TSI Instruments 4000 Series Design Manual
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TSI Instruments 4000 Series Design Manual

High performance linear oem mass flowmeter
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Mass Flowmeters
TSI Series 4000/4100
High Performance
Linear OEM Mass Flowmeter
(TSI Models 4021, 4024,
4121, and 4122)
Design Guide
1980430, Revision H
August 2010

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Summary of Contents for TSI Instruments 4000 Series

  • Page 1 Mass Flowmeters TSI Series 4000/4100 High Performance Linear OEM Mass Flowmeter (TSI Models 4021, 4024, 4121, and 4122) Design Guide 1980430, Revision H August 2010...
  • Page 2 SHIP/MAIL TO: E-mail address: TSI Incorporated flowmeters@tsi.com 500 Cardigan Road Website: Shoreview, MN 55126-3996 http://flowmeters.tsi.com INTERNATIONAL Sales and Customer Service: Sales and Customer Service: (+1) 651 490-2811 (800) 874-2811/(651) 490-2811 Fax: (+1) 651 490-3824 Fax: (651) 490-3824...
  • Page 3 Copyright TSI Incorporated / 2004-2010 / All rights reserved. LIMITATION OF WARRANTY AND LIABILITY (effective July 2000) Seller warrants the goods sold hereunder, under normal use and service as described in the operator's manual, shall be free from defects in workmanship and material for 90 days for OEM components, from the date of shipment to the customer.
  • Page 4 TO THE EXTENT PERMITTED BY LAW, THE EXCLUSIVE REMEDY OF THE USER OR BUYER, AND THE LIMIT OF SELLER'S LIABILITY FOR ANY AND ALL LOSSES, INJURIES, OR DAMAGES CONCERNING THE GOODS (INCLUDING CLAIMS BASED ON CONTRACT, NEGLIGENCE, TORT, STRICT LIABILITY OR OTHERWISE) SHALL BE THE RETURN OF GOODS TO SELLER AND THE REFUND OF THE PURCHASE PRICE, OR, AT THE OPTION OF SELLER, THE REPAIR OR REPLACEMENT OF THE GOODS.

  • Page 5: Table Of Contents

    CONTENTS Chapter 1 - Models and Accessories ..........1 Accessories ..............2 Model Designations ............. 3 Chapter 2 - Measurements Available ..........4 Flow Rate Measurement ..........4 Temperature Measurement ......... 4 Volume Measurement ..........5 Chapter 3 - Mechanical Interface ............. 6 Overall Dimensions ............
  • Page 6 Chapter 5 - Design Considerations, Electrical ......13 Power Requirements ..........13 Grounding Scheme ........... 13 Output Signal, Analog ..........13 Digital Interfaces ............14 Pin-out for Mini-DIN Connector ......... 16 Chapter 6 - I/O Signal Description ..........18 RS-232 Bi-Directional Interface ......... 18 Analog Output of Mass Flow Rate ......

  • Page 7: Chapter 1 - Models And Accessories

    Chapter 1 - Models and Accessories The TSI Series 4000/4100 High Performance Linear OEM Mass Flowmeter is available in the following model numbers: 4021, 4024, 4121, and 4122. Models 4121 4122...

  • Page 8: Accessories

    Models 4021 4024 Accessories Interface Cable, mini-DIN -to- tinned wire: TSI Part Number 1303584...

  • Page 9: Model Designations

    Model Designations Model Gas Calibration Flow Range Inlet Adapter Outlet Adapter 22 mm ISO 22 mm ISO 40211 0 to 300 tapered tapered standard L/min 40212 Oxygen Male Male 40241 0.75 inch 0.75 inch 0 to 300 40242 Oxygen (19.1 mm) (19.1 mm) standard L/min straight...

  • Page 10: Chapter 2 - Measurements Available

    Refer to the Command Set section for instructions. *TSI instruments define standard conditions as 21.1°C (70° F) and 101.3 kPa (14.7 psia, 1 bar). Temperature Measurement These flowmeters have an independent sensor in the flow tube to measure the gas temperature.

  • Page 11: Volume Measurement

    temperature is only available through the serial digital interface. See Command Set section. At flows below 1 standard L/min, the temperature inside of the flow tube will increase several degrees because of the heat generated by the thermal flow sensor. This effect is normal and the temperature of the incoming gas will be measured accurately once flow resumes.

  • Page 12: Chapter 3 - Mechanical Interface

    Chapter 3 - Mechanical Interface Overall Dimensions...

