1. Manuals
  2. Brands
  3. BOC Edwards Manuals
  4. Water Pump
  5. STP-A2203 Series
  6. Instruction manual

BOC Edwards STP-A2203 Series Instruction Manual

Turbomolecular pump
Hide thumbs
Table of Contents

Advertisement

Quick Links

Download this manual
MT-41E-002-A
STP-A2203 Series
Turbomolecular Pump
INSTRUCTION MANUAL
(Second Edition- a)
Read through the Safety Precautions and
each section of this Manual carefully before
using the STP pump.
Keep this Manual in a place where you can
quickly access it at any time.
BOC Edwards Japan Limited
Nov. 2003
Copyright 2003 BOC Edwards Japan Limited. All rights reserved. Printed in Japan.

Advertisement

Table of Contents
loading
Need help?

Need help?

Do you have a question about the STP-A2203 Series and is the answer not in the manual?

Questions and answers

Related Manuals for BOC Edwards STP-A2203 Series

Summary of Contents for BOC Edwards STP-A2203 Series

  • Page 1 Manual carefully before using the STP pump. Keep this Manual in a place where you can quickly access it at any time. BOC Edwards Japan Limited Nov. 2003 Copyright 2003 BOC Edwards Japan Limited. All rights reserved. Printed in Japan.
  • Page 2 Safety Precautions as well as the general safety rules (your country’s laws, regulations, safety standards and so on). If the equipment is used in a manner not specified by BOC Edwards, the protection provided by the equipment may be impaired.
  • Page 3 STP-A2203 Series Instruction Manual The STP pump is provided with a high-speed rotor. Secure the STP ◇ pump according to the specified method. Failure to do so may lead to serious personal injury, product and/or peripheral equipment damage if any abnormality/error occurs in the rotor.
  • Page 4 STP-A2203 Series Instruction Manual NEVER use any gas that is not specified as usable in this Manual. ◇ The use of such gas may corrode the STP pump and damage it. A hazardous live voltage may exist at connector that marked ◇...
  • Page 5 (the STP pump serial number, the STP control unit serial number, and the STP connection cable length) is changed. Use the STP connection cable that BOC Edwards has specified. ◇ The use of different cables may result in product damage.
  • Page 6 STP-A2203 Series Instruction Manual NEVER turn OFF the primary power (DO NOT switch the breaker ◇ "OFF") while the STP pump is rotating. Doing so may result in product damage. Perform investigations into probable causes and remove them before ◇...
  • Page 7 STP-A2203 Series Instruction Manual INTRODUCTION Thank you very much for purchasing BOC Edwards’ turbomolecular pump. The turbomolecular pump is designed to be installed in the vacuum equipment to exhaust gases from it. This manual covers all items necessary to ensure safe installation, operation and...
  • Page 8 1) No part of this manual may be reproduced in any form by any means without prior written permission from BOC Edwards. 2) BOC Edwards pursues a policy of continuing improvement in design and performance of this product. The right is, therefore, reserved to vary specifications and design without notice.

  • Page 9: Limited Warranty

    1) This warranty applies only to the product delivered from BOC Edwards to the customer. 2) If any defect is found during this period, BOC Edwards will, at its option, repair or recondition the product free of charge. The costs for repair or replacement of the product after the warranty period has passed will be at your own charge.
  • Page 10 STP-A2203 Series Instruction Manual Product damage occurred during transport or other factors not attributable to BOC Edwards; Product breakage or damage due to natural disasters, fire or other external factors; Deterioration in the basic performance due to the use of the product beyond limits of the use;...

  • Page 11: Table Of Contents

    STP-A2203 Series Instruction Manual TABLE OF CONTENTS SAFETY PRECAUTION INTRODUCTION PRECAUTIONS REQUEST LIMITED WARRANTY 1 Precautions for Safe Operation of the STP Pump..........1-1 Usable Gases........................1-1 Maintenance and Inspection Precautions................1-1 Labels..........................1-1 2 Operation Principle of the STP Pump..............2-1 3 Unpacking ......................
  • Page 12 STP-A2203 Series Instruction Manual Connecting to Semiconductor Equipment ................ 6-11 6.5.1 Connecting to Power.................... 6-11 6.5.2 Emergency Off Circuit (EMO Circuit) ..............6-11 7 How to Start/Stop the STP Pump............... 7-1 Before Starting ........................7-1 Start Procedures ......................... 7-2 Stop Procedures ......................... 7-2 Manual Operation........................
  • Page 13 STP-A2203 Series Instruction Manual 11.6 Maintenance and Inspection ................... 11-12 11.6.1 Cleaning and Decontamination................11-13 11.6.2 Inspecting the Deposit ..................11-14 11.6.3 Overhaul......................11-15 11.6.4 Transporting for Repair or Overhaul ..............11-16 12 Storage and Disposal ..................12-1 12.1 Storage of the STP Pump ....................12-1 12.2 Storage of the STP Control Unit ..................
  • Page 14 STP-A2203 Series Instruction Manual TABLES Table 3.1 Accessories ........................3-2 Table 3.2 Optional Accessories ....................3-2 Table 4.1 Tightening torque of bolt ....................4-9 Table 4.2 Maximum Torque predicted and Recommended securing bolt for inlet port flange..4-10 Table 4.3 Number of Claw Clamps by Size of Flange..............
  • Page 15 STP-A2203 Series Instruction Manual FIGURES Figure 2.1 Cross Sectional View of the STP Pump ............... 2-2 Figure 3.1 Example of Lifting the STP Pump ................. 3-2 Figure 4.1 Configuration of the STP Pump ..................4-2 Figure 4.2 Installation of the STP Pump to the Vacuum Equipment ..........4-6 Figure 4.3...

