-0115-00.BKEN- 2017-06-26 Supply voltage 001-07...
Page 256: Matchbox (Optional)
Matchbox (optional) A matchbox from TRUMPF is connected between generator and load. The matchbox thereby forms the load for the generator. 11.1 Connection principle of a matchbox For more exact details on the matchbox: see operating instruc- tions for the matchbox.
Page 257: Dismantling
Dismantling 12.1 Dismantling the generator RF output carries life threatening voltage! WARNING Ø Before unfastening the RF cable, switch off the generator and disconnect mains cables from mains. The generator's cooling water circuit consists of copper NOTICE components The use of cooling water from aluminum systems damages the generator.
Page 258: Shipping
Shipping 13.1 Packing the generator Ø Use suitable packaging material for shipping the generator (as for delivery). 6‐26 Shipping 2017-06-26 A04-0115-00.BKEN- 001-07...
Page 259: Disposal
Disposal 14.1 Disposal of generator Ø Observe the local regulations when disposing of the genera- tor. 6‐27 A04-0115-00.BKEN- 2017-06-26 Disposal 001-07...
Page 260 6‐28 Disposal 2017-06-26 A04-0115-00.BKEN- 001-07...
Page 261: Operation
Chapter 7 Operation Activating interface and changing active 7‐5 interface Activating interface 7‐5 Changing active interface 7‐5 Displaying the active interface 7‐5 Operation with TruControl Power 7‐7 Installing TruControl Power 7‐7 Setting up connection via RS-232 interface 7‐7 Disconnecting 7‐8 Taking and releasing control 7‐8 Connection status...
Page 262 Operating via RS-232/RS-485 interface 7‐14 Switching between RS-232 and RS-485 7‐14 Setting slave address for RS-485 7‐14 Setting the watchdog 7‐15 Operation via AD interface 7‐16 Scaling analog inputs and outputs 7‐16 Operation via Profibus interface (optional) 7‐17 Setting Profibus address 7‐17 Operation via DeviceNet interface (optional) 7‐18...
Page 263 Frequency agility (optional) 7‐30 10.1 Activate frequency agility 7‐30 10.2 Description of the frequency agility function 7‐30 Pulse mode 7‐35 11.1 Setting pulse mode 7‐35 11.2 Pulse increase 7‐35 11.3 External pulse source 7‐36 11.4 Pulse output 7‐36 11.5 Triggered pulse mode 7‐36 11.6 Simmer operation...
Page 264 Run-time monitoring (watchdog) 7‐57 Matchbox operation 7‐58 User limit configuration 7‐60 Mixed Mode 7‐61 20.1 Activate mixed mode 7‐61 Factory setting 7‐63 21.1 Resetting to factory settings 7‐63 21.2 Default values 7‐63 Time synchronization 7‐67 22.1 Synchronizing time 7‐67 Diagnostics 7‐68 23.1 Displaying messages in TruControl Power...
Page 265: Activating Interface And Changing Active
Activating interface and changing active interface Activating interface The generator can be operated and controlled via various interfa- ces. The generator can only be controlled from the active interface. Only one interface can be active. Monitoring of values and error messages can be done simultaneously via multiple interfaces.
Page 266 3. Read the default interface under "Active interface""Main inter- face". After the generator is switched on, the default interface is automatically the active interface. 7‐6 Activating interface and changing active interface 2017-06-26 A04-0115-00.BKEN- 001-07...
Page 267: Operation With Trucontrol Power
Operation with TruControl Power The TruControl Power software permits easy operation of the generator. The software is supplied on a CD. The computer can be connected to the generator via the Ethernet interface or RS-232 interface. The software package must first be installed on a computer. System requirements: ■...
Page 268: Disconnecting
9. Click on Connect . 10. Select Operator and click on Ok. The software establishes contact with the connected generator. Disconnecting Ø Click on Disconnect. The start screen then opens and the connection can again be established. Taking and releasing control To control a generator using TruControl Power, the generator interface to which the computer is connected must first be acti- vated.
Page 269 Symbol Connec- Control Description tion ■ Generator is not connected. ■ Generator is switched off. ■ Data from the generator can only be read. ■ Required generator interface is not activated. ■ To activate the RS-232 interface: Press Take control. Connection is set up.
