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Varian FRG-700 Short Operating Instructions

Inverted magnetron pirani gauge
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FRG-700
Inverted
Magnetron Pirani
Gauge
Manual No. tqma48e1
Revision --
November 2008
vacuum technologies
SHORT OPERATING
INSTRUCTIONS

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Summary of Contents for Varian FRG-700

  • Page 1 FRG-700 SHORT OPERATING INSTRUCTIONS Inverted Magnetron Pirani Gauge Manual No. tqma48e1 Revision -- November 2008...
  • Page 2 FRG-700 Inverted Magnetron Pirani Gauge Copyright 2008 Vacuum Technologies...

  • Page 3: Warranty

    FRG-700 Inverted Magnetron Pirani Gauge Warranty Products manufactured by Seller are warranted against defects in materials and workmanship for twelve (12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty claims is limited, at the option of Seller, to repair, to re- place, or refund of an equitable portion of the purchase price of the Product.

  • Page 4: Warranty Replacement And Adjustment

    FRG-700 Inverted Magnetron Pirani Gauge Warranty Replacement and Adjustment All claims under warranty must be made promptly after occur- rence of circumstances giving rise thereto, and must be received within the applicable warranty period by Seller or its authorized representative. Such claims should include the Product serial number, the date of shipment, and a full description of the cir- cumstances giving rise to the claim.

  • Page 5: Product Identification

    FRG-700 Inverted Magnetron Pirani Gauge Product Identification In all communications with VARIAN, please specify the infor- mation given on the product nameplate. For convenient refer- ence copy that information into the space provided below. VARIAN Lexington MA 02421 USA Model:...

  • Page 6: Intended Use

    The Inverted Magnetron Pirani Gauge must not be used for measuring flammable or combustible gases which react in air. The gauge can be operated in connection with a VARIAN FRG Control Unit, a VARIAN Turbo AG Rack Controller, or with another controller. Functional Principle...

  • Page 7: Table Of Contents

    FRG-700 Inverted Magnetron Pirani Gauge Contents Warranty Warranty Replacement and Adjustment Product Identification Validity Intended Use Functional Principle Safety 1.1 Symbols Used 1.2 Personnel Qualifications 1.3 General Safety Instructions Technical Data Installation 3.1 Vacuum Connection 3.2 Electrical Connection Operation 4.1 Gas Type Dependence 4.2 Ignition Delay...

  • Page 8: Safety

    FRG-700 Inverted Magnetron Pirani Gauge Safety Symbols Used DANGER Information on preventing any kind of physical injury. WARNING Information on preventing extensive equipment and environ- mental damage. Caution Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage.

  • Page 9: General Safety Instructions

    FRG-700 Inverted Magnetron Pirani Gauge General Safety Instructions • Adhere to the applicable regulations and take the necessary precautions for the process media used. Consider possible reactions with the product materials. Consider possible reactions (e.g. explosion) of the process media due to the heat generated by the product.

  • Page 10: Technical Data

    FRG-700 Inverted Magnetron Pirani Gauge Technical Data Measuring range (air, N 5×10 … 1000 mbar Accuracy ±30% (in the range ≈ 1×10 … 100 mbar) Repeatability ±5% (in the range ≈ 1×10 … 100 mbar) Output signal (measuring signal) Voltage range 0 …...
  • Page 11 FRG-700 Inverted Magnetron Pirani Gauge Supply DANGER The gauge may only be connected to power sup- plies, instruments or control devices that conform to the requirements of a grounded protective extra- low voltage (SELV-E according to EN 61010). The connection to the gauge has to be fused Voltage at the gauge 15 …...
  • Page 12 FRG-700 Inverted Magnetron Pirani Gauge Materials on the vacuum side Vacuum connection stainless steel Measurement chamber stainless steel Feedthrough isolation ceramic Internal seal FPM 75 Anode Ignition aid stainless steel Pirani measurement tube Ni, Au Pirani filament Internal volume 20 cm³...
  • Page 13 FRG-700 Inverted Magnetron Pirani Gauge Dimensions [mm] ø 63.5 DN 25 ISO-KF DN 40 CF-F Weight FRG700KF25 ≈700 g FRG700CF35 ≈980 g...
  • Page 14 FRG-700 Inverted Magnetron Pirani Gauge Measuring Signal vs. Pressure Pressure p 1E+04 p = 10 mbar 1.667U-d 1E+02 torr 1E+00 1E–02 1E–04 1E–06 1E–08 0.0 0.5 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5 9.5 10.5 U [V] Measurement signal U [V] 1.667×U-d...
  • Page 15 FRG-700 Inverted Magnetron Pirani Gauge Gas Type Dependence p (mbar) He Ne Indication range Freon 12 >10 mbar) –1 Water vapor –2 –3 –2 –1 (mbar)
  • Page 16 FRG-700 Inverted Magnetron Pirani Gauge p (mbar) –1 Indication range –2 ... 10 mbar –3 –4 –5 –6 –4 (mbar) In the range below 10 mbar, the pressure indication is linear. For gases other than air, the pressure can be determined by means of a simple conversion formula: = K ×...

