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Instruction Manual
EXT250M Turbomolecular Pump
Description
EXT250M Turbomolecular Pump,
with EXC300M Controller and
pump-to-controller cable
Manor Royal, Crawley, West Sussex, RH10 9LW, UK
Telephone: +44 (0) 1293 528844 Fax: +44 (0) 1293 533453
http://www.bocedwards.com
Flange size
Cable length
DN100ISO-K
1 m
DN100ISO-K
3 m
DN100ISO-K
5 m
DN100CF
1 m
DN100CF
3 m
DN100CF
5 m
B735-21-880
Issue C
Item Number
B735-21-010
B735-21-030
B735-21-050
B735-22-010
B735-22-030
B735-22-050
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Summary of Contents for BOC Edwards EXT250M/ISO100
- Page 1 B735-21-880 Issue C Instruction Manual EXT250M Turbomolecular Pump Description Flange size Cable length Item Number EXT250M Turbomolecular Pump, with EXC300M Controller and pump-to-controller cable DN100ISO-K B735-21-010 DN100ISO-K B735-21-030 DN100ISO-K B735-21-050 DN100CF B735-22-010 DN100CF B735-22-030 DN100CF B735-22-050 Manor Royal, Crawley, West Sussex, RH10 9LW, UK Telephone: +44 (0) 1293 528844 Fax: +44 (0) 1293 533453 http://www.bocedwards.com...
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Page 3: Table Of Contents
CONTENTS Section Title Page INTRODUCTION Scope and definitions General description Vent options and vent control Safety bearings TECHNICAL DATA General Pumping media 2.2.1 EXT250M without gas purge 2.2.2 EXT250M with gas purge Vent gas specification and vent control data Purge gas specification Cooling-water INSTALLATION Unpack and inspect... - Page 4 7.4.5 ACX air-cooler 7.4.6 Vibration isolators 7.4.7 PRX purge-restrictor 7.4.8 VRX vent-restrictor RETURN OF BOC EDWARDS EQUIPMENT Illustrations Figure Title Page Part-sectional view of EXT250M Turbomolecular Pump Maximum allowed rate of pressure rise during venting: backing pressure plotted against time...
- Page 5 Tables Table Title Page Accidents which affect the life of the safety bearings EXT250M technical data Checklist of items Vent-valve orifice diameter (with atmospheric pressure at the inlet of the vent-valve) Vent-valve orifice diameter (with 2 bar absolute, 2 x 10 Pa pressure at the inlet of the vent-valve) Pump cooling methods for different applications Fault finding...
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Page 7: Introduction
Edwards EXT250M Turbomolecular Pump. You must use the EXT250M as specified in this manual. The EXT250M pump is designed for use with a BOC Edwards EXC300M Controller. Read this manual and the EXC300M Controller instruction manual before you install or operate the equipment. -
Page 8: General Description
General description The EXT250M Turbomolecular Pump is a multi-stage axial-flow turbine, optimised for operation in molecular flow conditions. The internal structure of the EXT250M Turbomolecular Pump is shown in Figure 1. In the following description, item numbers in brackets refer to items shown in Figure 1. -
Page 9: Part-Sectional View Of Ext250M Turbomolecular Pump
16. Sensor coils Inlet-flange Earth (ground) screw Inlet-screen 10. Drive coil (lower) 17. Active electro- Shaft 11. Water connector magnetic bearing Passive magnetic 12. Damper (upper) bearing (radial) 13. Passive magnetic 18. Drive coil (upper) Safety bearing (radial) bearing (radial) 19. -
Page 10: Vent Options And Vent Control
Electrical connection between the EXT250M and the EXC300M Controller is by a 19-way connector and a pump-to-controller cable (supplied). The EXT250M may be cooled by natural convection to the surrounding air, by forced-air cooling (with an optional air-cooler accessory), or by water cooling (by the flow of cooling-water through the water-cooler). -
Page 11: Accidents Which Affect The Life Of The Safety Bearings
Accident Effect Result The pump-to-controller cable is The electrical supply to the The rotor assembly drops disconnected or broken. electromagnetic bearing is lost. immediately onto the safety bearings with considerable noise as the EXT250M decelerates. The ‘Emergency’ LED on the EXC300M will go on. -
Page 12: Technical Data
