PI M-687.UN User Manual

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MP100E

M-687.UN XY Stage

User Manual

Version: 1.3.0

Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany

Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, www.pi.ws

Date: 17.03.2022

This document describes the following product:

M-687.UN



XY stage for inverted Nikon microscopes,

135 mm × 85 mm, self-locking, PILine® linear

drives, 0.1 µm resolution

Table of Contents

Summary of Contents for PI M-687.UN

Page 1 XY stage for inverted Nikon microscopes, 135 mm × 85 mm, self-locking, PILine® linear drives, 0.1 µm resolution Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, www.pi.ws...
Page 2 The patents held by PI are found in our patent list: https://www.physikinstrumente.com/en/about-pi/patents © 2022 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs and drawings in this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains all the rights.
Page 3: Table Of Contents
Mounting a Positioner on the M-687.UN ..............19 Inserting and Removing the M-687.AP1 Universal Holder ........21 Connecting the M-687.UN to the Controller ............22 Starting and Operating General Notes on Starting and Operating ..............25 Starting and Operating the M-687.UN with the C-867 Controller ......28...
Page 4 Maintenance General Notes on Maintenance ................31 Doing a Maintenance Run ..................31 Cleaning the M-687.UN .................... 32 Troubleshooting Customer Service Technical Data 10.1 Specifications ......................37 10.1.1 Data Table ....................37 10.1.2 Limit Switch Specifications ................38 10.1.3 Reference Switch Specifications ..............38 10.1.4 Maximum Ratings ..................
Page 5: About This Document
Downloading Manuals ........................3 Objective and Target Audience of this User Manual This user manual contains the information required for using the M-687.UN as intended. It assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures.
Page 6: Definition Of Terms
(e. g., C-867 controller) Amplifier Electronics without sensor evaluation for open-loop operation of positioners Maximum load capacity in the vertical direction when the M-687.UN Load capacity is mounted horizontally. The contact point of the load is at the center of the motion platform.
Page 7: Other Applicable Documents
1 About this Document Other Applicable Documents The devices and software tools from PI mentioned in this documentation are described in separate manuals. Description Document C-867.2U2 PILine® controller MS231 User Manual PIMikroMove SM148E Software Manual PILine® positioners MP121EK Short Instructions...
Page 9: Safety
Organizational Measures ....................... 7 Intended Use The M-687.UN is a laboratory device as defined by DIN EN 61010-1. It is intended for indoor use and use in an environment that is free of dirt, oil, and lubricants. According to its design, the M-687.UN is intended for positioning, adjusting, and moving loads in two axes at different velocities in interval mode.
Page 10 If a protective earth conductor is not or not properly connected, dangerous touch voltages can occur on the M-687.UN in the case of malfunction or failure of the system. If there are touch voltages, touching the M-687.UN can result in minor injuries from electric shock.
Page 11: Organizational Measures
 Add all information from the manufacturer to the user manual, for example supplements or technical notes.  If you give the M-687.UN to a third party, include this user manual as well as other relevant information provided by the manufacturer.
Page 13: Product Description
Scope of Delivery ......................... 10 Suitable Controllers ........................11 Accessories ........................... 11 Technical Features ........................12 Product View Figure 1: M-687.UN product view Lower platform (X axis) Upper platform (Y axis) Base body 000029788 adapter plate (110 mm × 160 mm) Protective earth connection...
Page 14: Product Labeling
 2 lock washers 2 flat washers  000031657 Screw set for mounting the M-687.UN, consisting of: 5 socket head screws, M5×35 ISO 4762  1 hex key  Adapter plate, 110 mm × 160 mm, with spring and M2x5...
Page 15: Suitable Controllers
3 Product Description Also included in the scope of delivery when the M-687.UN is part of the U-780.DNS system: Product number Quantity Description C-867.2U2 Piezo motor controller for PILine® systems, 2 axes, USB, RS-232, TCP/IP, SPI, I/O, analog or digital joystick, networkable via daisy...
