Alcatel ADS 501 User Manual
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Alcatel ADS 501 User Manual

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A - Introduction
B - Start-up
Alcatel - High Vacuum Technology - User's Manual ADP/ADS
ADP/ADS
User's manual
ADP/ADS Series One .............................................
for semi-conductor's industry .......................................
Types of monitoring systems ......................................
Dry pump operational principle .................................
The accessories .......................................................
Technical characteristics.............................................
Safety instructions ....................................................
Unpacking / Storage ...............................................
Installing anti-vibration pads........................................
Modular version - Layout ..........................................
Filling the pump oil housings ......................................
Connection to the cooling circuit ...............................
Nitrogen purge flow sensor .......................................
Connection to the pumping circuit .............................
Electropneumatic exhaust valve connection (withdrawal)
Pump power supply ...............................................
Checking the rotational direction ..............................
RS 232 or RS 485 link wiring ..................................
Use of the Serial link (Service centers) ........................
Installation of silencer heating kit ...............................
Contents
plug) ..........................
2
A 50
B 50
B 100
B 160
1/3

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  • Page 1: Table Of Contents

    Remote control plug connection (M1 monitoring) ..B 150 RS 232 or RS 485 link wiring ........B 160 Use of the Serial link (Service centers) ......B 170 Installation of silencer heating kit ....... Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 2 «Motor temp.» Alert or alarm........D 130 «Analogic input» Alert or alarm......... D 140 «E1 logic»/«E2 logic» Alert or alarm ......D 150 «Valve option» Alert and alarm ........ D 160 «Variator» Alarm............. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 3 Freeing up the ADP ..........Safety instructions concerning product installation, operation and maintenance. Our ALCATEL products are designed and tested to provide maximum safety. However, in order to obtain the best level of safety, the following must be observed: - the user’s manual during product transport, installation, operation and maintenance.
  • Page 4 - incorporated purge line (N2) - Quick connection - Modular design and : 100 448 ANUAL EFERENCE interchangeable parts - Easy to transport - Network compatible. : 04 - May 1998 DITION Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 5: Adp/Ads Series One

    - interchangeables parts - may be performed by user Pump designed for all - Several equipments are available for semi-conductor’s processes applications, corrosives, CVD or clean processes 2 versions Standard or modular Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 6: The Various Versions Of Adp Series One

    OEM interface panel and the RS 232/485 serial link. FRONT VIEW Inlet port Monitoring system Flowmeter panel REAR VIEW Utilities panel RS 232/485 OEM Interface (option) Exhaust port Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 7 5 - Two types of monitoring system : M1 or M3 integrated The monitoring system M1 may be remote (optional). 6 - Flowmeter panel with water and purge gas flow rate settings. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 8 Apart from its mounting in the different possible positions on the pump frame, the electrical box can be set remote to 5 meters from the pump if necessary. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 9: Adp/Ads Serie One Dry Pumps

    ADP 31/ADP 81 ADS 151/301/501 equipment Motor Motor Water Anti-suckback valve Exhaust Silencer 10 - Water electrovalve 12 - Water flow sensor 11 - Water flowmeter 13 - Isolation valve (accessory) Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 10 7 - Gas flowmeter 8 - N flow sensor (optional) 9 - Pressure regulator Cooling system: 10 - Water electrovalve 11 - Water flowmeter 12 - Water flow sensor Accessories: 13 - Isolation valve Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 11 12 - Isolation valve flow sensor This sensor (8) is used to warn the user when the N flow comes (optional) under a preset value during harsch processes (SiH for example). Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 12: Types Of Monitoring Systems

    • Water flow failure • Purge flow failure • Electrical overloading • Purge flow and exhaust pressure • Exhaust gas temperature • ADP motor power • Water flow rate • Maintenance Time Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 13: Dry Pump Operational Principle

    “HP stages”. Inlet Water Silencer Exhaust Stage 1 Stage 2 Stage 3 Stage 4 Stage 5 (LP1) (LP2) (LP3) (HP4) (HP5) Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 14 1 - Stage HP - to recover fluid 2 - Trap 3 - Water cooling 4 - HP purge 5 - Dynamic seal 6 - Lubrication disk 7 - Gear casing Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 15 The pump is fitted with a antisuckback valve in the silencer, preventing the exhaust being sucked back. The pump in a pumping Process installation chamber INLET PRESSURE Secondary pumping pump ATMOSPHERIC PRESSURE Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 16: The Accessories

    It allows also to isolate the running pump from the process. Part Number : Several models are available in Alcatel catalog (Manual valve, electropneumatic...). Consult us. Fitting : See section B 90...