  • Page 13: Inlet / Outlet Connections

    Mounting Model Screws 4021 - 5.12 in 2.52 in 1.50 in 2.60 in 0.63 in 8–32 UNF 4024 (130 mm) (64 mm) (38 mm) (66 mm) (16 mm) 4121 - 3.67 in 1.93 in 1.11 in 2.60 in 0.43 in 6–32 UNF 4122 (93 mm)

  • Page 14: Inlet / Outlet Adapter Dimensions

    Models equipped with female 22 mm ISO tapered inlet/outlet: • Connections can be made with appropriate 22 mm ISO tapered male connectors. Inlet / Outlet Adapter Dimensions Inlet / Outlet Dimensions Model 4021 0.920 (23.37) 0.751 (19.08) 0.874 (22.20) 4024 0.795 (20.19) 0.621 (15.77) 0.749 (19.02)

  • Page 15: Chapter 4 - Design Considerations, Mechanical

    Chapter 4 - Design Considerations, Mechanical Important Safety Notes Hydrogen Safety These models of TSI OEM flowmeters use a heated, platinum-coated sensor element exposed to the flow stream. For this reason do not use these flowmeters with hydrogen or hydrogen mixtures. Intrinsic Safety These models of TSI OEM flowmeters are not designed to be intrinsically safe.

  • Page 16: Inlet / Outlet Screens

    blown free of particles and metal shavings after manufacturing and before the flowmeters are installed. We strongly recommend an upstream filter with an efficiency of at least 99.9%. Do not use an oil- impregnated filter. Consult factory for more information. Inlet / Outlet Screens The small screens on the inlet and outlet of the flowmeter trap dirt and manufacturing debris.

  • Page 17: Inlet Flow Conditioning

    Inlet Flow Conditioning The airflow going into the flowmeter’s measuring section normally has a uniform flow profile. An upstream valve, regulator, or small diameter tubing can create a non-uniform jet of gas through the flowmeter. For best accuracy your design should avoid these devices immediately upstream of the flowmeter.

  • Page 18: Flow Reversal/Direction - Pumps

    Flow Reversal/Direction - Pumps These flowmeters are designed and calibrated for unidirectional flow. The arrow on the body of the flowmeter indicates the correct direction. The flowmeter cannot detect flow direction, so the output signal is the same regardless of flow direction. If your design presents the flowmeter with momentary flow reversals, such as during valve switching, pump operation, etc., you will see significant errors in the measured flow.

  • Page 19: Chapter 5 - Design Considerations, Electrical

    Chapter 5 - Design Considerations, Electrical Power Requirements 5.0 VDC ±0.25 Volts, 300 mA maximum The power is supplied through mini-DIN connector Grounding Scheme The following are connected together inside the flowmeter: Power Ground Logic Ground Analog Ground (output signal return) Output Signal, Analog Model 4021-4024: 0-4 Volts = 0-300 Standard L/min (default) Model 4121-4122: 0-4 Volts = 0-20 Standard L/min (default)

  • Page 20: Digital Interfaces

    Important Since the (-) side of the analog output is connected to the common power/logic ground, you must use a differential input on any device used to measure this analog output signal. Failure to use a differential input will result in measurement errors.
  • Page 21 Device information is also available via the digital interfaces. This includes SN, model number, calibration date, the current status of all device options, and calibration gas. Appendix C for complete command set. All models are RS-232 Bi-directional Interface Type: 38,400 baud, 8 bit, no parity, 1 stop bit, no flow control. This meter can be connected to a RS-232 port of a computer by connecting a 9 pin female D-Sub to the cable.

  • Page 22: Pin-Out For Mini-Din Connector

    Pin-out for Mini-DIN Connector Mini-DIN pin-out and cable color code Color code for TSI cable with Computer Mini-DIN tinned wires. female 9 pin Pin No. Function PN 1303584 D-Sub Power Input (+5V) Black Power Ground Green Analog Output (+) Analog Ground (-) Brown Analog Pressure Input Blue...

  • Page 24: Chapter 6 - I/O Signal Description

    Chapter 6 - I/O Signal Description RS-232 Bi-Directional Interface Type: 38,400 baud, 8 bit, no parity, 1 stop bit, no flow control. Used to output the flow rate, volume, and temperature signals as well as to select options and modify operating parameters. See Appendix Analog Output of Mass Flow Rate Factory default: 0–4.0 VDC corresponding to 0 to the full scale flow...
  • Page 25 slightly improve the accuracy of the air density calculation for SLPM. Appendix Analog Input: 0.0–2.0 VDC corresponds to 0 to 101.30 kPa (absolute). Max input = 4.0 V Digital Input of Pressure Data: Pressure data can be sent to the instrument via the digital interface.