  • Page 16: Precautions For Safe Operation Of The Stp Pump

    The STP series models are chemical specific pumps: chlorine or fluorine system gases can be used. When you use gases including alkaline metals, but excluding Li, gases including Ga, Hg, In, or Sn, or HBr, contact BOC Edwards. ◇ To prevent an accident, confirm the characteristics of gases to be used, referring to the Material Safety Data Sheet (MSDS) you obtain from the gas supplier.
  • Page 17 STP-A2203 Series Instruction Manual 2) Heavy Product Caution Label This label is affixed to the product with a weight of 18 kg or more. Follow the precautions of Section 2, "Unpacking" so as not to cause any accident during handling.
  • Page 18 STP-A2203 Series Instruction Manual Connector Caution Label ◇ This label describes lock of the connector. ◇ This label instructs operators to prevent the connectors from being disconnected while the STP pump is in operation. 注意 CAUTION ◇コネクタは確実に ◇Lock connector ロックしてくださ...
  • Page 19 STP-A2203 Series Instruction Manual 9) Hot Surface Warning Label This label instructs operators so as not to touch the hot surface of the STP pump. The use of the TMS unit may lead to a considerable rise in temperatures outside the STP pump.

  • Page 20: Operation Principle Of The Stp Pump

    STP-A2203 Series Instruction Manual Operation Principle of the STP Pump The STP series pump is a series of a magnetically levitated turbomolecular pumps, featuring the following: • Oil free • Low vibration • High reliability The STP pump is configured so that rotor blade (1) and stator blade (2) are aligned alternately in the axial direction.

  • Page 21: Figure 2.1 Cross Sectional View Of The Stp Pump

    STP-A2203 Series Instruction Manual (1) Rotor blade (2) Stator blade (7) Touch down bearing (3) Radial sensor (4) Radial electromagnet (3) Radial sensor (8) Touch down bearing (5) Axial sensor (6) Axial electromagnet Figure 2.1 Cross Sectional View of the STP Pump...

  • Page 22: Unpacking

    • Check the package for bruises, breakage, wetness, and other. If there is any abnormality/error or it is judged necessary to return the product, contact BOC Edwards or the selling agency. • Check the contents of the package. See Section 3.2, "Accessories."...

  • Page 23: Accessories

    Attached to the STP pump TMS heater 250 V, 3 A For F1 Spare fuses 250 V, 0.5 A For F2 : The standard cable length is 5 m. Both 10m and 20m are available. Contact BOC Edwards on other specifications.

  • Page 24: Installation Of The Stp Pump

    STP-A2203 Series Instruction Manual Installation of the STP Pump Name and Function of Each Part Inlet Port Flange (VG , ICF , ISO, and other) ・ Connected to the vacuum equipment (at the high vacuum side). Outlet Port Flange (KF ・...

  • Page 25: Figure 4.1 Configuration Of The Stp Pump

    STP-A2203 Series Instruction Manual (1) Inlet port flange (7) TMS heater (5) Cooling water port (6) Temperature sensor connector (2) Outlet port flange (3) STP connector (4) Purge port Figure 4.1 Configuration of the STP Pump...

  • Page 26: Precautions Before Installation

    When you use gases including alkaline metals, but excluding Li, gases including Ga, Hg, In, or Sn, or HBr, contact BOC Edwards (See Section 1.1, "Usable Gases"). If the STP pump is used in an area with radiation, contact BOC ◇...

  • Page 27: Installation Area

    STP-A2203 Series Instruction Manual 4.2.2 Installation Area Leave enough space for the following in addition to that for the STP pump: • Space for maintenance and inspection • Space for connecting cables The minimum bending radius of the STP connection cable is ◇...
  • Page 28 STP-A2203 Series Instruction Manual Confirm the dimensions by the external appearance of the STP pump ◇ when designing the bench. The bolt may not be able to be inserted from the lower side of the inlet port according to the shape of the inlet port flange.

