Related Manuals for BOC Edwards EO2K
Summary of Contents for BOC Edwards EO2K
- Page 1 B304–09–880 Issue G Original Instruction Manual EO2K, EO4K and EO6K Diffusion Pumps...
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Page 3: Table Of Contents
Make the electrical connections 3.5.1 Introduction 3.5.2 Connect the heater electrical supply 3.5.3 Connect the fan electrical supply (EO2K air-cooled pump only) Fit optional thermal snap-switches Connect the cooling-water pipelines (water-cooled pumps only) Leak-test the system Fill the pump with fluid 3.9.1 Safety of vapour pump fluids 3.9.2... - Page 4 EO2K, EO4K and EO6K Diffusion Pumps Section Page OPERATION PAGE General safety Check the electrical safety of the pump 4.2.1 Check the earth (ground) continuity 4.2.2 Check the insulation resistance of the heaters Start-up Readmission of air to your vacuum system...
- Page 5 EO2K, EO4K and EO6K Diffusion Pumps ILLUSTRATIONS PAGE Figure Page Sectional view of the EO2K pump (water-cooled version) Sectional view of the EO2K pump (air-cooled version) Sectional view of the EO4K pump Sectional view of the EO6K pump EO2K pumping speed (l s...
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Page 7: Introduction
PAGE Scope and definitions This manual provides installation, operation and maintenance instructions for the BOC Edwards EO2K, EO4K and EO6K Diffusion Pumps, abbreviated to “EO pump” or “pump” in the remainder of this manual. You must use the pumps as specified in this manual. Read this manual before you install and operate the pump. -
Page 8: Description
The condenser has a pre-formed stainless steel cooling-coil wound around it for optimum cooling. The EO2K pump is also available as an air-cooled pump. Refer to Figure 2. On the air-cooled EO2K pump, the backing condenser has cooling-fins (2) and a cooling-jacket (1) is attached to the pump-body’... -
Page 9: Operation With High Ambient Humidity
Detailed information about these recommendations is outside the scope of this manual. If you need more information about the operation of the pump with high ambient humidity, request a copy of our Application Note P400-50-000 from your supplier or BOC Edwards. Accessories A wide range of accessories is available for the EO pumps. -
Page 10: Sectional View Of The Eo2K Pump (Water-Cooled Version)
NW10 clamping-ring Heater assembly securing nut switch mounting plate Backing connection Heater Second-stage jet Condenser baffles Radiation shield First-stage jet Backing-spout Pump-body Pump inlet-flange Co-Seal Figure 1 – Sectional view of the EO2K pump (water-cooled version) Issue G Aug 06... -
Page 11: Sectional View Of The Eo2K Pump (Air-Cooled Version)
EO2K, EO4K and EO6K Diffusion Pumps PAGE Cooling-air Process gases Pump fluid vapour Pump-body cooling-jacket Condenser cooling-fins Cooling-fan chamber Cooling-fan electrical cable Earth (ground) stud Cooling-fan Figure 2 – Sectional view of the EO2K pump (air-cooled version) Issue G Aug 06... -
Page 12: Sectional View Of The Eo4K Pump
EO2K, EO4K and EO6K Diffusion Pumps PAGE Process gases Pump fluid vapour Top-jet pin Ejector-jet 19. Cooling-coil Guard-ring assembly Heater terminal block 20. Interior jet assembly NW25 elbow Terminal-box 21. Cooling-fail thermal snap- NW25 centring-ring Heater electrical lead switch mounting plate... -
Page 13: Sectional View Of The Eo6K Pump
EO2K, EO4K and EO6K Diffusion Pumps PAGE Process gases Pump fluid vapour Top-jet pin Heater terminal block Interior jet assembly Guard-ring assembly Terminal-box Cooling-fail thermal snap- NW25 elbow Heater electrical lead switch mounting plate NW25 centring-ring Heater assembly securing nut... - Page 14 EO2K, EO4K and EO6K Diffusion Pumps PAGE This page intentionally blank. Issue G Aug 06...
