Pfeiffer Vacuum CENTERONE-TWO Operating Instructions Manual
Pfeiffer Vacuum CENTERONE-TWO Operating Instructions Manual

Pfeiffer Vacuum CENTERONE-TWO Operating Instructions Manual

Total pressure measuring and control unit
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OPERATING INSTRUCTIONS
EN
Translation of the Original
CENTERONE ∣ -TWO ∣ -THREE
Total pressure measuring and control unit

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Summary of Contents for Pfeiffer Vacuum CENTERONE-TWO

  • Page 1 OPERATING INSTRUCTIONS Translation of the Original CENTERONE ∣ -TWO ∣ -THREE Total pressure measuring and control unit...
  • Page 2 Dear Customer, Thank you for choosing a Pfeiffer Vacuum product. Your new total pressure measuring and control unit should support you in your individual application with full performance and without malfunctions. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a comprehensive and complete range of top-quality products and first-class service.
  • Page 3: Table Of Contents

    Foreseeable improper use Responsibilities and warranty Owner requirements Personnel qualification 2.8.1 Ensuring personnel qualification 2.8.2 Personnel qualification for maintenance and repair 2.8.3 Advanced training with Pfeiffer Vacuum Operator requirements Transportation and storage Product description Identifying the product Scope of delivery...
  • Page 4 Data logger mode Setup mode Decommissioning Maintenance Cleaning the device Replacing the battery Malfunctions Shipping Disposal Service solutions from Pfeiffer Vacuum Ordering information 14.1 Ordering parts 14.2 Accessories Technical data and dimensions 15.1 Technical data 15.2 Dimensions Appendix 16.1 Units of pressure 16.2 Gas throughputs...
  • Page 5 List of tables List of tables Tbl. 1: Related documents Tbl. 2: Variants Tbl. 3: Abbreviations used Tbl. 4: Danger to life due to electric voltage Tbl. 5: Controls Tbl. 6: Switching functions Tbl. 7: Switching functions Tbl. 8: Status of the Ethernet connection Tbl.
  • Page 6 List of figures List of figures Fig. 1: Disconnect device in accordance with EN 61010-1 Fig. 2: Front panel Fig. 3: Connections on the rear side Fig. 4: Display CenterOne Fig. 5: Display CenterTwo and CenterThree Fig. 6: Exponential illustration of the measurement channel measured value (exam- ples) Fig.
  • Page 7: About This Manual

    CenterThree, however, they also apply to the CenterOne and CenterTwo. The part number is found on the rating plate of the product. Pfeiffer Vacuum reserves the right to make technical changes without prior notification. The figures in this document are not to scale (Dimensions in mm).
  • Page 8: Conventions

    About this manual ● Decommissioning ● Maintenance and cleaning ● Storage or disposal The work described in this document is only permitted to be performed by persons with the appropriate technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac- uum.
  • Page 9: Trademarks

    About this manual Abbreviation Explanation Switch-point (setpoint) UART Universal Asynchronous Receiver Transmitter (Electronic circuit used to implement serial interfaces) Tbl. 3: Abbreviations used 1.4 Trademarks ● CenterLine ® is a trademark of Pfeiffer Vacuum GmbH. 9/76...
  • Page 10: Safety

    Notes, tips or examples indicate important information on the product or on this document. 2.2 Safety instructions Safety instructions according to product’s life stages All safety instructions in this document are based on the results of a risk assessment. Pfeiffer Vacuum has taken into account all the relevant life stages of the product. 10/76...
  • Page 11: Tbl. 4: Danger To Life Due To Electric Voltage

    Safety Danger to life due to electric voltage DANGER Danger to life due to electric voltage High voltages are present inside the device. When touching parts that are live, there is a risk of death. If there is visible damage, there is a risk of death when commissioning the device. ►...
  • Page 12 ► Operate the device away from fluids and humidity sources. ► Take special precautions if there is a risk of dripping water. ► Do not switch on the device if fluid has penetrated into it, instead contact the Pfeiffer Vacuum Service Center.
  • Page 13 ► Only operate the device in a dry environment. ► Operate the device away from fluids and humidity sources. ► Do not switch on the device if fluid has penetrated into it, instead contact Pfeiffer Vacuum Serv- ice. ► Always disconnect the current supply before cleaning the device.
  • Page 14: Safety Precautions