  • Page 29: How To Install The Stp Pump

    STP-A2203 Series Instruction Manual How to Install the STP Pump Install the STP pump to the vacuum equipment as shown in Figure 4.2. The STP pump can be installed through the Vacuum Equipment damper (optional accessory) Inlet Port Inlet Port Flange...

  • Page 30: Cleaning The Seal

    STP-A2203 Series Instruction Manual 4.3.1 Cleaning the Seal Inspect the seals of inlet and outlet port flanges for dirt or oil spots before installing the STP pump to the vacuum equipment. Take the following measures for cleaning the seals: •...

  • Page 31: Stp Pump Installation Positions

    STP-A2203 Series Instruction Manual 4.3.2 STP Pump Installation Positions The STP pump can be installed vertically, horizontally, upside-down and slanted. Upside-down Horizontal Vacuum Equipment Slanted Vertical Figure 4.3 STP Pump Installation Positions When installing the STP pump in a horizontal or slanted position, it is recommended to install it so that the direction of the outlet port is on a vertical or horizontal plane in the direction of the gravity.

  • Page 32: How To Secure The Stp Pump

    STP-A2203 Series Instruction Manual 4.3.3 How to Secure the STP Pump The STP pump is provided with a high-speed rotor. The worst-case ◇ failure may result in a jump in rotational torque leading to personal injury or peripheral equipment damage.

  • Page 33: Table 4.2 Maximum Torque Predicted And Recommended Securing Bolt For Inlet Port Flange

    STP-A2203 Series Instruction Manual 1) When securing the inlet port with bolts 1) When securing the inlet port with bolts Refer to Table 4.2 for torque in pump abnormality and recommended securing bolts. Secure the inlet port flange with all of the boltholes of the size specified in the Inlet Port Flange Standard.

  • Page 34: Table 4.3 Number Of Claw Clamps By Size Of Flange

    STP-A2203 Series Instruction Manual Refer to the following Figure for the shape of R.D.S.B. Equipment Equipment Installation face Space by cantering ｒ ｒ Pump Flange Pump Flange VG/ICF Flange ISO_F Flange Bolt size Type of flange ISO_F flange 2.5 mm or more 5.9 mm or more...
  • Page 35 STP-A2203 Series Instruction Manual Vacuum Equipment Claw Clamps Secure the base Figure 4.7 Example of securing the STP pump Figure 4.7 Example of securing the STP pump (When securing the inlet port flange with claw clamps) 3) When installing the damper in the inlet port flange Refer to Table 4.2 for rotational torque.

  • Page 36: Vacuum Piping

    STP-A2203 Series Instruction Manual 4.3.4 Vacuum Piping DO NOT open the STP pump through the inlet flange to atmospheric ◇ air while the STP pump is running. If atmospheric air flows into the STP pump, it may not function normally.
  • Page 37 STP-A2203 Series Instruction Manual 6) Depending upon the type of the backing pump used, oil vapor may 6) Depending upon the type of the backing pump used, oil vapor may contaminate the inside of the STP pump. Some oil viscosity could cause a contaminate the inside of the STP pump.

  • Page 38: Connecting The Purge Port

    STP-A2203 Series Instruction Manual 4.3.5 Connecting the Purge Port When pumping reactive or corrosive gases, introduce a dry N gas or other gas into the STP pump in order to protect the inside of the STP pump. As shown in Figure 4.9, introduce a dry N gas through the electromagnetic vent.

  • Page 39: Connecting The Cooling Water Valve (For Use With Tms Unit Only)

    STP-A2203 Series Instruction Manual 4.3.6 Connecting the Cooling Water Valve (For use with TMS unit only) DO NOT apply excessive force to the cable for cooling water valve. ◇ Check the indication of the cooling water valve ports. ◇ Secure the cooling water pipe to prevent water leakage.

  • Page 40: Figure 4.10 External Dimensions Of Cooling Water Valve

    STP-A2203 Series Instruction Manual 1) Secure the cooling water valve at any appropriate position of the vacuum equipment using an attached installation board (for dimensions of the cooling water valve, see Figure 4.10). 2) Connect the cooling water port to the cooling water pipe as well as the cooling water port (See Figure 4.11).

  • Page 41: Figure 4.11 Piping Of Cooling Water Valve

    STP-A2203 Series Instruction Manual Cooling Water Port Cooling Water Port Cooling Cooling Water Water Valve Pipe To Vacuum Equipment To Vacuum Equipment Water Pipe Water Pipe Figure 4.11 Piping of Cooling Water Valve 4-18...

