Oerlikon Leybold Vacuum Turbovac SL 300 Manuals

Oerlikon Leybold Vacuum Turbovac SL 300 Manuals

Manuals and User Guides for Oerlikon Leybold Vacuum Turbovac SL 300. We have 1 Oerlikon Leybold Vacuum Turbovac SL 300 manual available for free PDF download: Operating Instructions Manual

Oerlikon Leybold Vacuum Turbovac SL 300 Operating Instructions Manual

Oerlikon Leybold Vacuum Turbovac SL 300 Operating Instructions Manual (64 pages)

Wide-Range Turbomolecular Pump with Integrated or External Frequency Converter

Brand: Oerlikon Leybold Vacuum | Category: Water Pump | Size: 3 MB

Table of Contents

Table of Contents
2
Important Safety Information
3
1 Description

7
- Design
  8
- Standard Equipment
  8
- Technical Data
  9
- Ordering Data
  14
- Accessories
  14
2 Installation

18
- Conforming Utilization
  18
- Operating Environment
  18
- Fitting Accessories
  19
- Attach the Pump to the Vacuum Chamber
  22
- Forevacuum Connection
  25
- Connect the Cooling
  26
- Connecting the Purge Gas / Venting Valve
  30
- Electrical Connection
  32
- Connecting Pump and Frequency Converter
  32
- Connecting the Power Supply
  34
- Mounting the Frequency Converter
  35
- Relay Status
  38
3 Operation

39
- Media Compatibility / Purge Gas
  39
- Start-Up
  39
- Interfaces
  40
- RS 232 C Interface (SERVICE X5)
  41
- RS 485 Interface
  42
- Profibus DP
  43
- Ethernet/Ip Interface
  43
- Parameter List
  44
- Warning Codes for Parameter 227
  48
- Switching on
  49
- Shutting down
  50
- Venting
  51
- Bakeout
  52
- Removing the Pump from the System
  53
4 Maintenance

54
- Cleaning
  54
- Oerlikon Leybold Vacuum Service
  54
5 Troubleshooting

55
6 Waste Disposal

59
- EC Manufacturer's Declaration
  60
- EC Conformance Declaration
  61
- Index
  63

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