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1.3
Technical data
TURBOVAC
High-vacuum connection
Pumping speed (without splinter guard) for
N
2
Ar
He
H
2
Ultimate pressure
with two-stage, oil-sealed rotary vane pump
with SCROLLVAC SC 30
with diaphragm pump
Max. permissible forevacuum pressure with N
water cooled
Weight
Pump with ISO-K flange
with TURBO.DRIVE 400
with TURBO.DRIVE 400 and air cooler
with TURBO.DRIVE 400 and water cooling
Pump with CF flange
Recommended forevacuum pumps
TRIVAC
SCROLLVAC
Diaphragm pump DIVAC
(at purge gas operation) TRIVAC
Operating speed
Run-up time
Power consumption
at run-up
at ultimate pressure
Forevacuum connection
Purge gas connection
Type of protection
Noise level
Ambient temperature
during operation, water cooled pump
during operation, air cooled pump
storage
Max. rel. air humidity
Purge gas flow
Purge gas
SL 300
DN 100 ISO-K / DN 100 CF
-1
270 l·s
-1
260 l·s
-1
255 l·s
-1
190 l·s
-10
< 10
mbar
-10
< 8
10
mbar
·
-9
< 4
10
mbar
·
2
< 8 mbar
5.2 kg
5.8 kg
6.3 kg
6.1 kg
7.4 kg
D 2,5 E
SC 5 / SC 15
2.5 VT
D 8 B
-1
60,000 min
approx. 4 min
115 W
18 W
DN 16 KF
M8 or DN 16 KF
IP 20
< 49 dB(A)
+15 - + 35 °C
+15 - + 30 °C
-15 - + 70 °C
95% (non-condensing)
12 sccm / 0,2 mbar l·s
Nitrogen, Argon or similar
130000761_002_A0 - 08/2008 - © Oerlikon Leybold Vacuum
Description
-1
9
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