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VAT 95248-PAGI-0002 Installation, Operating, & Maintenance Instructions

Butterfly pressure control valve with ethercat interface and isolation valve control
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Butterfly Pressure Control Valve
with EtherCAT interface and
isolation valve control
This manual is valid for the valve ordering number(s):
95248-PAGI-0002
configured with firmware 612C.1E.11
The fabrication number is indicated on each product as per the label
below (or similar):
made in Switzerland
Fabrication No.:
952 . . – . . . . – . . . . / . . . .
A – . . . . . .
Explanation of symbols:
Read declaration carefully before you start any other
action!
Attention!
Loaded springs and/or air cushions are potential
hazards!
Disconnect electrical power and compressed air lines.
Do not touch parts under voltage!
Read these «Installation, Operating & Maintenance Instructions» and the enclosed «General
Safety Instructions» carefully before you start any other action!
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com
Installation, Operating & Maintenance Instructions
Series 612 DN 250 (I.D. 10"), EtherCAT
Fabrication number
sample picture
Keep body parts and objects away from the valve
opening!
Hot surfaces; do not touch!
Wear gloves!
282408EB
2012-04-23
1/81

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Summary of Contents for VAT 95248-PAGI-0002

  • Page 1 Do not touch parts under voltage! Read these «Installation, Operating & Maintenance Instructions» and the enclosed «General Safety Instructions» carefully before you start any other action! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 1/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 2 VAT products. The VAT firmware contains a limited, time unlimited user license. The VAT firmware may not be used for purposes other than those intended nor is it permitted to make copies of the VAT firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to other people.

  • Page 3: Table Of Contents

    3.14 EtherCAT interface (Parameter data – acyclic communication) ..............58 3.14.1 EtherCAT Object dictionary ....................... 58 3.15 Communication and timing control between Master (PLC) and Slave (VAT-Valve) ........62 3.16 PRESSURE and SENSOR READING allocation ................... 63 VAT Vakuumventile AG, CH-9469 Haag, Switzerland...
  • Page 4 Seals and grease ............................79 Accessories ..............................80 7.4.1 Centering ring with Viton o-ring ......................80 8 Warranty ................................. 81 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 4/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2012-04-23...

  • Page 5: Use Of Product

    This product is a Butterfly control valve for downstream pressure control in vacuum systems. Use product for clean and dry indoor vacuum applications under the conditions indicated in chapter «Technical data» only! Other applications are only allowed with the written permission of VAT. VAT Vakuumventile AG, CH-9469 Haag, Switzerland...

  • Page 6: Technical Data

    Refer to chapter «Sensor supply concepts» for details. Refer to chapter «Schematics» for details. PFO = Power Failure Option. Refer to «Behavior in case of power failure» for details. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 6/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 7: Valve Unit

    15000 l/s Dimensions Refer to dimensional drawing of specific valve ordering number (available on request) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 7/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2012-04-23...

  • Page 8: Installation

    Do not connect or disconnect sensor cable when device is under power. Connection overview: Connectors at controller panel: EtherCAT connection Ground connection VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 8/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2012-04-23...
  • Page 9 Note: To provide power to the valve motor pins 4 and 8 must be bridged, otherwise motor interlock is active and the valve enters the safety mode and is not operative. Refer also to «Safety mode». This valve may optionally be equipped with a heating device. Connect VAT heating device according to manual of respective heating device.

  • Page 10: Tightening Torque

    65-70 80-90 26-30 48-52 59-67 hole depth (mm) hole depth (inch) See dimensional drawing See dimensional drawing VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 10/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2012-04-23...

  • Page 11: Admissible Forces

    The following forces are admissible: Axial tensile or Bending moment «M» compressive force «F » lbf. 1200 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 11/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2012-04-23...

  • Page 12: Admissible Forces At Controller

    F = Force a = middle of aluminium part of controller (b / 2) pedestal 400 N pedestal VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 12/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2012-04-23...

  • Page 13: Requirements To Sensor Connection

    Dynamic stray magnetic fields may introduce noise to sensor output and should be avoided or shielded. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 13/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 14: Electrical Connection

    It is also possible to connect the ground strap at system chamber if it is well connected to PE. Note: Avoid low chassis cross section to the system PE connection. (Min. same cross section as ground strap) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 14/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 15: Sensor Supply Concepts

    612 . . - . . G . - ..and 612 . . - . . H . - ..SPS module not included Note: The SPS module can be retrofitted. Refer to chapter «Retrofit / replacement procedure» for instruction. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 15/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 16: Power And Sensor Connection (+24 Vdc Sensors)

