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Cryogenic Water Pump
CDPL Series
Instruction Manual
Export Control Policy
Vacuum pumps that pump nitrogen gas at pumping speed of 15000L/S or
more fall under row 2(35) of appended table 1 of Japan's Export Trade
Control Order, which is based on international export control regimes.
Also, when applying a refrigerator system to a cryocooler for optical
sensors, the cryocooler falls under row 10(2) of appended table 1 of Japan's
Export Trade Control O rder as well.
Customers must follow all related rules and regulations such as Foreign
Exchange and Foreign Trade Act and take appropriate procedures when
exporting or re-exporting those products.
D/N.MBCDPL0E, 2017MY01
ULVAC CRYOGENICS INCORPORATED
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Table of Contents
Related Manuals for Ulvac CDPL Series
Summary of Contents for Ulvac CDPL Series
- Page 1 Cryogenic Water Pump CDPL Series Instruction Manual Export Control Policy Vacuum pumps that pump nitrogen gas at pumping speed of 15000L/S or more fall under row 2(35) of appended table 1 of Japan’s Export Trade Control Order, which is based on international export control regimes.
- Page 3 As a general rule, diagnosis of failure should be done on site by customer. However, ULVAC CRYOGENICS or our service network can perform this service for an agreed fee upon the customer’s request. There will be no charge if the cause...
- Page 4 ULVAC CRYOGENICS. (2) Damage during transportation When damage by delivery/transportation is admitted, the product will be repaired free of charge within the range of the guarantee expressed in the sales contract.
- Page 5 2.3 Repair period after production is discontinued ULVAC CRYOGENICS shall accept product repairs for seven years after production of the product is discontinued. 3. Service Form After the products are delivered, please fill out the following information in the blanks. If you have any questions or technical problems please feel free to contact the nearest Customer Support Center or headquarters.
- Page 6 (3) If you have any questions or comments on this document, please do not hesitate to contact us. The phone numbers of local customer support centers are listed at the end of this manual. ULVAC CRYOGENICS INCORPORATED...
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Page 7: Safety Considerations
There is a danger of fire or burn injury. Explosive gas used. There is a risk of fire or explosion. Hazardous voltage . Electric shock may cause severe injury or loss of life. Hot heating part present. There is a risk of burn injury. MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED... - Page 8 This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...
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Page 9: Table Of Contents
Shutdown Procedures ....................4-3 4-6. How to store CDPL ....................4-4 4-7. Handling of Hazardous Materials ................4-4 WARM-UP ........................5-1 5-1. Overview ........................5-1 5-2. Warm-up Time ......................5-1 5-3. Warm-up Procedures ....................5-2 5-4. Assisted Warm-up ...................... 5-2 ULVAC CRYOGENICS INCORPORATED... - Page 10 Decontamination Procedure (1) ··················································· 6-11 Figure 6-6 Decontamination Procedure (2) ··················································· 6-12 Figure 6-7 Connecting Flexible Hoses ·························································· 6-13 Figure D-1 Principle of Refrigeration ···························································· D-1 Figure D-2 Principle of G-M Cycle Operation ················································· D-4 Figure D-3 Single-stage Refrigerator ····························································· D-4 ULVAC CRYOGENICS INCORPORATED...
- Page 11 Contents of Cartons for CDPL Assembly ········································· 2-1 Table 4-1 CDPL Operating Parameter (Room Temperature：20°C) ··················· 4-3 Table 6-1 Maintenance Parts and Intervals ·················································· 6-2 Table A-1 Troubleshooting Procedures ························································· A-2 Table A-2 Operating Log ··········································································· A-5 ULVAC CRYOGENICS INCORPORATED...
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Page 13: Safety Instructions
The refrigerator contains helium gas of high-pressure and high purity. When disassembling your refrigerator, please contact our customer support section, your local ULVAC TECHNO, Ltd., CS center, or ULVAC Kyusyu Corp. for technical assistance. Take the following special precautions for maintenance or disassembly of the refrigerator. - Page 14 Self-sealing coupling RM type Refrigerator Cylinder bolt Self-sealing coupling ①：Bolts ②：Plugs Presser relief valve Self-sealing coupling R type Refrigerator Cylinder bolt Self-sealing coupling ①：Bolts ②：Plugs Presser relief valve Figure 1 Bolt Locations ULVAC CRYOGENICS INCORPORATED...