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Page 15: Technical Data
EO2K, EO4K and EO6K Diffusion Pumps TECHNICAL DATA PAGE Operating and storage conditions Typical surface temperature during operation > 200 Maximum surface temperature during operation 250 C (pump body), 400 C (pump base) Table 1 – Operating and storage conditions Performance Note: As specified in Section 1.4, pump performance depends on a number of factors. -
Page 16: Eo2K Pumping Speed
EO2K, EO4K and EO6K Diffusion Pumps PAGE Figure 5 – EO2K pumping speed (l s ) against pressure (mbar/Pa) Figure 6 – EO4K pumping speed (l s ) against pressure (mbar/Pa) Issue G Aug 06... -
Page 17: Eo6K Pumping Speed
EO2K, EO4K and EO6K Diffusion Pumps PAGE Figure 7 – EO6K pumping speed (l s ) and throughput (mbar l s ) against pressure (mbar/Pa) Issue G Aug 06... -
Page 18: Mechanical Data
EO2K, EO4K and EO6K Diffusion Pumps Mechanical data PAGE EO2K EO4K EO6K Dimensions Figure 8 Figure 9 Figure 10 8 kg 18 kg Mass 4 kg § 7 kg 12 x Ø8.8 holes ISO 160 8 x Ø11 holes Inlet connection on 114.3 PCD... -
Page 19: Eo2K Dimensions (Mm)
EO2K, EO4K and EO6K Diffusion Pumps PAGE Water-cooled Air-cooled Figure 8 – EO2K dimensions (mm) Figure 9 – EO4K dimensions (mm) Issue G Aug 06... -
Page 20: Eo6K Dimensions (Mm)
EO2K, EO4K and EO6K Diffusion Pumps PAGE Figure 10 – EO6K dimensions (mm) Issue G Aug 06... -
Page 21: Cooling-Air Data (Air-Cooled Eo2K Only)
Cooling-air data (air-cooled EO2K only) PAGE Maximum air temperature Minimum cooling-air flow rate 40 l s Table 6 – Cooling-air data (air-cooled EO2K only) Electrical data Electrical supply 110-125 V, 210-225 V or 230-250 V, 1-phase, 50/60 Hz EO2K EO4K... - Page 22 EO2K, EO4K and EO6K Diffusion Pumps PAGE This page intentionally blank. Issue G Aug 06...
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Page 23: Installation
EO2K, EO4K and EO6K Diffusion Pumps INSTALLATION PAGE Safety WARNING Obey the safety instructions given below and take note of appropriate precautions. If you do not, you can cause injury to people and damage to equipment. • A suitably trained and supervised technician must install the pump. -
Page 24: Checklist Of Items: Eo2K Fitting-Pack
5 x 15 mm inside diameter nitrile ‘O’ ring Water connection couplings and ferrules Washers: inch BSF Studs Nuts: norm inch BSF Table 10 – Checklist of items: EO2K fitting-pack * Only supplied with water-cooled pumps. Quantity Description Check ( ) Seal pack NW25 elbow... -
Page 25: Locate The Pump
(see Section 3.9). If you have an air-cooled EO2K pump, ensure that the cooling-air inlet to the fan is not blocked or obstructed so that air flow through the fan is restricted, and ensure that the temperature of the cooling- air does not exceed the maximum specified in Section 2.6), otherwise the cooling-fail thermal snap-... -
Page 26: Free-Standing Installation
If you use flexible pipelines, you must ensure that you use pipelines which have a maximum pressure rating which is greater than the highest pressure that can be generated in your system. We recommend that you use BOC Edwards flexible pipelines. Issue G... -
Page 27: Connect The Pump Inlet And Outlet
Note: If your pump is not free-standing, you will have connected the inlet in Section 3.3.2. On EO2K and EO4K pumps, use the seals supplied with the pump to connect the pump inlet and outlet to your vacuum and exhaust system pipelines. On EO6K pumps, you must supply your own seal to connect the pump inlet to your vacuum system pipeline, and use the seal supplied with the pump to connect the pump outlet to your exhaust system pipeline. -
Page 28: Figure
EO2K, EO4K and EO6K Diffusion Pumps PAGE Connection with bolted rotatable flange Co-Seal Connection with clamped flange Retaining-ring Rotatable flange Pump inlet-flange Claw clamp Figure 11 – EO4K inlet connection options Issue G Aug 06... -
Page 29: Make The Electrical Connections
EO2K, EO4K and EO6K Diffusion Pumps Make the electrical connections 3.5.1 Introduction PAGE WARNING A competent electrician must make the electrical connections to the pump. WARNING Ensure that the electrical installation of the pump conforms with your local and national safety requirements, and make the electrical connections as described in this section. -
Page 30: Connect The Heater Electrical Supply
(5) and the cooling-fail thermal snap-switch mounting plate (see Figures 1 to 4). On air-cooled EO2K pumps, connect a suitable earth (ground) conductor between the earth (ground) connection (5) and the earth (ground) stud on the cooling-fan cowling (Figure 2, item 5). -
Page 31: Recommended Electrical Supply And Control Circuit