  • Page 26: Chapter 7 - Specifications

    Chapter 7 - Specifications Models 4021 Models 4121 through 4024 through 4122 Flow Measurement Measurement Range 0 to 300 Std L/min. 0.01 to 20 Std L/min. Accuracy Air and O : 2% of Air and O : 2% of reading or 0.05 Std reading or 0.005 Std L/min, whichever is L/min, whichever is...
  • Page 27 Models 4021 Models 4121 through 4024 through 4122 Accuracy (continued) : 3% of reading or : 3% of reading or 0.10 Std L/min, which 0.010 Std L/min, which ever is greater, at 21.1°C ever is greater, at and 101.3 kPa. See 21.1°C and 101.3 kPa.
  • Page 28 Models 4021 Models 4121 through 4024 through 4122 Analog Flow Output Range 0 to 4.0 V = 0 to 300 Std 0 to 4.0 V = 0 to 20 Std L/min (can be re-scaled L/min (can be re-scaled via serial interface via serial interface command) command)
  • Page 29 Models 4021 Models 4121 through 4024 through 4122 Temperature Measurement Range 0 to 50°C 0 to 50°C Accuracy ±1°C, at flows greater ±1°C, at flows greater than 1 L/min. See note 2 than 1 L/min. See note below. 2 below. Response Less than 75 msec, 63% Less than 75 msec,...
  • Page 30 Models 4021 Models 4121 through 4024 through 4122 Pressure Drop See figure below See figure below Instrument Temp. Range Operation, Ambient 0 to 50°C 0 to 50°C Storage, Ambient -20 to 60°C -20 to 60°C Gas Calibrations Flowmeter must be Flowmeter must be calibrated to the calibrated to the...
  • Page 31 Accuracy stated at standard conditions of 21.1°C and 101.3 kPa. • Add an additional 0.075% of reading per 1°C away from standard conditions when operating within the range of 0°C to 50°C. • Add an additional 0.015% of reading per 1 kPa above 101.3 kPa when pressure compensated and operating within the pressure range of 70 kPa to 170 kPa.
  • Page 32 Pressure Drop Model 4021–4024 Flow (SLPM)
  • Page 33 Pressure Drop Model 4121–4122 Flow (SLPM)

  • Page 34: Appendix A - Back-Pressure And Barometric Pressure - Effect On Accuracy

    Appendix A - Back-Pressure and Barometric Pressure - Effect on Accuracy Even though thermal flowmeters are inherently mass flowmeters (flow is independent of gas density), there is a pressure component related to Mach number which cannot be accounted for without knowing the gas pressure.
  • Page 35 1. Store a fixed pressure value in the instrument. If the typical actual pressure is known and relatively constant, you can store the estimated pressure in the instrument’s memory. You can enter this fixed pressure via any of the serial protocols. Examples of this method include a relatively constant backpressure caused by downstream hardware or a correction for high altitude operation.
  • Page 36 Pressure Effect vs. Flow Rate Model 4021–4024 20 PSIA 18 PSIA 16 PSIA 13 PSIA 11 PSIA 9 PSIA 0.01 1000 Flow (SLPM)
  • Page 37 Pressure Effect vs. Flow Rate Model 4121 - 4122 20 PSIA 18 PSIA 16 PSIA 12 PSIA 10 PSIA 8 PSIA -10% 10.0 100.0 Flow (SLPM)

  • Page 38: Appendix B - Standard Flow Rate Vs. Volumetric Flow Rate

    Since thermal flow sensors are sensitive to changes in air density and air velocity, all thermal flowmeters indicate flow rates with reference to a set of standard conditions. For TSI instruments, standard conditions are defined as 21.1°C (70°F) and 101.3 kPa (14.7 psia). Other manufacturers may use different values.
  • Page 39 Where Q = Standard flow rate T = Absolute temperature of gas in flow tube P = Absolute pressure in flow tube ºC and Pstd = 101.3 kPa TSI flowmeters use Tstd = 21.11 absolute Example: The mass flow rate measured by the flowmeter is 100 Std L/min at ºC and 117.0 kPa.