  • Page 42: How To Introduce A Purge Gas

    When you use gases including alkaline metals, but excluding Li, gases including Ga, Hg, In, or Sn, or HBr, contact BOC Edwards. Cool the STP pump to prevent the STP pump from overheating when ◇...

  • Page 43: Cooling The Stp Pump

    STP-A2203 Series Instruction Manual Cooling the STP Pump When pumping gases, cool the STP pump. Also, when performing baking, always cool the STP pump. If the TMS unit is used, cool the STP pump with the method specified for the TMS unit.

  • Page 44: Baking The Stp Pump

    STP-A2203 Series Instruction Manual Baking the STP Pump To attain a less pressure in a shorter time and reduce the exhaust time, bake the vacuum equipment and STP pump. The surfaces of the STP pump and its peripheral equipment will ◇...

  • Page 45: Figure 5.1 Attaching Positions Of The Cooling Unit And Baking Heater

    STP-A2203 Series Instruction Manual 警告 WARNING Hot surface. 高温部 Can burn hands. やけどします。 Do not touch. 触らないでく ださい。 Baking Heater Cooling Water Port Figure 5.1 Attaching Positions of the Cooling Unit and Baking Heater...

  • Page 46: Installation Of The Stp Control Unit

    STP-A2203 Series Instruction Manual Installation of the STP Control Unit Name and Function of Each Part 6.1.1 Front Panel "START" Switch (flat panel switch, green) ･ STP pump rotating function (valid in MANUAL operation only). "STOP" Switch (flat panel switch, dark gray) ･...
  • Page 47 STP-A2203 Series Instruction Manual ･ The LCD displays a pump’s operation state, speed, or other messages. ･ The LCD displays an error message when an abnormality/error occurs in the STP pump. (10) "ACCEL." Lamp (green LED) ･ Lights during acceleration (ACCELERATION state).

  • Page 48: Figure 6.1 Stp Control Unit Front Panel

    STP-A2203 Series Instruction Manual (14) (15) STP CONTROL UNIT POWER FAILURE REMOTE TEMP CTRL (13) RESET SELECT NORMAL (16) ACCEL BRAKE DOWN ENTER START STOP (11) (10) (12) Figure 6.1 STP Control Unit Front Panel...

  • Page 49: Rear Panel

    STP-A2203 Series Instruction Manual 6.1.2 6.1.2 Rear Panel Rear Panel A hazardous live voltage may exist at connector that marked ◇ DO NOT touch the terminal. Doing so may result in electric shock. When operating connection/disconnection to connector, always power OFF the STP pump (Switch the breaker "OFF").

  • Page 50: Precautions Before Installation

    STP-A2203 Series Instruction Manual Precautions Before Installation 6.2.1 Operating Environment Install the STP control unit in a place meeting the following requirements: Ambient Temperature 0 to 40 °C 30 to 95% (no dew condensing) Ambient Relative Humidity A place free of exposure to direct sunlight.

  • Page 51: Installation Area

    STP-A2203 Series Instruction Manual 6.2.3 Installation Area Leave enough space for the following in addition to that for the STP control unit. • Space for maintenance and inspection • Space for inlet and outlet of air for cooling - Top and side: 50 mm or more - Bottom: 14.5 mm or more (height of the rubber feet)

  • Page 52: Attaching The Stp Control Unit To A Rack

    STP-A2203 Series Instruction Manual Attaching the STP Control Unit to a Rack The dimensions of the STP control unit front panel conform to EIA standard. Therefore, this panel can be attached to any type of commercially-available racks. Attach the STP control unit to the rack according to the following steps: •...

  • Page 53: Cable Connection

    STP-A2203 Series Instruction Manual Cable Connection 6.4.1 Name and Dimensions of Each Cable STP Control Unit Side STP Pump Side 8 Pin (Pin) 60 Pin (Pin) 60 Pin (Socket) L-type Connector STP Connection Cable Control Unit Side Crimp-Type Terminal (M4...

  • Page 54: How To Connect The Cables

    STP-A2203 Series Instruction Manual 6.4.2 How to Connect the Cables Use the STP connection cable that BOC Edwards has specified. The ◇ use of other cables may result in product damage. When connecting/disconnecting cables, always power OFF the STP ◇...

  • Page 55: Table 6.1 Connecting The Power Cable

    STP-A2203 Series Instruction Manual Table 6.1 Connecting the Power Cable Table 6.1 Connecting the Power Cable CON1 Cable Color Remarks Rear Panel Pin No. "AC POWER" Brown or Outline of L(L1) Black1 Connector Single phase 200 to 240 V AC ±10%...