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Page 15: Power Source
DO NOT place electrical devices under the CDPL to avoid short-circuit or break down of the devices. It is recommended to place a saucer to catch water drops. ULVAC CRYOGENICS INCORPORATED... - Page 16 Temp.(ºC) -0.401 -0.321 -0.241 -0.161 -0.080 0.000 0.081 0.162 0.243 0.324 0.405 0.487 0.568 0.650 0.732 0.814 0.896 0.978 1.060 1.143 1.225 1.308 1.390 1.473 1.556 1.638 1.721 1.804 1.887 1.970 2.053 Reference ： JIS C 1602-1995 ULVAC CRYOGENICS INCORPORATED...
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Page 17: Disposal Consideration
We will offer you Material Safety Data Sheet (called MSDS) of our products upon your request. If you have any questions, please contact our Service Engineering Division or the nearest customer support center. MZIW001E,2010.01 ULVAC CRYOGENICS INCORPORATED IW-1... - Page 18 This page intentionally left blank. IW-2 ULVAC CRYOGENICS INCORPORATED...
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Page 19: General Descriptions
CDPL □ □ □ □ □ □ Length of shorter side of the cryopanel e.g.) 300mm: 30 Length of longer side of the panel e.g.) 500mm: 50 Shape of the panel F：Flat type L：Folding type Inner Heater H：With Blank：Without ULVAC CRYOGENICS INCORPORATED... -
Page 20: Standard System
Vacuum chamber side Cold panel Open air K thermocouple Refrigerator unit Super trap temperature controller Power Refrigerator cables AC100V×1φ Compressor AC200V×3φ unit Flexible hose (SUPPLY) Cooling water lines Inlet Flexible hose (RETURN) Outlet Figure 1-1 Standard CDPL System ULVAC CRYOGENICS INCORPORATED... - Page 21 K thermocouple Refrigerator unit 1st stage cylinder 1st stage Motor Cold head power connector Helium supply connector Helium return connector For the external drawing of your CDPL systems, please refer to the attached “Specifications”. Figure 1-2 Part Names ULVAC CRYOGENICS INCORPORATED...
- Page 22 CDPL Description This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...
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Page 23: Inspection
◇When you purchase a CDPL assembly alone, normally three cartons will be delivered. Table 2-2 Carton Contents for CDPL Assembly Content Quantity Carton CDPL, CDPL accessories (screws, etc) (*1) Refrigerator Unit Instruction manual Specifications (External Drawing) booklet (*1)The attachments vary depending on the model. ULVAC CRYOGENICS INCORPORATED... -
Page 24: Inspection
2-2. Inspection Take out the CDPL and other components from the shipping carton and check the following. 1. Any damages or dents to the exterior, or accessories. 2. Any damages to the K (CA) thermocouples or inner heater. ULVAC CRYOGENICS INCORPORATED... -
Page 25: Installation
4. Attach indium sheets to the crimping terminals at the tip of the K thermocouples. Refer to Figure 3-2 and the CDPL Specifications (External Drawing) and mount the K thermocouples as instructed. 5. Check that all bolts are firmly tightened to the specified torque and conduct leak test. ULVAC CRYOGENICS INCORPORATED... - Page 26 Main evacuation pump USABLE Diffusion pump Turbo molecular pump Cryopump USABLE Heat source Installation onto the pipe of main evacuation UNUSABLE Installation onto the pipe of main evacuation Figure 3-1 Installation to the Vacuum System with Heat Source ULVAC CRYOGENICS INCORPORATED...
- Page 27 Hexagon nut (M4) Bolt with hexagon socket(M4) Bolt with hexagon socket(M4) Spring washer(M4) Spring washer (M4) Flat washer(M4) Flat washer (M4) Crimping terminal (M4) Crimping terminal（M4） Indium sheet Indium sheet Cold panel Cold panel Figure 3-2 K thermocouple Installation ULVAC CRYOGENICS INCORPORATED...
