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Summary of Contents for BOC Edwards EXT555H
- Page 1 NRA-266-880 Issue A Original Instruction Manual EXT555H 98/37/EC 89/336/EEC 73/023/EEC...
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Page 3: Table Of Contents
EXT555H CONTENTS PAGE Section Title Page INTRODUCTION Scope and definitions TECHNICAL DATA General Pumping media 2.2.1 Pumps without gas purge 2.2.2 Pumps with gas purge Vent gas specification and vent control data Purge gas specification Water cooling Materials exposed to gases pumped... - Page 4 Diagram of inlet screen - remove screws 'A' in order to remove the inlet screen. Do not remove screws 'B' Maximum rate of pressure rise when venting Dimensions and features of EXT555H pumps Installation of EXT555H optional accessories and spares 29 Issue A Jun 01...
- Page 5 EXT555H TABLES PAGE Table Title Page General information Vent gas and vent control data Purge gas specification Cooling water specification Technical data List of items supplied Vent restrictor orifice diameter (with atmospheric pressure at the inlet) Fault finding ISX inlet-screen...
- Page 6 EXT555H PAGE This page intentionally blank. Issue A Jun 01...
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Page 7: Introduction
: this is a flow of 1cm at an The EXT555H pump is designed for use with a BOC ambient temperature of 0 °C and a pressure of Edwards EXC or EXDC controller. Read this 1013 mbar (1.013 x 10 Pa). - Page 8 EXT555H PAGE This page intentionally blank. Issue A Jun 01...
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Page 9: Technical Data
Table 1 - General information Pumping media CAUTION WARNING Do not use an EXT555H pump to pump gases containing more than 20% oxygen unless a bearing Vent dangerous gases and gas purge is applied as stated in Section 2. If you do the mixtures safely. -
Page 10: Pumps Without Gas Purge
EXT555H 2.2.1 Pumps without gas purge • Water vapour You must ensure that vapour does not PAGE The pumps are designed to pump the following condense inside the pump - refer to residual gases normally used in high vacuum systems: Section 3.7.3. -
Page 11: Purge Gas Specification
EXT555H Purge gas specification PAGE Purge gas system items Reference data Purge gas Dry nitrogen, argon or other inert gases Maximum dew point at atmospheric pressure -22 °C Maximum size of particulates 1 micron Maximum concentration of oil 0.1 parts per million Allowable purge gas flow (when required) 20 to 150 sccm (0.33 to 2.48 mbar l s-1, 33 to 248... -
Page 12: Materials Exposed To Gases Pumped
'O' rings, hydrocarbon lubricant, rare earth magnets, silicon nitride, phenolic resin and carbon fibre epoxy resin. Parameter EXT555H Notes Mass EXT555H ISO160 13.4 kg Mass EXT555H DN160CF 21.2 kg Main inlet flange DN160ISO-K/DN160CF Outlet flange... - Page 13 EXT555H Parameter EXT555H Notes Ultimate pressure PAGE <10 mbar <2 x 10 mbar Minimum backing pump 12 m displacement Recommended backing pump RV12 Maximum continuous inlet †† pressure (light gas pumping) Forced air cooled, 30 °C ambient 1 x 10 mbar Forced air cooled, 35 °C ambient...
- Page 14 EXT555H Parameter EXT555H Notes Cooling method forced air / water PAGE Ambient air temperature for 0 °C - 35 °C forced air cooling Minimum cooling water flow rate 15 l h (water at 15 °C) Water temperature 10 °C - 20 °C Noise level at 1 metre <60 dBA...
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Page 15: Installation
EXT555H INSTALLATION Typical installation PAGE A typical pump system with an EXT555H pump is Unpack and inspect shown in Figure 1. WARNING The accessories available for the EXT555H pump are detailed in Section 7.4. The accessories are The EXT555H DN160CF pump shown in Figure 5. -
Page 16: Typical Pumping System
EXT555H PAGE 1. Alternative position for 6. Backing valve 12. Cooling water connectors vent-valve 7. Vacuum gauge 13. EXC controller 2. Vacuum system 8. Flexible bellows 14. Air cooler 3. High-vacuum gauge 9. Foreline trap 15. PRX10 purge restrictor 4. Inlet-screen 10. -
Page 17: Inlet Connection
EXT555H Do not remove inlet screens unless you can be sure If the inlet flange of the EXT555H is not connected that there is no danger that debris can fall into the to a rigid, firmly fixed vacuum system, ensure that PAGE pump. -
Page 18: Diagram Of Inlet Screen - Remove Screws 'A' In Order
EXT555H PAGE Figure 2 - Diagram of inlet screen - remove screws 'A' in order to remove the inlet screen. Do not remove screws 'B' Issue A Jun 01... -
Page 19: Interstage Connection (Hi Pump Variants Only)
Venting may be only open the vent valve when the rotational speed accomplished by one of the following methods: of the EXT555H pump has fallen to 50% of full rotational speed. • Use a TAV5 or TAV6 solenoid vent valve... -
Page 20: Maximum Rate Of Pressure Rise When Venting
EXT555H PAGE Figure 3 - Maximum rate of pressure rise when venting Issue A Jun 01... -
Page 21: Purge Gas Connection
If you use the TAV5 or TAV6 vent valve you can The EXC controller provides the electrical supply to control it using an EXC controller or by other the EXT555H pump through the pump-to- PAGE methods. Table 7 gives an indication of the controller cable. -
Page 22: Dimensions And Features Of Ext555H Pumps
EXT555H PAGE 1. Backing port (NW25) 5. Earth bond point 2. Interstage port - Hi variants (NW25) 6. Purge plug 3. Electrical supply connector 4. Vent valve Figure 4 - Dimensions and features of EXT555H pumps Issue A Jun 01... -
Page 23: Forced Air Cooling
PAGE An air cooler accessory is available for the connectors can be used for the water supply or EXT555H pump (see Section 7). Fit the air cooler as return connections. described in the instructions supplied with it. If you wish to use alternative air cooling, ensure that the... - Page 24 EXT555H PAGE This page intentionally blank. Issue A Jun 01...