TECHNICAL DATA General Performance See Table 2 Dimensions See Figure 3 Maximum inlet-flange temperature Maximum magnetic field 5 mT Installation category EN61010-1, category 1 Pollution degree EN61010-1, category 2 Equipment type Fixed Equipment, for indoor use only Inlet screen mesh size Hexagonal holes, 1 mm Pumping media WARNING... -
Page 13: Ext250M With Gas Purge
You can use the pump to pump oxygen and water vapour, subject to the following conditions : · Oxygen The oxygen concentration must be less than 20% by volume. · Water vapour You must ensure that vapour does not condense inside the pump; refer to Section 3.7.1. -
Page 14: Cooling-Water
Cooling-water The following cooling-water specification corresponds to a typical high-quality drinking water specification. Check with your water supply authority if you are in doubt about the quality of your supply. Quality Mechanically clean and optically clear with no deposits or turbidity pH value 6.0 to 8.0 Maximum calcium carbonate concentration... - Page 15 Mass 11 kg (DN100CF)/8.5 kg (DN100ISO-K) Inlet-flange DN100CF/DN100ISO-K Outlet-flange DN25NW Vent-port -inch BSP female Purge-flange NW10 ‡ Pumping speed 240 l s ‡ 250 l s ‡ 190 l s Compression ratio N >1 x 10 2 x 10 1500 Ultimate pressure * <5 x 10 mbar, <5 x 10...
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Page 16: Ext250M Turbomolecular Pump Dimensions (Mm)
Vent-valve Backing-port Electrical supply connector Axial-mounted air-cooler accessory Cooling-water connectors Side-mounted air-cooler accessory Purge-port Allowance for right-angle cable connector Figure 3 - EXT250M Turbomolecular Pump dimensions (mm) EXT250M Turbomolecular Pump... -
Page 17: Installation
INSTALLATION WARNING Safely route all vacuum, vent/purge gas and cooling-water pipelines, and all electrical cables and wires, so that people cannot trip over them. Unpack and inspect The pump is packed to prevent damage in transit. Take care when you unpack the pump to avoid excessive shocks which could damage the bearings and reduce the life of the pump. -
Page 18: Typical Pumping System
Alternative position for Vacuum gauge 13. EXC300M Controller vent-valve Flexible bellows 14. Air-cooler Vacuum system Foreline trap 15. PRX10 purge-restrictor High-vacuum gauge 10. Rotary backing-pump 16. Regulated purge Inlet-screen 11. Mist filter gas supply EXT250M pump 12. Cooling-water connectors 17. Vent-valve Isolation-valve (optional) Figure 4 - Typical pumping system EXT250M Turbomolecular Pump... -
Page 19: Protection Of The Safety Bearings
3.2.2 Protection of the safety bearings You must take precautions to prevent the occurrence of the accidents listed in Table 1. If you do not, the safety bearings may be damaged. We recommend that you take the following precautions to prevent or limit damage to the safety bearings: ·... -
Page 20: Mechanical Fixing
To remove the inlet-screen, carefully extract it from the inlet-flange with a bent wire hook. To replace a screen which has been removed, install it as shown in Figure 5, with the BOC Edwards logo uppermost. Ensure that the dimples on the rim of the screen engage in the groove in the pump flange. -
Page 21: Inlet Connection
, 42 Pa l s ) of purge gas. Use a foreline trap available from BOC Edwards as an accessory (see Section 7) to ensure that the backing line is free from oil vapour. In addition, you can fit a backing pipeline isolation-valve directly to the backing-pump. -
Page 22: Vent-Valve Connection And Control
Vent-valve connection and control 3.4.1 Vent configurations When you design your system and when you install a vent-valve, take note of the information in Sections 1.3 and 2.3. You can vent the EXT250M pump and your vacuum system by any of the following methods: ·... -
Page 23: Vent-Valve Orifice Diameter (With Atmospheric Pressure At The Inlet Of The Vent-Valve)
Notes: If you use a fixed-orifice vent-restrictor, you may find that the time required to vent your system is unacceptably long. You may be able to reduce the vent time if you use an unrestricted vent port without a vent-restrictor and wait until the pump speed has fallen to 50% of full rotational speed before you vent the pump. -