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Page 28: Figure 3-3 Installation & Maintenance Space
( ※ 2) Low vibration types require larger maintenance space. Refer to the CDPL Specifications (External Drawing). (※3) It is 350mm when you use the optional bendable flexible hoses. Refer to Appendix B for details. Figure 3-3 Installation & Maintenance Space ULVAC CRYOGENICS INCORPORATED... -
Page 29: Connecting Electrical Cables
1. Connect the CDPL and the compressor u 1. Connect the CDPL and the compressor u nit with the r nit with the r efrigerator power cable. efrigerator power cable. 2. Connect the ground wire. 2. Connect the ground wire. ULVAC CRYOGENICS INCORPORATED... - Page 30 ②Tighten the self-sealing coupling using two wrenches until the fittings are firmly sealed and the nut will not rotate any more. When using torque wrench, the recommended torque value is 20N･m. Figure 3-4 Connecting Flexible Hoses ULVAC CRYOGENICS INCORPORATED...
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Page 31: Disconnecting Flexible Hoses
Loosen with a spanner. spanner. Loosen the self-sealing coupling using two spanners and then by hand. Loosen the self-sealing coupling using two spanners and then by hand. Figure 3-5 Figure 3-5 Disconnecting Flexible Hose Disconnecting Flexible Hose ULVAC CRYOGENICS INCORPORATED... - Page 32 Installation This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...
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Page 33: Operation
1. Turn ON the roughing pump. 2. Open the roughing valves and then rough pump the vacuum chamber which the CDPL is attached to. Rough pump the vacuum chamber to the pressure that maintains the vacuum insulation. (10 ULVAC CRYOGENICS INCORPORATED... -
Page 34: Startup And Cool-Down
(such as electrical circuit) under the CDPL. †For Your †For Your Information† Information† In case the radiation heat load is high, the cool-down time will be longer. In case the radiation heat load is high, the cool-down time will be longer. ULVAC CRYOGENICS INCORPORATED... -
Page 35: Normal Operation
CDPL. It is recommended to place a saucer under the CDPL to catch water droplet. ・ When using a heater to defrost the CDPL, be sure to control the heater so that the CDPL temperature will not rise above 70°C. ULVAC CRYOGENICS INCORPORATED... -
Page 36: How To Store Cdpl
Please contact us before handling these hazardous gases. ◆ When transporting CDPL that has pumped hazardous materials, take appropriate measures according to the laws or regulations of relevant countries or regions. ULVAC CRYOGENICS INCORPORATED... -
Page 37: Warm-Up
5-2. Warm-up Time Perform warm-up when one of the operating parameters becomes the following state: ・When the CDPL does not absorb heat to meet the specification. ・At CDPL maintenance. ・At the vacuum equipment/system maintenance. ULVAC CRYOGENICS INCORPORATED... -
Page 38: Warm-Up Procedures
In addition to the methods above, using an optional band heater or inner heater enables warm up time even shorter. ULVAC CRYOGENICS INC. offers several types of standard band heaters such as RBH type and silicon rubber type. The RBH band heater self controls the temperature around 70 to 80°C. - Page 39 WARNING The heater surface becomes extremely hot. Be sure to take necessary measures to prevent fire and burn injury and also display warnings to call attention. ULVAC CRYOGENICS INCORPORATED...
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Page 41: Maintenance
Item code Helium charging adapter kit A700B5101000 (Regulator, Charging hose 2.4M, Charging adopter) <Items independently available> Regulator (for helium gas) A700A5101700 Charging hose 2.4M A700A5101800 Charging adapter A700B5101100 Helium gas (with purity of 99.999% or above) － － ULVAC CRYOGENICS INCORPORATED... - Page 42 Other parts At fault Compressor Unit Adsorber Replacement Adsorber Refer to the compressor unit documentation. (*1) This is only applicable to a CDPL system with a heater. (*2) Depending on the specification, CDPL assembly replacement may be required. ULVAC CRYOGENICS INCORPORATED...