Page 270 Messages Three types of message can appear on the right in the status bar: Icon Message type Priority Current alarm Current warning Current information Message types Tab. 7-2 If one or more messages are pending, the current alarm is always displayed. If no alarm is pending, the pending warning is always displayed.
Page 271 Buttons active Buttons passive Power on and Power off buttons Tab. 7-3 Main menu and submenu Main menu Submenu Position of main menu and submenu Fig. 10015 The user interface is divided into a main menu and a submenu. The buttons for the main menu are on the left side of the win- dow and cover the following 5 areas: ■...
Page 272 Selecting submenu items Arrow buttons Number of tab Changing tab Fig. 10014 Ø To select a submenu item: Ø Click on the tab of the submenu item (1). Ø Clicking on the arrows to scroll forward or backward (3). Ø At "Tab:", highlight the number with the left mouse button. Enter the number of the desired tab.
Page 273 Main menu Submenu Description Diagnostics Pending messages (see "Diagnostics", pg. 7‐68) Message history (see "Diagnostics", pg. 7‐68) Monitoring (see "Monitoring", pg. 7‐69) Identification (see "Identification", pg. 7‐69) Data logging Trending (see "Performing trending", pg. 7‐70) Configuration (see "Setting trigger conditions for oscillo- scope", pg.
Page 274 Operating via RS-232/RS-485 interface The generator can be controlled by means of serial data trans- mission via the RS-232/RS-485 interface. This way, the genera- tor can be integrated into a complex system and controlled via a system controller. Pin assignment, function description and serial protocol . Switching between RS-232 and RS-485 Because the same physical interface is used for serial data...
Page 275 3. Select >Configuration >Parameter handling and press Save parameters. Setting the watchdog 1. Select >Configuration >Interfaces. 2. Enter the time under "Service" "Watchdog". If no valid command is transferred within the entered time, the generator switches off the power and outputs an alarm message.
Page 276 Operation via AD interface The AD interface is a combined interface consisting of analog inputs and outputs as well as digital inputs and outputs (I/O lines): ■ Digital inputs Digital outputs ■ ■ Analog input. ■ Analog outputs. The inputs of the AD interface can be used to control the gener- ator.
Page 277 Operation via Profibus interface (optional) The generator features an interface for Profibus communication (optional). Pin assignment and function description (see "Profibus (optional)", pg. 4‐50). Setting Profibus address 1. Switch off the generator using the main switch. 2. Set rotary switch for Profibus to desired address. −...
Page 278 Operation via DeviceNet interface (optional) The generator features an interface for DeviceNet communication (optional). Pin assignment and function description (see "DeviceNet (optional)", pg. 4‐66). Setting the baud rate and node address 1. Switch off the generator using the main switch. 2.
Page 279 Operation via EtherCAT interface (optional) The generator features an interface for EtherCAT communication (optional). Pin assignment and function description (see "EtherCAT (optional)", pg. 4‐89). Setting node address 1. Switch off the generator using the main switch. 2. Use the rotary switch on the rear side of the generator to set the desired node address: −...
Page 280 2. Read the current status under "EtherCAT device state". There are four states corresponding to the EtherCAT defini- tion: Init, Pre-op, Safe-op and op. 3. Read the time stamp under "Time stamp EtherCAT". 7‐20 Operation via EtherCAT interface (optional) 2017-06-26 A04-0115-00.BKEN- 001-07...
Page 281 Power regulation Switching power on Conditions ■ Interlock circuit is closed. ■ On the AD interface, the two pins for the interlock circuit are connected to an external contact for this purpose (see "Con- necting the control lines", pg. 6‐20). ■...
Page 282 Note Observe the useful range for P set values: P ≤ P 2. Enter set value for forward power (P ), load power (P reflected power (P ) and DC bias (U Which regulator is currently active is displayed under "Active regulator / ramping state"...
Page 283 selection" signal is changed, the unneeded set value is auto- matically set to its maximum value. The P set value remains unchanged. The unneeded set value as well as the P value can be controlled via one of the digital interfaces at any time.
Page 284 This regulation allows measurement values from a matchbox to be used as regulation parameters. Note External current / voltage regulation is only possible if a match- box from TRUMPF is connected to the generator (see "Matchbox (optional)", pg. 6‐24). Use external current / voltage regulation 1.
