Varian Turbo-V 1000 ICE Instruction Manual
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- Page 1 MANUALE DI ISTRUZIONI Turbo-V 1000 ICE BEDIENUNGSHANDBUCH E-series NOTICE DE MODE D’EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRUÇÕES BEDRIJFSHANDLEIDING Model 969-9128 INSTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEKÄSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87-900-942-01(A) APRIL 2002...
- Page 2 Turbo-V 1000 ICE E-series...
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Page 5: Table Of Contents
ISTRUZIONI PER L’USO ....................1 GEBRAUCHSANLEITUNG ....................3 MODE D’EMPLOI ........................ 5 INSTRUCCIONES DE USO ....................7 INSTRUÇÕES PARA O USO....................9 GEBRUIKSAANWIJZINGEN..................... 11 BRUGSANVISNING ......................13 BRUKSANVISNING ......................15 BRUKERVEILEDNING ...................... 17 KÄYTTÖOHJEET ......................19 PDHGIES CRHSEWS ......................21 INSTRUCTIONS FOR USE.................... -
Page 6: Istruzioni Per L'uso
ISTRUZIONI PER L’USO INFORMAZIONI GENERALI Questa apparecchiatura è destinata ad uso professionale. L'utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Varian prima dell'utilizzo dell'apparecchiatura. La Varian si ritiene sollevata eventuali responsabilità dovute... - Page 7 Quando la pompa viene utilizzata per il pompaggio di gas controllori Varian (serie 969-9464 220V, 969-9564 120V) e tossici, infiammabili o radioattivi, seguire le appropriate devono essere collegate ad una pompa primaria (vedere procedure tipiche di ciascun gas.
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Page 8: Gebrauchsanleitung
Nichtbeachtung -auch teilweise- der enthaltenen Hinweise, unsachgemäßem Gebrauch durch ungeschultes Personal, nicht autorisierten Eingriffen Mißachtung einheimischen, hier zur Geltung kommenden Bestimmungen übernimmt die Firma Varian keinerlei Haftung. Bei den Pumpen der Serie Turbo-V1000 ICE E-series handelt sich Turbomolekularpumpen für Hoch- Ultrahochvakuumanwendungen. Sie eignen sich insbesonders für... - Page 9 Pumpenghehäuse unter 50°C abgesunken ist. Wenn die Pumpen über ihr Unterteil installiert werden sollen, Bei einem Defekt kann der Varian Service oder der " advanced müssen in die Bohrungen des Unterteils 3 M6-Schrauben exchange service" in Anspruch genommen werden.
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Page 10: Mode D'emploi
Varian, avant d'utiliser l'appareil. Varian décline par conséquent toute responsabilité en cas d'inobservation totale ou partielle des instructions données, d'utilisation incorrecte de la part d'un personnel non formé, d'opérations non autorisées ou d'un emploi contraire... - Page 11 "advanced exchange service", remplir et Toutes les instructions pour le fonctionnement correct de la faire parvenir au bureau local Varian la fiche "Sécurité et turbopompe sont contenues dans la notice de l'unité de Santé" annexée à la présente notice d'instructions. Une copie contrôle.
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Page 12: Instrucciones De Uso
Varian antes de utilizar el equipo. Varian se considera libre de cualquier responsabilidad debida al incumplimiento total o parcial de las instrucciones, al uso poco... - Page 13 4,5 Nm. En caso de avería se podrá utilizar el servicio de reparación Varian o el "Varian advanced exchange service", que permite Para instalar los accesorios opcionales, véase “Technical obtener una bomba regenerada para sustituir la averiada.
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Page 14: Instruções Para O Uso
Varian antes de usar a aparelhagem. A Varian não se responsabiliza pela eventual inobservância total ou parcial das instruções, pelo uso indevido por parte de pessoas não treinadas, por operações não autorizadas ou pelo uso contrário às normas... - Page 15 Em caso de defeito é possível usufruir do serviço de reparação três parafusos M6 fixados aos furos específicos existentes na Varian ou do "Varian advanced exchange service", que permite base da bomba. Os parafusos utilizados devem possuir um obter uma bomba regenerada que substitua a bomba com...
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Page 16: Gebruiksaanwijzingen
Varian verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen. Varian acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen, onoordeelkundig gebruik... - Page 17 ! ! ! ! series mogen alleen gebruikt worden in combinatie met een GEVAAR! van de speciale Varian controllers (serie 969-9464 220V, 969- Wanneer de pomp wordt gebruikt voor het pompen van 9564 120V) en moeten aangesloten zijn op een primaire pomp...