    5. Pass on safety instructions to all other users. 2.4 Proper use The total pressure measuring and control unit is used together with the Pfeiffer Vacuum CenterLine gauges to measure total pressures. Typical applications are measurement, monitoring and process con- trol tasks in vacuum systems.
  • Page 15: Foreseeable Improper Use

    ● Use with replacement or accessory parts that are unsuitable or are not approved 2.6 Responsibilities and warranty Pfeiffer Vacuum shall assume no responsibilities and warranty if the operating company or a third party: ● disregards this document. ● does not use the product for its intended purpose.
  • Page 16: Ensuring Personnel Qualification

    ─ Customer with Pfeiffer Vacuum service training ─ Pfeiffer Vacuum service technician 2.8.3 Advanced training with Pfeiffer Vacuum For optimal and trouble-free use of this product, Pfeiffer Vacuum offers a comprehensive range of courses and technical trainings. For more information, please contact Pfeiffer Vacuum technical training.
  • Page 17: Transportation And Storage

    Transportation and storage 3 Transportation and storage NOTICE Damage caused by incorrect transportation Transportation in unsuitable packaging, or failure to install all transport locks, can damage the prod- uct. ► Comply with the instructions for safe transportation. NOTICE Damage caused by improper storage Improper storage will lead to damage to the product.
  • Page 18: Product Description

    4 Product description 4.1 Identifying the product You will need all the data from the rating plate to safely identify the product when communicating with Pfeiffer Vacuum. Recording rating plate data 1. Read the data on the product rating plate. 2. Record this data.
  • Page 19: Fig. 2: Front Panel

    Product description CenterTwo CenterThree CenterOne Fig. 2: Front panel 1 USB connection (type A) Controls 2 Display CenterTwo CenterThree CenterOne Fig. 3: Connections on the rear side 1 Ground terminal CONTROL "CONTROL" connection for control functions 2 Mains power supply RELAY "RELAY"...
  • Page 20: Display Elements

    Product description 4.4 Display elements Display elements of the device Fig. 4: Display CenterOne 1 Parameter or bar graph Measurement channel value 2 Parameter mode or input lock Measurement channel status 3 Unit of pressure or voltage Switch-points Fig. 5: Display CenterTwo and CenterThree 1 Parameter or bar graph Measurement channel value 2 Parameter mode or input lock...
  • Page 21: Fig. 7: Parameter Or Bar Graph

    Product description Parameter or bar graph Fig. 7: Parameter or bar graph 1 Display for measurement channel 1 Bar graph with switch-point for measurement channel 1 2 Parameter display Pressure vs. time, trend for measurement channel 1 Switch-points, parameter mode and input lock Fig.
  • Page 22: Controls

    Product description 4.5 Controls Designation Functions (depending on operating mode) Parameter ● Change to parameter mode ● Select parameter/group ● Confirm selection ● Save changes and return to read mode Measurement Change measurement channel channel (only for CenterTwo and CenterThree) UP and DOWN ●...
  • Page 23: Ground Terminal

    Product description 4.6.2 Ground terminal DANGER Danger to life from electric shock The internal earthed conductor is fastened to the housing by a screw. A device without an earthed conductor attached can be life-threatening in the event of a malfunction. ► Do not rotate or loosen the screw on the internal earthed conductor. The connection to the protective earthing is located on the rear side of the device.
  • Page 24: Control" Connection (Centerone)

    Product description Fig. 13: Connection CH B (D-Sub socket) 1 EMI status n.c. 2 Signal input (measuring signal 0 – +10 V DC) Identification 3 Status Supply (24 V DC) 4 HV_H / HV_EMI Signal earth 5 Supply earth (GND) Receive data (RxD) 6 n.c.
  • Page 25: Control" Connection (Centertwo/Centerthree)

    Product description Pins Switching func- Description Switching func- Description tion tion No errors Error or device switch- ed off Tbl. 6: Switching functions 4.6.5 "CONTROL" connection (CenterTwo/CenterThree) DANGER Danger to life due to dangerous contact voltage Voltages above 30 V (AC) or 60 V (DC) are considered dangerous in accordance with IEC 61010. If you come into contact with dangerous contact voltage, this can result in injury through electric shocks or even death.
  • Page 26: Usb" Connection (Type B)

