Keithley 7174A Instruction Manual

Keithley 7174A Instruction Manual

8×12 low current matrix card
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  • Page 1 (217) 352-9330 | Click HERE Find the Keithley 7174A at our website:...
  • Page 2 Instruction Manual Model 7174A 8×12 Low Current Matrix Card Contains Operating and Servicing Information 7174A-901-01 Rev. A / 9-98 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 3 WARRANTY Keithley Instruments, Inc. warrants this product to be free from defects in material and workmanship for a period of 1 year from date of shipment. Keithley Instruments, Inc. warrants the following items for 90 days from the date of shipment: probes, cables, rechargeable batteries, diskettes, and documentation.
  • Page 4 Model 7174A 8 × 12 Low Current Matrix Card Instruction Manual ©1998, Keithley Instruments, Inc. All rights reserved. Cleveland, Ohio, U.S.A. First Printing September 1998 Document Number: 7174A-901-01 Rev. A Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 5 Revision of the manual. Each new Revision includes a revised copy of this print history page. Revision A (Document Number 7174A-901-01)................September 1998 All Keithley product names are trademarks or registered trademarks of Keithley Instruments, Inc. Other brand and product names are trademarks or registered trademarks of their respective holders.
  • Page 6 (IEC) Standard IEC 664, digital multimeter measuring circuits The types of product users are: (e.g., Keithley Models 175A, 199, 2000, 2001, 2002, and 2010) are Installation Category II. All other instruments’ signal terminals are Responsible body is the individual or group responsible for the use Installation Category I and must not be connected to mains.
  • Page 7 fire hazard. leads, and input jacks, must be purchased from Keithley Instru- ments. Standard fuses, with applicable national safety approvals, Chassis connections must only be used as shield connections for may be used if the rating and type are the same.
  • Page 8 7174A 8×12 Low Current Matrix Card Specifications MATRIX CONFIGURATION: Single 8 rows×12 columns. Expanding ENVIRONMENT: the columns can be done internally by connecting the rows of Offset Current and Path Isolation Specifications: 23°C, <60% multiple 7174A cards together with coax jumpers.
  • Page 9: Table Of Contents

    Recommended cables and adapters ......................2-3 2.5.3 Triax banana plug adapter .......................... 2-4 2.5.4 General instrument connections ......................... 2-5 2.5.5 Keithley instrument connections ......................2-11 2.5.6 Typical test fixture connections ....................... 2-17 Matrix configuration ............................2-18 2.6.1 Switching matrix ............................2-18 2.6.2...
  • Page 10 Applications Introduction ................................ 3-1 CV measurements ............................... 3-1 3.2.1 Stand alone system configuration ....................... 3-1 3.2.2 Computerized system configuration ......................3-1 3.2.3 Optimizing CV measurement accuracy ...................... 3-3 3.2.4 Basic CV test procedure ..........................3-3 3.2.5 Typical CV curves ............................3-3 Semiconductor test matrix ..........................
  • Page 11 List of Illustrations Operation Figure 2-1 Model 7174A installation .......................... 2-2 Figure 2-2 Card connectors ............................2-3 Figure 2-3 Triax connector configuration ........................2-3 Figure 2-4 Triax cable preparation ..........................2-4 Figure 2-5 General instrument connections ........................ 2-6 Figure 2-6 Model 617 electrometer connections ......................
  • Page 12 Service Information Figure 4-1 Model 7174A block diagram ........................4-2 Figure 4-2 ID data timing ............................. 4-3 Figure 4-3 Offset verification test connections ......................4-6 Figure 4-4 Connections for path isolation verification ....................4-7 Figure 4-5 Triaxial cable preparation ........................... 4-8 Figure 4-6 Connections for path resistance verification ....................
  • Page 13 Table 4-3 Recommended verification equipment ...................... 4-5 Replaceable Parts Table 5-1 Model 7174A electrical parts list ........................ 5-3 Table 5-2 Model 7174A mechanical parts list ......................5-4 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 14: General Information

    238 Source Measure Units can also be used below the maxi- Pin to Ground -- 0.01 pA/V mum signal level (200V, 2A carry) of the Model 7174A Low Pin to Pin -- 0.005 pA/V Current Matrix Card (for full specifications, refer to para- graph 1.6).
  • Page 15: Manual Addenda