  • Page 40: Appendix C - Digital Serial Interface

    Appendix C - Digital Serial Interface Command Set Summary Data Format The serial interface settings are fixed as follows: Baud Rate ....38,400 Data Bits ....8 Parity ....... None Stop Bits ....1 Flow Control .... None Buffering The flowmeter has an internal software buffer for both transmit and receive operations.
  • Page 41 These flowmeters use ASCII characters as the input command set. Each command sent to the flowmeter must be terminated by a carriage return (CR = 0x0d). Line feeds (LF = 0x0a ) are ignored. Some commands allow you to choose either ASCII or binary format for the returned data.
  • Page 42 Commands for Flow Rate, Volume, and Temperature Measurement DmFTPnnnn Returns Flow rate and Temperature data at an interval equal to the sample rate. Vmnnnn Returns a volume measurement by integrating flow rate over time. Measurement Setup Commands SBTx±nnn.nn Sets the begin-trigger level for starting data acquisition.
  • Page 43 Setup Commands for Analog Output SASnnn Sets the full-scale flow rate of the analog output. SAZnnn Sets the zero intercept for the analog output. SSRnnnn Sets the sample rate at which the data is returned. Miscellaneous Commands Reads the current values of the changeable operating parameters.

  • Page 44: Command Set

    Command Set DmFTPnnnn Returns Flow, Temperature, and Pressure data at an interval equal to the sample rate. The data is returned in the order of Flow, Temperature, and Pressure. All three measurements may be requested or a combination of the three as indicated below.
  • Page 45 Requests a pressure setting (replace with a lower case ‘x’ if a pressure reading is not required). Pressure data is returned in units of kPa. This is the pressure set for compensation. Default value is 101.32 kPa. nnnn Denotes maximum number of samples to return, range is 1 to 1000.
  • Page 46 ASCII Modes Mode A – ASCII, comma delimited If the comma delimited ASCII mode is chosen, the acknowledge sequence of “OK” <CR> <LF> is sent followed by the data. The readings returned are separated by commas and the termination sequence is a <CR> <LF>. If the command generated an error, an error code “ERRn”...
  • Page 47 Binary Mode If binary mode is chosen, a single byte, 0x00, will be returned, as a command acknowledgment. If a command generated an error, then a single byte will be returned in place of the acknowledgment byte. See the end of this section for a list of error codes. Each reading returns two bytes.
  • Page 48 be used in the integral. If an end-trigger is set (set with SETx±nnn.nn), the acquisition will stop either when the end-trigger condition is detected or when nnnn samples has been acquired, whichever comes first. After the command is finished, a termination sequence is sent to signal the end of the transfer.
  • Page 49 (flow) (temperature) 61.22 19.02 60.01 19.00 59.10 19.00 59.24 18.96 59.38 18.95 Example 6) DBFxx0005 Request 5 samples of flow in binary format (assume begin-trigger is not set). Flowmeter returns the single byte acknowledgement 0x00 followed by the flow data and termination sequence: 0x33 0x09 0x33 0x1f 0x33 0x25 0x33 0x2d 0x33 0x2e 0xFF 0xFF After conversion, the data would look like this:...
  • Page 50 nnnn Denotes maximum number of flow samples to integrate, range is 1 to 9999. (‘0500’ denotes 500 readings, leading zeros must be included.) Example 1) VA2000 Request a single volume reading by integrating a maximum of 2000 flow samples and return data in ASCII format. Volume data is returned in units of standard liters or volumetric liters.
  • Page 51 represents an error code 0 through 9. See the end of this section for a list of possible error codes. If the binary mode is chosen, the acknowledge sequence is a single byte 0x00. Data acquisition begins as soon as the begin-trigger condition is detected.
  • Page 52 Example 2) VA1000 Request volume measurement with at most 1000 samples, data returned in ASCII. Flowmeter immediately returns the acknowledgement OK <CR> <LF>. After the end of the data acquisition period when the end-trigger condition is detected or when the specified number of samples have been collected, volume data is transmitted followed by the termination sequence: 130.651 <CR>...
  • Page 53 SBTx±nnn.nn Sets the begin-trigger level for starting the data acquisition. Denotes set begin-trigger. Denotes trigger source: F = flow, P = pressure. ± Denotes positive or negative trigger: + = positive, - = negative. nnn.nn Set trigger level (‘001.00’ could denote 1.00 Std L/min, leading and trailing zeros must be included).
  • Page 54 SETx±nnn.nn Sets the end-trigger level for stopping data acquisition. Denotes set end-trigger. Denotes trigger source: F = flow. ± Denotes positive or negative trigger: + = positive, - = negative. nnn.nn Sets trigger level (‘001.00’ could denote 1.00 Std L/min, leading zeros must be included).
