Alcatel IPUP A100 Instruction Manual
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Alcatel IPUP A100 Instruction Manual

Compact dry vacuum pump
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ALCATEL VACUUM TECHNOLOGY FRANCE
98, avenue de Brogny --- BP 2069
74009 ANNECY Cedex --- France
TEL. (33) 4 50 65 77 77
FAX : (33) 4 50 65 77 89
IPUP A100 Instruction manual
Edition: 10
Date: 09/00
Manual P/N 107782

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  • Page 1 ALCATEL VACUUM TECHNOLOGY FRANCE 98, avenue de Brogny --- BP 2069 74009 ANNECY Cedex --- France TEL. (33) 4 50 65 77 77 FAX : (33) 4 50 65 77 89 IPUP A100 Instruction manual Edition: 10 Date: 09/00 Manual P/N 107782...
  • Page 2 L/LI version: for clean pumping. Advantages l Reduced volume and footprint. l Low operating cost. l High performance (pumping speed and ultimate pressure). l Advanced monitoring functions. Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 2...
  • Page 3 Design for reliability. l Reduced power consumption. l Reduced water consumption. l Reduced weight. New control interface l Amat SPI interface. l Amat device net interface. l RS 232/485 interface. 2 / 2 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...

  • Page 4: Table Of Contents

    ..... . . C 50 IPUP A100P version 1 / 3 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...
  • Page 5 ....... . 2 / 3 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...
  • Page 6 Warnings are used when failure to observe instructions could result in injury or death. WARNING Cautions are used when failure to observe instructions could result in significant damage to equipment and/or facilities. CAUTION 3 / 3 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...

  • Page 7: Ipup A100 Operating Principle

    ......A 70 SEMI S2 certificate Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 1...
  • Page 8 (P version only), l by integrating the silencer inside the pump to reduce by---product deposition. MULTI---STAGE PUMP WITH ROOTS TECHNOLOGY IPUP A100 pump consists of 5 Roots type stages. The two rotors rotate without touching each other. INLET EXHAUST Stage 5...
  • Page 9 Neutral gas purging for the bearings is imperative for corrosive processes. Tightness at high pressure side The bearings are lubricated by splashing oil. The oil trap is sealed from stage 5 by a trap and a deflector. 2 / 3 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...
  • Page 10 Motor casing Incorporated liner Electrical liner Tightness at shutdown The pump is fitted with an antisuckback valve in the exhaust tube which prevents the exhaust from being sucked back. Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 3 / 3...

  • Page 11: Ipup A100 Description

    A 20 IPUP A100 description IPUP A100 DESCRIPTION The IPUP A100 pump includes an intelligent monitoring system. This pump is fully integrated in a compact and enclosed frame which includes: l the control panel located on the front panel, l the facilities panel located on the rear panel, An Amat SPI connector located on the rear facilities panel allows pump control and communication with the process tool.
  • Page 12 M Motor sensor Intermediate port for IPUP A100PI version only INLET Monitoring Supply block Pump Inert gas Water IN Motor Water OUT Frequency converter EXHAUST SILENCER Anti suckback valve 2 / 3 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...
  • Page 13 ©¢£ Transfer stage ¤ High pressure stage Intermediate port for IPUP A100LI version only INLET Monitoring Pump Water IN Motor Water OUT Frequency converter EXHAUST SILENCER Anti suckback valve 3 / 3 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...

  • Page 14: Ipup A100 Monitoring System

    A 30 IPUP A100 monitoring system GENERAL Each IPUP A100 pump includes an intelligent monitoring system. DESCRIPTION Electrical cabinet This is located at the top of the machine. It is linked with the main power supply, pump motor and electronic cabinet.
  • Page 15 (valves) Sensors Hand held display module MAIN FUNCTIONS l Motor protection. l Pump temperature monitoring and control. l Exhaust pressure monitoring (P version only). l Maintenance time control. 2 / 2 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...