    • Advise as to the warranty status of the matrix card. • Write ATTENTION REPAIR DEPARTMENT on the Model 7174A specifications may be found at the front of this shipping label. manual. These specifications are exclusive of the matrix card •...
  • Page 16 Eight 10 ft. (3m) cables — Cables to connect the Model 7174A to a HP-4145 Semiconductor Parameter Analyzer. Model 237-BAN-3 — 3-slot male triax to male banana plug. Four BNC to triax adapters — Used with eight cables listed above Model 237-ALG-2 —...
  • Page 17: Operation

    Environmental considerations — Outlines environ- other possible sources of contamination. To avoid this prob- mental aspects of using the Model 7174A. lem, operate the mainframe and matrix card only in a clean environment. If contamination is suspected, clean the card as Card installation and removal —...
  • Page 18: Card Installation And Removal

    CAUTION Do not touch the card surfaces or any components to avoid contamination The Model 7174A has 12 columns (labeled 1 through 12) that could degrade card performance. and 8 rows (labeled A through H). Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 19: Recommended Cables And Adapters

    Table 2-1 summarizes the cables recommended for use with card. the Model 7174A. Equivalent user-supplied items may be substituted as long as they are of sufficient quality (low offset current, high leakage resistance). Using substandard cables and connectors may degrade the integrity of the measure- ments made.
  • Page 20: Triax Banana Plug Adapter

    7. Screw on the plastic cover as shown in Figure 2-4(E). Table 2-2 Make certain the wire is secure by gently pulling on the Parts for special triaxial cable plug. Keithley part or model number Description 7078-TRX-3 triax cable* Triax cable terminated with...
  • Page 21: General Instrument Connections

    General DMM connections are shown in Figure 2-5 (A), (B), to source LO. and (C). Floating connections are shown in (A) with LO and HI routed to two separate jacks on the Model 7174A. The Source/measure unit connections common LO connections in (Figure 2-5B) should be used...
  • Page 22: Figure

    Operation Rows Columns S ignal Guard Signal Guard 7174A A.) DMM Floating Rows Columns Signa l Guard Note: Use this configuration only for Warning: Hazardous voltage from guard 7174A non-critical measurements. sources may be present on LO. B.) DMM Common LO...
  • Page 23 Operation Rows Columns Signal Guard Signal Guard Sense HI Sense LO Signal Guard Signal Guard 7174A C.) DMM 4-Wire Rows Columns Signal Guard Signal Electrometer Guard 7174A D.) Electrometer, Unguarded Volts Figure 2-5 General instrument connections (cont.) Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 24 Operation Rows Columns Signal Guard Guard Signal Guard Electrometer 7174A E.) Electrometer, Guarded Volts Rows Columns Signal Guard Signal Electrometer Guard 7174A F.) Electrometer, Fast Current Signal Guard Guard Signal Guard Electrometer 7174A G.) Electrometer, Resistance (Guarded) Figure 2-5 General instrument connections (cont.)
  • Page 25 Operation Signal Guard Signal Voltage Source Guard 7174A H.) Voltage Source Signal Guard Signal Electrometer Guard 7174A I.) Current Source, Unguarded Rows Columns Signal Guard Guard Signal Guard Current Source 7174A J.) Current Source, Guarded Figure 2-5 General instrument connections (cont.)
  • Page 26 Guard V or I Source/Measure Signal Unit Guard 7174A K.) Source/Measure Unit Note: DUT shielding/guarding not shown. See Figures 2-20 and 2-21. Figure 2-5 General instrument connections (cont.) 2-10 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 27: Keithley Instrument Connections

    B. The following paragraphs outline connecting typical Kei- thley instruments to the Model 7174A 8 × 12 Low Current 1. Connect one end of a Model 7078-TRX- (3, 10, or 20) 3-lug triaxial cable to row A of the Model 7174A.
  • Page 28: Model 196 Dmm Connections

    WAR NING: TIGHTE N MOUNTING S CR E WS TO E NS UR E P R OP E R CHAS S IS GR OUND 7174A Matrix Card Figure 2-7 Model 196 DMM connections 2-12 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 29: Model 230 Voltage Source Connections

    TIGHTE N MOUNTING S CR E WS TO E NS UR E P R OP E R 2-4 for special triax to banana cable. CHAS S IS GR OUND 7174A Matrix Card Figure 2-8 Model 230 voltage source connections 2-13...
  • Page 30: Model 590 Cv Analyzer Connections