Page 285 Clock modes Three clock modes are available: ■ Phase offset (CEX mode) Here, the clock signal and the RF output signal are coupled phase-locked. The phase shift can be set by the user. ■ Frequency offset In this mode, a frequency deviation can be set by the user in a range around the nominal frequency.
Page 286 Clock signal from an external source Clock signal from an external source Fig. 10208 Note For an external clock signal to be accepted, the generator must be set to Clock - source External. (>Operation"Clock and pulse mode""Source"External). This setting can only be activated when the RF output power is switched off.
Page 287 If the value set for the phase shift is too large, the generator out- puts an alarm message. Clock signal generated internally in the generator A generator can operate as a clock signal master. The internal oscillator generates the 13.56 MHz signal which can be fed to other RF generators, which shall have a defined phase angle rel- ative to the common clock signal.
Page 288 4. Feed in the clock signal of other generators (see "Clock sig- nal from an external source", pg. 7‐26) and make settings for an external clock signal . Frequency offset Note Clock signal and RF output power are not phase synchronous in the "clock offset mode"...
Page 289 2. Switch on output power with Power on. The generator now switches to frequency-offset mode. A value entered under "Phase shift" is generally ignored. Selecting phase shift mode 3. To select the phase shift mode: enter the desired value under "Phase shift". 4.
Page 290 Frequency agility (optional) 10.1 Activate frequency agility 1. Press Power off. 2. Select >Operation >Frequency agility. 3. Select >Mode >Frequency agility. 10.2 Description of the frequency agility function Auto Frequency Tuning / In "Frequency agility" mode, the generator automatically changes AFT (optional) its operating frequency and tries to achieve optimum matching.
Page 291 The Γ-dependent part of the modulation "Rel. mod. deviation" causes the modulation to become very small near the optimum matching (lowest-possible reflected power Pr). If frequency regu- lation is also to take place even with very low reflection, parame- ter "Modulation deviation" must be increased somewhat. The Γ-dependent regulation amplification "Rel.
Page 292 application-specific values with parameters "Min. tuning offset" and "Max. tuning offset". Excluded frequency range AFT range "Bandwidth"(Example: 30 kHz) Nominal operating frequency Excluded frequency range (13.56 MHz) "Center frequency offset" (Example: 35 kHz) Excluded range Fig. 10755 With the function "Skip frequency window", a frequency range from the AFT can be ruled out.
Page 293 an ignition process or plasma propagation to complete. If Ignition Frquenecy mode is active, the generator starts the first pulse from the ignition position (ignition frequency). The next pulse begins with frequency 13.56 MHz + offset and continues after the Regulation delay has elapsed with the working fre- quency that was used up to the end of the previous pulse.
Page 294 AFT adjustment parameters AFT settings Fig. 10756 Size Default Min. Max. "Frequency offset" 0 kHz -5000 kHz 5000 kHz "Tuning start offset" 0 kHz -678 kHz 678 kHz "Min. tuning offset" -678 kHz -678 kHz 678 kHz "Max. tuning offset" 678 kHz -678 kHz 678 kHz...
Page 295 Pulse mode As an alternative to continuous operation, the RF power can be pulsed cyclically. The relevant variables for pulse mode, such as frequency and duty cycle, can be produced in the generator or externally. During the pulse (high level), the generator delivers power. Dur- ing the pulse pause (low level), no power is delivered, but all components remain ready for power delivery.
Page 296 Power on command. With the help of the pulse increase in pulse mode, a much higher switch-on/switch-off frequency with increased pulses can be achieved than with the Power on and Power off commands. Power curve without pulse Power curve with pulse increase increase Pulse increase...
Page 297 The "Pulse delay" is the time between the rising edge of the external pulse signal until the application of the internal pulse signal. The "Pulse duration" defines the duration of the internal pulse signal. To use this function, the pulse source must be set to external ("Pulse mode"...
Page 298 Regulation characteristic Soft start With the "soft start" start behavior, a slow, controlled start behav- ior can be achieved. The "soft start" ensures that, when switched on, the generator is always adjusted from 0 W to the entered set value. This prevents the occurrence of a sudden, high reflected power, since the regulation has sufficient time to intervene once the entered P...