  • Page 56: Connecting To Semiconductor Equipment

    STP-A2203 Series Instruction Manual Connecting to Semiconductor Equipment The STP pump is a component system when installing to the semiconductor equipment. Consider the followings when designing the semiconductor equipment. 6.5.1 Connecting to Power The STP control unit receives its power from the semiconductor equipment electrical distribution system via a circuit breaker.

  • Page 57: How To Start/Stop The Stp Pump

    STP-A2203 Series Instruction Manual How to Start/Stop the STP Pump NEVER connect or disconnect any cables while the power is ON. ◇ NEVER turn the primary power OFF (Switch the breaker "OFF") while ◇ the STP pump is in rotation.

  • Page 58: Start Procedures

    STP-A2203 Series Instruction Manual Start Procedures Start the backing pump before or simultaneously with start of the STP pump. Open the vacuum valve located at the outlet port flange side after starting the backing pump. DO NOT open the vacuum valve without operating the backing pump.

  • Page 59: Manual Operation

    STP-A2203 Series Instruction Manual There are two methods of operating the STP pump: MANUAL and REMOTE. Select one which fits your vacuum equipment. Manual Operation (See Figures 7.1.) Slide the "MANUAL/REMOTE" changeover switch on the STP control unit front panel to the position opposite to "ON." At this time, the "REMOTE" lamp is off.

  • Page 60: Stopping The Stp Pump

    STP-A2203 Series Instruction Manual 7.4.3 Stopping the STP Pump 1) Press the "STOP" switch on the front panel to stop the STP pump. The "NORMAL" lamp or "ACCEL." lamp goes out, and the "BRAKE" lamp lights (BRAKE state). 2) The "BRAKE" lamp goes out when rotational speed goes below 500 rpm.

  • Page 61: Remote Operation

    STP-A2203 Series Instruction Manual Remote Operation (See Figures 7.1.) (Read through Section 8, "Remote Input/Output Signal Connector" before use.) Slide the "MANUAL/REMOTE" changeover switch on the STP control unit front panel to "ON." The "REMOTE" lamp lights. 7.5.1 Powering ON 1) Switch "ON"...

  • Page 62: Starting The Stp Pump After Stopping

    STP-A2203 Series Instruction Manual 7.5.3 Starting the STP Pump after Stopping Perform the start operation to reaccelerate the STP pump. See Section 7.5.2, "Starting/Stopping the STP Pump." The STP pump can be reaccelerated even while it is stopping. 7.5.4 Powering OFF Switch "OFF"...

  • Page 63: Operating The Tms Unit (For Use With The Tms Unit Only)

    STP-A2203 Series Instruction Manual Operating the TMS Unit (For use with the TMS unit only) 7.6.1 Starting/Stoping Power on the STP pump to automatically start the TMS unit. Power off the STP pump to automatically stop the TMS unit. While the TMS unit is in operation, the "TEMP CTRL" lamp of the STP control unit lights.

  • Page 64: Figure 7.1 Stp Pump Operation Procedures

    STP-A2203 Series Instruction Manual ＜STP Pump State＞ ＜LCD Message＞ ＜Operation＞ Breaker ON Software Version Version v *.* 1997 ***** Autotest Self test in progress Execute Self Test （upper only） Self test completed Autotest complete （upper only） Levitation Upper：Levitation state Levitation State TMS TEMP : **℃...

  • Page 65: Remote Input/Output Signal Connector

    STP-A2203 Series Instruction Manual Remote Input/Output Signal Connector The remote input/output signal connector (REMOTE X7) is used for input/output remote signals. ∗ 1 This connector is of D-Sub type (37-pins, socket type). ∗ 2 The screw for remote connector is M2.6...

  • Page 66: Table 8.1 Remote X7 Input Signal Pins

    STP-A2203 Series Instruction Manual Table 8.1 REMOTE X7 Input Signal Pins Description Pins for inputting the START signal. The following two methods are available: 1) Short the circuits between (1)-(21). Then, short the circuits between (3)-(21) for 0.3 seconds or START IN more.

  • Page 67: Figure 8.1 Remote X7 Input Signal Pins

    STP-A2203 Series Instruction Manual スタート1)の場合 In case of Start 1) スタート2)の場合 リモート入力信号 / Remote Input Signal In case of Start 2) START STOP リセット信号 RESET signal RESET 回転禁止信号 Rotation INHIBIT signal INHIBIT 未使用ピン Unused Pins Figure 8.1 REMOTE X7 Input Signal Pins 1 pin (0V) is insulated from the frame ground.

  • Page 68: Output Signal Pins

    STP-A2203 Series Instruction Manual Output Signal Pins Use output signal pins according to Table 8.2 and Figure 8.2. Remote output signals function during MANUAL and REMOTE operations. Four abbreviations are used in Table 8.2: N.O: Normal Open N.C: Normal Close...
  • Page 69 STP-A2203 Series Instruction Manual Table 8.2 REMOTE X7 Output Signal Pins(2/2) Description Pins for the TMS unit rated state signal output. AT TEMP.OUT When the actual temperature of the TMS unit is (16) within the setting temperature range ±10°C, the pins...