  • Page 16: Ipup A100 Technical Characteristics

    Variable speed control, min. 20 Hz / max. 100 Hz. Oil charge is filled at factory. Do not modify the oil level. According to CE regulations, IPUP A100 can withstand a supply voltage variation of ¦ 10%. Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...
  • Page 17 A 40 IPUP A100 technical characteristics IPUP A100 DIMENSIONS AND INTERFACING (1/2) Bottom view Right view Front view See detail S Left view Hand held display module connector 2 / 9 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...
  • Page 18 A 40 IPUP A100 technical characteristics IPUP A100 DIMENSIONS AND INTERFACING (2/2) Right view Front view ipup A100 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 3 / 9...
  • Page 19 A 40 IPUP A100 technical characteristics IPUP A100 STACKING DIMENSIONS AND INTERFACING (1/2) Right view Front view Left view 4 / 9 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...
  • Page 20 A 40 IPUP A100 technical characteristics IPUP A100 STACKING DIMENSIONS AND INTERFACING (2/2) Right view Front view A100 STACKING CG & WEIGHT DISTRIBUTION ipup A100 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 5 / 9...
  • Page 21 A 40 IPUP A100 technical characteristics IPUP A100P DIMENSIONS Right view Front view Left view 6 / 9 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...
  • Page 22 A 40 IPUP A100 technical characteristics IPUP A100PI DIMENSIONS Right view Front view Left view Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 7 / 9...
  • Page 23 A 40 IPUP A100 technical characteristics IPUP A100L DIMENSIONS Right view Front view Left view 8 / 9 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...
  • Page 24 A 40 IPUP A100 technical characteristics IPUP A100LI DIMENSIONS Right view Front view Left view Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 9 / 9...

  • Page 25: Table Of Ipup A100 Part Numbers

    IPUP A100P---Point of use Pump Harsh Duty---High Voltage Option 800677 IPUP A100---Point of use Pump Instruction Manual 107782 IPUP A100P---Point of Use Pump---Harsh Duty---EPI Configuration 800998 IPUP A100L---Point of Use Pump---Clean Duty---Power Start Option 800675 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 1...

  • Page 26: Ce Marking Certificate

    A 60 CE marking certificate Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 1...

  • Page 27: Semi S2 Certificate

    A 70 SEMI S2 certificate Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 1...

  • Page 28: Safety Instructions

    ....RS 232 or RS 485 link wiring B 80 ... Connection to the pumping circuit Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 1...
  • Page 29 Disconnect main electrical cable before any intervention. Hazardous voltage enclosed. Voltage or current hazard sufficient to cause shock. Disconnect and lockout power before servicing. WARNING Any intervention must be done by trained personnel only. Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 4...
  • Page 30 Operating conditions may generate temperatures justifying particular attention on the part of the user (external surfaces > 70°C on exhaust connections). Contact may cause burns. Always use gloves before servicing. 2 / 4 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...
  • Page 31 B 00 Safety instructions l Alcatel has no control over the types of gases passing through this pump. Frequently, process gases are toxic, flammable, corrosive, explosive or otherwise reactive. Since these gases can cause serious injury or death, it is very important to plumb the exhaust of the pump to the facility’s hazardous gas exhaust system which...
  • Page 32 It specifies that any preventive maintenance operation can only be performed by trained personnel. 4 / 4 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...
  • Page 33 PRECAUTIONS l If the equipment has been damaged, take necessary steps with the carrier and inform Alcatel, if necessary. In all cases, Alcatel recommends that the packaging be kept, in the event that the equipment needs to be transported or put into prolonged storage.
  • Page 34 Unpacking / Handling / Storage SHIPPING SCREWS PROCEDURE The IPUP A100 pumps are sent from the factory with two screws to hold the functional block in place during shipping. These screws must be loosened before pump is operated. Also, located on the top of the pump there is a warning sign posted.
  • Page 35 With a hoist and a sling with three arms, lift the pump using shackles. Pump Weight in lbs (kg) IPUP A100 220.4 (100) Hoist Bracket M6 Chc screw Sling Hook Shackle 3 / 6 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...
  • Page 36 The pump is equipped with 2 fixed wheels, 1 swivelling front wheel, a removable handle provided to move the pump easily. Fixed wheel Removable handle Swiveling front wheel Interlocking device 4 / 6 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...
  • Page 37 Push the handle to move the pump. When the pump is in the desired location, position it (see B 20). Then store the handle under the frame by proceeding in reverse manner. 5 / 6 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...
  • Page 38 If the pump is going to be put into storage, the inlet and exhaust connections should be blanked off. This equipment can be stored at an ambient temperature between ---10°C and +60°C. 6 / 6 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...
  • Page 39 (see B 10). POSITIONING THE PUMP l The pump must operate in the horizontal position. It may not be used standing on its end. INLET EXHAUST Horizontal surface PROHIBITED 1 / 3 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...
  • Page 40 H Lock the upper pump by adjusting its jacks solidly on the lower pump cover. H Secure the stacked pump by screwing a CHc M8 screw in each assembly bracket 2 / 3 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...
  • Page 41 4 tapped holes M10 for stackable frame or specific fixation system (anti earthquake) Upper pump frame Lower pump cover Note : All handling devices are designed for handling one pump only. 3 / 3 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...

