Alcatel ADP One Series User Manual

A - Introduction
B - Start-up
Alcatel - High Vacuum Technology - User's Manual ADP/ADS
ADP/ADS
User's manual
ADP/ADS Series One .............................................
The various versions of ADP Series One ......................
ADP/ADS Serie One Dry pumps
for semi-conductor's industry .......................................
Types of monitoring systems ......................................
Dry pump operational principle .................................
The accessories .......................................................
Technical characteristics.............................................
Safety instructions ....................................................
Unpacking / Storage ...............................................
Positioning the pump in pumping installation .................
Installing anti-vibration pads........................................
Modular version - Layout ..........................................
Filling the pump oil housings ......................................
Connection to the cooling circuit ...............................
Inert gas purge connection (N
Nitrogen purge flow sensor .......................................
Connection to the pumping circuit .............................
Electropneumatic exhaust valve connection (withdrawal)
Pump power supply ...............................................
Water flowrate and gas purge according to processes...
Checking the rotational direction ..............................
Remote control plug connection (M3 monitoring) .........
Remote control plug connection (M1 monitoring) .........
RS 232 or RS 485 link wiring ..................................
Use of the Serial link (Service centers) ........................
Installation of silencer heating kit ...............................
Contents
plug) ..........................
2
A 10
A 20
A 30
A 40
A 50
A 60
A 70
B 00
B 10
B 20
B 30
B 40
B 50
B 60
B 70
B 80
B 90
B 100
B 110
B 120
B 130
B 140
B 141
B 150
B 160
B 170
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