    Product description Fig. 16: "RELAY" connection (25-pole D-Sub socket) 1, 7 16, 17, 18 Switching function 4 Earth (GND) 19, 20, 21 Switching function 5 +24 V (DC), 200 mA 4, 5, 6 Switching function 1 22, 23, 24 Switching function 6 8, 9, 10 Switching function 2 3, 14, 15...
  • Page 27: Ethernet" (Lan) Connection

    Product description Fig. 18: "USB" connection (type A) 1 VBUS (5 V) 2 D- Earth (GND) 4.6.9 "Ethernet" (LAN) connection The "Ethernet" connection enables direct communication with the device via a computer. RJ-45 green yellow Fig. 19: "Ethernet" (LAN) connection 1 Transmission data (TD+) Reception data (RD-) 2 Transmission data (TD-) 4, 5, 7, 8...
  • Page 28: Installation

    Installation 5 Installation 5.1 Installing the device in a 19” rack NOTICE Damage caused by overheating The ambient temperature must not exceed the permissible operating temperature of the device. ► Make sure there is unobstructed circulation of air when installing the device. ►...
  • Page 29: Fig. 23: Adapter Plate (Only Centerone With 3 Height Unit Rack Module Adapter)

    Installation Fastening the rack module adapter ► Fasten the rack module adapter in the rack cabinet. Fig. 23: Adapter plate (only CenterOne with 3 height unit rack module adapter) Attaching the adapter plate Required tools ● Screwdriver Required material ● 2 × collar screws and synthetic nipple ►...
  • Page 30: Installing The Device In A Switchboard

    Installation 5.2 Installing the device in a switchboard NOTICE Damage caused by overheating The ambient temperature must not exceed the permissible operating temperature of the device. ► Make sure there is unobstructed circulation of air when installing the device. ► Make sure that air can enter and exit through the ventilation openings without obstruction. ►...
  • Page 31: Using The Device As A Desktop Device

    Installation 3. Support the device to relieve the front panel. 4. Fasten the device using 4 screws. 5.3 Using the device as a desktop device NOTICE Damage caused by overheating The ambient temperature must not exceed the permissible operating temperature of the device. ►...
  • Page 32: Commissioning

    6.2 Updating the firmware If your device requires a more recent firmware version, in order to support new gauges for example, please contact your nearest Pfeiffer Vacuum Service Center. A firmware update can be performed ● using a USB memory stick (USB type A on the front side of the device) or ●...
  • Page 33: Fig. 29: Usb Update Tool

    ● You must use the Windows XP, 7, 8 or 10 operating system. ● Make sure there is no USB memory stick connected to the front side of the device. 1. Open the Pfeiffer Vacuum Download Center in the browser.
  • Page 34: Configuring Ethernet

    Commissioning 8. Go to the "Release Notes" tab. – You will find the change log here. 9. Go to the "Manage Parameters" tab. – We recommend that you store the parameters here before performing an update. 10. Go to the "Manage Firmware" tab. 11.
  • Page 35 Commissioning 5. Use the Ethernet Configuration Tool to search for the device on the network. 6. Assign a virtual COM interface. 7. Start the program to communicate with the device. 8. Connect the device to the assigned COM interface. Ethernet Configuration Tool The Ethernet Configuration Tool enables the configuration of the Ethernet interface using a PC.
  • Page 36: Fig. 30: Ethernet Configuration Tool

    Commissioning Fig. 30: Ethernet Configuration Tool Ethernet Configuration Tool ● The "Device Info" tab displays basic information about the selected device. ● The automatic or manual network setting is made in the "Network Settings" tab. ● In the "Virtual Serial Port" tab, you can assign a separate COM port to each device and/or gener- ate a new COM port.
  • Page 37 1. Recommendation: Contact your network administrator before you start the configuration. 2. Recommendation: Update the operating system before you start the Ethernet configuration. You also require administrator rights. 3. Open the Pfeiffer Vacuum Download Center in the browser. 4. Enter "Ethernet Configuration Tool" as the keyword.
  • Page 38: Operation

    Operation 7 Operation 7.1 Basic operation The following section provides information about the most important basic operations for the individual modes. Operation Description Press button Press button for longer than one second > 1s Do not press button Press buttons simultaneously Tbl. 9: Description of the controls 7.2 Operating modes The device operates in the following modes:...
  • Page 39: Fig. 31: Changing The Measurement Channel (Only Centertwo And Centerthree)