    Operation Model 590 CV analyzer connections supplied with the Model 590 can be used; however, Model 7078-TRX-BNC adapters must be used at the Model 7174A The Model 590 CV analyzer can be connected to any row or end. any column as shown in Figure 2-9. The BNC cables that are...
  • Page 31: Model 220 Current Source Connections

    4. Connect the triax end of a triax/banana cable to the the GUARDED/UNGUARDED selection desired row on the Model 7174A. switch. Otherwise, instrument LO will be 5. Connect the banana plug end of the triax/banana cable to the OUTPUT COMMON jack of the Model 220.
  • Page 32: Model 236/237/238 Source Measure Unit Connections

    7174A Matrix Card B. Local Sensing Caution: The models 237 and 238 Source Measure Units can only be used within the specified maximum signal levels of the Model 7174A (200V, 2A carry). Figure 2-11 Model 236/237/238 source measure unit connections 2-16...
  • Page 33: Typical Test Fixture Connections

    Typically, one or more test fixtures will be connected to nected to the probe or other device contact points, while desired columns of the Model 7174A. Typically, the test fix- GUARD should be carried through as close to the device as tures will be equipped with card-edge connectors with wires possible.
  • Page 34: Matrix Configuration

    This section describes the matrix configuration of the Model spoint, required pathways and pins may be connected. All 7174A. It also explains ways to expand the matrix by install- crosspoints are configured for 2-pole switching, as shown in ing and connecting additional matrix cards in the Model Figure 2-14.
  • Page 35: Matrix Configuration

    Operation Columns H G C H G C H G C H G C H G C H G C H G C H G C H G C H G C H G C H G C User connections and expansion Rows Path Isolator...
  • Page 36 Operation Table 2-3 Column numbering by slot and unit Unit Slot Columns (1 through 12) 2446 2-20 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 37: Internal Matrix Expansion

    Because of critical signal paths, rows A-H are not jumpered through the backplane. Instead, install the supplied coaxial Two to six Model 7174A cards can be connected together jumpers between appropriate connectors on Model 7174A within the mainframe to yield an 8 × N matrix, where N cards (for more critical signal paths, rows can be isolated depends on the number of cards.
  • Page 38: Measurement Considerations

    • Impulse sources as in the case of arcing in high-voltage environments. Measurement considerations The Model 7174A, signal source, measuring instrument, and Most measurements made with the Model 7174A concern signal leads should be kept as far away as possible from any low-level signals.
  • Page 39: Keeping Connectors Clean

    Operation these problems, never touch the connector insulating mate- SIGNAL LEADS rial. In addition, the matrix card should be used only in clean, INSTRUMENT 1 INSTRUMENT 2 INSTRUMENT 3 dry environments to avoid contamination. If the connector insulators should become contaminated, either by inadvertent touching or from air borne deposits, they can be cleaned with a cotton swab dipped in clean meth- anol or an HCFC.
  • Page 40: Guarding

    Specifications such as those given for path isolation and off- charged through the low impedance of the buffer amplifier set current are with a single Model 7174A card installed in rather than by the source, settling times are shortened consid- the mainframe.
  • Page 41: Coaxial Jumper Access

    Operation Coaxial jumper access To gain access to jumpers, lift jumper across cover (Figure 2-22). Figure 2-22 Coaxial jumper access 2-25 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 42: Applications

    Semiconductor IV characterization — Covers the proper time. basic scheme and connections used to generate an IV Model 7174A 8 × 12 Low Current Matrix Card: Switches curve of a bipolar or MOS transistor. the signa pathways to the six devices under test.
  • Page 43: Figure

    CV Analyzer Plotter 707A Switching Matrix IEEE-488 Bus Note: Remove jumpers to other 7174A cards (if installed) to optimize Model 595 measurement accuracy. Figure 3-2 Computerized CV system configuration Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 44: Optimizing Cv Measurement Accuracy

    Applications 3.2.3 Optimizing CV measurement accuracy 7. Set up the Model 590 for the expected CV sweep. 8. Close the crosspoints necessary to connect the Model For accurate CV measurements, each Model 590 CV mea- 590 to the device under test. For example, to test device surement pathway must be corrected using the procedure #1, close G1 and H2.
  • Page 45: Figure

