Mitsubishi MELFA SQ Series Special Specifications Manual page 25

(2) About the use with the bad environment
Item
Specification
Environment
General environment
Clean room
Oil mist
The pressurization inside the robot arm is unnecessary in general environment and clean room environ -
ment.
Dew point
The atmospheric pressure 0 to 0.01MPa
dew point is -20 degree or
less.
Whether or not robot is
pressurized
Note1)
Not pressurized
Note1)
Not pressurized
Pressurized
Not pressurized
Pressure
When packing must be replaced
When signs of cracking or peeling are noted in the packing.
When removing and installing the cover.
２ Robot arm
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