  • Page 55 Clears the begin-trigger level that was set with SBTx±nnn.nn. Begin- trigger function is disabled. The flowmeter will return an acknowledge sequence of “OK” <CR> <LF> as a response. Example 1) CBT Clears the end-trigger level that was set with SETx±nnn.nn. End- trigger function is disabled.
  • Page 56 In addition to setting the sample rate at which data is accessed through the serial port, this command also controls the update rate of the D/A for the linearized analog flow output signal. After the command is processed, an acknowledge sequence of “OK” <CR>...
  • Page 57 Denotes set gas. Denotes the gas calibration desired. 0=Air, 1=100% O 2=100% N O, 6=100% N 300 L/min meter air and nitrogen meter can output either air or nitrogen signals. 20 L/min air, nitrous oxide and nitrogen meters output air, nitrous oxide and nitrogen signals.
  • Page 58 Select either Standard or Volumetric units of flow for data received through the serial port. Denotes whether flow is measured in Standard units or Volumetric units. Denotes which units. S = Std L/min, V = Volumetric L/min. The 4000 and 4100 series flowmeters are designed to measure flow in units of standard L/min.
  • Page 59 Use the SAVE command to permanently store the selected flow units as the new power-on default. Example 1) SUS Selects units of Std L/min for flow rate SPnnn.nn Sets the pressure to be used for internal pressure compensation and for conversion from standard L/min to volumetric L/min. The unit will default to 101.3 kPa on power up.
  • Page 60 SASnnn Sets the full-scale flow rate of the analog output. Denotes set scaling factor. Sets full-scale flow rate output (range: 1 to 300 Std L/min) = 4.0 Volts output. (‘010’ denotes 10 Std L/min, leading zeroes must be included.) The linearized analog output can be configured for various full-scale flow rate values.
  • Page 61 SAZnnn Sets the zero intercept for the analog output. The zero intercept nnn is in units of mV. If nnn = 010, at zero flow the analog output will be 10 mV. This command will accept a negative offset formatted as SZ-nnn.
  • Page 62 nnnn Denotes number of milliseconds per sample, range 1 to 1000. (‘0005’ denotes 5 milliseconds per sample, leading zeros must be included.) In addition to setting the sample rate at which data is accessed through the serial port, this command also controls the update rate of the D/A for the linearized analog flow output signal.
  • Page 63 xx = AZ Read analog zero intercept (returns –100 to 100) xx = BT Read begin-trigger value (returns xxnnn.nn). xx = ET Read end-trigger value (returns xxnnn.nn). xx = G Read gas calibration (returns 0 to 6). xx = P Read the current pressure setting (returns 0 to 200) xx = SR Read rate (returns 0 to 1000).
  • Page 64 SAVE Saves the current values for changeable operating parameters to the internal nonvolatile memory. The flowmeter will be restored to this configuration when powered up. The following parameters are saved: Analog Pressure Input enable (see SPnnn.nn command) Analog full scale flow rate (SASnnn) Analog zero intercept (SAZnnn) Gas (SGn) Sample Rate (SSRnnn)
  • Page 65 DEFAULT command. This command also clears both the begin- and end-trigger values. Example: The normal factory default parameter settings are: Analog Pressure Setting: 101.3 kPa Sample Rate: 10 ms Gas Calibration: 0 = Air Flow Units: Standard Analog Output Scaling: The full scale flow rate of the meter.
  • Page 66 Returns the serial number of the flowmeter in ASCII. The serial number is an alpha-numeric string terminated by a <CR> <LF>. The string can be a maximum of 16 characters in length plus the terminating <CR> <LF>. If the command generated an error, an error code of “ERRn”...
  • Page 67 Returns the internal firmware revision of the flowmeter in ASCII. The revision is an alpha-numeric string terminated by a <CR> <LF>. The string can be a maximum of 3 characters in length plus the terminating <CR> <LF>. If the command generated an error, an error code of “ERRn”...

  • Page 68: Error Codes

    This is a ping command used to tell if the flowmeter is communicating. The flowmeter will return an acknowledge sequence of “OK” <CR> <LF> as a response. Example 1) ? Returns “OK” <CR> <LF> Error Codes Unrecognizable command – The flowmeter uses the length of the command and the first few letters (how many letters depends on the command) to recognize a valid command.
  • Page 69 TSI Incorporated – 500 Cardigan Road, Shoreview, MN 55126 U.S.A Tel: +1 800 874 2811 E-mail: info@tsi.com Website: www.tsi.com Tel: +44 149 4 459200 E-mail: tsiuk@tsi.com Website: www.tsiinc.co.uk France Tel: +33 491 11 87 64 E-mail: tsifrance@tsi.com Website: www.tsiinc.fr Germany Tel: +49 241 523030 E-mail: tsigmbh@tsi.com Website...

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