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Page 25: Operation
EXT555H. the air cooler. When the EXT555H speed has fallen to 50% of Start the backing pump. full rotational speed, turn the manual vent valve anticlockwise to open it. -
Page 26: Bakeout (Conflat Only)
70 °C at the inlet-flange, you must cool the pump by water-cooling, to prevent damage to the bearing lubricant. If you heat your EXT555H pump (and your vacuum system), you will speed up the degassing process so that the pump will reach ultimate vacuum in the shortest possible time. -
Page 27: Maintenance
If the EXT555H pump is contaminated inside, it may or fault-finding procedures. not be possible to achieve the specified ultimate vacuum, or pump-down time may increase. The... -
Page 28: Fault Finding
EXC Controller). Check that the pump-to-controller lead is connected. If all the above checks are OK then consult BOC Edwards or your supplier. Is the EXC Controller first speed If not, the EXC Controller is indication LED lit? faulty. - Page 29 If not, the EXT pump-bearings are damaged. Consult Edwards or your supplier. The EXC Controller trips into Fail Consult BOC Edwards or your - all the speed LEDs are lit supplier. Ultimate pressure cannot be Is the pressure limited by water Bake the system and pump.
- Page 30 EXT555H Symptom Check Action Remove the pump from the If poor, check the pump for PAGE system and test the ultimate contamination and if necessary pressure of the pump alone (see clean as described in Section 5.3. Section 3 for specification).
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Page 31: Storage And Disposal
Avoid long-term storage if possible. When long- term storage is necessary, the pump should be set up and run for at least eight hours every six months. Disposal Dispose of the EXT555H Turbomolecular Pump and components accessories safely accordance with all local and national safety and environmental requirements. - Page 32 EXT555H PAGE This page intentionally blank. Issue A Jun 01...
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Page 33: Service, Spares And Accessories
EXT555H SERVICE, SPARES Service AND ACCESSORIES PAGE BOC Edwards products are supported by a worldwide network of BOC Edwards Service Introduction Centres. Each Service Centre offers a wide range of options including: equipment decontamination; BOC Edwards products, spares and accessories are service exchange;... -
Page 34: Inlet-Strainer (Ext555Hi Pump Only)
C083-00-003 Table 11 - Inlet-flange seals Accessories 7.4.1 Installation The accessories available for use with the EXT555H turbomolecular pumps are described in the following Sections. Figure 5 shows how the accessories are fitted to an EXT pump. 7.4.2 EXC controller... -
Page 35: Installation Of Ext555H Optional Accessories And Spares
16. Bakeout band position 5. EXT555H pump 11. WCX water cooling 17. ACX air cooler assembly 6. TAV solenoid vent valve accessory 7. DN10NW adaptor 12. Purge port Figure 5 - Installation of EXT555H optional accessories and spares Jun 01 Issue A... -
Page 36: Pump-To-Controller Cable
110-120 V or 220-240 V versions and may be powered from a rear panel socket on the EXC Controller. Pump Bakeout band Item Number EXT555H/Hi DN160CF BX501 (110 V) B580-52-044 BX501 (240 V) B580-52-064 Table 15 - BX bakeout band... -
Page 37: Fl20K Foreline Trap
EXT555H 7.4.6 FL20K foreline trap PAGE foreline trap minimises vapour backstreaming from the backing pump and is recommended where the highest system cleanliness is required. Foreline trap Item Number FL20K A133-05-000 Table 16 - FL20K foreline trap 7.4.7 TAV vent-valve and vent-port... -
Page 38: Wcx Water-Cooler
EXT555H 7.4.9 WCX water-cooler PAGE If you wish to water cool your pump, you must order the water cooling plate: Water cooler Item Number WCX555 B580-67-003 Table 19 - WCX water-cooler 7.4.10 Vibration isolators In applications where the small amount of vibration generated by the turbomolecular pump is a problem, a vibration isolator can be fitted. -
Page 39: 7.4.12 Vrx Vent-Restrictor
EXT555H 7.4.12 VRX vent-restrictor PAGE Use a VRX fixed orifice vent-restrictor to restrict the flow of vent gas into the EXT pump. Refer to Section 3.4 for information on the selection of the correct VRX vent-restrictor. Vent-restrictor Orifice diameter (mm) - Page 40 EXT555H PAGE This page intentionally blank. Issue A Jun 01...
- Page 41 Return of Edwards Equipment - Procedure (Form HS1) Introduction Before you return your equipment you must warn your supplier if the substances you used (and produced) in the equipment can be dangerous. You must do this to comply with health and safety at work laws. You must complete the Declaration (HS2) on the next page and send it to your supplier before you dispatch the equipment.
- Page 42 Telephone number: _________________________________Date of equipment delivery: ________________________________________ I have made reasonable enquiry and I have supplied accurate information in this Declaration. I have not withheld any information. I have followed the Return of BOC Edwards Equipment Procedure (HS1) on the previous page. Signed: _____________________________________________________ Date ____________________________________________________...
- Page 44 Fax: +(1) 972 669 8054 BRAZIL Sao Paulo +(55) 11 8580377 Fax: +(55) 11 2652766 BOC Edwards is a trading name used by affiliate companies of the BOC Group plc. The stripe http://www.bocedwards.com symbol is a trademark of the BOC Group plc.
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