    Connect the +24 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above. Do not connect other pins, that may damage power supply or controller! Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 16/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 17 Connect the +24 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above. Do not connect other pins, that may damage power supply or controller! Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 17/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 18: Power And Sensor Connection ( 15 Vdc Sensors) Without Optional Sps Module

    Connect the 15 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above. Do not connect other pins, that may damage power supply or controller! Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 18/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 19 Connect the 15 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above. Do not connect other pins, that may damage power supply or controller! Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 19/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 20: Ethercat Interface Connection

    Note: Cable length between Master and Slaves max. 100 m. Note: For all detail information about EtherCAT refer to EtherCAT homepage: http://www.ethercat.org/ VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 20/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 21: Logic I/O Connection

    Local commands Configuration with switch for digital input: Note: Do not connect other pins than indicated in the schematics above! Connector type: Binder M8 (99-3363-00-04). VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 21/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 22: Digital Input

    The service port (connector: SERVICE) allows to connect the valve to a RS232 port of a computer. This requires a service cable and software from VAT. You can either use our freeware 'Control View', which can be downloaded from www.vatvalve.com or purchase our 'Control Performance Analyzer'.

  • Page 23: Isolation Valve Control (Ivc) Connection

    The connector is located on the side of the control and actuating unit, rectangular to the pipe. Connector: Use only screws with 4-40UNC thread for fastening the DB-9 connector! For more information see also in chapter: “Interface” commands. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 23/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 24: Operation

    Local operation means that the valve is operated via the service port using a computer or the Service Box 2. When using a computer, a service cable and a software from VAT are required. You can either download our freeware 'Control View' from or purchase our 'Control Performance Analyzer'.

  • Page 25: Remote Operation

    Refer also to chapter «Display information». Valve position after power up is closed Valve position after power up is open VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 25/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 26: Behavior In Case Of Power Failure

    1) SPS = optional ±15 VDC Sensor Power Supply module 2) PFO = Power Failure Option VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 26/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 27 Digit 2 Digit 3 Digit 4 Fatal error occurred Error code. Refer to «Trouble shooting» for details VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 27/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2012-04-23...

  • Page 28: Ethercat Leds

    Anybus module in EXCEPTION responding any more a) If RUN and ERR turns red, this indicates a fatal event, forcing the bus interface to a physically passive state. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 28/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 29: Setup Procedure

    Refer to chapter «LEARN» for details. LEARN Note: Without LEARN the valve is not able to run pressure control VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 29/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 30: Ethercat Configuration

    Note: It’s not the goal of this manual to describe the configuration of all parameters. Operation via EtherCAT is sophisticated and requires specific knowledge and training about it and its tools. VAT offers valve-related but not general EtherCAT support. Contact us under: EtherCAT-support@vat.ch Data type of pressure and position values (optional) The «data type of pressure and position»...
  • Page 31 The format of y and z has following syntax: _ _ _ _ _ _ _ _._ _ _ _ _ VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 31/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 32 Note: The internal accuracy of valve is for all positions 100’000 steps and for all pressures 1’000’000 steps. If the range of pressure and position values is rising, the accuracy of pressure and position will not rise. There is only the gain factor between the VAT valve and the EtherCAT Master which will be adapted. Note: (upper scale value - lower scale value) Note: If at startup the scale values in the memory are out of range or the rule above is broken the default values are taken.
  • Page 33 Upload the ESI-file to your PLC EtherCAT master. The ESI -file specifies the characteristics of the valve, and is used for the EtherCAT master. Attention: If a new VAT ESI-File is necessary please always delete the old one in the corresponding EtherCAT directory. The VAT ESI-Files are always downwardly compatible! EtherCAT station alias address (optional) The «station alias address»...
  • Page 34 1. Go to “Advanced Settings” 2. Enter new station alias address and press afterwards “Write to EEPROM” Note: After a power up of the VAT valve the new station alias address is active. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 34/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 35 Valve can not be controlled any longer and enters the network failure state – see chapter 3.6.2 “Valve and sensor conofiguration”. Watchdog runs out Valve is not any longer in the OPERATIONAL state and the VAT network failure warning is active - see chapter 4.1 “Additional EtherCAT warning”. See Error LED(2) chapter 3.5.1.2...
  • Page 36 Select 0x1000 and press Edit Set the green check mark to enable the Process data watchdog. That enable-check mark is also set by default (ESI-File). VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 36/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 37 Series 612 DN 250 (I.D. 10”), EtherCAT EtherCAT process data interface (PDI) watchdog (optional) The PDI watchdog supervises the VAT valve internal communication between the EtherCAT slave contorller (ESC) and the used application controller. Effects of the PDI watchdog if it runs out:...
  • Page 38 If the timing must be optimized do it as described in the following procedure. Go to “Advanced Settings” Modify the default settings values. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 38/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 39: Logic I/O Configuration

    0 = non inverted 1 = inverted 2 = disabled VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 39/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2012-04-23...