  • Page 42: Connection To The Cooling Circuit

    Water flow: min. 100 l/h l Deionized water compatible If the ”solid particle size” and ”solid pollution” water characteristics values can not be reached, install a filter on the cooling connection. Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 2...
  • Page 43 Connect the water pipes to the quick ---connect connectors. l Water inlet marked ”IN” (1/4 inch NPT quick female connector) l Water outlet marked ”OUT” (1/4 inch NPT quick male connector) 2 / 2 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...
  • Page 44 CONNECTION RS 485 Reserved for future use Pressure regulator 1/4 Swagelock Pipe 6.35 mm OD 1/4 inch tubing Supplied in the pump Supplied by the customer Rear panel Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 2...
  • Page 45 LEL. The N flow rate can be adjusted with the pressure regulator depending on processes (see C 60). Manometer Pressure regulator purge Rear panel 2 / 2 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...

  • Page 46: Electrical Connection

    However, the electrical connection of the main power supply is provided by the process tool. An out of phase condition is corrected automatically by the pump electronics. IPUP A100 does not include any operator replaceable fuses. PROTECTIVE EARTH CONNECTION An IEC 417q5019 symbol is located inside the enclosure, under the monitoring cooling plate near the main protective conductor terminal.
  • Page 47 Fit the pipe clamp on the female connector collar (position the fixing holes correctly). l Secure the two M3 fixing screws. Female connector Ferrule 2 fixing screws M3 Pipe clamp 2 / 2 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...

  • Page 48: Amat Smart Pump Interface Connection

    These contacts can be monitored or used by a system external to the pump. AMAT SPI CONNECTOR LOCATION IPUP A100 pump warnings and hazards are monitored on the SPI connector with exception of maintenance warnings. Remote control connection is realized with the Amat SPI connector located at the rear of the pump.
  • Page 49 0 VDC=100 Hz 0 V ---10 VDC Variable rotation speed 10 VDC=20 Hz control signal 0 VDC Variable rotation speed control common Note: Dry output contacts are software monitored 2 / 5 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...
  • Page 50 Close Close Open Pump running + warning Close Open Close Close Close Pump stopped + hazard Open Close Open Close Open Flow defect Close Open Close Open Open 3 / 5 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...
  • Page 51 0 VDC=100 Hz 0 V ---10 VDC Variable rotation speed 10 VDC=20 Hz control signal 0 VDC Variable rotation speed control common Note: Dry output contacts are software monitored 4 / 5 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...
  • Page 52 Close Close Close Pump stopped Open Close Close Close Open Pump running + warning Close Open Close Close Close Pump stopped + hazard Open Close Open Close Open 5 / 5 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...

  • Page 53: Rs 232 Or Rs 485 Link Wiring

    The syntax of commands and messages is dealt with in a separate chapter (see C 90). EXAMPLES OF POSSIBLE CONNECTION Link RS 232 with a single monitoring system 1 / 1 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...

  • Page 54: Connection To The Pumping Circuit

    It is delivered with each IPUP A100P/PI version pump. l flow: 5 cfm l static pressure: ---0.14 inch of water measured at the secondary exhaust port l exhaust: DN25 ISO KF 1 / 1 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...

  • Page 55: Operation (Cont'd)

    ..... . . C 90 Use of the serial link Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 1...
  • Page 56 Green on = pump is running and no problems, l Yellow on and green on = warning, l Red on = hazard. Pump will automatically shutdown and will not restart until corrected. Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 2...
  • Page 57 Remote control of a single pump or group of pumps through RS 232/485 serial link The pump can be controlled through the RS 232/485 serial link (see B 70 and C 90). 2 / 2 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...