  • Page 17: Technical Characteristics

    Ø Inlet/Exhaust portt 40/40 40/40 63/40 63/40 100/40 100/40 160/40 Average noise level < 70 * Without nitrogen supply ** According to processes (see B120) See pumping curves at the chapter G Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 18 15.7 34.4 32.7 20.5 35.8 10.9 26.0 ADS 501 53.8 52.4 15.7 37.8 35.9 25.6 39.2 10.9 31.2 ADS 801 59.4 56.8 15.7 41.3 37.2 28.3 41.3 10.9 34.5 ADS 1001 Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 19 12.6 27.9 15.7 33.1 28.8 31.2 11.4 12.6 27.9 15.7 33.1 ADS 151MD 31.7 33.9 11.4 12.6 27.9 15.7 33.1 ADS 301MD 31.7 33.9 11.4 12.6 27.9 15.7 33.1 ADS 501MD Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 20: Safety Instructions

    EMC (ElectroMagnetic Compatibility) performance and the safety of the product. ALCATEL declines any responsability for such operations. • Before any maintenance operation is perfomed by a maintenance technician who has not received safety training (EMC, electrical safety, chemical pollution, etc.), isolate the...
  • Page 21 Hot surface near the label (pump body, silencer...) • Alcatel has no control over the types of gases passing through this pump. These are entirely under the control of the process user and/or the hardware systems integrator. Frequently, process gases are toxic, flammable, corrosive, explosive an otherwise reactive.

  • Page 22: Unpacking / Storage

    If the equipment has been damaged, take necessary steps with the carrier and inform Alcatel, if necessary. In all cases, Alcatel recommends that the packaging be saved, in the event that the equipment must be transported or put into prolonged storage.
  • Page 23 Our equipment can be stored without particular storage precautions (pump pressurized in nitrogen and sealed) at an ambient temperature between -20°C and + 70°C. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 24: Positioning The Pump In Pumping Installation

    Lock the pump by adjusting these jacks so that all four feet are resting solidly on the floor. See section B30 for installing Anti-vibration Pads. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 25 • Unfasten the toggle joints located on the top of the cover (1). • Unfasten the lateral fastening and raise the cover by the handles (2). Toggle joints Handle Side cover Lateral fastening Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 26 The shipping braces are also used as hoisting device. Failure to remove the shipping braces could later cause the pump to seize as a result of a strain exerted by the braces. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 27: Installing Anti-Vibration Pads

    (expanding type). ADP/ADS On the modular version : Modular version • Screw the delivered angle into the frame holes after removing the shipping braces. •Install the anti-vibration pads (as shown opposite). Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 28: Modular Version - Layout

    This kit is a part of modular pumps marked with a serial number upper than 973187. It can be fitted to retrofit on older pumps by ordering P/N 104527. Positioning in pumping See page B 20. installation Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 29 Inlet Flowmeter panel Some location examples EXHAUST EXHAUST WATER & N2 WATER & N2 POWER SUPPLY SUPPLIES SUPPLIES POWER SUPPLY MOTOR INLET MOTOR CONTROL FLOWMETER CONTROL PANEL CONFIGURATION A CONFIGURATION F Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 30 For machines wich use lubricants, it is recommended to request the manufacturer for the safety data sheets concerning the product used. The pump is tested using synthetic fluid Alcatel 113. When pumping corrosive gases, we recommend synthetic fluid Alcatel 113.
  • Page 31 2 - Front Roots housing level sight glass 3 - ADP filling 4 - ADP housing oil level sight glass 5 - Rear Roots housing filling 6 - Roots housing oil level sight glass Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 32: Connection To The Cooling Circuit