EO2K, EO4K and EO6K Diffusion Pumps PAGE Pump electrical supply Pump heaters Relay latch contact RL1 RCCB Relay coil RL1 Backing pressure interlock switch Fuse Stop button Cooling-fail thermal snap-switch Power relay RL1 Start button Control electrical supply Figure 12 – Recommended electrical supply and control circuit... -
Page 32: Connect The Cooling-Water Pipelines (Water-Cooled Pumps Only)
EO2K, EO4K and EO6K Diffusion Pumps Connect the cooling-water pipelines (water-cooled pumps only) PAGE WARNING Do not fit quick-fit couplings to the pump cooling-water inlet and outlet. Use of these couplings can result in trapped volumes of water. This water may boil, the cooling-coil may fracture and hot water and steam ejected from the cooling-coil may injure people. -
Page 33: Leak-Test The System
EO2K, EO4K and EO6K Diffusion Pumps PAGE EO2K Cooling-water inlet EO4K Cooling-water outlet EO6K Figure 14 – Cooling-water connections Leak-test the system The EO pumps are stringently leak-tested before despatch. After you have installed the pump, leak-test the system before you fill the pump with pump fluid, and seal any leaks found; outgassing from the fluid may give false test results. -
Page 34: Fill The Pump With Fluid
EO2K, EO4K and EO6K Diffusion Pumps Fill the pump with fluid 3.9.1 Safety of vapour pump fluids PAGE Vapour pump fluids are not dangerous when used in a pump that is operated correctly. But if the pump is operated incorrectly and is allowed to get to very high temperatures, the pump fluid can go through a process of thermal breakdown. -
Page 35: Filling Procedure
EO2K, EO4K and EO6K Diffusion Pumps Vapour Auto- Break- Thermal Type of danger Possible pump fluid Edwards ignition down breakdown injury PAGE product temp. temp. products (other fluid) ≈ 500 Silicone fluids DC702, Decomposed Negligible Negligible (methyl DC704EU, hydrocarbons phenyl... - Page 36 EO2K, EO4K and EO6K Diffusion Pumps PAGE This page intentionally blank. Issue G Aug 06...
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Page 37: Operation
• Always allow the pump to cool down before you turn off the cooling-water supply. Allow at least 30 minutes for the EO2K and EO4K pumps, and at least 45 minutes for the EO6K pumps. • Always allow the pump to cool down (see above) before the pump-inlet and backing pressures are allowed to rise above their critical values. -
Page 38: Check The Electrical Safety Of The Pump
Then: If all of the resistances are < 0.1 Ω: continue at Section 4.2.2. • • Otherwise, contact your supplier or BOC Edwards for advice; do not continue to operate the pump. 4.2.2 Check the insulation resistance of the heaters If the heater in the EO pump has absorbed moisture while the pump was switched off, the insulation resistance of the heater may be too low. -
Page 39: Start-Up
EO2K, EO4K and EO6K Diffusion Pumps Start-up PAGE WARNING If you have incorporated isolation valves in both the cooling-water supply and return pipelines, ensure that both valves are open before you switch on the pump. If you do not, water trapped in the cooling-coil may boil, the cooling-coil may fracture, and hot water and steam which escapes from the cooling-coil may injure people. -
Page 40: Re-Evacuation Of Your Vacuum System
For more information about the operation of the pump in high ambient humidity, request a copy of our Application Note P400-50-000 from your supplier or BOC Edwards. If you have incorporated isolation valves in both the cooling-water supply and return pipelines: •... -
Page 41: Typical Pumping System Configuration
EO2K, EO4K and EO6K Diffusion Pumps PAGE Vacuum system Vacuum system air-admittance valve High vacuum gauge head Roughing-valve Backing-valve Backing gauge head Backing-pump air admittance valve Backing-pump EO pump Vacuum system isolation-valve Figure 15 – Typical pumping system configuration Issue G... -
Page 42: Shut Down The Eo Pump
EO2K, EO4K and EO6K Diffusion Pumps 4.6.2 Shut down the EO pump PAGE WARNING Do not admit air into the EO pump through any port until the pump has cooled to ambient temperature. If you do, the pump fluid may ignite, or expansion of admitted air can cause hot fluid to be ejected from the pump. -
Page 43: Maintenance
Allow the EO pump to cool fully before you touch any part of the pump or attempt to move it. (Allow at least 30 minutes for EO2K and EO4K pumps; allow at least 45 minutes for EO6K pumps.) Only open the pump to atmospheric pressure when it is cool. -
Page 44: Tools And Equipment Required
Abrasive pads • Lint free wipes • Torque wrench with 13 mm socket (for EO2K and EO4K pumps) or inch socket (for EO6K pumps) Maintenance plan The plan shown in Table 14 below lists the maintenance operations necessary to maintain the EO pump in normal use. -
Page 45: Check The Pump Fluid-Level