Page 16: Technical Features
Technical Features 3.6.1 Linear Encoder The M-687.UN is equipped with one optical linear encoder per axis. For the encoder resolution, refer to the table in the "Specifications" section (p. 37). Optical linear encoders measure the actual position directly (direct metrology). Therefore, errors occurring in the drivetrain such as nonlinearity, backlash or elastic deformation, cannot influence the measurement of the position.
Page 17: Unpacking
NOTICE Platform slips and hits the hard stop! When the M-687.UN is aligned vertically, the platforms can slip and hit the hard stop. The impact of a platform on the hard stop could cause damage to the M-687.UN.  Make sure that the M-687.UN is always horizontal.
Page 19: Installation
 Do not open the M-687.UN.  Do not touch the contacts in the connection sockets of the M-687.UN.  If an adapter or connecting cable is connected to the M-687.UN, do not touch the contacts in the connector.  Do not pull the connectors out of the electronics during operation. If possible, use screws to secure the connectors against being pulled out of the electronics.
Page 20: Connecting The M-687.Un To The Protective Earth Conductor
NOTICE Heating up of the M-687.UN during operation! The heat produced during operation of the M-687.UN can affect your application.  Install the M-687.UN so that your application is not affected by the dissipating heat. NOTICE Unsuitable cables! Unsuitable cables can cause damage to the controller and affect the performance of the M-687.UN.
Page 21 5 Installation There is an M4 hole in the M-687.UN for connecting the protective earth. This hole is marked with the symbol for the protective earth conductor . The position of the hole is shown in the product view (p. 9).
Page 22: Mounting The M-687.Un Onto A Surface
Incorrect mounting can warp the base body. A warped base body will increase wear and reduce accuracy.  Mount the M-687.UN onto a flat surface. The recommended flatness of the surface is 5 µm.  For applications with large temperature fluctuations: Only fix the M-687.UN to surfaces that have the same or similar thermal expansion...
Page 23: Mounting A Positioner On The M-687.Un
 Mounting the M-687.UN onto a surface 1. Move the motion platforms of the M-687.UN by hand until all countersunk holes in the base body are accessible (refer to illustration above). 2. Fix the M-687.UN with the four M5 screws supplied.
Page 24 Fixing a positioner to the M-687.UN (with adapter plate) Figure 4: M-687.UN: Threaded holes in the upper platform (hatched arrows = 8 × M4; black arrows = 4 × M3; gray arrows = 4 × M6) 1. Select the mounting position so that the threaded holes in the upper platform (refer to figure above) can be used for fixing the positioner.
Page 25: Inserting And Removing The M-687.Ap1 Universal Holder
Fixing a positioner to the M-687.UN (without adapter plate) Figure 5: Screws for affixing the adapter plate 1. Loosen the three M4 screws that fix the adapter plate to the M-687.UN (refer to figure above). 2. Remove the adapter plate together with the loosened screws.
Page 26: Connecting The M-687.Un To The Controller
 You have read and understood the user manual for the controller (p. 3).  The controller is switched off.  You have connected the M-687.UN to the protective earth conductor (p. 16). Tools and accessories Two U-600.AMD adapter cables (p. 10) ...
Page 27 Connecting the M-687.UN to the controller 1. Connect the MDR connector of the first cable to the Axis X socket of the M-687.UN. 2. Connect the D-sub connector (m) on the other end of the cable to the Axis 1 socket of the controller.
Page 29: Starting And Operating
If a protective earth conductor is not or not properly connected, dangerous touch voltages can occur on the M-687.UN in the case of malfunction or failure of the system. If there are touch voltages, touching the M-687.UN can result in minor injuries from electric shock.
Page 30 Short-circuiting due to condensation! Condensation can lead to short-circuiting and failure of the M-687.UN.  Wait for a sufficient period of time to allow the M-687.UN to reach room temperature in the following cases: − After unpacking or before starting for the first time −...