    Pressure ∆ inlet/outlet 3 bars mimimum If the above mentioned characteristics are not respected, install a filter to the cooling connection. Standard version connections REAR VIEW 1/4 NPT 1/4 Gas 1/4 Gas 1/4 NPT ALCATEL supply Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 33 Water IN/OUT Waterflowrate adjustment Waterflowrate WATER FLOW N2 FLOW PRESSURE Flowmeter panel Needle tap The water flow will be adjusted according to the processes with the needle tap (see section B120). Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 34 Oil < 0,1 PPM Pressure between 3 and 7 bar absolute. Flowrate per pump: 100 l/min. Standard version connections REAR FACE Customer supply 1/8 Gas 1/8 Gas ALCATEL supply Modular version REAR connections FACE Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 35: Inert Gas Purge Connection (N 2 Plug)

    (see section B 120). adjustment The flowmeter is used to display the overall purge flow rate. Pressure Pressure gauge regulator WATER N2 FLOW PRESSURE FLOW Purge gas Flowmeter panel flowmeter Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 36: Nitrogen Purge Flow Sensor

    - Check the good operation by increasing the purge pressure to a level higher than the one to be detected, then reduce this pressure until the purge alert is triggered. Note if this triggering pressure corresponds to the minimum required one. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 37: Connection To The Pumping Circuit

    In this case, do not fit the anti-noise seal. Make sure that the pressure at the exhaust does not exceed 1200 mbar. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 38 Connect the valve directly on the pump inlet flange using connecting accessories. Connect the valve to the chamber. Connect the electrical cable to the "inlet valve / exhaust valve" connector at the rear of the M3 monitoring system. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 39: Pump Power Supply

    Even if the main switch is locked in the "1" position, the disconnecting function remains operational. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 40 (See section B 130) . Modular version Mains connector is located on the electrical box lower face. Mains connector The connection has to be carried out as defined previously in page 1. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 41 5 RS 232 / RS 485 6 Interface connector 7 ADP supply 8 Sensors information (n° 2) Check the rotational direction of the pump at the first start-up (See B 130). Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 42: Water Flowrate And Gas Purge According To Processes

    - no heating of the line between the cold trap and the pump. * Should the layer be thick (>1500A), please contact Alcatel Worldwide Technical Support for dry pumps. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 43 - no heating of the line between the cold trap and the pump. * Should the layer be thick (>1500A), please contact Alcatel Worldwide Technical Support for dry pumps. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 44: Checking The Rotational Direction

    Note : We can also check that the pump is forcing back at the exhaust after that the blank-off flanges have been removed from inlet and exhaust.If not, invert two phases. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 45: Remote Control Plug Connection (M3 Monitoring)

    These contacts can be used to control automatisms. Monitoring system M3 Wiring of the cover plug to put if the remote control is not used (REMOTE plug). Remote control «REMOTE» Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 46 Note: If the remote control receives an order from the RS232, keyboard and remote control are locked. Only LOC order transmitted by the RS232 allows to enable keyboard or remote control. (Contact Alcatel) Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 47 OPTION LI 2 MOTOR TEMP. PURGE WATER ANA. INPUT ROOTS CONT. VALVE VALVE RS 232 WATER EXHAUST LI 3 LI 1 EMERG. WATTMETER REMOTE FLOW VALVE EMERGENCY Plug Prise EMERGENCY Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 48: Remote Control Plug Connection (M1 Monitoring)

    With inhibition of remote control buttons: With switch : Interrupteur MA/AR ON / OFF switch The remote control STOP button will stop the ADP, but it will restart as the push button is released. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 49 7 and 8 contacts of “emergency“ plug Monitoring system M1 at the rear of the monitoring system. WATER EMERG MOTOR TEMP. VALVE REMOTE CB 1 EMERGENCY Plug Prise EMERGENCY Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 50 48 49 Arrêt d'urgence Emergency stop Interrupteur MA/AR ON / OFF switch The remote control STOP button will stop the ADP, but it will restart as the push button is released. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 51 7 and 8 contacts of “emergency“ plug Monitoring system M1 at the rear of the monitoring system. WATER EMERG MOTOR TEMP. VALVE REMOTE CB 1 EMERGENCY Plug Prise EMERGENCY Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 52: Rs 232 Or Rs 485 Link Wiring

    Stop bit : 1 Connector wiring (Reception data) (RS 232) RD TD (Transmission data) (RS 232) RS232/485 GND (Ground) V(+) (RS 485) V(-) (RS 485) 9-pin male DB connector for serial link. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 53 Connect terminals 7 and 8 when the monitoring system is at the end of the line. The commands and messages reception syntax is dealt with in a special chapter (Contact Alcatel). Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 54: Installation Of Silencer Heating Kit