  • Page 70: Figure 8.2 Remote X7 Output Signal Pins

    STP-A2203 Series Instruction Manual Normal Open ： ： Normal Close Remote Output Signals ： Common R EM OT E ８ REMOTE selection state Ｃ Ｒ ２ signal output pins N .O O UT P OW ER ９ POWER ON state Ｃ...

  • Page 71: Table 8.3 Rated Contacts For Relays Cr1 To Cr8

    STP-A2203 Series Instruction Manual Table 8.3 shows the rated contacts for relays CR1 to 8 in Figure 8.2. Table 8.3 Rated Contacts for Relays CR1 to CR8 Resistance Load (COSφ=1) 125V AC 0.5A Rated Load 24V DC 1A Rated Current...

  • Page 72: Adjustment Methods

    STP-A2203 Series Instruction Manual Adjustment Methods Tuning For the STP pump, tuning is required to align the position of levitation in the axial direction with the center of the rotor's movable range. Tuning can be performed simply by pressing the "RESET" switch on the front panel.

  • Page 73: Each Of Data After Tuning

    STP-A2203 Series Instruction Manual Tuning can be performed only while the STP pump is in the ◇ LEVITATION state (It cannot be performed while the STP pump is in the ACCELERATION, NORMAL OPERATION, or BRAKE state). When performing the tuning during remote operation, use the ◇...

  • Page 74: Figure 9.1 Tuning Procedures

    STP-A2203 Series Instruction Manual <Contents> <Pump Operation> <LCD Display Example> Breaker “ON” Software Version v1.0 1997 ***** Autotest When an abnormality/error Self Test is detected. Autotest Complete CAUTION Bad EEPROM content CAUTION：PCB& Pump EEPROM Failure Levitation Levitation State Software Version Press the etc., a status is displayed.

  • Page 75: Confirmation Mode

    STP-A2203 Series Instruction Manual Confirmation Mode Confirmation Mode is used to check the status of the STP pump and STP control unit. The following items can be checked in Confirmation Mode: (1) Version information (2) Individual information (serial number, total hours of running, and...

  • Page 77: Parameter Set Mode

    STP-A2203 Series Instruction Manual Parameter Set Mode Parameter Set Mode is used to set the different parameters of the STP pump and STP control unit. The following items can be set in Parameter Set Mode: (1) Remote mode (2) Rated speed...

  • Page 78: Figure 9.3 Parameter Setting Method

    STP-A2203 Series Instruction Manual Do not set the "RS232/485 Modbus" and "LONWORKS" settings of ◇ Remote Mode because they cannot be set in the current configuration. "UP" Switch :Change to the next value "DOWN" Switch :Change to the previous value "SELECT"...

  • Page 79: Figure 9.4 Remote Mode Setting Method

    STP-A2203 Series Instruction Manual Remote Mode Detail The settings listed here are for "RS232/485 Com", "RS232/485 Settings Modbus", and "LONW ORKS" only. They are not displayed in "I/O Remote Mode." Baud Rate Baud Rate Baud Rate 9600 xxxx Press "SELECT" to go to next menu or "ENTER"...

  • Page 80: Safety Functions

    STP-A2203 Series Instruction Manual Safety Functions 10.1 Power Failure <Ⅰ. Operation at a Power Failure> When the power voltage drops below 180 V due to a power failure or other, the normal operation of the magnetic bearing is maintained using the regenerative energy of the rotating rotor (backup operation during a power failure).

  • Page 81: Table 10.1 States Of Lamps And Remote Output Signals At A Power Failure

    STP-A2203 Series Instruction Manual Establish a sequence so that the power can be supplied to the STP ◇ control unit immediately after a power recovery. Table 10.1 shows the states of LCD, LED lamps, and REMOTE output signals at a power failure.

  • Page 82: Abnormal State Of Magnetic Bearing

    STP-A2203 Series Instruction Manual 10.2 Abnormal State of Magnetic Bearing When the magnetic bearing does not function normally due to a breakage of the STP connection cable, disconnection of connectors or any abnormality/error of the STP control circuit, the rotor falls on the touch down bearing and stops.

  • Page 83: Overheating Inside The Stp Control Unit

    STP-A2203 Series Instruction Manual 10.6 Overheating Inside the STP Control Unit When the temperature inside the STP control unit overheats due to a failure in the air cooling fan, external heat source, and other, the WARNING message "CAUTION: CNT heat1" is displayed. In this case, the STP pump does not stop.
  • Page 84 STP-A2203 Series Instruction Manual 2) Disconnecting of the TMS Connection Cable and Connectors When an abnormality/error occurs in the TMS connection cable, the STP pump decelerates and stops. Output of the heater and the cooling water unit is OFF. The "FAILURE" lamp lights and the LCD displays error message "T.Cable Disconnect".

