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Measuring Instruments
5200 Series
Manual
TSI Instruments 5200 Series Manual page 3
General purpose thermal mass flowmeters
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GENERAL PURPOSE
THERMAL MASS FLOW METERS
TSI
SERIES 5200/5300
®
ASCII COMMAND SET
P/N 6011697, REVISION A
April 2019
U.S. & INTERNATIONAL
TSI Instruments Ltd. (UK)
Sales and Customer Service:
Sales and Customer Service:
(800) 680-1220 / +1(651) 490-2860
+44 (0) 1494 459200
Fax:
+1(651) 490-3824
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This manual is also suitable for:
5 series
5300 series
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