  • Page 17: Installation

    FRG-700 Inverted Magnetron Pirani Gauge Installation Vacuum Connection DANGER DANGER: overpressure in the vacuum system >1 bar Injury caused by released parts and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized.
  • Page 18 FRG-700 Inverted Magnetron Pirani Gauge DANGER DANGER: protective ground Products that are not correctly connected to ground can be extremely hazardous in the event of a fault. Electrically connect the gauge to the grounded vacuum chamber. This connection must conform to...
  • Page 19 FRG-700 Inverted Magnetron Pirani Gauge WARNING WARNING: electric arcing Helium may cause electric arcing with detrimental effects on the electronics of the product. Before performing any tightness tests put the pro- duct out of operation and remove the electronics unit.
  • Page 20 FRG-700 Inverted Magnetron Pirani Gauge Remove the protective lid and connect the product to the vac- uum system. Seal with centering ring Protective lid Clamp Seal with centering ring and filter Keep the protective lid.

  • Page 21: Electrical Connection

    FRG-700 Inverted Magnetron Pirani Gauge Electrical Connection Make sure the vacuum connection is properly made (→ "Vacuum Connection"). If no sensor cable is available, make one according to the following diagram. Signal – 10 k Ident – Electrical connection Pin 1 Supply ( 15 …...

  • Page 22: Operation

    N . It can be mathematically converted for other gases (→ "Technical Data"). If the gauge is operated in connection with an VARIAN vacuum gauge controller, a calibration factor can be entered for correction of the reading. Ignition Delay...

  • Page 23: Adjusting The Gauge

    FRG-700 Inverted Magnetron Pirani Gauge Adjusting the Gauge The gauge is factory-calibrated. If used under different climatic conditions, through extreme temperatures, aging or contamina- tion, and after exchanging the sensor, the characteristic curve can be offset and readjustment may become necessary.
  • Page 24 FRG-700 Inverted Magnetron Pirani Gauge While depressing the tactile switch with a cylindrical pin (ø 3 mm), adjust the <HV> potentiometer by means of a ≈ 1.5 mm screwdriver … … to 4.20 V … to 5×10 mbar Vent the gauge with air or nitrogen to atmospheric pres- sure, and wait at least 10 minutes.
  • Page 25 FRG-700 Inverted Magnetron Pirani Gauge Using the 1.5 mm screwdriver, adjust the <ATM> potentiometer … … to 8.60 V … to 1×10 mbar Turn the nameplate back to its original position (it catches).

  • Page 26: Deinstallation

    FRG-700 Inverted Magnetron Pirani Gauge Deinstallation DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

  • Page 27: Maintenance, Troubleshooting

    FRG-700 Inverted Magnetron Pirani Gauge Put the gauge out of operation and unplug the sensor cable. Remove the gauge from the vacuum system and place the protective lid. When deinstalling a CF flange connection, it can be ad- vantageous to temporarily remove the electronics and the magnet unit (→...

  • Page 28: Returning The Product

    Contaminated products (e.g. radioactive, toxic, caustic or microbiological hazard) can be detrimen- tal to health and environment. Products returned to VARIAN should preferably be free of harmful substances. Adhere to the for- warding regulations of all involved countries and forwarding companies and enclose a duly com- pleted declaration of contamination.

  • Page 29: Literature

    FRG-700 Inverted Magnetron Pirani Gauge WARNING WARNING: substances detrimental to the environ- ment Products or parts thereof (mechanical and electric components, operating fluids etc.) can be detrimen- tal to the environment. Dispose of such substances in accordance with the relevant local regulations.

  • Page 30: Ec Declaration Of Conformity

    FRG-700 Inverted Magnetron Pirani Gauge EC Declaration of Conformity We, VARIAN, hereby declare that the equipment mentioned below complies with the provisions of the Directive relating to electrical equipment designed for use within certain voltage limits 2006/95/EC and the Directive relating to electromagnetic compa- tibility 2004/108/EC.
  • Page 31 FRG-700 Inverted Magnetron Pirani Gauge Notes...
  • Page 32 Varian Vacuum Technologies 121 Hartwell Avenue Lexington, MA, 02421 USA Tel: (781) 861 7200 Fax: (781) 861 5437 custserv@varianinc.com Original: English www.varianinc.com t q ma 4 8 e 1...

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