  • Page 88: Troubleshooting, Maintenance, And Inspection

    STP-A2203 Series Instruction Manual Troubleshooting, Maintenance, and Inspection The STP pump is provided with safety functions for various abnormality/errors. When an abnormality/errors occurs in the pump or control unit, the safety function operates with the "FAILURE" lamp lit, and an alarm signal is output from the remote output pins.

  • Page 89: When Error Message Is Displayed On Lcd

    STP-A2203 Series Instruction Manual 11.2 When Error Message is Displayed on LCD 11.2.1 Error Messages When error is detected, "Error n˚ **/**" and the error message are displayed on the lower line of the LCD alternately. The first number of "**/**" is the order of detected errors that have occured.

  • Page 90: Table 11.1 Error Messages

    STP-A2203 Series Instruction Manual Table 11.1 Error Messages Referred LCD Messages Probable Causes Countermeasures Section ATMP Failure Overheat inside the STP control unit: 1) High ambient 1) Set the ambient 6.2.1 temperature temperature to 40 °C or less. 2) Insufficient cooling of 2) Remove obstacle from the 6.2.3...
  • Page 91 STP-A2203 Series Instruction Manual Referred LCD Messages Probable Causes Countermeasures Section CAUTION:X_H Contact Service office. Malfunction Excessive displacement of the CAUTION:Y_H information rotor during its rotation CAUTION:X_B 1) Any deposit adhered to CAUTION:Y_B the rotor. CAUTION:Z 2) Excessive disturbance CNT Overheat 1...
  • Page 92 STP-A2203 Series Instruction Manual Referred LCD Messages Probable Causes Countermeasures Section Disturbance X_B Abnormal magnetic bearing: Disturbance X_H 1) Change of the cable 1) When changing the cable Disturbance Y_B length length, perform tuning. Disturbance Y_H 2) Disconnection of the 2) Contact Service office.
  • Page 93 STP-A2203 Series Instruction Manual Referred LCD Messages Probable Causes Countermeasures Section Mains Failure Insufficient power supply: 1) Power failure 1) Check whether or not a 10.1 power failure has occurred. 2) Incorrect connection of 2) Connect the power cable 6.4.2 the power cable.
  • Page 94 STP-A2203 Series Instruction Manual Referred LCD Messages Probable Causes Countermeasures Section TMS Breaker Trip The TMS unit earth leakage breaker (optional) is "OFF" 1) Incorrect setting of the 1) Always remain the TMS Instruction TMS unit earth leakage unit earth leakage Manual of breaker.

  • Page 95: Other Abnormalities

    STP-A2203 Series Instruction Manual 11.3 Other Abnormalities 11.3.1 Abnormalities When Powering ON (When the "FAILURE" lamp lights and the LCD displays an error message, see Section 11.2, "When Error Message is Displayed on LCD.") Table 11.2 Troubleshooting after Powering ON...

  • Page 96: 11.3.3 Other Abnormalities

    STP-A2203 Series Instruction Manual 11.3.3 Other Abnormalities (When the "FAILURE" lamp lights and the LCD displays an error message, see Section 11.2, "When Error Message is Displayed on LCD.") Table 11.4 Troubleshooting While the STP Pump Is Rotating Referred Symptom...

  • Page 97: Warning" Message Display Function

    STP-A2203 Series Instruction Manual 11.4 "WARNING" Message Display Function The STP control unit is provided with a "WARNING" message to display when an overhaul is needed following a self test. When a "w" appears in the upper left hand corner of the LCD, press the "ENTER"...

  • Page 98: 11.4.2 Second Damage Limit

    STP-A2203 Series Instruction Manual 11.4.2 Second Damage Limit "Second Damage Limit" is displayed when continuing to operate the STP pump after "First Damage Limit" is displayed, and the accumulation of the damage point attains the second setting value by generating second "Disturbance" or "Mains Failure."...

  • Page 99: Maintenance And Inspection

    STP-A2203 Series Instruction Manual 11.6 Maintenance and Inspection When performing maintenance and inspections of the STP pump, ◇ exhaust gases inside the STP pump thoroughly. Residual gases may cause an accident when removing the STP pump. Confirm the characteristics of gas to be used, referring to the Material Safety Data Sheet (MSDS) you obtain from the gas supplier.

  • Page 100: 11.6.1 Cleaning And Decontamination

    STP-A2203 Series Instruction Manual 11.6.1 Cleaning and Decontamination The method of cleaning and decontamination of the STP pump and STP control unit is shown below. Table 11.5 Cleaning and Decontamination Area Cleaning and Decontamination STP Pump Exterior Wipe with proper solvent (such as alcohol).