EO2K, EO4K and EO6K Diffusion Pumps Check the pump fluid-level PAGE WARNING Wear the appropriate personal protective equipment when you drain the fluid from the pump. Hot fluid can cause burns, and dangerous substances may be present if the pump fluid has undergone thermal breakdown. -
Page 46: Inspect The Pump Fluid Condition
EO2K, EO4K and EO6K Diffusion Pumps Inspect the pump fluid condition PAGE WARNING Wear the appropriate personal protective equipment when you inspect the pump fluid condition. Dangerous substances may be present if the pump fluid has undergone thermal breakdown. If the EO pump fails to give satisfactory performance on a leak tight system, inspect the condition of the pump fluid as described below. -
Page 47: Clean The Pump Components
The centring pin in the top-jet cap must be flush with the guard-ring cap. Ensure the guard-ring is positioned centrally over the top-jet cap, then carefully tighten the retaining screw (on the EO2K) or the adjuster screws (on the EO4K/EO6K) to secure the guard-ring. Do not over-tighten the screws. -
Page 48: Clean The Radiation Shield
EO2K, EO4K and EO6K Diffusion Pumps Refit the heater assembly to the pump: refer to Section 5.8.2. Refit the radiation shield: refer to Section 5.7. PAGE Check that the pump-inlet-flange is thoroughly clean then position the Co-Seal or ‘O’ ring assembly (as applicable) on the flange. -
Page 49: Fit The New Heater
Tighten the heater assembly securing nut: • On EO2K and EO4K pumps, tighten the nut to a torque in the range 8 to 10 Nm. • On EO6K pumps, tighten the nut to a torque in the range 10 to 12 Nm. -
Page 50: Fault Finding
EO2K, EO4K and EO6K Diffusion Pumps Symptom Check Actions PAGE The ultimate pressure is poor. Is there a leak in the vacuum system, Locate and seal the leak. virtual or real ? Is the vacuum system dirty ? Clean the vacuum system. - Page 51 EO2K, EO4K and EO6K Diffusion Pumps Symptom Check Actions There are inlet pressure surges. Is the heater input incorrect ? Check and rectify if necessary. PAGE Is the fluid outgassing ? Inspect the condition of the pump fluid. Refill with new fluid if necessary.
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Page 53: Storage And Disposal
EO2K, EO4K and EO6K Diffusion Pumps STORAGE AND DISPOSAL PAGE Storage Use the procedure below to store the EO pump: Shut down the pump as described in Section 4.6. Isolate the pump from the electrical supply, disconnect it from your vacuum system and drain the pump fluid as described in Section 5.4. - Page 54 EO2K, EO4K and EO6K Diffusion Pumps PAGE This page intentionally blank. Issue G Aug 06...
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Page 55: Service, Spares And Accessories
The majority of these centres employ Service Engineers who have undergone comprehensive BOC Edwards training courses. Order spare parts and accessories from your nearest BOC Edwards company or distributor. When you order, state for each part required: •... -
Page 56: Eo2K Pump Spares
EO2K, EO4K and EO6K Diffusion Pumps Spare Item Number Heaters PAGE 0.4 kW, 110-125 V H017-00-277 0.4 kW, 210-225 V H017-00-275 0.4 kW, 230-250 V H017-00-274 0.45 kW, 110-125 V H017-00-273 0.45 kW, 210-225 V H017-00-276 0.45 kW, 230-250 V... -
Page 57: Eo2K Pump Accessories
EO2K, EO4K and EO6K Diffusion Pumps Accessory Item Number H5L2K baffle and isolation-valve B464-01-000 PAGE QSB63 manually-operated valve B424-02-000 QSB63P pneumatically-operated valve B424-03-000 63 mm rotatable flange pack C100-07-010 Cooling-fail thermal snap-switch B023-02-000 Table 20 – EO2K pump accessories Accessory... - Page 58 EO2K, EO4K and EO6K Diffusion Pumps PAGE This page intentionally blank. Issue G Aug 06...
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Page 59: Return Of Boc Edwards Equipment
7. If the equipment is large, strap the equipment and its accessories to a wooden pallet. If the equipment is too small to be strapped to a pallet, pack it in a suitable strong box. 8. Fax or post a copy of the Declaration (HS2) to BOC Edwards. The Declaration must arrive before the equipment. - Page 60 Read the Return of BOC Edwards Equipment - Procedure (HS1) before you complete this Declaration • Contact BOC Edwards to obtain a Return Authorisation Number and to obtain advice if you have any questions • Send this form to BOC Edwards before you return your equipment...
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- Page 62 PLEASE CONTACT ANY OF THESE COMPANIES FOR DETAILS OF OTHER SALES AND SERVICE CENTRES IN YOUR AREA. BOC Edwards is part of BOC Limited. BOC Edwards and the stripe symbol are trade marks of The BOC Group. © BOC Edwards 2003 Produced by Technical Publicity Techpublicity@edwards.boc.com...
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