Table of Contents
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No. CP-SP-1204E
™
Digital Mass Flow Controller
Standard Gas Model
MQV9005/9020/9200/9500
0002/0005/0020/0050/0200/0500
User's Manual
Thank you for purchasing an Azbil
Corporation product.
This manual contains information for
ensuring the correct use of this product.
It also provides necessary information
for installation, maintenance, and
troubleshooting.
This manual should be read by those who
design and maintain equipment that uses
this product. Be sure to keep this manual
nearby for handy reference.
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Table of Contents
Related Manuals for Azbil Micro Flow MQV0500
Summarization of Contents
Conventions Used in This Manual
Handling Precautions
Precautions to pay attention to when handling the product.
Safety Precautions
General Safety Warnings
Warnings and cautions for safe operation and to prevent damage.
The Role of This Manual
Manual Overview
Describes the purpose and scope of available manuals for the MQV.
Organization of This User's Manual
Manual Structure
Outlines the structure of the user's manual by chapters.
Chapter 1. INTRODUCTION
Product Features
Highlights key features like high-speed controllability and wide range.
Product Functions
Details various standard functions available for MQV models.
Model Selection Guide
Provides guidance on selecting the correct MQV model based on specifications.
Basic vs. Advanced Operation
Explains the two modes of operation: basic and advanced.
Chapter 2. NAMES AND FUNCTIONS OF PARTS
Display Components
Describes the 7-segment display and indicator lamps.
Main Unit Description
Details the physical ports and connections on the main unit.
Chapter 3. MOUNTING AND WIRING
Mounting Procedures
Covers installation locations, display direction, and joint installation.
Piping Installation
Provides instructions and precautions for connecting pipes to the device.
Wiring Connections
Details connector pin layouts, signal assignments, and wiring examples.
Chapter 4. BASIC OPERATION
Switching Displays
Explains how to cycle through different display modes (PV, SP, Totalized flow).
Setting Flow Rate
Describes methods for setting the flow rate via digital or analog inputs.
Selecting Operating Mode
Details how to change between control, fully closed, and fully open modes.
Chapter 5. ADVANCED OPERATION
Setup Mode Transition
Explains how to navigate between Function, Parameter, and Info modes.
Functions Setup
Guides on configuring various device functions like output types and input assignments.
Parameters Setup
Details how to set specific parameters like alarm limits and delays.
Device Information Display
Shows how to view configured items like gas type and flow rate range.
Flow Rate Range Settings
Explains how to change the flow rate range and its impact on resolution.
Chapter 6. MAINTENANCE AND TROUBLESHOOTING
Alarm Code Display
Lists and explains common alarm codes and their causes.
Troubleshooting Guide
Provides solutions for common problems like zero flow rate issues and poor accuracy.
Flow Rate Zero Adjustment
Describes the procedure to adjust the flow rate zero point due to sensor deviation.
Chapter 7. SPECIFICATIONS
Product Specifications
Lists detailed specifications for various MQV models.
Gas Type and Control Range
Details controllable flow rate ranges for different gas types.
External Dimensions
Provides dimensional drawings and mounting hole information for models.
Optional Parts
Lists available optional accessories for the MQV controllers.
Terms and Conditions
Warranty Information
Outlines the warranty period, scope, and exclusions for Azbil products.
Product Suitability and Safety
Emphasizes user responsibility for ascertaining product suitability and incorporating safety designs.
Application Precautions
Lists restrictions and special considerations for product usage.
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