  • Page 101: 11.6.2 Inspecting The Deposit

    Contact with atmospheric air may cause a reaction of the deposit. ◇ DO NOT open the STP pump to atmospheric air as much as possible. BOC Edwards supplies you the Temperature Management System ◇ (TMS) unit to keep the temperature high inside the STP pump and prevent the accumulation of deposit.

  • Page 102: 11.6.3 Overhaul

    5 years (Only vacuum pumping) Other use (2 years) Dependent on application, contact BOC Edwards. The touch down bearing inside the STP pump will be worn out after a ◇ number of full speed touch downs. When the STP control unit displays "w,"...

  • Page 103: 11.6.4 Transporting For Repair Or Overhaul

    When returning the STP pump to Service office, be sure to pack it ◇ well to prevent external damage. If "Return Procedure" has not been satisfied, BOC Edwards will not be responsible for any troubles. i) Always contact Service office before returning the STP pump for repairs, overhaul, or other purposes.

  • Page 104: Storage And Disposal

    STP-A2203 Series Instruction Manual Storage and Disposal 12.1 Storage of the STP Pump When the STP pump is left unused over a long period (more than a few months), follow the precautions below: 1) Close the inlet port of the STP pump and vacuum it using a backing pump.

  • Page 105: Disposal

    Confirm the characteristics of gas to be used, referring to the Material Safety Data Sheet (MSDS) you obtain from the gas supplier. BOC Edwards is not responsible for problems during or after ◇ disposal.

  • Page 106: Specifications

    STP-A2203 Series Instruction Manual Specifications 13.1 Specifications for the STP Pump Table 13.1 Specifications for the STP Pump Item A2203 Series Inlet port flange VG250/ISO250F/ICF305 Flange size Outlet port flange KF40 2200 Pumping speed 1700 >10 Compression ratio 2.5×10 Ultimate pressure...

  • Page 107: Figure 13.1 External Appearance Of The Stp Pump

    STP-A2203 Series Instruction Manual H(Height of purge port) I(Height of cooling water port) Figure 13.1 External Appearance of the STP Pump 13-2...

  • Page 110: Specifications For The Stp Control Unit

    STP-A2203 Series Instruction Manual 13.2 Specifications for the STP Control Unit Table 13.2 Specifications for the STP Control Unit Item Specification Input voltage 200 to 240 ±10% Without the TMS unit: kVA Max. 1.5 Input power With the TMS unit: Max.
  • Page 111 X1P CONNECTOR X7 REMOTE...

  • Page 113: Unit Conversion Table

    UNIT CONVERSION TABLE Length inch 1.00x10 39.4 0.01 10.0 0.394 1x10 39.4x10 0.10 25.4x10 2.54 25.4 Mass 1.00x10 2.20x10 1x10 2.20 0.454 Pressure kgf/cm Torr 7.50x10 1.02x10 1.36x10 9.81 x 10...
  • Page 114 For more information, contact to the nearest Service Office. Manufacture: BOC Edwards Japan Limited 2-4-1, Shibakoen, Minato-ku, Tokyo 105-0011 JAPAN Telephone: Domestic 03-5470-6530 International +81-3-5470-6530 Facsimile: Domestic 03-5470-6521 International +81-3-5470-6521 Copyright 2003 BOC Edwards Japan Limited. All rights reserved.
  • Page 115 Complete the Declaration (HS2) and send it to BOC Edwards before you dispatch the equipment. It is important to note that this declaration is for BOC Edwards internal use only, and has no relationship to local, national or international transportation safety or environmental requirements.
  • Page 116 • Read the Return of BOC Edwards Equipment - Procedure (HS1) before you complete this Declaration • Contact BOC Edwards to obtain a Return Authorisation Number and to obtain advice if you have any questions • Send this form to BOC Edwards before you return your equipment...
  • Page 117 Telephone number:_____________________________ Date of equipment delivery: ___________________ I have made reasonable enquiry and I have supplied accurate information in this Declaration. I have not withheld any information, and I have followed the Return of BOC Edwards Equipment - Procedure (HS1). Note: Please print out this form,...
  • Page 118 PLEASE CONTACT ANY OF THESE COMPANIES FOR DETAILS OF OTHER SALES AND SERVICE CENTRES IN YOUR AREA. BOC Edwards is part of BOC Limited. BOC Edwards and the stripe symbol are trade marks of The BOC Group. © BOC Edwards 2003 Produced by Technical Publicity Techpublicity@edwards.boc.com...

This manual is also suitable for:

Stp-a2203cStp-a2203cv

Table of Contents