  • Page 58: Start Up Of The Monitoring System

    Press to validate the selection of a menu, a parameter or a value Configuration validation key ENTER Press to validate an answer to a requested information Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 3...
  • Page 59 The monitoring system has been configured in the factory. This configuration allows the pump to run (see C 30). If necessary, parameters may be customized (see C 50 and C 51). 2 / 3 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...
  • Page 60 MONTH with key YEAR ENTER Validate with the HOUR Update the needed parameters and DEFINITION MENU SETTING validate Return to the main menu by MAINTENANCE pressing successively. MANAGEMENT Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 3 / 3...

  • Page 61: Use Of The Monitoring System For Pumping Operation

    The purge will start or stop by pressing the PURGE control key located on the hand held display module. When the purge gas is selected, the message N2 is displayed on the hand held display module. Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 3...
  • Page 62 Do not move a pump when in operation. Note : During pump start up, the temperature is not monitored (no warning, no hazard) until the pump has reached the programmed temperature value (P version only). 2 / 3 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...
  • Page 63 > 1700 mbar and high pressure stage ± 70° C, then the message pumping stopped is displayed. The message PUMPING STOPPED appears on the screen: 120H REM N2 PUMPING STOPPED 09/30/99 10H50 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 3 / 3...

  • Page 64: Monitoring System Parameters

    The monitoring system can be customized according to the customer application, by programing the parameters of the various menus listed in C 50 and C 51 with pump stopped. Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 1...

  • Page 65: Monitoring System Function Table Ipup A100P Version

    Parameters can be transfered from one pump to another. This can be done if the pump is to be replaced or when installing a new pump (see C 70). Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 4...
  • Page 66 Line N2 will not be supplied and the internal temperature regulation will be false. CAUTION This will quickly wear down the pump’s parts. Select the pump for the process it is being used in. 2 / 4 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...
  • Page 67 LONGED DATE AND day/month/year/hour/ TIME minute TEMPERA- ° C / ° F Celsius Celsius/Fahrenheit TURE UNIT PRESSURE mbar/Torr/PSI/hPa mbar UNIT Contrast Press + or -- Contrast display setting Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 3 / 4...
  • Page 68 Valid by pressing Enter Key. OPERATING TIME Displays the operating times of the various components. LAST WARNING(S) Displays the 10 last recorded warnings. LAST ALARM(S) Displays the 10 last recorded hazards. 4 / 4 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...

  • Page 69: Monitoring System Function Table Ipup A100L Version

    Parameters can be transfered from one pump to another. This can be done if the pump is to be replaced or when installing a new pump (see C 70). Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 4...
  • Page 70 Do not set an L pump to a P pump configuration. The N2 flow and internal temperature alarms will quickly shut off the pump. CAUTION Select the pump for the process it is being used in. 2 / 4 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...
  • Page 71 1000 to 42000 h 26000 h PART. MAINT. WARNING 13000 h 1000 to 42000 h l Maintenance warning parameters have to be set according to table (see E 10). Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 3 / 4...
  • Page 72 Valid by pressing Enter Key. OPERATING TIME Displays the operating times of the various components. LAST WARNING(S) Displays the 10 last recorded warnings. LAST ALARM(S) Displays the 10 last recorded hazards. 4 / 4 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...

  • Page 73: Gas Purge And Temperature According To The Semiconductor Processes

    Note : This table is only for information. It can be adapted to specific customer process. l For any other processes or chemicals not referenced above, contact ALCATEL for compatibility. Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 1...

  • Page 74: Saving And Loading Of Pump Configuration (With Monitoring System)

    The former configuration is automatically reset. Loading parameters may result in creating software conflicts. After loading, configure manually the following parameters (temperature unit, pressure unit, serial link, time and date). CAUTION Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 1...

  • Page 75: Monitoring System Setting For Transport

    The pump start up is no longer possible and the hour counter is stopped. NOTE : when power comes on, STORAGE mode is automatically deleted. Date and time reset is only necessary (see C 20). Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 1...

