Related Manuals for Varian FRG-700 series
Summary of Contents for Varian FRG-700 series
- Page 1 vacuum technologies INSTRUCTION MANUAL FRG-700 Inverted Magnetron Pirani Gauge Manual No. tqna48e1 Revision -- November 2008...
- Page 2 FRG-700 Inverted Magnetron Pirani Gauge Copyright 2008 Vacuum Technologies...
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Page 3: Warranty
FRG-700 Inverted Magnetron Pirani Gauge Warranty Products manufactured by Seller are warranted against defects in materials and workmanship for twelve (12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty claims is limited, at the option of Seller, to repair, to re- place, or refund of an equitable portion of the purchase price of the Product. -
Page 4: Product Identification
The Inverted Magnetron Pirani Gauge must not be used for measuring flammable or combustible gases which react in air. The gauge can be operated in connection with a VARIAN FRG Control Unit, a VARIAN Turbo AG Rack Controller, or with another controller. -
Page 5: Table Of Contents
3 Installation 3.1 Vacuum Connection 3.1.1 Removing the Magnet Unit (Only for Gauges With CF Flanges) 3.2 Electrical Connection 3.2.1 Use With an VARIAN Controller 3.2.2 Use With Another Control Device 4 Operation 4.1 Measurement Principle, Measuring Behavior 5 Deinstallation 6 Maintenance 6.1 Adjusting the Gauge... -
Page 6: Safety
FRG-700 Inverted Magnetron Pirani Gauge 1 Safety 1.1 Symbols Used DANGER Information on preventing any kind of physical injury. WARNING Information on preventing extensive equipment and environmental damage. Caution Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage. -
Page 7: Technical Data
The minimum voltage of the power supply must be increased proportionally to the length of the sensor cable. Voltage at the supply unit with 16.0 … 30.0 VDC (ripple ≤ 1 V maximum line length VARIAN controller fulfill these requirements. - Page 8 FRG-700 Inverted Magnetron Pirani Gauge Adjustment <HV> potentiometer at <10 mbar <ATM> potentiometer at atmospheric pressure Electrical connection FCC68 female, 8 poles Sensor cable 8 conductors plus shielding Line length ≤50 m (8×0.14 mm²) Operating voltage ≤3.3 kV Operating current ≤500 µA Grounding concept →...
- Page 9 FRG-700 Inverted Magnetron Pirani Gauge Dimensions [mm] ø 63.5 DN 25 ISO-KF DN 40 CF-F Weight FRG700KF25 ≈700 g FRG700CF35 ≈980 g...
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Page 10: Installation
FRG-700 Inverted Magnetron Pirani Gauge 3 Installation 3.1 Vacuum Connection DANGER DANGER: overpressure in the vacuum system >1 bar Injury caused by released parts and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized. - Page 11 FRG-700 Inverted Magnetron Pirani Gauge The gauge may be mounted in any orientation. To keep condensates and particles from getting into the measuring chamber preferably choose a horizontal to upright position and possibly use a seal with a centering ring and filter. If adjustment should be possible after the gauge has been installed, be sure to install it so that the <HV>...
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Page 12: Removing The Magnet Unit (Only For Gauges With Cf Flanges)
FRG-700 Inverted Magnetron Pirani Gauge 3.1.1 Removing the Magnet Unit (Only for Gauges With CF Flanges) Tools required • Allen wrench AF 1.5 • Open-end wrench AF 7 Procedure a) Unfasten the hexagon socket set screw (1) on the electronics unit (2). b) Remove the electronics unit without twisting it. -
Page 13: Electrical Connection
3.2 Electrical Connection Precondition Make sure the vacuum connection is properly made (→ 10). 3.2.1 Use With an VARIAN Connect the sensor cable to the gauge and the controller. Controller 3.2.2 Use With Another Control Make a sensor cable according to the diagram. -
Page 14: Operation
, CO and N . They can be mathematically converted for other gases ( → Appendix B). If you are using an VARIAN controller, you can enter a calibration factor to correct the pressure reading ( → of that controller). - Page 15 FRG-700 Inverted Magnetron Pirani Gauge As long as the cold cathode measuring circuit has not yet ignited, the measured value of the Pirani is output as measuring signal ("Pirani underrange" is displayed for pressures <5 × 10 mbar). The identification output (pin 6, low) indicates the Pirani-only mode.
