Scroll Pump - Pfeiffer Vacuum QualyTest HLT 260 Maintenance Instructions Manual

• Clean contaminated parts and sealing surfaces with alcohol.
• Fit each new molded diaphragm with the same number of compensating washers as the
old one.
• Screw in the new molded diaphragms.
• Carefully set the HLT 270 upright.
• Set the intermediate plates on the molded diaphragm and install the valve plates.
• Insert the sealing rings on the head covers and place both head covers together in the
correct position on the intermediate plate.
• With a Phillips screwdriver No. 2 screw in and tighten 6 screws on each head cover.
• If an external roughing pump is used, reestablish the KF 16 connection to the external
roughing pump.
• Reconnect the ground cable.
• Reinstall the hood and close the latches on the left and right-hand side with the socket
wrench.
• Reinstall operating unit RC 260.
• Put the HLT 2xx back into service according to the user's guide.
4.5

Scroll pump

(valid for HLT 275)
4.5.1 Varian Triscroll TS600
Maintenace work according to Varian operating instructions
BG 805 457 BE / C (0204) HLT 2xx
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