    Aluminum etching, Polysilicon, LPCVD or PECVD Nitrid, Alcatel proposes a silencer heating kit including: • two heating belts (1) • two insulation sleeves (2) • a connection box (3) • a mains cable (4). Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 55 • Set the power supply switch to ”I”. The heating kit will be used during pumping of condensable gases. Caution : Heating temperature = 130 °C. Take all the necessary precautions regarding burn risks. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 56: Start-Up Of The M3 Monitoring System

    • Used to validate the selection of ENTER validation key a menu, parameter or value An insulating film protects the keys. Do not use hard objects such as pens, screwdrivers, etc., which could damage the key. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 57 CODE : 0 the factory is protected by an access code which disables the entry of new parameters. Valid the code ENTER with the key Acces code can be (see C 30) personalized Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 58 18 : 24 : 80 (Seconds counter is blocked) Note : When you position the main switch to position I, the storage mode disappears automatically : Make a DATE/TIME setting (see previous paragraph) Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 59: Setting The M3 Monitoring System Parameters

    Allows to monitor a voltage on an input contact with 2 adjustable thresholds. E1 and E2 logic Allows to monitor a logic sensor during sensors an alert time and stop pumping at the end of the alarm time. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 60 However, the M3 monitoring system may be customized according to the current application, by programming the parameters, pump stopped, of the various menus listed on C 30. *Temperature regulation occurs 10°C below the alert threshold. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 61: M3 Monitoring System Function Table

    E2 LOGIC INPUT Valid/Disabled SYSTEM SELECTION ADS151/ADS301/ADS501/ADS801/1001 ADP81/ADP81V/ADP31/ADS501V AUTOMATIC RESTARTING Valid/Disabled ROOTS CONTROL Valid/Disabled BUZZER CONTROL SELECT. Valid/Disabled PURGE CONTROL SELECT. Valid/Disabled THERMO CONTROLLED Valid/Disabled FLOW N2 OPTION Valid/Disabled Other menus next page Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 62 Stop bit 1 or 2 DATE, TIME Time/Date menu TEMPERATURE UNIT Celsius/Fahrenheit Initial config. : °C PRESSURE UNIT mbar, hPa, Torr, PSI Initial config. : mbar ( Technical modifications reserved ) Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 63 ENTER and valide with LAST ALERTS DISPLAY LAST 10 ALERTS LAST ALARMS DISPLAY LAST 10 ALARMS CONFIGURATION LIST OF CUSTOMIZED PARAMETERS ( Technical modifications reserved ) Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 64: Use Of The M3 Monitoring System

    The pumps are equipped with an exhaust pressure monitoring sensor. When this is not used, it is the responsibility of the user to prevent the risks related to excess pressure of the installation. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 65 M3 monitor enables other operating modes, particularly control by PC via RS 232 interface and RS 485 ( see section B 150) or the remote control via the connector Remote ( see section B 140) . Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 66: Use Of The M1 Monitoring System

    • the audible warning buzzer, • the fault contacts on the REMOTE connector at the rear of the monitoring system which close, • stopping of the pumping although the STOP command has not been given. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 67 • Copying monitoring parameters in dry contact form (250 V - 1 A - 100 VA). These contacts may be used for controlling automatic control systems. (see section B 140) . Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 68: Safety Instructions Related To Maintenance

    • to wear gloves, protective glasses and, if necessary, a breathing mask. • to ventilate the premises well. • not to dispose of residue but, if necessary, to have it destroyed by a qualified organization. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 69 After a complete maintenance operation, on the pump or on the installation, it is recommended to perform a tightness test with helium. Alcatel - High Vacuum Technology -User’s Manual ADP/ADS...

  • Page 70: First Level Of Maintenance

    CB1 : circuit breaker CB1 CB2 CB2 : Ext* 24V circuit breaker : ADP and Roots power circuit breakers Monitoring TR1 : Int* transformer * Int : internal for ADS801/1001 ADS Unit ADS opened Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 71 Press the “SET” button during pumping and the operating times for components are displayed in turn. This information can be red at any time using the “Operating time” menu. Perform maintenance on the relevant parts. Maintenance See Section E operations Alcatel - High Vacuum Technology -User’s Manual ADP/ADS...