Page 31  Stop motion immediately if the limit switches malfunction. INFORMATION Although the M-687.UN operates quietly in theory, noise levels of up to 50 dB (A) are possible during operation. The ultrasonic drive of the M-687.UN can also generate higher noise levels at frequencies between 100 and 500 kHz.
Page 32: Starting And Operating The M-687.Un With The C-867 Controller
PIMikroMove manual). INFORMATION The X and Y axes of the M-687.UN XY stage have different travel ranges. Therefore, for each axis a separate positioner type with specially adapted parameters is available in the positioner database from which the operating parameters can be loaded.
Page 33 (refer to the controller manual). Starting and operating the M-687.UN with the C-867 controller  Operate one axis of the M-687.UN (refer to controller manual), and repeat the sequence for the second axis. Starting and operating comprises the following steps: Selecting the positioner type −...
Page 35: Maintenance
500 hours of operation, or at least after 1 year.  If you move the M-687.UN over a small travel range (<20 % of the entire travel range) in continuous industrial operation, do a maintenance run across the entire travel range every 5000 motion cycles.
Page 36: Cleaning The M-687.Un
7 Maintenance Cleaning the M-687.UN Requirements  You have disconnected the M-687.UN from the controller. Cleaning the M-687.UN  If necessary, clean the M-687.UN surface using a cloth dampened with a mild cleanser or disinfectant. Version: 1.3.0 MP100E M-687.UN XY Stage...
Page 37: Troubleshooting
Refer to the controller manual (p. 3) for details. Increased wear Warped base body  Mount the M-687.UN onto a flat surface. The recommended flatness of the Reduced accuracy surface is 5 µm.  For applications with large temperature fluctuations: Only mount the M-687.UN on surfaces...
Page 39: Customer Service
9 Customer Service Customer Service For inquiries and orders, contact your PI sales engineer or send us an email (service@pi.de).  If you have any questions concerning your system, provide the following information: Product and serial numbers of all products in the system −...
Page 41: Technical Data
Reference switch Optical, 1 µm repeatability Limit switch Hall effect Mechanical properties Load capacity Max. Drive properties PILine® ultrasonic piezo Motor type motor, performance class 2 Connectors Motor / sensor 2 × MDR14 (f) M-687.UN XY Stage MP100E Version: 1.3.0...
Page 42: Limit Switch Specifications
The signal level changes from 0 to +5 V when the reference switch is passed. 10.1.4 Maximum Ratings M-687.UN XY stages are designed for the following operating data: Maximum operating voltage Operating frequency Maximum power...
Page 43: Ambient Conditions And Classifications
Degree of pollution Degree of protection according IP20 to IEC 60529 10.3 Influence of Downtimes on the Static Holding Force Figure 8: Static holding force of the M-687.UN depending on the downtime of the motor M-687.UN XY Stage MP100E Version: 1.3.0...
Page 44: Dimensions
10 Technical Data 10.4 Dimensions Figure 9: M-687.UN XY stage with installed 000029788 adapter plate. Dimensions in mm. Note that a comma is used in the drawings instead of a decimal point. Version: 1.3.0 MP100E M-687.UN XY Stage...
Page 45 10 Technical Data Figure 10: 000029788 adapter plate for M-687.UN. Dimensions in mm. Note that a comma is used in the drawings instead of a decimal point. M-687.UN XY Stage MP100E Version: 1.3.0...
Page 46: Pin Assignment
Input: Piezo 71 VAC (RMS) ENCA+ Output: Encoder channel A, RS-422 ENCA- Output: Encoder channel A (inverted), RS-422 ENCB+ Output: Encoder channel B, RS-422 ENCB- Output: Encoder channel B (inverted), RS-422 REFSWITCH - Output: Reference switch, TTL, negative Version: 1.3.0 MP100E M-687.UN XY Stage...
Page 47: Old Equipment Disposal
Dispose of your old equipment according to international, national, and local rules and regulations. In order to fulfill its responsibility as the product manufacturer, Physik Instrumente (PI) GmbH & Co. KG undertakes environmentally correct disposal of all old PI equipment made available on the market after 13 August 2005 without charge.
Page 49 12 European Declarations of Conformity European Declarations of Conformity For the M-687.UN, declarations of conformity were issued according to the following European statutory requirements: Low Voltage Directive EMC Directive RoHS Directive The standards applied for certifying conformity are listed below.

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Mp100e