    Operation Fig. 31: Changing the measurement channel (only CenterTwo and CenterThree) Change measurement channel You can use the "Measurement channel" button to switch between measurement channels. The num- ber of the selected measurement channel lights up. ► Press the "Measurement channel" button until the number of the desired measurement channel is displayed.
  • Page 40: Parameter Mode

    Operation Measuring range Fig. 34: Measuring range During operation with linear gauges (CTR, CCR), negative pressure values can be displayed. Possible causes are: ● Negative drift ● Activated offset correction > 1s Fig. 35: Identifying the gauge Identifying the gauge 1.
  • Page 41: Fig. 37: Change Parameters

    Operation ● General parameters ● Test parameters Fig. 37: Change parameters Measurement Mode Parameter Display Edit Group Parameter Parameter Power on BARGRAPH FSR < < >10 s >10 s Fig. 38: Read/write parameter groups and parameters (CenterOne) 41/76...
  • Page 42: Fig. 39: Read/Write Parameter Groups And Parameters (Centertwo/Centerthree)

    Operation Measurement Mode Parameter Display Edit Group Parameter Parameter Power on < < >10 s >10 s Fig. 39: Read/write parameter groups and parameters (CenterTwo/CenterThree) Change parameters 1. Press the "Parameter" button to switch to parameter mode. – The display shows the respective parameter group instead of the bar graph. The symbol for Parameter mode lights up.
  • Page 43: Switching Function Parameters

    Setting the threshold values Pfeiffer Vacuum recommends setting the upper threshold value 1/2 decade above the low- er threshold value or the lower threshold value 1/2 decade below the upper threshold val-...
  • Page 44: Gauge Parameters

    Operation Minimum hysteresis The minimum hysteresis between the upper and lower threshold value is a minimum of 10% of the lower threshold value (logarithmic gauges) or 1% of the set upper range value (linear gauges). The upper threshold value is automatically updated with minimum hystere- sis if required.
  • Page 45: Tbl. 14: Available Parameters

    ● SLOW ─ The device does not respond to minor measured value fluctuations and thus responds more slowly to measured value changes. Pfeiffer Vacuum recommends this setting for precise com- parison measurements. ● CTR (for CCR gauges) ─...
  • Page 46: Gauge Control

    Operation Resetting the zero point on the gauges You must switch off offset correction before you reset the zero point on the gauges. Zero point calibration of a digital CCR gauge ► For digital CCR gauges, first adjust the gauge and then the controller. After zero point calibration, a zero appears on the display.
  • Page 47: Tbl. 16: Available Parameters

    Operation Gauge type TTR 9x TTR 101 ITR 90 PTR 91 PTR 2xx CCR 3xx Parameter S-ON S-OFF T-ON T-OFF Tbl. 16: Available parameters S-ON You can switch on certain gauges using different switch-on types. Adjustment, set- Description ting HAND You can manually switch on the gauges by pressing the “UP”...
  • Page 48: General Parameters

    Operation This parameter is only displayed if you have set the gauge switch-on type to S-ON S1, S-ON S2 or S- ON S3 (only CenterThree). T-OFF (CenterOne) Definition of the switch-off threshold with self-monitoring. This parameter is only displayed if you have set the gauge switch-off type to S-OFF SELF. T-OFF (CenterTwo/CenterThree) Definition of the switch-off threshold value when using the gauge on the other channel to switch off, or for self-monitoring.
  • Page 49 Operation ● mbar ● hPa (factory setting) ● Torr (only available if the Torr lock is not activated.) ● Pa ● Micron (= 0.001 Torr) (only available if the Torr lock is not activated.) ● Volt A change to the unit of measure also changes the unit of measure for the ITR 90 and ITR 200 gauges. For CenterOne: If Micron is selected as the unit of measure, it automatically switches to Torr when the level exceeds 99000 Microns.
  • Page 50 Operation ● LOG +0 ─ Logarithmic representation of a sub-measuring range (2.5 V/decade). p = 10^[U/(10/4) - 4] ● LOG +3 ─ Logarithmic representation of a sub-measuring range (2.5 V/decade). p = 10^[U/(10/4) - 1] ● LOG C1 ─ Logarithmic representation with the following combination: TTR at measurement channel 1, PTR 2xx at measurement channel 2 p = 10^[U/(10/12) - 9] ●...
  • Page 51 Operation ● PRL10K ─ Non-linear output characteristics such as with Edwards PRL10K gauges ● PRL1Q ─ Non-linear output characteristics such as with Edwards PRL1Q gauges Sorting the gauges (with LOG C3) ► Sort the three gauges with regard to the upper range value (FS). –...
  • Page 52: Fig. 42: Press The Arrow Keys Simultaneously > 2 Seconds