  • Page 72: Maintenance Frequency

    A+B : ADS 151 / 301 / 501 Maintenance ** For oil filling, see section B 50 A+C : ADS 801/1001 Maintenance Maintenance times can change according to processes and equipments used. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 73 A+C : ADS 801/1001 Maintenance Maintenance times can change according to processes and equipments used. (1) With TC version and silencer heating, the maintenance of the silencer can be extanded to 8500 h. Alcatel - High Vacuum Technology -User’s Manual ADP/ADS...
  • Page 74 A+B : ADS 151 / 301 / 501 Maintenance ** For oil filling, see section B 50 A+C : ADS 801/1001 Maintenance Maintenance times can change according to processes and equipments used. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 75: Diagnosis And Troubleshooting

    (followed by the pumps stopping) ..D 50 The pump is running (no message) ..D 60 Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 76: Pump Does Not Start

    Push on the blue button untill zero. Check the calibration CB1 breaker switched off Switch it on Call Alcatel customer service Other problem The keyboard is not working Call Alcatel customer service Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 77 Check the connection “Roots “J3 plug bad connected Call Alcatel customer service Problem on M3 “ADP“ plug Check the connection ADP does not run bad connected Defective management Call Alcatel customer service board Alcatel - High Vacuum Technology -User’s Manual ADP/ADS...
  • Page 78 ( See D 70 ). Check ADP mechanical condition. Alarm “Breaker RT2“ Switch it on. Roots RT2 breaker Check its rate. ( See D 70 ). Check ADP mechanical condition. See next page 4/4 Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 79 See D 80 Exhaust pressure ≥ 1450 mbar “Starting phase“ Check the main power. Main power is not correct No message displayed on Problem on M3 Call Alcatel customer service the screen Alcatel - High Vacuum Technology -User’s Manual ADP/ADS...

  • Page 80: The Pump Is Running And Then Is Showing

    Check the connection Exhaust pressure ( See D 80 ) = 500 mbar See D 80 Exhaust pressure > 1450 mbar Alert “Pressure“ See D 80 Exhaust pressure > 1990 mbar Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 81 Check the connection Sensors not connected θ gas = 170°C See D 90 Problems on platinium sensor “Consumption“ Alert See D 100 Consumption higher than “Consumption“ Alarm alert threshold or no power Alcatel - High Vacuum Technology -User’s Manual ADP/ADS...
  • Page 82 Sensor out of order Unreadable flowmeter Clean the flowmeter Deposits in the flowmeter graduation (blocked ball) “Power supply“ Alert Check the voltage Mains voltage variation (± 15%) Call Alcatel customer service Problem on M3 Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 83 Problem on the platinium sensor “Pump temp.“ Alarm Pump θ higher than See D 91 alarm threshold Check the wiring Sensor not connected θ gas = 170°C See D 91 Problem on the platinium sensor Alcatel - High Vacuum Technology -User’s Manual ADP/ADS...
  • Page 84 Defect does not disappear “Motor temp.“ Alarm See D 110 Cooling problems θ ADP motor ≥ 65° See E 50 ADP mechanical problems Call Alcatel customer service Defect does not disappear Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 85 P = 500 mbar See D 80 500 mbar < P < Pres. threshold With flow purge See D 80 No nitrogen sensor option See D 80 Flowmeter bad set Alcatel - High Vacuum Technology -User’s Manual ADP/ADS...
  • Page 86 “E1 logic“ or “E2 logic“ Reset M3 configuration Valid input after Alert or alarm configuration and not used Check the sensors Sensor problems ( See D 140 ) Set the delays Delay not properly set Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 87 Reset M3 configuration Valid option after configuration and not used Check the compressed air Valve does not open when supply. pump is starting Check the valve condition. See D 150 Contact problems Alcatel - High Vacuum Technology -User’s Manual ADP/ADS...
  • Page 88 ( See D 160 ) “Maintenance“ Alert Perform maintenance The maintenance threshold operation and reset the (ADP, Bearings, Silencer of a parameter is reached corresponding time. or Roots) Check the maintenance thresholds. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 89: Pump Is Running - No Message

    Call Alcatel customer service Maintenance ADP Rotors seizing Call Alcatel customer service Maintenance ADP Unsynchronized gears Call Alcatel customer service No N2 purge Reset M3 configuration or Bad configuration set the purge manually. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 90 “Breaker …“ Alarm “Breaker KM2“ Alarm • Check the breaker CB2, on M3 rear panel Roots KM2 Contactor • If the message still remains, call Alcatel customer service “Breaker RT1“ Alarm RT 1 breaker is not in - Check its position...

