Varian PVG-502 Instruction Manual

vacuum technologies
Pirani Standard Gauge
PVG-500
PVG-502
Instruction Manual
Incl. EC Declaration of Conformity
tqna44e1
Product Identification
In all communications with VARIAN, please specify the in-
formation on the product nameplate. For convenient refe-
rence copy that information into the space provided below.
VARIAN Lexington MA 02421 USA
Model:
PN:
SN:
V W
Made in Liechtenstein
Validity
This document applies to products with the following part
numbers:
W filament
PVG500KV16
(DN 16 ISO-KF, w/o switching functions)
PVG500KV16S
(DN 16 ISO-KF, with switching functions)
Ni filament
PVG502KV16S
(DN 16 ISO-KF, with switching functions)
The part number (PN) can be taken from the product name-
plate.
We reserve the right to make technical changes without prior
notice.
All dimensions in mm.

Intended Use

The Pirani Standard Gauges PVG-500 and PVG-502 have
been designed for vacuum measurement of gases in the
-4
pressure range of 5×10 ... 1000 mbar.
They must not be used for measuring flammable or combusti-
ble gases in mixtures containing oxidants (e.g. atmospheric
oxygen) within the explosion range.
They can be operated in connection with an VARIAN con-
troller or with another controller.
Safety
Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and envi-
ronmental damage.
Caution
Information on correct handling or use. Disregard can lead
to malfunctions or minor equipment damage.
Personnel Qualifications
(2010-05)
Skilled personnel
All work described in this document may only be carried out
by persons who have suitable technical training and the
necessary experience or who have been instructed by the
end-user of the product.

General Safety Instructions

• Adhere to the applicable regulations and take the nec-
essary precautions for the process media used.
Consider possible reactions between the materials and the
process media.
Consider possible reactions (e.g. explosion) of the process
media due to the heat generated by the product.
• Adhere to the applicable regulations and take the neces-
sary precautions for all work you are going to do and con-
sider the safety instructions in this document.
• Before beginning to work, find out whether any vacuum
components are contaminated. Adhere to the relevant re-
gulations and take the necessary precautions when hand-
ling contaminated parts.
Communicate the safety instructions to all other users.
Liability and Warranty
VARIAN assumes no liability and the warranty becomes null
and void if the end-user or third parties
• disregard the information in this document
• use the product in a non-conforming manner
• make any kind of interventions (modifications, alterations
etc.) on the product
• use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with
the process media used.
Gauge failures due to contamination or wear and tear, as well
as expendable parts (filament), are not covered by the
warranty.

Technical Data

Measurement principle thermal conductance according
to Pirani
-4
Measurement range 5×10 ... 1000 mbar
(air, O , CO, N )
2 2
Accuracy (N )
2
-3
1×10 ... 100 mbar ±15% of reading
-4 -3
5×10 ... 1×10 mbar ±50% of reading
100 ... 1000 mbar ±50% of reading
Resolution 1% of reading
Repeatability
-3
1×10 ... 100 mbar 2% of reading
Output signal (measure-
ment signal)
Voltage range VDC 0 ... +10.3
Measurement range VDC +1.9 ... +10.0
Voltage vs. pressure logarithmic
1.286 V/decade
Error signal V 0 ... +0.5
Filament rupture V +0.1
Output impedance Ω 2×4.7
Minimum loaded imped- 10, short-circuit proof
kΩ
ance
Response time ms 80
Gauge identification 27.0 kΩ, referenced to supply
common (voltage at pin 4 ≤5 V)
Adjustment one tactile switch for ATM and
HV adjustment
Switching functions SP1, SP2
Threshold value indi- one tactile switch at measure-
cation and setting ment value output. Press briefly
for threshold indication. Keep
pressing or press repeatedly for
threshold setting.
-3
Setting range 2×10 ... 500 mbar
Hysteresis 10% above lower threshold
Relay contact 30 V, 0.5 ADC, floating
closed at low pressure (LED is lit)
open at high pressure, error, missing
supply
Supply
DANGER
The gauge may only be connected to power sup-
plies, instruments or control devices that conform
to the requirements of a grounded extra-low vol-
tage (SELV). The connection to the gauge has to
1)
be fused .
Supply voltage
At gauge VDC +14 ... +30
Ripple V ≤1
pp
Current consumption mA <500
(max. starting current)
Power consumption W ≤1
1)
Fuse required AT 1
(slow)
Electrical connection FCC 68 / RJ45 appliance
connector, 8 poles, male
Sensor cable 8 poles plus shielding
Cable length ≤100 m (8×0.14 mm
Grounding concept
→ "Power Connection"
Vacuum connection to
connected via 1 MΩ
signal common
(voltage difference <15 V)
Supply common to conducted separately, for
signal common differential measurement
DIN 1.4301, DIN 1.4305,
Materials exposed to
DIN 1.4435, glass, Ni,
vacuum
NiFe
Filament
PVG-500 W
PVG-502 Ni
Internal volume cm
Admissible pressure bar
(abs.)
1)
VARIAN controllers fulfill these requirements.
2
)
3
≈1.5
10, limited to inert
gases