BOC Edwards EXT200/200/30 Instruction Manual
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BOC Edwards EXT200/200/30 Instruction Manual

Split flow compound turbomolecular pump
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Instruction Manual
EXT200/200/30 Split Flow Compound Turbomolecular Pump
Description
24 Volt EXT200/200/30 Compound Turbomolecular Pump
80 Volt EXT200/200/30 Compound Turbomolecular Pump
24 Volt EXT200/200/30 Cartridge Compound Turbomolecular Pump
80 Volt EXT200/200/30 Cartridge Compound Turbomolecular Pump
B756-00-880 Issue A Original
Item Number
B756-11-991
B756-10-000
B756-15-991
B756-15-000
98/37/EC
89/336/EEC
73/023/EEC

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Summary of Contents for BOC Edwards EXT200/200/30

  • Page 1 EXT200/200/30 Split Flow Compound Turbomolecular Pump Description Item Number 24 Volt EXT200/200/30 Compound Turbomolecular Pump B756-11-991 80 Volt EXT200/200/30 Compound Turbomolecular Pump B756-10-000 24 Volt EXT200/200/30 Cartridge Compound Turbomolecular Pump B756-15-991 80 Volt EXT200/200/30 Cartridge Compound Turbomolecular Pump B756-15-000 98/37/EC 89/336/EEC 73/023/EEC...

  • Page 5: Table Of Contents

    EXT200/200/30 Split Flow Compound Turbomolecular Pump CONTENTS PAGE Section Title Page INTRODUCTION Scope and definitions TECHNICAL DATA General Pumping media Vent gas specification and vent control data Materials exposed to gases pumped INSTALLATION Unpack and inspect Typical installation Connection to the vacuum system 3.3.1...
  • Page 6 RETURN OF BOC EDWARDS EQUIPMENT ILLUSTRATIONS Figure Title Page Dimensions of the EXT200/200/30 split flow pump (units in mm) Opening procedures for packaging EXT200/200/30 split flow system Correct installation of inlet-screen Mounting attitude of the EXT200/200/30 split flow pump Installation of optional accessories...
  • Page 7 EXT200/200/30 Split Flow Compound Turbomolecular Pump TABLES PAGE Table Title Page General data Vent gas and vent control data Technical data List of items supplied Vent-restrictor orifice diameter (with atmospheric pressure at the inlet of the vent-valve) Fault finding Spares...
  • Page 8 EXT200/200/30 Split Flow Compound Turbomolecular Pump PAGE This page intentionally blank. Issue A Jun 03...

  • Page 9: Introduction

    EXT200/200/30 Split Flow Compound Turbomolecular Pump INTRODUCTION Warning - hot surfaces. PAGE Scope and definitions This manual provides installation, operation, The units used throughout this manual conform to maintenance and storage instructions for the BOC the SI international system of units of measurement.
  • Page 10 EXT200/200/30 Split Flow Compound Turbomolecular Pump PAGE This page intentionally blank. Issue A Jun 03...

  • Page 11: Technical Data

    • Krypton for this purpose. • Argon CAUTION • Propane Do not use the EXT200/200/30 Split Flow pump to • Carbon dioxide pump gases containing more than 20% oxygen. If • Helium you do, the lubricant will polymerise and the pump will fail prematurely.

  • Page 12: Vent Gas Specification And Vent Control Data

    EXT200/200/30 Split Flow Compound Turbomolecular Pump If you wish to pump a gas not in the list above, contact your supplier for advice. If you do not PAGE contact your supplier, you may invalidate the warranty on the pump. The pumps are not suitable for pumping aggressive or corrosive gases.
  • Page 13 EXT200/200/30 Split Flow Compound Turbomolecular Pump Parameter EXT200/200/30 Notes Side inlet pumping speed PAGE #‡* 217 l s Pb < 5 mbar (500 Pa) = 5 x 10 mbar (0.5 Pa) #‡* 195 l s Pb < 1 mbar (100 Pa) = 5 x 10 mbar (0.5 Pa)

  • Page 14: Materials Exposed To Gases Pumped

    EXT200/200/30 Split Flow Compound Turbomolecular Pump Parameter EXT200/200/30 Notes Operating attitude Refer to Figure 5 PAGE Nominal rotational speed 60000 r min Standby rotational speed 42000 r min EXC controller only Starting time to 90% speed EXDC160 146 sec EXC100E...
  • Page 15 EXT200/200/30 Split Flow Compound Turbomolecular Pump PAGE 1. 4 slots 8.4 mm wide Figure 1 - Dimensions of the EXT200/200/30 split flow pump (units in mm) Jun 03 Issue A...
  • Page 16 EXT200/200/30 Split Flow Compound Turbomolecular Pump PAGE This page intentionally blank. Issue A Jun 03...

  • Page 17: Installation

    EXT200/200/30 Split Flow Compound Turbomolecular Pump Typical installation INSTALLATION A typical pumping system with an EXT200/200/30 PAGE Unpack and inspect pump is shown in Figure 3*. Take care when you unpack the pump to avoid excessive shocks which could damage the bearings and reduce the life of the pump.

  • Page 18: Mechanical Fixing

    Ensure the EXT200/200/30 Split Flow pump is 1. Inlet-screen securely fixed to the vacuum system via its inlet- 2. Inlet-flange flange.

  • Page 19: Inlet Connection And Orientation

    Figure 5, from horizontal through to pump to the vacuum system. vertical and upright (±2 ), although it is most commonly mounted horizontally. Figure 5 - Mounting attitude of the EXT200/200/30 split flow pump Jun 03 Issue A...