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Page 43: Cdpl Maintenance
Do not pull the sheathed wire of thermocouple. It may break when stress is added at the ・ base. If the thermocouple is mounted too loose, it cannot measure accurate tempera ture and ・ may cause overcooling or overheating, resulting in damaging the refrigerator or deterioration of pumping performance. ULVAC CRYOGENICS INCORPORATED... - Page 44 If insulation property is deteriorated, please replace the heater. Inspection should be conducted before turning on electricity to check that the insulation resistance between the outside of atmospheric side sleeve and the lead wire is 10MΩ or more (DC 500V Megger). ULVAC CRYOGENICS INCORPORATED...
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Page 45: Charging Helium Gas
If it occurs, contact our Service Engineering by air or moisture may occur in the system. If it occurs, contact our Service Engineering Division or customer support center. Division or customer support center. ULVAC CRYOGENICS INCORPORATED... - Page 46 (4) Tighten the flair nut at the end of charging hose and close the charge valve. Helium gas charge in the line between the regulator and the charge valve on the compressor has been completed. ULVAC CRYOGENICS INCORPORATED...
- Page 47 2.5MPaG. 6. Close the charge valve after charging helium gas. 7. Close the regulator and remove the charging hose from the charge inlet. The helium gas charging for the compressor has been completed with this. ULVAC CRYOGENICS INCORPORATED...
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Page 48: Helium Circuit Decontamination
(called Step-out*) may occur. Follow the steps below for decontamination. *Step-out: means that a refrigerator motor has an irregular or intermittent movement. 1. Turn ON the CDPL system (refrigerator unit) and keep it running for three to four Ωhours. a. Start the compressor unit. ULVAC CRYOGENICS INCORPORATED... -
Page 49: Figure 6-3 Disconnecting Flexible Hose
(V1) of the charging adaptor. NOTE: As helium gas is cooled down in the refrigerator unit, the density of the gas increases. After shutdown of the refrigerator, the helium gas in the refrigerator returns to room ULVAC CRYOGENICS INCORPORATED... - Page 50 7. Connect the helium bottle and the regulator. Replace the air remained between the helium bottle valve and the regulator with helium gas as instructed in Section 6.3 Charging Helium Gas. Use helium gas with purity of 99.999％ or more. 6-10 ULVAC CRYOGENICS INCORPORATED...
- Page 51 After the pressure is lowered below the atmospheric pressure, fully open the valve (V3). The maximum allowable pressure for ULVAC’s compact oil-sealed rotary pump and dry pump is 0.01MPaG. Monitor the pressure of the roughing pump head with an appropriate pressure gauge.
- Page 52 Keep the refrigerator running and repeat the following operation 25 times slowly. 1) Open the valve (V2) and charge helium gas until the pressure gauge shows 1.5MPaG then close the valve (V2). 2) Open the valve (V1) and depressurize to 0.4MPaG then close the valve (V1). 6-12 ULVAC CRYOGENICS INCORPORATED...
- Page 53 If not, charge helium gas through the charging valve of the compressor unit, or adjust the pressure by discharging helium gas. 13. Restart the CDPL (refrigerator unit). Refrigerator Cable Input Power Cable CDPL system Flexible Hoses Cooling Water Figure 6-7 Connecting Flexible Hoses ULVAC CRYOGENICS INCORPORATED 6-13...
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Page 55: Troubleshooting
(Although the temperature rise varies according to the usage, it generally occurs slowly in months or years.) Refer to Table A-1 for detailed troubleshooting procedures. Please contact us or your local customer support centers when it is difficult to specify the cause of the trouble. ULVAC CRYOGENICS INCORPORATED... - Page 56 Charge helium gas. Ⅲ． CDPL does not cool down to the lowered. set temperature. 2) Flexible hoses between Check that flexible hoses are the refrigerator unit and connected to the refrigerator unit. the compressor unit are not connected properly. ULVAC CRYOGENICS INCORPORATED...
- Page 57 2. The CDPL is mounted tighten all the screws firmly. Check the indium sheet and loosely, replace it if necessary. 8) Refrigerator failure. Contact us. 9) Compressor failure. Refer to the instruction manual of the compressor unit. ULVAC CRYOGENICS INCORPORATED...