  • Page 76: Use Of The Serial Link

    RS 485 ECHO : ENABLED ENTER SPEED : 9600 Validate the setting with the PARITY : 2 STOP BITS : DISABLED ADDRESS : Return to main menu with key. Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 6...
  • Page 77 The character <LF> is not taken account by the unit ADDress of unit, varies from 000 to 999 <CR> The response Example of dialog : E : q000SYSON<CR> R : q000OK..<CR> 2 / 6 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...
  • Page 78 XX = 00 : running time 01 : full overhaul 02 : P out maintenence 03 : reserved 04 : exhaust Maintenance 05 : reserved 06 : reserved Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 3 / 6...
  • Page 79 31---33 : reserved reserved separator character reserved 35---37 : reserved separator character separator character 69---72 : N2 purging on second 39---42 : analog input (mV) 4 / 6 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...
  • Page 80 A command such as: #000SEP044<CR> where “044” is the decimal ASCII code of the character “,” (comma). Command #000STA<CR> Response #000,00000,2,0080,2530,0127,1230,0000000000<CR> Only commands requiring the separator character are affected by the SEP command. Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 5 / 6...
  • Page 81 ERR1 : order fault ERR2 : parameter fault ERR3 : context fault ERR4 : checksum fault NOTE: ”The remote control mode” has priority on RS 232 or RS 485 commands. 6 / 6 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...

  • Page 82: Troubleshooting

    ....... . Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...

  • Page 83: First Level Of Troubleshooting

    This information can be read at any time using the menu. GENERAL ELECTRICAL DIAGRAM When troubleshooting the pump (using D 20) you may need to check the electrical components of the IPUP A100 (see G 10). Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 1...

  • Page 84: Diagnosis And Troubleshooting

    ....... . Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...

  • Page 85: Message Numbers

    N2 FLOW D 80 INTERNAL T° HIGH D 90 D 90 INTERNAL T° LOW EXHAUST MAINT. D 110 IPUP A100 LP MAINT. D 110 D 110 IPUP A100 MAINT. Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 1...

  • Page 86: Pump Does Not Start

    Switch to positon 1. Hand-- held diplay module RT1 switch inposition 0 is not illuminated l Check power supply. No main power l Call your Alcatel Service Other problem Representative. Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 1...

  • Page 87: Pump Does Not Start

    1-- 2 l Switch to positon 1. RT1 switch in position 0 No main power l Check power supply. l Call your Alcatel Service Other problem Representative. Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 1...

  • Page 88: Pump Does Not Start

    Connect 24 V. No 24 V between Amat SPI Pump does not start (see B 60) connector pins 1-- 2 l Call your Alcatel Service Other problem Representative. Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 1...

  • Page 89: Pump Does Not Start

    Other problem Representative. l Switch RT1 to ”0”. Pump in storage mode Message on display Then switch it on again. STOCK l Call your Alcatel Service Other problem Representative. Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 1...
  • Page 90 Check the setting of Insufficient purge flow nitrogen flow. l Check that warning level is Incorrect N2 warning level correctly set. setting l Call your Alcatel Service Other problem Representative. Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 2...
  • Page 91 Check the water supply. Hazard Motor temperature is > 75° C Wait for pump to cool. D10: MOTOR TEMP . l Call your Alcatel Service Other problem Representative. 2 / 2 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...

  • Page 92: Temperature Problem

    Call your Alcatel Service Other problem Representative. W16: INTERNAL T° LOW l Call your Alcatel Service Pump temperature < 10° C compared to temperature control Representative. setting value Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 2...
  • Page 93 +/-- 10° C but the display is 0 or 170° C l Check the water supply. Pump temperature is higher than Cooling problem hazard threshold l Call your Alcatel Service Other problem Representative. 2 / 2 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...

  • Page 94: Fault Message Display

    Check the N2 flow rate Exhaust pressure > 2500 mbar Hazard setting value. Check that the D01: EXHAUST PRESSURE exhaust pipe is not clogged. l Call your Alcatel Service Other problem Representative. Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 1...

  • Page 95: Fault Message Display

    Check maintenance The maintenance threshold W31: ADP LP MAINT. threshold. of a parameter is reached W30: EXHAUST MAINT. (P only) Perform maintenance (Call your Alcatel Service Representative). Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 1...

  • Page 96: Pump Is Running

    Foreline vacuum leak Bad vacuum or no vacuum verify vacuum with second gauge. l Inspect all connections and perform helium leak test. l Call your Alcatel Service Other problem Representative. Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 1...