Page 299 12.1 Setting the regulation characteristic 1. Select Operation Regulation characteristic. 2. To activate "soft start", select: Active. 3. To increase the time constants of the regulation during unsteady operating conditions: select Slow or Expert under "Regulation speed"; if necessary, set a different value for the regulation speed.
Page 300 Timer 13.1 Setting timer 1. Select >Operation >Regulation characteristic. 2. Under "RF off timer", enter the time after which the output power is switched off. Adjustment range: 0 to 999999 seconds. With setting 0 s, the timer is not active. 3.
Page 301 Joule mode In Joule mode, a limit value is specified for energy transfer to the load. The power is switched off after the energy value has been reached. ■ "Joule mode limit": limit value specification in Ws. "Total energy output": display of the consumed energy in ■...
Page 302 Ramp function The ramp function can be used to set the output power to a new value with a defined speed in W/s or within a defined period in Depending on the choice of reference input (Regulation type), the ramp acts on P or on P .
Page 303 The P set value may be set too low. The P regulator inter- venes even before the ramp can increase to the P value. Ø In TruControl Power, select >Operation >Power regula- tion. Ø Check set values for P and P and change if necessary.
Page 304 Arc management (optional) Arc management operates in two levels: ■ Detection ■ Reaction If arc detection is active, all arcs are counted. The arc counter can be reset. External arc detection Arc detection is performed by an external measuring device. This measuring device can be a second generator.
Page 305 Condition for arc detection Fig. 10198 16.2 Arc detection modes There are various ways to detect arcs: ■ "Pr Threshold": − limit value in W. − An arc is detected if the P value exceeds the set P limit value. −...
Page 306 ■ "Pr/Pi Slope": − Slope Δ(P )/(n * T ) in %/µs. sample − An arc is detected if P rises faster than the set value "Slope Pr/Pi". − (see "Fig. 10202", pg. 7‐49). ■ "External": An arc is detected by an external measuring device. In the event of an arc, this device supplies a signal to the arc- syn in interface in the generator (see "Fig.
Page 307 Arc detection P threshold Fig. 10199 7‐47 A04-0115-00.BKEN- 2017-06-26 Arc management (optional) 001-07...
Page 308 Arc detection P threshold Fig. 10200 Arc detection P slope Fig. 10201 7‐48 Arc management (optional) 2017-06-26 A04-0115-00.BKEN- 001-07...
Page 309 Arc detection P slope Fig. 10202 External arc detection Fig. 10628 7‐49 A04-0115-00.BKEN- 2017-06-26 Arc management (optional) 001-07...
Page 310 Combined arc detection - external - internal Fig. 10629 7‐50 Arc management (optional) 2017-06-26 A04-0115-00.BKEN- 001-07...
Page 311 16.3 Arc handling There are two different types of arc treatment: ■ Power off: In the event of an arc, the generator switches off the output power and generates an alarm message. ■ Cut arc actively (active interruption of the arc): The generator responds according to the arc treatment set- tings.
Page 312 Process and parameter combinations Fig. 10203 16.5 Single pulse To extinguish an arc with a single pulse, the following parame- ters must be set: ■ "Pulse count in burst = 1." ■ "Arc suppression time = n µs." "Burst-pulse-on time = n µs." ■...
Page 313 Single pulse Fig. 10204 16.6 Pulse packet To extinguish an arc with a defined number of pulses, the follow- ing parameters must be set: ■ "Pulse count in burst "= number of pulses. Even if 0 is set, the following applies: With active arc handling, a single arc suppression is performed (see "Fig.
Page 314 Pulse packet Fig. 10205 16.7 Limiting repetition of the pulse packet If an arc cannot be extinguished in spite of pulse packet, the pulse packet is repeated continuously. To limit the number of repetitions, the "Arc retry count" parameter must be set: ■...
Page 315 Repetition of pulse packets/retry count = 2 Fig. 10206 16.8 Behavior after an arc To define the time between power on and reactivation of arc detection following an arc, the following parameter must be set: ■ "Arc detection delay" = time in µs (see "Fig.
Page 316 Arc detection delay (number of burst pulses = 0) Fig. 10207 7‐56 Arc management (optional) 2017-06-26 A04-0115-00.BKEN- 001-07...