- Page 58 2) Keep the atmospheric side (Applicable to CDPL with a sleeve of the heater dry. heater) 2) Disconnection 1) Measure insulation resistance regularly and replace it when deteriorated. 2) Check regularly that the mounting bolt and/or screw are tightened properly ULVAC CRYOGENICS INCORPORATED...
- Page 59 Table A-2 Operating Log CDPL S/N Date: CDPL Measurer OPERATING COMPRESSOR S/N Room temp. ℃ REFRIGERATOR UNIT S/N Power φ Measuring condition Compressor unit CDPL Remarks (*) Set a meter on each compressor unit to measure cooling water flow rate. ULVAC CRYOGENICS INCORPORATED...
- Page 60 Troubleshooting This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...
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Page 61: Flexible Hose
CDPL Series Instruction Manual Appendix B FLEXIBLE HOSE ULVAC CRYOGENICS INC. offers two types of flexible hoses; one is a standard flexible hose which is not bendable and the other is bendable. 1 Specifications 1.1 Specifications of standard flexible hose (non-bendable) ：... - Page 62 ・ Cover bendable flexible hoses with protective materials such as cableveyors. Stroke Max 100 ストローク 最大100 Cableveyor ケーブルベア ・ Bendable flexible hoses make larger sound than non-bendable ones when the cryopumps are in operation. This is the normal state. ULVAC CRYOGENICS INCORPORATED...
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Page 63: Conversion Of Thermometer Readings
CDPL series Instruction Manual Appendix C CONVERSION OF THERMOMETER READINGS １． K(CA) Thermocouple Electromotive Force Temperature E.M.F. (mV) (Ambient Temperature：20ºC) ULVAC CRYOGENICS INCORPORATED... - Page 64 Conversion of Thermometer Readings This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...
- Page 65 CDPL series Instruction Manual Appendix D PRINCIPLE OF REFRIGERATOR OPERATION Helium gas is used as heat-medium gas of a refrigeration cycle in our refrigerator systems, because it does not liquefy even at 10K. First, helium gas is compressed into high pressure, cooled by water-cooling or air cooling to the room temperature in the compressor unit, and flows into the regenerator when the valve A opens.
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Page 66: Figure
In addition, the load to the seal inside is light, it is highly efficient and reliable refrigeration cycle. The refrigeration cycle with the mechanical driving system adopted by ULVAC CRYOGENICS INC is explained as follows. - Page 67 CDPL series Instruction Manual The ideal refrigeration ability “Q ” is as follows when indicating the period of one ideal cycle as “t” minutes: W / t ideal = n the actual refrigerators, the structure with two stages is adopted in order to gain cryogenic temperature of 15K or lower as shown in Figure D-3.
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Page 68: Figure D-2 Principle Of G-M Cycle Operation
Low pressure Low pressure High pressure 1 cycle P-V diagram W=∮PdV －P Volume of Expansion Chamber Figure D-2 Principle of G-M Cycle Operation 1st Displacer 1st Seal 1st Regenerator 1st Expansion Chamber Figure D-3 Single-stage LOAD Refrigerator ULVAC CRYOGENICS INCORPORATED... -
Page 69: Service Network
ULVAC CRYOGENICS INC. www.ulvac-cryo.com 1222-1 Yabata, Chigasaki, Kanagawa 253-0085, Japan <Sales> Tel: +81-467-85-8884 <Service Engineering Division> Tel: +81-467-85-9366 Fax: +81-467-83-4838 ULVAC CRYOGENICS KOREA INC. www.ulvac-cryo.co.kr 107, Hyeongoksandan-ro, Cheongbuk-Myeon, Pyeongtaek-si, Gyeonggi-Do, Korea, 17812 Tel: +82-31-683-2926 Fax: +82-31-683-2956 ULVAC CRYOGENICS (NINGBO) INC. - Page 70 This page intentionally left blank. CS-2 ULVAC CRYOGENICS INCORPORATED...
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Page 71: Revision History
CDPL Series Instruction Manual Revision History Date Revision No. Contents 2014-09-02 2014.09 First edition 2017-05-17 2017MY01 “Safety Instructions” has been modified 6. MAINTENANCE has been revised. “Appendix D” Description of refrigerator unit has been modified. ULVAC CRYOGENICS INCORPORATED... - Page 72 Revision This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...
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