    Operation ● f(1min) ─ p = f , auto-scaled, 1 minute/pixel The device stores a measured value in tabular form every minute for each measurement channel, and shows the last 100 measured values (= 100 pixel) auto-sized. The illustrated da- ta series is equivalent to a recording duration of 100 minutes.
  • Page 53: Test Parameters

    "Parameter" button for 5 seconds on the display. < SOFTWARE Firmware version (program version) display. This information is useful if you need to contact Pfeiffer Vacuum. HARDWARE Hardware version display. This information is useful if you need to contact Pfeiffer Vacuum.
  • Page 54: Fig. 43: Program Memory Test

    Operation KEY LOCK The key lock prevents unintentional input in parameter mode and thus any malfunctions. This function is disabled in the factory setting. FLASH Fig. 43: Program memory test Program memory test. ● RUNNING ─ The test is running (very short). ●...
  • Page 55: Data Logger Mode

    The device does not recognize all USB memory sticks, for instance if they do not comply with the USB standard. Try using a different memory stick first before you contact your nearest Pfeiffer Vacuum Service Center. DATE Current date in format YYYY-MM-DD.
  • Page 56: Fig. 47: Start/Stop Measured Data Recording

    Operation TIME Current time in format hh:mm [24 h]. INTERVAL Interval of measured data recording. ● 1 s ─ Recording interval 1/s ● 10 s ─ Recording interval 1/10 s ● 30 s ─ Recording interval 1/30 s ● 1 min ─...
  • Page 57: Setup Mode

    Operation 7.6 Setup mode Parameter Description SAVE Save all parameters RESTORE Write all parameters to the device FORMAT Format the USB memory stick (FAT32) DELETE Delete files with stored parameters Tbl. 23: Parameters of this group This group allows ● all parameters to be saved on a USB memory stick (USB interface type A). ●...
  • Page 58: Fig. 50: Delete Parameter Files From The Usb Memory Stick

    Operation Fig. 50: Delete parameter files from the USB memory stick ● RUNNING ─ The device is deleting the files. ● DONE ─ The device has deleted the files. 58/76...
  • Page 59: Decommissioning

    Decommissioning 8 Decommissioning Switching the device off 1. Switch off the device at the mains switch. 2. For rack assembly: Switch off the device centrally via the switched mains distributor. 3. Wait at least 10 seconds before switching it back on again, so that the device can reinitialize. 59/76...
  • Page 60: Maintenance

    ► Only operate the device in a dry environment. ► Operate the device away from fluids and humidity sources. ► Do not switch on the device if fluid has penetrated into it, instead contact Pfeiffer Vacuum Serv- ice. ► Always disconnect the current supply before cleaning the device.
  • Page 61: Replacing The Battery

    Maintenance NOTICE Damage caused by unsuitable cleaning agents Unsuitable cleaning agents damage the product. ► Do not use solvents as they attack the surface. ► Do not use any aggressive or abrasive cleaning agents. Cleaning the device Required consumables ● Common cleaning agent (e.g. mild detergent). ●...
  • Page 62: Malfunctions

    10 Malfunctions The error appears and the error relay opens. The malfunction cannot be eliminated If the malfunction persists even after acknowledging several times and/or replacing the gauges, please contact your nearest Pfeiffer Vacuum Service Center. Error Possible cause Correction/acknowledgment Display: SEN- Interruption or malfunction in the Press the "Parameter"...
  • Page 63: Shipping

    ► Comply with the instructions for safe shipping. Shipping the product safely Decontamination subject to charge Pfeiffer Vacuum decontaminates products not clearly declared "Free of contamination" at your expense. 1. Do not ship microbiological, explosive or radioactively contaminated products. 2. Observe the shipping guidelines for the participating countries and transport companies.
  • Page 64: Disposal

