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F3M-S
Specifications
J RATINGS/CHARACTERISTICS
Part number
Sensing object
Number of channels
Optical axis pitch
Optical axis width
Light source
Power supply voltage
Current consumption
Output
Control
output
Answer-back
output
Self-
diagnostic
output
Indicators
Power
Warning
Response time
Control output interrupt input
Remote
Remote
ON
teaching
OFF
input
Teaching check function
Ambient
Operating
p
temperature
Storage
Relative humidity
Ambient illumination
Noise resistance
Noise resistance
Vibration resistance
Shock resistance
Degree of protection
Connection
F3M-S625
F3M-S626
6-inch (5-inch) semiconductor
silicon wafers and transparent
wafers (with transparency of
92% max.) (See Note.)
25
26
4.76 mm
1.5 mm
Infrared LED (940 nm)
12 to 24 VDC 10%, ripple (p-p): 10% max.
120 mA max.
Load power supply voltage: 30 VDC
Load current: 20 mA max. (residual voltage: 1 V max.)
Inflow current: 20 mA
Parallel output from all channels, NPN open collector
Dark-ON operation
When remote teaching is ON, pin 28 will be used for this function.
Load power
---
supply voltage:
30 VDC max.
Load current:
20 mA max.
(Residual
voltage: 1 V
max.)
Inflow current:
20 mA
NPN open
collector
Green indicator is ON when power is being supplied.
Red indicator is ON under the following conditions:
Teaching, no sensing object, insufficient light, or error.
10 ms max.
All outputs interrupted: GND and control output interrupt input terminals are short-circuited and 0-V
short-circuit current is 1 mA max.
Output interrupt reset: GND and control output interrupt input terminals are opened or the voltage is
between 9 V and the working power supply voltage.
GND and remote input terminals are short-circuited and 0-V short-circuit current is 1 mA max.
GND and remote input terminals are opened or the voltage is between 9 V and the working power
supply voltage.
Orange LED indicator
0 C to 40 C (32 F to 104 F) with no icing or condensation
- - 25 C to 60 C (- - 13 F to 140 F)
35% to 85% with no condensation
Fluorescent lamp: 1,500 x max.
Power supply line: 480 V in normal mode with noise simulator
Static electrical noise: No malfunction or destruction at 8 kV
10 to 55 Hz, 0.5-mm double amplitude for 2 hrs each in X, Y, and Z axes
2
300 m/s
(30G) for 3 times each in X, Y, and Z axes
IEC60529 IP40
Preleaded cable (standard cable length: 100 mm)
(This table continues on the next page.)
3
F3M-S825
F3M-S826
8-inch semiconductor silicon
wafers and transparent wafers
(with transparency of 92% max.)
(See Note.)
25
26
6.35 mm
Load power
---
supply voltage:
30 VDC max.
Load current:
20 mA max.
(Residual
voltage: 1 V
max.)
Inflow current:
20 mA
NPN open
collector
F3M-S
F3M-S1213
F3M-S1225
12-inch semiconductor silicon
wafers and 12-inch SIC wafers
(with transparency of 30% max.)
13
25
10 mm
Load power supply voltage:
30 VDC max.
Load current: 20 mA max.
(Residual voltage: 1 V max.)
Inflow current: 20 mA
NPN open collector
0 C to 55 C (32 F to 131 F)
with no icing or condensation
- - 25 C to 60 C (- - 13 F to 140 F)
Connector
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