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LEYBOLD Manuals
Water Pump
MAG W 2200 iPL
Installation & operating instructions manual
LEYBOLD MAG W 2200 iPL Installation & Operating Instructions Manual
Turbomolecular pumps with magnetic bearing and frequency converter
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Contents
Table of Contents
Troubleshooting
Bookmarks
Table of Contents
Table of Contents
Important Safety Information
Mechanical Hazards
Electrical Hazards
Hazards Caused by Materials and Substances
Thermal Hazards
Danger of Ignition
Risk of Damaging the Pump
1 Description
Design and Function
Supplied Equipment
Technical Data
Ordering Data
Accessories
2 Transport and Storing
3 Installation
Conforming Utilization
3.1.1 Non-Conforming Utilization
Operating Environment
Attach the Pump to the Vacuum Chamber
Forevacuum Connection
Connecting the Cooling Water
3.5.1 Water Quality
Connect the Purge Gas and Venting Valve
Electrical Connection for the Integrated Frequency Converter
Relays, Leds, PLC Interface
4 Operation
Media Compatibility / Purge Gas
Interfaces
Switching on
Operation
Switching off
Venting
Removing the Pump from the System
5 Maintenance
Cleaning
Changing the Touch-Down Bearings
Leybold Service
6 Troubleshooting
7 Waste Disposal
EC Incorporation Declaration
EC Declaration of Conformity
Certificates
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Quick Links
1
Design and Function
2
Technical Data
3
Connecting the Cooling Water
4
Electrical Connection for the Integrated Frequency Converter
5
Interfaces
6
Troubleshooting
Download this manual
MAG integra
Turbomolecular Pumps with Magnetic Bearing
and Frequency Converter
Installation & Operating Instructions 300324726_002_C0
Part Nos.
411300Vxxxx
411600Vxxxx
411700Vxxxx
412200Vxxxx
and pumps modified by
Leybold
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