Table Of Contents - SMC Networks PF2M7 Series Manual

Flow Switch Flow Rate Variations
Series
PFMV
Series
Availability of the
digital flow monitor PFG300
PF2M7
PFMB
PFMC
PF2A
PF3A7 H
3
Applicable Detection
fluid
method
Dry air Thermal type
N (MEMS)
2
Smallest
Applicable Detection
settable
fluid method
increment
0.01
L/min
Dry air
Thermal
N
2
- type
Ar
0.1
(MEMS)
CO
2
L/min
Thermal
type
(MEMS)
1
Dry air
N L/min
2
Bypass
PFG300
flow
type
Thermal
type
(MEMS)
Dry air 1
N L/min
2
PFG300
Bypass
flow
type
0.1
L/min
0.5
L/min
Thermal
1
Air
- type
L/min
N
2
(Thermistor)
2
L/min
5
L/min
Thermal
2
type
L/min
(Platinum
Air 5
sensor)
N
L/min
2
PFG300
Bypass
10
flow
L/min
type
Rated flow range [L/min]
−3 −2 −1
−0.5
−1
−3
Rated flow range [L/min]
0.1 0.3 0.5 1 2 5 10 20 25 50 100 150 200 300
0.1 0.1 0.1
10 1 1
0.3 2 2 25
0.5 5 5 5 50
1 100 1 1
2
5
10
20
5
10
20
1 1 1 10
5 5 5 50
10 1 1 100
20
50
30
60
120
−0.5 0 0.5 1
0 0 0 0 0 0 0.5
0 0 1 1 1
0 0
5 0.5 0 0
1 1
500 600 1000 2000
2 2 200
500 5 5
1 1000
2 2 2000
500 5 5
1 1000
2 2 2000
200 2 2
500 5 5
2 3
3 3 3 3 3
3
3000 6000 12000
3 3 3000
6 6 6000
12000 120 12000 00 00 00