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Page 16: Deinstallation
FRG-700 Inverted Magnetron Pirani Gauge 5 Deinstallation DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contami- nated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts. -
Page 17: Maintenance
FRG-700 Inverted Magnetron Pirani Gauge 6 Maintenance Gauge failures due to contamination, as well as expendable parts (filament), are not covered by the warranty. DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contami- nated. - Page 18 FRG-700 Inverted Magnetron Pirani Gauge While depressing the pin with the cylindrical pin, adjust the <HV> potentiometer … … to 4.20 V … to 5×10 mbar. After that, turn the potentiometer counter-clockwise by 1/3 of a turn. Vent the gauge with air or nitrogen to atmospheric pressure, and wait at least 10 minutes.
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Page 19: Cleaning And Replacing Parts
FRG-700 Inverted Magnetron Pirani Gauge 6.2 Cleaning and Replacing DANGER Parts DANGER: cleaning agents Cleaning agents can be detrimental to health and environment. Adhere to the relevant regulations and take the necessary precautions when handling cleaning agents and disposing of them. Consider possible reactions with the product materials ( →... -
Page 20: Cleaning
FRG-700 Inverted Magnetron Pirani Gauge Unfasten the hexagon head screw (3) on the magnet unit (4) and remove the magnet unit. The magnetic force and the tendency to tilt make it difficult to separate the magnet unit and the measuring chamber (7). Remove the circlip (5) and the polarity insert (6) from the measuring chamber Remove the three hexagon socket screws (8) incl. -
Page 21: Reassembling
FRG-700 Inverted Magnetron Pirani Gauge Cleaning the Pirani element Remove the FPM seal (13a) from the Pirani element (13). Fill the Pirani measuring tube with cleaning alcohol and let it work. Pour the alcohol out of the tube. Dry the tube (e.g. with a blow dryer <150 ° C). Slide a new FPM seal over the Pirani element and insert it into the corre- sponding groove. - Page 22 FRG-700 Inverted Magnetron Pirani Gauge If possible perform a leak test (leak rate <10 mbar l/s). WARNING WARNING: electric arcing Helium may cause electric arcing with detrimental effects on the electronics of the product. Before performing any tightness tests put the product out of operation and remove the electronics unit.
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Page 23: Troubleshooting
FRG-700 Inverted Magnetron Pirani Gauge 6.3 Troubleshooting Problem Possible cause Remedy Measuring signal No supply voltage. Turn on the power continually < 0.5 V supply. "Error low". Measuring signal Pirani measurement Replace the Pirani continually > 9.5 V element defective element ( →... -
Page 24: Spare Parts
FRG-700 Inverted Magnetron Pirani Gauge 7 Spare Parts When ordering spare parts, always mention: • all information on the product nameplate • description and ordering number according to the spare parts list Pos. Description Ordering number Maintenance kit, consisting of: FRG700MAINT 1×... -
Page 25: Returning The Product
Contaminated products (e.g. radioactive, toxic, caustic or biological hazard) can be detrimental to health and environment. Products returned to VARIAN should preferably be free of harmful substances. Adhere to the forwarding regulations of all involved coun- tries and forwarding companies and enclose a duly completed decla- ration of contamination. -
Page 26: Appendix
FRG-700 Inverted Magnetron Pirani Gauge Appendix Measuring Signal vs. Pressure Conversion formulae 1.667U-d p = 10 U = c + 0.6log ⇔ [mbar] 11.33 [Torr] 6.875 11.46 [Pa] 9.333 where pressure valid in the range 5×10 mbar < p <1000 mbar measuring signal 3.8×10 Torr <... -
Page 27: B: Gas Type Dependence
FRG-700 Inverted Magnetron Pirani Gauge Gas Type Dependence Indication range above Pressure indicated (gauge calibrated for air). mbar p (mbar) Indication range above 10 mbar Freon 12 –1 Water vapor –2 –3 –2 –1 4 6 8 4 6 8 4 6 8 4 6 8 (mbar) - Page 28 FRG-700 Inverted Magnetron Pirani Gauge Indication range below In the range below 10 mbar, the pressure indication is linear. For gases other mbar than air, the pressure can be determined by means of a simple conversion formula: = K × pressure indicated where gas type air (O...
- Page 29 FRG-700 Inverted Magnetron Pirani Gauge Notes...
- Page 30 Varian Vacuum Technologies 121 Hartwell Avenue Lexington, MA, 02421 USA Tel: (781) 861 7200 Fax: (781) 861 5437 custserv@varianinc.com Original: English www.varianinc.com t qna48e1...