BOC Edwards EXT250M/100CF Manuals

Manuals and User Guides for BOC Edwards EXT250M/100CF. We have 1 BOC Edwards EXT250M/100CF manual available for free PDF download: Instruction Manual

BOC Edwards EXT250M/100CF Instruction Manual

BOC Edwards EXT250M/100CF Instruction Manual (48 pages)

Turbomolecular Pump

Brand: BOC Edwards | Category: Water Pump | Size: 1 MB

Table of Contents

Table of Contents
3
1 Introduction

7
2 Technical Data

12
- General
  12
- Pumping Media
  12
- EXT250M Without Gas Purge
  12
- EXT250M with Gas Purge
  13
- Vent Gas Specification and Vent Control Data
  13
- Purge Gas Specification
  13
- Cooling-Water
  14
- EXT250M Turbomolecular Pump Dimensions (MM)
  16
3 Installation

17
- Unpack and Inspect
  17
- Typical Installation
  17
- General
  17
- Typical Pumping System
  18
- Protection of the Safety Bearings
  19
- Connect the EXT250M to Your Vacuum System
  19
- Inlet-Screen
  19
- Correct Installation of the Inlet-Screen
  19
- Mechanical Fixing
  20
- Base Mounting
  20
- Inlet Connection
  21
- Backing Connection
  21
- Vent-Valve Connection and Control
  22
- Vent Configurations
  22
- Vent-Valve Orifice Diameter (with Atmospheric Pressure at the Inlet of the Vent-Valve)
  23
5 Vent-Valve Orifice Diameter

23
6 Pump Cooling Methods for Different Applications

26
- Forced-Air Cooling
  27
4 Operation

28
- Start-Up
  28
- Standby
  29
- Shut-Down
  29
- Safety Interlocks and Control-System
  30
- Emergency Operation : Loss of Magnetic Suspension
  30
- General
  30
- Emergency Shutdown
  31
- Excessive Vibration
  31
  - Bakeout
    31
- Maintenance
  32
  - Introduction
    32
  - Bearing Life
    32
  - Rotor Life
    32
  - Clean the Pump
    33
7 Fault Finding

34
- Storage and Disposal
  38
  - Storage
    38
  - Disposal
    38
- Service, Spares and Accessories
  39
  - Introduction
    39
  - Service
    39
  - Spares
    39
    
    ISX Inlet-Screen
    39
    
    WCX Water-Cooler
    39
    
    Inlet-Flange Seals
    40
    
    EXC300M Controller
    40
    
    Pump-To-Controller Cable
    40
  - Accessories
    40
    
    Installation
    40
    
    BX Bakeout Band
    40
    
    FL20K Foreline Trap
    41
    
    TAV Vent-Valve and Vent-Port Adaptor
    41
    
    ACX Air-Cooler
    41
    
    Vibration Isolators
    41
    
    PRX Purge-Restrictor
    41
    
    VRX Vent-Restrictor
    42
- Installation of EXT250M Optional Accessories (and Spares)
  43
- Return of Boc Edwards Equipment
  45

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