Troubleshooting - PI M-687.UN User Manual

8 Troubleshooting

8 Troubleshooting
Problem
Noise during operation Uncontrolled
Inaccurate positioning
Reaching the target
position takes too long
Increased wear
Reduced accuracy
Axis does not reach the
commanded position
If the problem that occurred with your system is not listed in the table above or cannot be
solved as described, contact our customer service department (p. 35).
M-687.UN XY Stage
Possible causes
oscillation of the
M-687.UN
Settling window
around the target
position is too large
Settling window
around the target
position is too small
Warped base body
The values of the travel
range parameters in
the controller do not
match with the
connected axis of the
XY stage
MP100E
Solution
 Immediately switch off the servo control
system of the affected axes.
 Check the settings of the servo control
parameters.
 Reduce the settling window by changing
the parameter values for the settling
window limits on the controller. Refer to
the controller manual (p. 3) for details.
 Enlarge the settling window by changing
the parameter values for the settling
window limits on the controller. Refer to
the controller manual (p. 3) for details.
 Mount the M-687.UN onto a flat surface.
The recommended flatness of the
surface is 5 µm.
 For applications with large temperature
fluctuations:
Only mount the M-687.UN on surfaces
that have the same or similar thermal
expansion properties as the M-687.UN
(e.g., surfaces made of aluminum).
 Select the suitable positioner type in the
PC software (separate parameter sets for
the X and Y axes of the XY stage).
If the M-687.UN is part of a preconfigured
system:
 Connect the M-687.UN and the
controller using the cables so that the
assignment specified by the parameter
sets stored in the controller is adhered
to.
Version: 1.3.0 33