  • Page 40: Valve And Sensor Configuration

    ‘Setup / Sensor’. Do sensor configuration in menu ‘Setup / Sensor’. Note: Read first current configuration and do not change reserved bits when sending new configuration. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 40/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 41: Zero

    Note: Do not perform ZERO, if the base pressure of your vacuum system is higher than 1‰ of sensor full scale. We recommend disabling ZERO function in this case; refer to «Valve and sensor configuration» of the setup procedure. Otherwise incorrect pressure reading is the result. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 41/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 42: Learn

    Note: Learn may take several minutes. Do not interrupt the routine as a single full run is required to ensure fast and accurate pressure control. The PID controller covers 5% to 5000% of the gas flow which was used for learn. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 42/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 43 [l/s] gasflow for learn [sccm] = 39.4 p max. pressure to control [Torr] required lower conductance [l/s] VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 43/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2012-04-23...

  • Page 44: Behaviour Of Isolation Valve

    Select or enter position setpoint In «OUTPUT Buffer» > «CONTROL MODE SETPOINT» Select [Position] (value = 2) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 44/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2012-04-23...

  • Page 45: Pressure Control

    Select or enter pressure setpoint In «OUTPUT Buffer» > «CONTROL MODE SETPOINT» Select [Pressure] (value = 5) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 45/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2012-04-23...

  • Page 46: Tuning Of Control Performance

    Pumping speed (l/s) and pump type (e.g. turbo pump) System description Problem description Send diagnostic file with and all required information to tuning-support@vat.ch VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 46/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2012-04-23...
  • Page 47 Go to ‘Setup / Control Parameter’ menu. Note: It’s not possible to do ‘Sensor delay adjustment‘ Select sensor delay. via EtherCAT. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 47/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 48 Go to ‘Setup / Control Parameter’ menu. Note: It’s not possible to do ‘Setpoint ramp adjustment‘ via EtherCAT. Select setpoint ramp. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 48/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 49 Go to ‘Setup / Control Parameter’ menu. Select valve Note: It’s not possible to do ‘Valve speed adjustment‘ speed. via EtherCAT. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 49/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 50: Ethercat Interface (General)

    Cluster valve freeze address setpoint - Reserved, optional required Cluster valve freeze control setpoint - Reserved, optional required Cluster valve monitoring address setpoint - Reserved, optional required VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 50/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 51 GENERAL CONTROL Bitmap boolean array SETPOINT To adjust range refer to chapter: «Range of pressure and position values» VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 51/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2012-04-23...
  • Page 52 1st step : set bit (01) 4. from locked to remote 1st step : reset bit (10) 5-15 NOT USED (reserved) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 52/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2012-04-23...

  • Page 53: Input Buffer (Master Plc)

    Cluster valve control mode – Reserved, optional required Cluster valve status – Reserved, optional required Cluster valve warning – Reserved, optional required VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 53/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 54 10 = maintenance open 11 = maintenance close 12 = power failure 13 = safety 14 = fatal error VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 54/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2012-04-23...
  • Page 55 ZERO successful executed, active for 2 seconds PING PONG RX BIT, is inverted and transmitted back to the fieldbus master (PLC), See chapter: PING PONG RX-BIT Communication and timing control between Master (PLC) and Slave (VAT-Valve) 3.15 0 = off...
  • Page 56 AD-converter of Sensor input 1 and/or 2 (optional, only in case of 2 sensor version) on the master MEASUREMENT UNIT board is faulty. FAULTY NOT USED (reserved) 11-15 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 56/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2012-04-23...
  • Page 57 PROCESS DATA SETTING(S) NOT VALID (DATA TYPE or RANGE of pressure and position signals) 13-15 NOT USED (reserved) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 57/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2012-04-23...