  • Page 97: Maintenance Frequency

    ....Maintenance frequency E 20 Shipping procedure for contaminated pumps Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 1...
  • Page 98 Silicon nitride and nitroxide PECVD Silicon nitride LPCVD MOCVD doped using phosphorus Doped SiO CVD using phosphorus, boron or fluorine HDPCVD Maintenance times can change according to processes and equipment used. Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 1...

  • Page 99: Shipping Procedure For Contaminated Pumps

    (A) and (B). D This operation must be performed quickly, because without any water cooling the pump will overheat after a few minutes and will be in warning/hazard mode. 1 / 5 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...

  • Page 100: N2 Pressurization Kit

    Required accessories on purge port to maintain the pressure (DN50 ISO KF). l Blank off flange DN50 equipped with male 1/8” G connector Injector connection l Injector 2 / 5 Alcatel Vacuum Technology --- France --- IPUP A100 Instruction manual...
  • Page 101 Stop the nitrogen flow. Pressurize the pump Blank off the outlet port. Pressurize the pump with dry nitrogen to an absolute pressure of 1.1 bar using the injector. 3 / 5 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...
  • Page 102 E 20 Shipping procedure for contaminated pumps SAFETY QUESTIONNAIRE This safety questionnaire should be completedby the customer before returning the pump to a service center for maintenance. 4 / 5 Alcatel Vacuum Technology --- France --- IPUP A100 Instruction manual...
  • Page 103 E 20 Shipping procedure for contaminated pumps SAFETY QUESTIONNAIRE (CONT’D) 5 / 5 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...
  • Page 104 N2 pressurization kit ......Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 1...
  • Page 105 Centering ring DN50 with inlet screen O---ring DN50KF Quick connect clamp DN50 Blank off flange DN25 Centering ring DN25 Quick connect clamp DN20/25 O---ring DN25KF Loctite 0.05 Injector 106859 1 / 1 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...

  • Page 106: Ipup A100 Electrical Block Diagram

    ......G 30 ..... Accessory part numbers Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 1...
  • Page 107 G 10 IPUP A100 electrical block diagram FAULT WARNING BROWN GROUND ORANGE V- - BLUE Alcatel Vacuum Technology France --- IPUP A100 Instruction manual 1 / 2...
  • Page 108 + --- + --- + 3 2 1 6 11 10 Warning Hazard Frequency converter Motor T° J5 CONTROL CONTACTS IPUP A100L VERSION 6 11 Warning Hazard Frequency converter Motor T° 2 / 2 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...

  • Page 109: Safety Data Sheet

    No risk is expected on the basis of toxicological evaluation. FIRST AID MEASURES Eye contact Wash with plenty of water. Skin contact Wash with water and soap. Ingestion Induce vomiting if the subject is conscious. 1 / 5 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...
  • Page 110 Only threshold limits of by---products from thermal decomposition are applicable: TLV/TWA (HF): 2.5 mg/m3 TLV/TWA (COF2): 5 mg/m3 Personal protective clothing Eyes protection: safety goggles Hand protection: rubber gloves Body Protection: worksuit or rubber apron 2 / 5 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...
  • Page 111 Chronic effects No chronic effects are known. Carcinogenic effects No carcinogenic effects are known. Mutagenic effects No mutagenic effects are known. Reproduction effects No reproductive effects are known. 3 / 5 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...
  • Page 112 Trade Name: Fomblin Y Classification Not required European regulation for protection of man and environment DPR 303/56 (General regulation for safety and hygiene in work places): Not cited. 4 / 5 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...
  • Page 113 The company is not responsible for damages caused by the use of the product in applications for which it was not intended or for conditions of use outside its control. 5 / 5 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...

  • Page 114: Accessory Part Numbers

    This device is intented to switch off the pump power. It also has one relay contact (1 normally open) for external use. Part number 107849 206061.1 AMP 206430.1 AMP LINE IPUP A100 1 / 2 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...
  • Page 115 Allows user to list and modify frequency converter parameters. Part number 107909 Silencer kit Allows user to reduce noise level in case of free exhaust. Part number 108599 2 / 2 Alcatel Vacuum Technology France --- IPUP A100 Instruction manual...

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