Omron F3M-S825-1 Quick Start Manual

Silicon Wafer Mapping Sensor
Allows Simultaneous Mapping of Up
to 25 Silicon Wafers
Economical—one sensor detects most
H
wafer types
200 mm wafer size
H
Automatic and remote teaching
H
capability
Self-diagnostic functions reduce
H
downtime

Ordering Information

Applicable wafer size
8 inches (6.35-mm pitch)

Application Examples

Detects Transparent Glass Wafers
With a Transparency of 92%
The F3M-S825-1 allows the mapping of cassettes that have both
silicon wafers and glass wafers.
Automatic Teaching Saves Setting Time
(Remote Teaching Available)
The F3M-S825-1 has an automatic teaching function that ensures
easy adjustments in minimal time. The remote teaching function
allows quick, on-the-fly set up.
R
Number of cassette slots
25
Function Remarks
Self-diagnosis CE marking
Answer-back Alarms for Setting Errors and
Self-diagnostic Alarms for Operation Errors
These alarms help reduce system downtime and shorten
troubleshooting time.
Static Electricity Protection
OMRON's optical system (including emitter and receiver)
prevents malfunction and damage—protecting the Sensor from
static electricity if charged on the semiconductor wafers at the
time of mapping.
F3M-S825-1
Part number
F3M-S825-1