    Applications +0.6E-10 +0.4E-10 +005.00 -005.00 KEITHLEY 595 Figure 3-3 Typical quasistatic CV curve generated by Model 595 1.50 1.42 1.35 1.27 1.20 1.12 1.05 0.97 0.90 0.82 0.75 - 4.99 - 3.99 - 2.99 - 1.99 - 0.99 0.00 1.00 1.99...
  • Page 46: Semiconductor Test Matrix

    SG SG SG SG S G I Measure V Source 1 2 3 4 5 6 7 8 9 10 7174A Matrix Card 707A Switching Matrix Figure 3-5 Semiconductor test matrix Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 47: Testing Common-Source Characteristic Of Fets

    Electrometer/Source Meter (Current) Voltage Source Model 230 Voltage Source = Closed Crosspoints on 7174A Card (Figure 3-5). Figure 3-6 System configuration for measuring common-emitter characteristics 3.3.2 Testing common-source characteristic of 10 0 FETs = 0V The system shown in Figure 3-5 could be used to test a vari-...
  • Page 48: Resistivity Measurements

    Applications Resistivity measurements 3.4.2 Test procedure The Model 7174A 8 × 12 Low Current Matrix Card can be In order to make van der Pauw resistivity measurements, four terminals of a sample of arbitrary shape are measured. used in conjunction with a Model 220 Current Source and a...
  • Page 49: Resistivity Measurement Conventions

    Applications Figure 3-9 Resistivity measurement conventions Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 50: Resistivity Calculations

    If more DUT pins are needed, the system is easily expanded by adding more Model 7174A matrix cards. Each additional card will add 12 columns to the system. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 51: Cable Connections

    Cables ground. Columns 9 10 11 12 9 10 11 12 Rows • • • • 7174A 7174A Matrix Card Matrix Card Model 237-BAN-3 or Triax to banana plug Signal Modification (see Figure 2-4) Guard Signal Guard...
  • Page 52: Service Information

    Do not perform these Because of the high-impedance circuits on the Model procedures unless qualified to do so. 7174A, care should be taken when handling or servicing the Failure to recognize and observe normal card to prevent possible contamination. The following pre- safety precautions could result in per- cautions should be taken when servicing the card.
  • Page 53: Principles Of Operation

    ROM locations have been read. A total of 498 bytes of infor- configuration table is necessary because some cards (such as mation are read by the mainframe during the card ID the Model 7174A) require the closing of more than one relay sequence. to close a specific crosspoint.
  • Page 54: Relay Control

    Service Information CARDSEL CLRADDR NEXTADDR HI-Z HI-Z IDDATA Note: ID data sequence occurs on power-up only. CLRADDR pulse occurs only once. Figure 4-2 ID data timing 4.3.4 Power-on sequence 4.3.3 Relay control A power-on safeguard circuit, made up of U409 and associ- ated components, ensures that relays do not randomly ener- The relays are controlled by serial data transmitted via the gize upon power-up.
  • Page 55: Isolator Relays

    In order to gain access to the test points and other circuitry point relays in order to ensure the integrity of signal path- on the Model 7174A, the card must be plugged into the ways. Path isolator relays include K198-K204. The...
  • Page 56: Special Handling Of Static-Sensitive Devices

    Performance verification devices The following paragraphs discuss performance verification procedures for the Model 7174A, including relay testing, CMOS and other high-impedance devices are subject to pos- contact resistance, contact potential, path isolation, and leak- sible static discharge damage because of the high-impedance age current.
  • Page 57: Offset Current Verification

    • Model 7078-TRX-3 Triax Cable rect the instrument, and then select autoranging. • Model 6172 2-slot male to 3-lug female triaxial adapter 4. Connect the Model 617 to row A of the Model 7174A, as shown in Figure 4-4. Test connections 5.
  • Page 58: Path Isolation Verification

    • Unterminated 3-slot triaxial cable (cut connector off Procedure 7078-TRX-3) WARNING • Banana plug (Keithley part #BG-10-2) • #16-18AWG insulated stranded wire (6 in. length) Hazardous voltage from the electrome- ter voltage source will be used in the fol- Test connections lowing steps.
  • Page 59: Triaxial Cable Preparation

