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3
Operation
3.1
Media compatibility / purge gas
The TURBOVAC SL 300 is suitable for pumping air and clean gases.
These pumps are not suitable for
pumping liquids or gases containing dust or particulates
pumping corrosive or reactive gases
pumping gas mixtures with an oxygen share of > 21 %
If reactive gases in low concentrations must be pumped operate the pump
with purge gas.
During normal operation the pressures within the pump will be so low that
many gas mixtures will be incapable of igniting. But due to pressure bursts
during switching processes or due to malfunctions, for example, pressures
can be attained rendering such gas mixtures ignitable. During operation the
pump can reach temperatures as high as 110°C (230 °F). Ignition sparks
could occur in case of damage to the pump and these could ignite explosive
mixtures.
We would be glad to consult with you as regards the media which can safely
be handled with this unit.
Install a micropore filter when pumping media which contains dust.
Suited for venting or purging are all gases,
which will not cause corrosion or pitting in aluminium and steel and
which in connection with process deposits in the pump will not cause cor-
rosion or sticking.
For venting and as the purge gas we recommend inert gases like nitrogen or
argon. The temperature of these gases should be between 5 °C and 80 °C ,
max. relative humidity should not exceed 10 ppm.
The gas must be clean.
In individual cases and after consultation also dry, filtered, oil-free air or filte-
red ambient air may be used (filter mesh < 1µm).
Change the filters after some time, at least annually.
3.2
Start-up
The TURBO.DRIVE 400 offers the possibility of gently running in pumps
which were not operated for a period between 6 and 12 months. Before
starting, set up parameter 119 correspondingly.
Turbomolecular pumps which were not operated for a period of over 12
months should be returned to us. For more information on this please
contact your local sales partner.
130000761_002_A0 - 08/2008 - © Oerlikon Leybold Vacuum
Operation
Danger of ignition
Suited gases
39
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