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Page 18: Brugsanvisning
Brugeren bedes læse denne håndbog samt enhver yderligere vejledning, Varian har leveret, inden udstyret tages i brug. Varian er ikke ansvarlig, hvis vejledningen ikke er nøje fulgt, eller hvis den kun er delvist fulgt, og heller ikke hvis udstyret anvendes forkert af ukvalificeret personale, hvis der foretages uautoriserede indgreb på... - Page 19 Turbomolekulærpumperne i V1000 ICE-E series serien må kun Når pumpen anvendes til pumpning af giftige, brandfarlige eller anvendes med en af de særlige Varian kontrolapparater (serie radioaktive gasser, skal de gældende forskrifter for den enkelte 969-9464 220 V, 969-9564 120V) og skal forbindes med en gastype strengt overholdes.
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Page 20: Bruksanvisning
Användaren bör läsa denna bruksanvisning, samt övrig dokumentation från Varian före användning av utrustningen. Varian tar inget ansvar för skador helt eller delvis till följd av åsidosättande av instruktionerna, olämplig användning av person utan tillräcklig kunskap, obehörigt bruk av utrustningen eller hantering som strider mot gällande lokala föreskrifter. - Page 21 Då pumpen används för pumpning av giftiga, lättantändliga Turbomolekylärpumparna i serien V1000 ICE-E series måste eller radioaktiva typ, bör man följa de särskilda anvisningarna användas med en särskild styrenhet från Varian (serie 969- för varje enskild gas. 9464 220V, 969-9564 120V), och anslutas till en förpump (se Använd ej pumpen i närheten av explosiva gaser.
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Page 22: Brukerveiledning
Dette utstyret er beregnet til bruk av profesjonelle brukere. Brukeren bør lese denne brukerveiledningen og all annen informasjon fra Varian før utstyret tas i bruk. Varian kan ikke holdes ansvarlig for hendelser som skjer på grunn av manglende oppfølging av disse instruksjonene, selv delvis, feilaktig bruk av utrent personell, ikke autoriserte endringer av utstyret eller handlinger som på... - Page 23 Se “Teknisk informasjon” for detaljer. ADVARSEL! Turbo-V1000 ICE-E series serien turbo-molekulære pumper Når pumpen brukes for å pumpe giftige, brannfarlige eller må kun brukes med en av de spesielle Varian kontrollere (serie radioaktive gasser skal de relevante forskriftene for de enkelte 969-9464 220V,...
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Page 24: Käyttöohjeet
YLEISIÄ TIETOJA Tämä laite on tarkoitettu ammattimaiseen käyttöön. Ennen laitteen käyttöönottoa tulee käyttäjän lukea huolellisesti mukana seuraava käyttöohje sekä kaikki muu Varianin toimittama lisätieto. Varian ei ota vastuuta seurauksista, jotka johtuvat laitteen käyttöohjeiden täydestä tai osittaisesta laiminlyönnistä, ammattitaidottoman henkilön virheellisestä laitteen käytöstä,... - Page 25 VAARA! Sarjan V1000 ICE-E series turbomolekyylipumppuja tulee Jolloin pumppua käytetään myrkyllisten, tulenvaarallisten ja käyttää ainoastaan niihin sopivien varian valvojien kanssa radioaktiivisten kaasujen pumppaamiseen tulee seurata joka (sarja 969-9464 220V, 969-9564 120V) ja niiden täytyy olla kaasuun sopivaa menettelytapaa. Älkää käytä pumppua yhdistettyinä...
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Page 26: Pdhgies Crhsews
Varian, prin apÒ th crhsimopo∂hsh thj suskeuÿj. H Varian den f◊rei kam∂a euqÚnh Òson afor£ thn olikÿ ÿ merikÿ aq◊thsh twn odhgièn, thn akat£llhlh crÿsh ek m◊rouj anekpa∂deutou proswpikoÚ, auqa∂retej epemb£seij ÿ crÿsh pou den sumfwne∂ me touj eidikoÚj eqnikoÚjkanonismoÚj. - Page 27 M10 Se per∂ptwsh bl£bhj mpore∂te na apeuqunqe∂te sto s◊rbij episkeuèn Varian ÿ sto “Varian advanced exchange service”, Gia na stereèsete thn antl∂a m◊sw thj b£shj thj e∂nai pou saj d∂nei th dunatÒthta na antikatastÿsete thn apara∂thto na crhsimopoiÿsete treij b∂dej M6 sterewm◊nej calasm◊nh antl∂a me m∂a £llh eniscum◊nh.
