Mounting The M-687.Un Onto A Surface - PI M-687.UN User Manual

5 Installation
5.3

Mounting the M-687.UN onto a Surface

NOTICE
Protruding screw heads!
Protruding screw heads can damage the M-687.UN.
 Make sure that the screw heads do not protrude from countersunk holes so that they do
not interfere with the motion.
NOTICE
Warping the base body!
Incorrect mounting can warp the base body. A warped base body will increase wear and
reduce accuracy.
 Mount the M-687.UN onto a flat surface. The recommended flatness of the surface is
5 µm.
 For applications with large temperature fluctuations:
Only fix the M-687.UN to surfaces that have the same or similar thermal expansion
properties as the M-687.UN (e.g., surfaces made of aluminum).
INFORMATION
The M-687.UN's directions of motion are indicated in the product view (p. 9).
Figure 3:
18 Version: 1.3.0
M-687.UN: Mounting holes in the base body
The exact position of the holes is specified in the dimensional drawing in the "Dimensions"
(p. 40) section.
MP100E M-687.UN XY Stage