  • Page 20: Backing Connection

    Flow pump. accessory (refer to Section 7) in place of the manual vent-valve. We recommend that you use a BOC Edwards RV • Use a TAV5 or TAV6 solenoid vent-valve backing-pump. The minimum size of the backing- connected to a convenient flange on your pump required is given in Table 3.

  • Page 21: Electrical Installation

    3.5.2 EXC controllers The EXC Controller provides the electrical supply to the EXT200/200/30 Split Flow pump through the pump-to-controller cable. Connect and lock the bayonet-connectors at the ends of the cable to the mating connectors on the pump and the EXC Controller (if applicable).
  • Page 22 EXT200/200/30 Split Flow Compound Turbomolecular Pump PAGE This page intentionally blank. Issue A Jun 03...

  • Page 23: Operation

    EXT200/200/30 Split Flow Compound Turbomolecular Pump OPERATION Close the valve in the backing-line connecting the EXT200/200/30 Split Flow pump to the PAGE backing-pump. WARNING Switch off the backing-pump. Do not operate the EXT200/200/30 Switch off the power supply to the EXT200/ Split Flow pump unless it is connected to your vacuum system.

  • Page 24: Exc Controllers

    (refer to Section 5.4), press the EXC Controller Start/Stop button to reset the Fail condition, and restart the EXT200/200/30 Split Flow pump. If the pump is hot, allow sufficient time for it to cool before you restart Note: Any references to LEDs and buttons do not apply to OEM versions of the EXC controller.

  • Page 25: Maintenance

    Alternatively, Note that if you use an EXDC Pump Drive Module you can send your pump to a BOC Edwards Service to control the EXT200/200/30 Split Flow pump, or Centre to have the bearings replaced.
  • Page 26 EXT200/200/30 Split Flow Compound Turbomolecular Pump Symptom Check Action The impeller does not rotate. Is the EXC Controller power LED If not, check that the electrical PAGE After pressing start - Fail LED not lit? supply is on, check that the switch lit.
  • Page 27 EXT200/200/30 Split Flow Compound Turbomolecular Pump Symptom Check Action The EXC Controller trips into Fail Is the timer set incorrectly? Increase the timer setting (refer to PAGE during the ramp-up and before the instruction manual supplied 50% speed is reached (continued).
  • Page 28 EXT200/200/30 Split Flow Compound Turbomolecular Pump Symptom Check Action The EXT200/200/30 is very noisy Is the pump rotational speed the If so, change the natural frequency PAGE or there is excessive vibration or same as the resonant frequency of of your system.

  • Page 29: Storage And Disposal

    EXT200/200/30 Split Flow Compound Turbomolecular Pump STORAGE AND DISPOSAL PAGE Storage Use the following procedure to store the pump. Place protective covers over the main inlet, side inlet, interstage inlet, outlet and vent ports. Place the pump in its packing materials. For...
  • Page 30 EXT200/200/30 Split Flow Compound Turbomolecular Pump PAGE This page intentionally blank. Issue A Jun 03...

  • Page 31: Service, Spares And Accessories

    BOC Edwards training 7.3.2 Inlet-flange seals courses. The EXT200/200/30 Split Flow pump is supplied Order spare parts and accessories from your with inlet seals. The Item Number of replacement nearest BOC Edwards company or distributor. seals is given in Table 7.

  • Page 32: Accessories

    Use a VRX fixed orifice vent-restrictor to restrict EXC Controller and the EXT200/200/30 Split Flow the flow of vent gas into the EXT200/200/30 Split pump. A cable is not supplied with the EXT200/200/ Flow pump. Refer to Section 3.4 for information on 30 Pump or the EXC Controller (except EXC100L).
  • Page 33 EXT200/200/30 Split Flow Compound Turbomolecular Pump Cable Length Item Number Pump-to-controller D396-18-010 PAGE Pump-to-controller D396-18-030 Pump-to-controller D396-18-050 Table 10 - Pump-to-controller cable Product Item Number TAV5 vent-valve B580-66-010 TAV6 vent-valve B580-66-020 NW10-1/8 inch BSP male adaptor B580-66-011 Table 11 - TAV vent-valve and vent-port adaptor...
  • Page 34 EXT200/200/30 Split Flow Compound Turbomolecular Pump PAGE 1. EXDC controller 2. TAV vent-valve 3. ACX cooling fan Figure 6 - Installation of optional accessories Issue A Jun 03...

  • Page 35: Index

    Vent gas specification and vent control data ..4 EXT200/200/30 ......1 Vent options, vent valve connection and control 12 VRX vent-restrictor .
  • Page 36 EXT200/200/30 Split Flow Compound Turbomolecular Pump PAGE This page intentionally blank. Issue A Jun 03...

  • Page 37: Return Of Boc Edwards Equipment

    7. If the equipment is large, strap the equipment and its accessories to a wooden pallet. If the equipment is too small to be strapped to a pallet, pack it in a suitable strong box. 8. Fax or post a copy of the Declaration (HS2) to BOC Edwards. The Declaration must arrive before the equipment.
  • Page 38 Read the Return of BOC Edwards Equipment - Procedure (HS1) before you complete this Declaration • Contact BOC Edwards to obtain a Return Authorisation Number and to obtain advice if you have any questions • Send this form to BOC Edwards before you return your equipment...
  • Page 39 This page intentionally blank.
  • Page 40 PLEASE CONTACT ANY OF THESE COMPANIES FOR DETAILS OF OTHER SALES AND SERVICE CENTRES IN YOUR AREA. BOC Edwards is part of BOC Limited. BOC Edwards and the stripe symbol are trade marks of The BOC Group. © BOC Edwards 2003 Produced by Technical Publicity Techpublicity@edwards.boc.com...

This manual is also suitable for:

B756-11-991B756-10-000B756-15-991B756-15-000

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