Page 317 Run-time monitoring (watchdog) Each active interface is subject to run-time monitoring. If no valid command is transmitted within a specified time (timeout 500 to 30,000 ms), the generator switches off power and gener- ates an alarm message. This prevents the generator from dis- charging power in an uncontrolled manner should the interface cable be interrupted.
Page 318 Do not operate the matchbox simultaneously with TruControl Ø Power and another operating tool. A matchbox from TRUMPF can be connected to the generator by means of a 25-pin Sub-D cable. The current matchbox meas- urement values are transmitted to the generator via this cable.
Page 319 ■ "Matchbox" (Start, Stop). ■ "Start automatic control" (Manual, Automatic). ■ "Freeze" (Unfreeze, Freeze). ■ "Recipe number" (0 to 32). ■ ""Plasma-on" position" and "ignition position" of the tune capacitor. ""Plasma-on" position" and "ignition position" of the load ■ capacitor. Measurement values of the matchbox: ■...
Page 320 User limit configuration The user can define limit values for Pi, Pl and Pr that are not exceeded during operation. Example: For a generator with 3 kW output power, a limit value of PLmax = 2500 W was set. If a set value of 3000 W is entered, this pre-set value is cut to 2500 W.
Page 321 Mixed Mode If mixed mode is not active, the generator can only be controlled from the active interface. Only one interface can be active. In mixed mode, one of the digital interfaces is the main interface (active interface); individual commands can, however, be trans- mitted via AD interface.
Page 322 4. If analog inputs and analog outputs are used, scale these as necessary (see "Scaling analog inputs and outputs", 7‐16). 5. Under "Mixed Interface Mode", select On to accept the con- figuration and activate mixed mode. 7‐62 Mixed Mode 2017-06-26 A04-0115-00.BKEN- 001-07...
Page 323 Factory setting 21.1 Resetting to factory settings 1. Select >Configuration >Device settings. 2. Press Factory settings. 3. Switch generator off and back on again. All settings made in main menu >Configuration are reset to the factory settings. 21.2 Default values Default values operation Parame- Parame-...
Page 324 Parame- Parame- Feature Value ter num- ter num- ber dec. ber hex. 0x253 High time (simmer mode) 1 µs Regulation characteristic 0x1C6 Soft start Inactive 0x1C7 Regulation mode Normal 0x2E9 Expert settings 0x1DF Timer 0 s (timer not active) 0x284 Joule mode Inactive 0x283...
Page 325 Parame- Parame- Feature Value ter num- ter num- ber dec. ber hex. 0x24F Rel. mod. deviation 0x24B Modulation period 1 µs 0x24C Gain 0x24D Rel. gain 0x250 Pullback to start freq. 0x24A Retuning threshold 0x1C8 Regulation delay 7 µs 0x249 Auxillary 0 µs 0x29F...
Page 326 Parame- Parame- Feature Value ter num- ter num- ber dec. ber hex. 0x27E Active analog outputs Output 1 active Output 2 active Output 3 active 0x27F Active digital inputs Input 0 active Input 1 active Input 2 active Input 3 active 0x280 Active digital outputs Output 0 active...
Page 327 Time synchronization The time used within the generator is UTC time. UTC stands for Universal Time Clock and is also frequently referred to as Green- wich Mean Time. The operating panel on the generator also uses UTC time. The UTC time can be set via the operating panel. In TruControl Power, the local time is used.
Page 328 Diagnostics Pending messages, a message history, temperatures, operating time and values for identifying the generator can be displayed in TruControl Power. 23.1 Displaying messages in TruControl Power Displaying current messages 1. Select >Diagnostics >Pending messages. The currently pending messages are displayed. 2.
Page 329 23.2 Monitoring Displaying the temperature Ø Select >Diagnostics >Monitoring. The values of the temperature sensors are displayed under "Temperature". Displaying the operating time Ø Select >Diagnostics >Monitoring. The operating times are displayed under "Operating time". Generator on: time span during which the generator was switched on.
Page 330 Data logging Note This function is not available on the operating panel. 24.1 Performing trending 1. Select >Data Logging >Trending. 2. Under "Channel", select a signal from the drop-down list. 3. To start the display of signals: press Start under "Trending options".