  • Page 91: Breaker

    • Check the strap presence between the pins 41, 42, 43 and 44 on remote plug. ( see B 140 ). • If the defect still remains, call Alcatel customer service. “Breaker EMO“ Alarm • Check that the emergency stop button is not tripped (unlock it by rotating 1/4 of turn).
  • Page 92 B 120. than threshold “Pressure“ Alert and alarm • Check that the silencer, the pipe to exhaust are not clogged. • If the defect still remains, call Alcatel customer service. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 93 Exhaust pressure = 500 mbar - Test the connection and the display (idem exhaust pressure too high see page 1/2 ). - If the incident is still present, call Alcatel customer service. Alcatel - High Vacuum Technology -User’s Manual ADP/ADS...

  • Page 94: Gas Temp." Alert

    : 130,9 Ω • 80°C • 100°C : 138,5 Ω • 157°C : 160 Ω - If the sensor is OK, there is another problem on the M3: call Alcatel customer service. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 95: Pump Temp." Alert

    • 100°C : 138,5 Ω • 157°C : 160 Ω - Check the cooling circuit. - If the sensor is OK, there is another problem on the M3: call Alcatel customer service. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 96: Consumption" Alert And Alarm

    - Check LP bearings. - Check the rotational direction of the pump. - If the incident is still present, call Alcatel customer service. Consumed power = 0 W Rotational direction of the Invert two phases on mains...
  • Page 97 The defect disappears Change the setting of flow flowmeter by shunting controller the pins ( see A 30 rep. 12 ) 9 and 10 of J5 Call Alcatel customer service. Problem on M3 Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 98: Motor Temp." Alert Or Alarm

    - Check the sensor and the connection by shunting pins 19 & 20 of J5. Remake the wiring The defect disappears ( see B 80 ) Call Alcatel customer service. Problem on M3 Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 99: Analogic Input" Alert Or Alarm

    Check the display according to the DC input voltage between pins 14 & 15 of J6 (15 = 0V) Problem on analogical Check the status of analogical sensor sensor (Customer one) Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 100: E1 Logic"/"E2 Logic" Alert Or Alarm

    E2 logic Unplug the sensor Remake the wiring : The defect disappears it must not be continuity between pins 23 and 25 of J5. Call Alcatel customer service. Problem on M3 Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 101: Valve Option" Alert And Alarm

    Check the wiring by shunting pins 5 & 6 of J5. Remake the wiring and No defect at pump start up check valve contact condition. Call Alcatel customer service. Problem on M3 Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

  • Page 102: Variator" Alarm

    D 160 “Variator“ Alarm Configure on Check the configuration of ADS 801/1001, ADS 501V M3 parameters (See C 30) or ADP 81V Problem on M3 Call Alcatel customer service. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 103 Caution: the Roots is equipped with 2 housings. Repeat the operation for each housing. Replace the drain plug and the remove the fill plug. Introduce the quantity of new oil required (see Section B 5 0). Alcatel - High Vacumm Technology - User’s Manual ADP/ADS...
  • Page 104 Reinstall a complete assembly (equipped silencer and outlet tube). OLIO Reinstall the backplate to the rear of the pumping unit and the side covers. Perform the maintenance of the replaced parts on a bench. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 105 Dry in the air or with compressed air. Position the Borrelly washer (1) and install a new cartridge. Reassemble the other parts by replacing the O-rings (3 and 4) with new seals. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 106 The fresh screen appears Press the key repeatedly COUNTER SET DURATION : 0 H MAXI : 17000 H to reset the delay MINI : 1000 H ENTER Valid with the key Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...
  • Page 107 EFIT THE PROTECTIVE COVER Clean the O-ring and grease it lightly with vacuum grease. Reinstall the O-ring and the protective cover. • RESTART THE PUMP Restart by pressing the “START” switch on the monitor. Alcatel - High Vacuum Technology - User’s Manual ADP/ADS...

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