HELIX Compressor 9600 Installation & Operating Instructions Manual page 6

Installation, operation, and maintenance instructions
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9600 Compressor Installation, Operation, and Maintenance
Appendix A - Customer Support Information
Appendix B - Flow Diagram
Appendix C - Troubleshooting Procedures
Appendix D - Schematic
Figure 1-1: 9600 Compressor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
Figure 1-2: 9600 Compressor Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Figure 1-3: Water Flow Rate versus Pressure Drop . . . . . . . . . . . . . . . . . . . . . 1-6
Figure 2-1: Using the Shipping Carton Ramp . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
Figure 3-1: 9600 Compressor Installation Flowchart . . . . . . . . . . . . . . . . . . . . 3-2
Figure 3-4: Single On-Board Cryopump Connections . . . . . . . . . . . . . . . . . . . 3-9
Figure 3-5: Single Cryo-Torr Cryopump Installation . . . . . . . . . . . . . . . . . . . 3-10
P/N 8040540
Table of Contents (continued)
Sealing Couplings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
(Splitter Box located at Compressor) . . . . . . . . . . . . . . . . . . . . . . . 3-13
Figures
6

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