Page 331 2. To start trigger monitoring every time an alarm occurs: acti- vate "Triggering on every alarm". 3. Set the desired sampling interval under "Interval". 24.3 Operating the oscilloscope 1. Select >Data logging >Oscilloscope. 2. Under "Channel", select a signal from the drop-down list. 3.
Page 332 7‐72 Data logging 2017-06-26 A04-0115-00.BKEN- 001-07...
Page 333 Chapter 8 Maintenance Maintenance work 8‐2 Performing software updates 8‐2 Checking cooling water circuit 8‐2 Cooling water parameter 8‐2 Utilization and apportionment 8‐3 Cleaning and care 8‐4 Overview of cooling water additives 8‐4 8‐1 A04-0115-00.BKEN- 2017-06-26 Maintenance 001-07...
Page 334 Software updates can be performed via the RS-232 service inter- face. Ø Only have software updates for the generator performed by TRUMPF personnel. Checking cooling water circuit Ø Regularly check all connected water lines for wear and tear and aging.
Page 335 Cooling water additives for the chemical treatment of additional water and cooling water Description Apportionment Copper corrosion Water Care-Copper inhibitor for closed For concentration, see Easy-Kits Cu systems Copper corrosion Use suitable copper corrosion inhibitor. inhibitor for open sys- tems Oxidizing biocides <...
Page 336 the entire contents to the tank of the cooling water circuit. Circulate water immediately. Cleaning and care Closed system ■ The inspection interval of the cooling water should be approximately 6 months. The test parameters are: − Clear appearance, without suspended solids. −...
Page 337 Cooling water additives Water Care-Copper STABREX ST40 STABREX ST70 STABREX ST70 FOR KITS NALCO 93033B NALCO 93033 — Standard Canada Belgium Netherlands Easy-Kit Cu-1 (5 … 14 l) 1652981 1652991 1652992 1652993 1652994 Easy-Kit Cu-2 (15 … 49 l) 1652995 1653088 1653089 1653090...
Page 338 8‐6 Maintenance work 2017-06-26 A04-0115-00.BKEN- 001-07...
Page 339 Chapter 9 Troubleshooting Warning and alarm messages 9‐2 Messages 9‐3 9‐1 A04-0115-00.BKEN- 2017-06-26 Troubleshooting 001-07...
Page 340 The following tables show the most important alarm and warning messages messages, with notes on error causes and how to correct them. If a message reappears repeatedly after resetting and restarting the generator, please contact TRUMPF Service. 9‐2 Warning and alarm messages 2017-06-26 A04-0115-00.BKEN-...
Page 341 Messages Dec. Hex. Type Message texts Effect Cause Measure 17002 426A Invalid error num- — Missing error — ber. number (not defined yet). 17003 426B NULL pointer — Uninitialized pointer — assignment. in software. 17004 426C Software initiali- — Runtime problems —...
Page 342 Dec. Hex. Type Message texts Effect Cause Measure 18003 4653 Error CPLD. — Error code prepared — for future use. 18004 4654 DSP error. — Error code prepared — for future use. 18005 4655 EEPROM check- — Wrong checksum — sum error.
Page 343 Dec. Hex. Type Message texts Effect Cause Measure 24018 5DD2 DeviceNet dupli- — Duplicate MAC ID — cate MAC-ID check failed. error. 24019 5DD3 DeviceNet Rx — The interface unit — queue overrun. did not empty the receive queue in time.
Page 344 Dec. Hex. Type Message texts Effect Cause Measure 24584 6008 Temperature of — Generator tempera- — RF-Detector is ture is out of the out of range. allowed range. 24585 6009 Power module — Calibration is faulty. — ADC gain error. 24586 600A Power module...
Page 345 Dec. Hex. Type Message texts Effect Cause Measure 24600 6018 Gate synchroni- — RF output frequency — sation failed. is not synchronised with clock input. 24601 6019 Extension tem- — Generator tempera- — perature sensor 1 ture is out of the out of range.
Page 346 Dec. Hex. Type Message texts Effect Cause Measure 24615 6027 Temperature of — Temperature error is — HVPS cooling detected by power plate 2 is out of module. range. 24616 6028 Temperature of — Temperature error is — HVPS DC Mod- detected by power ule 1 is out of module.