    1. Turn on the Model 617 and allow it to warm up for two hours for rated accuracy. 2. With the mainframe power turned off, plug the Model 7174A into slot 1 of the mainframe. Remove all other 1" cards from the mainframe, and install the slot covers.
  • Page 60: Path Resistance Verification

    WARNING: TIGHTEN MOUNTING SCREWS • 237-BAN-3 triax to banana cables (4) TO ENSURE PROPER CHASSIS GROUND 7174A Matrix Card Connections Figure 4-6 Figure 4-6 shows the connections for the path resistance Connections for path resistance verification tests. The Model 196 is to be connected to the row and col- umn jacks using Model 237-BAN-3 triax/banana cables.
  • Page 61: Shorting Measurement Paths Using Triax Tee Adapter

    9. Verify that the resistance reading is <1.5 Ω . 2. With the power off, install the Model 7174A card in slot 10. Open the crosspoint, and disconnect the triax adapter 1 of the mainframe.
  • Page 62: Reed Pack Replacement

    Service Information Reed pack replacement 9. Reinstall the cross point interconnect board. Be sure that it is properly seated. If after performing troubleshooting or verification, a reed 10. Reinstall the guard enclosure cover. switch is thought to be faulty, it should be replaced. Note that 11.
  • Page 63: Figure 4-8 Cross Point Relays

    Service Information Isolator Relays (8) Note : When inserting reed pack, make sure long leads are inserted into bobbin. Bobbin Crosspoint Cross point Relay Relays (12 sets) Reed Pack Cross point Interconnect Board Cover Clear Yellow Triax Connector Figure 4-8 Cross point relays 4-12 Artisan Technology Group - Quality Instrumentation ...
  • Page 64: Figure 4-9 Isolator Relays

    Service Information Pathway Interconnect Board Clear Black Yellow Bobbin Yellow Clear Black Isolator Relay Isolator Reed Pack Relays (8) Note: When inserting reed pack, make sure long leads are inserted into bobbin. Cross point Relays (12 sets) Figure 4-9 Isolator relays 4-13 Artisan Technology Group - Quality Instrumentation ...
  • Page 65: Replaceable Parts

    This section contains a list of replaceable electrical and If the matrix card is to be returned to Keithley Instruments mechanical parts for the Model 7174A, as well as a compo- for repair, perform the following: nent layout drawing and schematic diagram of the matrix 1.
  • Page 66 Replaceable Parts Table 5-1 Model 7174A electrical parts list Circuit Desig. Description Keithley Part No. C101-113 CAP, .1µF, 20%, 50V, CERAMIC C-365-.1 C415-418, 421 CAP, .1µF, 20%, 50V, CERAMIC C-365-.1 C413 CAP, .01µF, 10%, 1000V, CERAMIC C-64-.01 C414, 425 CAP, 10µF, -20+100%, 25V, ALUM ELEC...
  • Page 67 Replaceable Parts Table 5-2 Model 7174A mechanical parts list Description Keithley Part No. #4-40X1/4 PHILLIPS PAN HD SEMS SCREW (9174-162 BOARD TO BRACKETS) 4-40X1/4PPHSEM #6-32X3/8LG. PHIL FLAT HD SCR (HANDLE MTG) 6-32X3/8PFH #6-32X5/16PHIL PAN HED SEMS SCR (R. PANEL TO MB; BRKT TO BD)
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  • Page 75 Recommended test equipment 4-5 Component layout and schematic diagram Reed pack replacement 4-11 Keeping connectors clean 2-23 Relay control 4-3 Computerized system configuration 3-1 Keithley instrument connections 2-11 Replaceable parts 5-1 Connections 2-2 Resistivity calculations 3-9 CV measurements 3-1 Resistivity measurements 3-7...
  • Page 76 Troubleshooting 4-4 Troubleshooting procedure 4-4 Typical CV curves 3-3 Unpacking and inspection 1-2 Warranty information 1-1 Typical test fixture connections 2-17 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 77 Service Form Model No. Serial No. Date Name and Telephone No. Company List all control settings, describe problem and check boxes that apply to problem. Intermittent Analog output follows display Particular range or function bad; specify IEEE failure Obvious problem on power-up Batteries and fuses are OK Front panel operational All ranges or functions are bad...
  • Page 78 Keithley Instruments, Inc. 28775 Aurora Road Cleveland, Ohio 44139 Printed in the U.S.A. Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

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