Page 24: Remove And Replace The Vent-Port Vrx Vent-Restrictor
3.4.2 Remove and replace the vent-port VRX vent-restrictor To remove the VRX vent-restrictor, refer to Figure 1 and use the following procedure. Remove the manual vent-valve (6) from the pump. The vent-restrictor (23) has an M3 tapped hole. Fit an M3 screw to the tapped hole, then pull the screw to remove the vent-restrictor from the vent port. -
Page 25: Electrical Installation
Electrical installation Always make the electrical connections to the EXT250M after it has been installed on your vacuum system. The EXC300M Controller provides the electrical supply to the EXT250M through the pump-to-controller cable. Connect and lock the bayonet-connectors at the ends of the cable to the mating connectors on the pump and the EXC300M Controller. -
Page 26: Water-Cooling
Application conditions Cooling method Natural convection, Ambient temperature < 30 C, light pumping duty, forced-air or inlet-flange temperature < 70 water- cooling Ambient temperature < 35 C, continuous light pumping duty with inlet-flange temperature > 70 C / baking Ambient temperature < 40 C, light pumping duty, inlet-flange temperature <... -
Page 27: Forced-Air Cooling
When you remove the EXT pump for maintenance or when you replace the EXT pump, you can unscrew the three M4 cap-head fixing-screws to remove the water-cooler from the pump; you do not have to break the cooling-water circuit. Make sure that there is a layer of thermal contact grease on the water-cooler before you fit it to the pump. -
Page 28: Operation
OPERATION WARNING Do not disconnect the pump-to-controller cable while the EXT250M is operating. If you do, there may be a risk of injury or death by electric shock, and the pump rotor will drop onto its safety bearings which will cause unnecessary wear. WARNING Do not expose any part of your body to vacuum. -
Page 29: Standby
Standby You can press the Standby button on the EXC300M Controller to operate the pump at reduced rotational speed. Select Standby before or after Start-up, for any of the following reasons: · To extend safety bearing life and still maintain adequate vacuum pumping performance (for example, when you leave a system under vacuum over holiday periods) ·... -
Page 30: Safety Interlocks And Control-System
The EXT250M is designed to survive at least five full-speed touchdowns onto the safety bearings under vacuum. We recommend that you return the EXT250M to a BOC Edwards Service Centre after five touchdowns have occurred, or earlier if you have any doubts about the pump’s performance (see Section 5). -
Page 31: Emergency Shutdown
4.5.2 Emergency shutdown To prevent the dissipation of all of the energy stored in the rotating rotor into the safety bearings during touchdown, you must vent the EXT250M. · With a manual system, vent the EXT250M and switch off the backing-pump to shorten the run-down time and reduce the energy dissipated in the safety bearings. -
Page 32: Maintenance
BOC Edwards Service Centre to have the bearings replaced. When you return an EXT250M pump to a BOC Edwards Service Centre, please use the procedure included at the end of this manual. However, the instruction to drain all fluids does not apply. -
Page 33: Clean The Pump
In these circumstances, you should return the pump to a BOC Edwards Service Centre, where the pump will be dismantled and cleaned. Use the procedure given in the forms at the end of this manual to return the pump. -
Page 34: Fault Finding
If all of the above are OK then the EXC300M Controller is faulty. Consult your supplier or your nearest BOC Edwards company. Is the EXC300M Controller If so, check that the correct links Start/Stop LED flashing? - Page 35 (refer to the instruction manual supplied with the EXC300M Controller). If the EXC300M Controller still trips into ‘Fail’, consult your supplier or your nearest BOC Edwards company. The EXC300M Controller Is the pressure too high? If so, reduce the pumping load or trips into ‘Fail’...