Page 347 Dec. Hex. Type Message texts Effect Cause Measure 24630 6036 HVPS Module 1: — Power module — Temperature of detected temperature DC Module 2 is alarm. out of range. 24631 6037 HVPS Module 1: — Power module — Temperature of detected temperature DC Module 3 is alarm.
Page 348 Dec. Hex. Type Message texts Effect Cause Measure 24658 6052 HVPS Module 1: — Power module — AC line voltage detected alarm too low 24659 6053 HVPS Module 1: — Power module — AC line voltage detected alarm too high 24660 6054 HVPS Module 1:...
Page 349 Dec. Hex. Type Message texts Effect Cause Measure 24671 605F HVPS Module 1: — Power module — IPS 6V PREDRV detected alarm failed 24672 6060 HVPS Module 1: — Power module — IPS +6V MEAS detected alarm failed 24673 6061 HVPS Module 1: —...
Page 350 Dec. Hex. Type Message texts Effect Cause Measure 24689 6071 HVPS Module 2: — Power module — AC line voltage detected alarm too low 24690 6072 HVPS Module 2: — Power module — AC line voltage detected alarm too high 24691 6073 HVPS Module 2:...
Page 351 Dec. Hex. Type Message texts Effect Cause Measure 24702 607E HVPS Module 2: — Power module — IPS 6V PREDRV detected alarm failed 24703 607F HVPS Module 2: — Power module — IPS +6V MEAS detected alarm failed 24704 6080 HVPS Module 2: —...
Page 352 Dec. Hex. Type Message texts Effect Cause Measure 24721 6091 Regulation fault — Power module — detected alarm 24722 6092 Critical impe- — Power module — dance detected alarm 24750 60AE SystemPORT — Check SystemPORT — matchbox alarm. matchbox state. 24751 60AF Invalid System-...
Page 353 Dec. Hex. Type Message texts Effect Cause Measure 24993 61A1 Temperature sen- — Value not feasible. — sor of cooling Sensor T1 is defec- plate 1 fault. tive. 24994 61A2 Temperature sen- — Value not feasible. — sor of cooling Sensor T2 is defec- plate 2 fault.
Page 354 Dec. Hex. Type Message texts Effect Cause Measure 26006 6596 Customer inter- — Wrong checksum — face checksum when receiving a error. message through customer interface. 26007 6597 Address error — Cusomter uses — customer inter- wrong address to face. control the genera- tor.
Page 355 Dec. Hex. Type Message texts Effect Cause Measure 26130 6612 Reading from Can't read cus- Hardware is defect — customer serial tomer interface. or connection to interface RS232 interface got lost. is time out. 26131 6613 Writing to cus- Can't write to Hardware is defect —...
Page 356 Dec. Hex. Type Message texts Effect Cause Measure 26309 66C5 DeviceNet I/O — I/O message could — send error. not be sent. 26310 66C6 DeviceNet CAN — There were to many — bus off event. transmission errors on the bus. 26311 66C7 DeviceNet CAN...
Page 357 Dec. Hex. Type Message texts Effect Cause Measure 29001 7149 Old EtherCAT — Current Software is — Module Firmware expecting a higher is detected. EtherCAT Module Firmware Version. 29002 714A Total number of — — — operation hours has been reset to 0.
Page 358 Dec. Hex. Type Message texts Effect Cause Measure 29016 7158 HVPS 2: Temper- — Control Module: — ature of ambient plausibility check of air may be faulty. temperature failed 29017 7159 HVPS 2: Temper- — Control Module: — ature of cooling plausibility check of plate 1 may be temperature failed...
Page 359 Dec. Hex. Type Message texts Effect Cause Measure 29030 7166 CANopen heart CANopen does Regulation unit soft- — beat was missing not work properly. ware stopped work- (Debug mode). ing or CANopen was not initialized prop- erly. 29031 7167 Arc rate exceeds Plasma not sta- Process dependant Check process para-...
Page 360 Dec. Hex. Type Message texts Effect Cause Measure 29050 717A SystemPORT — Check SystemPORT — matchbox warn- matchbox state. ing. 29051 717B SystemPORT — Check SystemPORT — matchbox inter- matchbox state. lock is open. 32765 7FFD Unknown error — — —...

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