    Disposal 12 Disposal WARNING Health hazard through poisoning from toxic contaminated components or devices Toxic process media result in contamination of devices or parts of them. During maintenance work, there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub- stances causes environmental damage.
  • Page 65: Service Solutions From Pfeiffer Vacuum

    We are consistently striving to perfect our core competence, service for vacuum components. And our service is far from over once you’ve purchased a product from Pfeiffer Vacuum. It often enough really just begins then. In proven Pfeiffer Vacuum quality, of course.
  • Page 66 Service solutions from Pfeiffer Vacuum 5. Prepare the product for transport in accordance with the details in the declaration of contamination. a) Neutralize the product with nitrogen or dry air. b) Close all openings with airtight blank flanges. c) Seal the product in appropriate protective film.
  • Page 67: Ordering Information

    Ordering information 14 Ordering information 14.1 Ordering parts Ordering spare parts, accessories or optional components ► Always specify the following details when ordering spare parts, accessories or optional compo- nents: ● all details according to the rating plate ● description and order number according to the parts list 14.2 Accessories Description order number...
  • Page 68: Technical Data And Dimensions

    Technical data and dimensions 15 Technical data and dimensions 15.1 Technical data General Parameter Value For rack installation, control panel installation or as a tabletop device Weight 0.85 kg (CenterOne) 1.10 kg (CenterTwo) 1.14 kg (CenterThree) Tbl. 25: General Mains power supply Parameter Value Voltage...
  • Page 69: Tbl. 28: Gauge Connections

    Technical data and dimensions Parameter Value ITR 90, ITR 200 CTR 90, CTR 91, CTR 100, CTR 101, CCR 36x, CCR 37x, DI/DU 200, DI/DU 201, DI/DU 2000, DI/DU 2001, DI/DU 2001 rel Tbl. 28: Gauge connections Gauge supply voltage Parameter Value Voltage...
  • Page 70: Tbl. 32: Switching Functions

    Technical data and dimensions Parameter Value Setting range Gauge-dependent Hysteresis ≥ 1 % F.S. for linear gauges, ≥ 10 % of the measured value for logarithmic gauges Tbl. 32: Switching functions Switching function relay Parameter Value Contact type Zero-potential two-way contact Load max.
  • Page 71: Tbl. 36: Gauge Control

    Technical data and dimensions Parameter Value switch on with mains volt- (see chapter “Gauge control”, page 46) with pressure rise Switch-off threshold value adjustable (see chapter “Gauge control”, page 46) Tbl. 36: Gauge control Analog output Parameter Value Quantity, number 1 (CenterOne) 2 (1 per channel) (CenterTwo) 3 (1 per channel) (CenterThree)
  • Page 72: Dimensions

    Technical data and dimensions Ethernet interface Parameter Value ACK/NAK, ASCII with 3 character mnemonics Data format Two-way data traffic, 1 start bit, 8 data bits, 1 stop bit, no parity bit, no handshake Baudrate 9600, 19200, 38400, 57600, 115200 IP address DHCP (factory setting) or manual input MAC address readable via "MAC"...
  • Page 73: Appendix

    Appendix 16 Appendix 16.1 Units of pressure Unit mbar Torr / mm Hg mbar 1 · 10 0.75 1000 1000 1 · 10 0.01 0.01 1 · 10 1 · 10 7.5 · 10 0.75 1 · 10 0.01 1000 Torr / mm Hg 1.33 133.32 1.33...
  • Page 74: Etl Listed

    ETL LISTED The products CenterOne, CenterTwo and CenterThree - conform to the UL standards UL 61010-1 and UL 61010-2-030. - are certified to the CAN/CSA standards CAN/CSA C22.2 No. 61010-1 and CANCSA C22.2 No. 61010-2-030. 4010094...
  • Page 75: Declaration Of Conformity

    DIN EN 61000-3-3:2014-03 DIN EN 61000-6-1:2007-10 DIN EN 61000-6-2:2006-03 DIN EN 61000-6-3:2011-09 DIN EN 61000-6-4:2011-09 DIN EN 61010-1:2011-07 DIN EN 61326-1:2013-07 RoHS (fully compliant) Signature: Pfeiffer Vacuum GmbH Berliner Straße 43 35614 Aßlar Germany (Dr. Ulrich von Hülsen) Aßlar, 2018-04-16 Managing Director...

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