- Page 36 Check Action The EXC300M Controller Consult your supplier or your trips into ‘Fail’ and all the nearest BOC Edwards company. speed LEDs are on. The EXC300M Controller Has there been a sudden Remove the gross leak. Allow the trips into ‘Emergency’ at accidental exposure of the EXT250M to cool.
- Page 37 Is the EXT250M making a If so, the rotor is out of balance. constant high-pitched noise ? Consult your supplier or your nearest BOC Edwards company. None of the above Contact your supplier or your nearest BOC Edwards company. Table 7 - Fault finding (continued)
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Page 38: Storage And Disposal
STORAGE AND DISPOSAL Storage Use the following procedure to store the pump. Place protective covers over the inlet, outlet, purge and vent ports. Place the pump in its packing materials. For fastest pump-down when the pump is put back into service, seal the pump inside a plastic bag together with a suitable desiccant. Store the pump in cool, dry conditions until required for use. -
Page 39: Service, Spares And Accessories
Equipment which has been serviced, repaired or rebuilt is returned with a full warranty. Your local Service Centre can also arrange provide BOC Edwards engineers to support on-site maintenance, service or repair of your equipment. -
Page 40: Inlet-Flange Seals
7.3.3 Inlet-flange seals The EXT250M is supplied with a seal to match the inlet-flange. The Item Numbers of replacement seals are listed below. Flange size Inlet seal Item Number DN100ISO-K ISO100 Trapped ‘O’ ring, fluoroelastomer C105-23-001 DN100CF 100CF Copper gasket (pack of 5) C082-00-003 7.3.4 EXC300M Controller... -
Page 41: Fl20K Foreline Trap
7.4.3 FL20K foreline trap The foreline trap (Figure 4, item 9) minimises oil vapour backstreaming from the backing-pump and is recommended where the highest system cleanliness is required. Foreline trap Item Number FL20K A133-05-000 7.4.4 TAV vent-valve and vent-port adaptor A solenoid-operated vent-valve is available for system venting. -
Page 42: Vrx Vent-Restrictor
7.4.8 VRX vent-restrictor Use a VRX fixed orifice vent-restrictor to restrict the flow of vent gas into the EXT pump. You can fit a vent-restrictor directly in the vent-port or the purge-port of the pump, or you can fit a vent-restrictor to the inlet of a TAV vent-valve or PRX purge-restrictor. -
Page 43: Installation Of Ext250M Optional Accessories (And Spares)
Vibration isolator VRX10 vent-restrictor (supplied) 10. Purge-restrictor * Inlet-flange seal (supplied) Water-cooler (supplied) 11. NW10 vent-port adaptor Inlet-screen (supplied) Air-cooler (side-mounting 12. EXT250M pump TAV vent-valve version shown; axial version 13. Bakeout band position (optional accessory) also available) 14. Bakeout band Manual vent-valve (supplied) Purge-port blanking-plug (supplied) * Can be used instead of the VRX10... - Page 44 This page intentionally blank. EXT250M Turbomolecular Pump...
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Page 45: Return Of Boc Edwards Equipment
7. If the equipment is large, strap the equipment and its accessories to a wooden pallet. If the equipment is too small to be strapped to a pallet, pack it in a suitable strong box. 8. Fax or post a copy of the Declaration (HS2) to BOC Edwards. The Declaration must arrive before the equipment. - Page 46 Read the Return of BOC Edwards Equipment - Procedure (HS1) before you complete this Declaration • Contact BOC Edwards to obtain a Return Authorisation Number and to obtain advice if you have any questions • Send this form to BOC Edwards before you return your equipment...
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- Page 48 PLEASE CONTACT ANY OF THESE COMPANIES FOR DETAILS OF OTHER SALES AND SERVICE CENTRES IN YOUR AREA. BOC Edwards is part of BOC Limited. BOC Edwards and the stripe symbol are trade marks of The BOC Group. © BOC Edwards 2003 Produced by Technical Publicity Techpublicity@edwards.boc.com...
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