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Page 28: Instructions For Use
The pumping action is obtained through a high speed turbine (max. 38000 rpm) driven by a high-performance 3-phase elec- tric motor. The Turbo-V 1000 ICE-E series pumps are free of contaminating agents and, therefore, are suitable for applica- tions requiring a "clean" vacuum. - Page 29 MAINTENANCE withstanding a torque of 4668 Nm around its axis. The Turbo-V 1000 ICE-E series series pump does not require The turbopump with ISO inlet flange must be fixed to the vac- any maintenance. Any work performed on the pump must be uum chamber by means of clamps or claws.
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Page 30: Technical Information
TECHNICAL INFORMATION The Spiral Seal is a dynamic seal based on a DESCRIPTION OF THE TURBOPUMP Siegbahn disk that increases the protection of the The Turbo-V1000 ICE E-series pump is available bearings against corrosive gases. A special cen- with an ISO 200 high vacuum flange. trifugal stage, named centrifugal dust seal, is pro- vided in order to protect the pump bearings from particles contamination. -
Page 31: Technical Specification
Start-up time < 4 minutes * According to standard DIN 28 428, the base Recommended Varian VSp 60; Varian VSr 90 pressure is that measured in a leak-free test dome, forepump 48 hours after the completion of test dome bake-... - Page 32 TECHNICAL INFORMATION Graph of nitrogen pumping speed vs inlet pressure Graph of compression ratio vs foreline pressure Graph of inlet pressure vs foreline pressure with fixed inlet flow (Ar) 87-900-942-01(A)
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Page 33: Inlet Screen Installation
TECHNICAL INFORMATION Graph of inlet pressure vs foreline pressure with fixed inlet flow (N2) The screen can be mounted on each pump model. INLET SCREEN INSTALLATION The inlet screens mod. 969-9316 prevents the blades of the pump from being damaged by debris greater than 1.4 mm diameter. -
Page 34: Heating Jacket Installation
TECHNICAL INFORMATION HEATING JACKET INSTALLATION WATER COOLING KIT INSTALLATION Two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient. The two model part numbers are: 969-9338 (metal- lic model), and 969-9348 (plastic model). - Page 35 TECHNICAL INFORMATION The water cooling kit 969-9338 has to be con- nected to a 3/8" internal diameter flexible water line. The water cooling kit 969-9348 has to be con- nected to a 6x8 (internal diameter x external di- ameter) metric flexible water line. Cooling may be carried out either through an open circuit with eventual discharge of the water, or us- ing a closed circuit cooling system.
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Page 36: Vent Device Installation
TECHNICAL INFORMATION VENT DEVICE INSTALLATION VENT VALVE INSTALLATION The vent valve mod. 969-9833 allows to avoid un- desired venting of the pump during a temporary power failure (5 sec maximum), and enables an automatic vent operation. The vent device mod. 969-9831 allows to avoid undesired venting of the pump during a temporary Unscrew the vent port threaded plug (see figure power failure (adjustable time up to 36 min.), and... -
Page 37: Solid State Flowmeter Installation
CAUTION To prevent bearing damage, the integrated purge valve is foreseen for a gas flow rate of 20 sccm (0.34 mbar l/s). Please contact Varian for specific SOLID STATE FLOWMETER INSTALLATION applications. A gas purge valve is integrated to protect the pump... -
Page 38: Typical Layout Diagram
TECHNICAL INFORMATION TYPICAL LAYOUT DIAGRAM Turbo-V controller 13. Turbopump Vent valve 14. Flexible connection Vacuum pump shut-off valve (optional) 15. Solid state flowmeter System vent valve (optional) Vacuum chamber Ionisation gauge Fore-vacuum pump connecting flange Oil mist eliminator Fore-vacuum pump with internal one-way valve 10. -
Page 39: Connection A - High Vacuum Flange
TECHNICAL INFORMATION Then fix the two flanges with the clamps or claws Connection A - HIGH VACUUM FLANGE as shown in the figure. To connect the Turbo pump to the ISO inlet flange, remove the outer ring and position the centering ring as shown in the figure. -
Page 40: Suggested Pump Installation
The heater jacket working tempera- ture should be adjusted on the pump control unit (see controller manual for reference). Ask VARIAN for proper temperature setting. Heater jacket must be always on even during start-up and shutdown. -
Page 41: Pump Used In Presence Of Magnetic Fields
Varian's specialist. As a matter of fact, in case of high magnetic fields, also important forces might be generated and ap- For a complete overview of Varian's extensive plied to the rotor. product lines, please refer to the Varian catalog. 87-900-942-01(A) - Page 42 NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product.
- Page 43 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
- Page 44 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...