  • Page 58: Ethercat Interface (Parameter Data - Acyclic Communication)

    Series 612 DN 250 (I.D. 10”), EtherCAT 3.14 EtherCAT interface (Parameter data – acyclic communication) VAT uses for acyclic parameter data handling a standard EtherCAT mailbox transfer. The mailbox protocol is CoE (CANopen over EtherCAT), compliant to DS301 (CiA Draft Standard 301 v4.02).
  • Page 59 Number of entries parameter Sync mode 0 (FREE_RUN) 1C33h SM input Number of entries parameter Assigned PDO 0 (FREE_RUN) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 59/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2012-04-23...
  • Page 60 Installation, Operating & Maintenance Instructions Series 612 DN 250 (I.D. 10”), EtherCAT Manufactor specific Object Entries – Parameter data 3.14.1.2 The following VAT specific objects (valve parameter data) are available. Index Object Name Sub- Description Type Valid Access Notes Index...
  • Page 61 * Bits keep their status until a new learn procedure will start or until power off. * These bits indicate any possible warnings during the learn procedure. The generated learn data must not necessarily be unusable. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 61/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 62: Communication And Timing Control Between Master (Plc) And Slave (Vat-Valve)

    Installation, Operating & Maintenance Instructions Series 612 DN 250 (I.D. 10”), EtherCAT 3.15 Communication and timing control between Master (PLC) and Slave (VAT-Valve) See chapter: «OUTPUT Buffer» > «PING PONG TX-BIT» and «INPUT Buffer» > «PING PONG RX-BIT». For visual overview see the diagram below.

  • Page 63: Pressure And Sensor Reading Allocation

    Above picture shows a 2 sensor system. In this configuration sensor 2 covers low range (100 mTorr) and sensor 1 covers high range (1 Torr). Switchover between sensors is done automatically according to «Pressure control operation with 2 sensors». VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 63/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 64: Series 612 Dn 250 (I.d. 10"), Ethercat

    1) Priority of pin 14 is higher than pin 13. If pin 14 is connected to ground after pin 13 the valve will close. Ground of service connector is at pin 4 and 8. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 64/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 65 >3% and < 98% of sensor full scale). - Noise on sensor signal? - Make sure a shielded sensor cable is used. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 65/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 66: Additional Ethercat Warning

    If you need any further information, please contact one of our service centers. You can find the addresses on our website: http://www.vat.ch VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 66/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 67: Maintenance & Repairs

    Contamination from the process may influence the function and requires more frequent maintenance. Before carrying out any maintenance or repairs, please contact VAT. It has to be individually decided whether the maintenance/repair can be performed by the customer or has to be carried out by VAT. The fabrication number on the valve made in Switzerland Fabrication No.:...

  • Page 68: Maintenance Procedures

    A critical factor influencing the maintenance period is the lifetime of the vacuum grease, being limited under increased temperature. In this case grease will separate to PTFE and oil. The oil may flow and contaminate the valve parts. VAT can give the following recommendations for preventive maintenance: unheated *) heated > 80°C *) heated 80°C *)
  • Page 69 Max. difference should be less than 1 turn or 0.5 turn of the screws. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 69/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 70 Vacuum grease 13. Deposit 0.0375 ml vacuum grease between the o-rings 14. Clean shaft from vacuum grease. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 70/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2012-04-23...
  • Page 71 18. Center plate with feeler 0.1 mm gauge as shown 19. Tighten plate screws with 2 Nm. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 71/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2012-04-23...
  • Page 72 Allen Wrench 21. Tighten clamp coupling with 1.1 Nm. 22. Reinstall valve into vacuum system according to chapter «Installation». VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 72/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 73: Option Board

    Ambient temperature [°C] Note: This graph shows estimated life of UltraCap PFO for reference and not as guaranteed value. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 73/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 74: Retrofit / Replacement Procedure

    Note: All boards have a fixed position into control and actuating unit. It is not possible to fit a board in other position as shown in picture above. Do not try out other positions, that may be destroy the socket of boards! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 74/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 75 Loosen and remove the LOGIC connector screw Open end wrench 10mm Disconnect fan cable from motor driver board VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 75/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 76 11. Tighten female screw locks from POWER and SENSOR connectors with 1.1 Nm Open end wrench 4.5 mm (see step 2) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 76/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 77 Required tool 12. Tighten panel screws with 1.1 Nm Pozidriv screw driver (see step 1) size 1 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 77/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2012-04-23...

  • Page 78: Drawing

    Installation, Operating & Maintenance Instructions Series 612 DN 250 (I.D. 10”), EtherCAT Drawing VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 78/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2012-04-23...

  • Page 79: Spare Parts

    N-5100-204 (Viton) Rotary feed through seals vacuum N-5100-204 (Viton) Vacuum grease syringe 206792 (2ml), 206793 (5ml) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 79/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2012-04-23...

  • Page 80: Accessories

    61248 - ..Aluminum 32048-QAZV Centering ring with Viton o-ring (for ISO-F installation only) Stainless steel 32048-QEZV VAT Vakuumventile AG, CH-9469 Haag, Switzerland 282408EB 80/81 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2012-04-23...

  • Page 81: Warranty

    (including any delay in or failure to deliver), packaging, storage or use of any product sold or delivered by VAT shall fail to conform to the foregoing warranty or to the...

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