LEYBOLD MAG 2000 C Operating Instructions Manual

LEYBOLD VACUUM
Vacuum Solutions Application Support Service
GA 05.130/3.02
MAG 1600 C, CT
MAG W 1600 C, CT
MAG 2000 C, CT
MAG W 2000 C, CT
Turbomolecular Pump
with Magnetic Bearing
MAG.DRIVE L, L2
Electronic Frequency
Converter
Software version
MAG.DRIVE L: 1.2.3
MAG.DRIVE L2: 1.3.4 - 1.3.7
Cat. Nos.
894 14 /28
894 15 /29
894 16 /30
894 17 /31
857 24 /23
Operating Instructions