Azbil MQV9020 User Manual
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Azbil MQV9020 User Manual

Azbil MQV9020 User Manual

Digital mass flow controller
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No. CP-SP-1205E
TM
Digital Mass Flow Controller
for Hydrogen and Helium Gases
Model MQV9020/9050/9500/0005/
0010/0050/0200
User's Manual
Thank you for purchasing an Azbil
Corporation product.
This manual contains information
for ensuring the correct use of this
product. It also provides necessary
information for installation, main-
tenance, and troubleshooting.
This manual should be read by
those who design and maintain
equipment that uses this product.
Be sure to keep this manual nearby
for handy reference.

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  • Page 1 Digital Mass Flow Controller for Hydrogen and Helium Gases Model MQV9020/9050/9500/0005/ 0010/0050/0200 User’s Manual Thank you for purchasing an Azbil Corporation product. This manual contains information for ensuring the correct use of this product. It also provides necessary information for installation, main- tenance, and troubleshooting.
  • Page 2 If you should find an error or omission, please contact the azbil Group. In no event is Azbil Corporation liable to anyone for any indirect, special or consequential damages as a result of using this product. © 2006–2019 Azbil Corporation. All Rights Reserved.
  • Page 3 Conventions Used in This Manual „ The safety precautions explained in the following section aim to prevent injury to the operator and others, and to prevent property damage.   W ARNING Warnings are indicated when mishandling this product might result in death or serious injury.  ...

  • Page 4: Safety Precautions

    Safety Precautions WARNING Never allow gases that are within explosion limits (in particular, mixed gases within explosion limits that contain hydrogen) to pass through this device. Doing so might result in an explosion accidents. When using this device for gases that contain hydrogen, be sure to purge the device with an inert gas (such as nitrogen or argon) before use.
  • Page 5 CAUTION Use the device within the operating differential pressure range. Also, do not subject it to pressure beyond the rated pressure resistance range. Doing so might damage it. Do not subject this device to pressure above its pressure resistance. Doing so might damage it.
  • Page 6 (with gold contacts). Failure to do so could cause faulty contact, resulting in malfunction. If there is a risk of a power surge caused by lightning, use Azbil Corporation’s SurgeNon to prevent possible fire or equipment failure.

  • Page 7: The Role Of This Manual

    A total of 2 different manuals are available for the MQV. Read them as necessary for your specific requirements. If a manual you require is not available, contact the azbil Group or its dealer. Digital Mass Flow Controller for Hydrogen and Helium Gases Model MQV9020/9050/9500/0005/0010/0050/0200 User’s Manual...

  • Page 8: Organization Of The Manual

    Organization of the Manual This manual is organized as follows. Chapter 1. INTRODUCTION This chapter briefly describes this device and its features, and gives a model selection guide. Chapter 2. NAMES AND FUNCTIONS OF PARTS This chapter describes the names and functions of this device’s parts. Chapter 3.

  • Page 9: Table Of Contents

    Contents Conventions Used in This Manual Safety Precautions The Role of This Manual Organization of the Manual Contents Chapter 1. INTRODUCTION „ Introduction „ Features „ Functions „ Model selection guide „ Basic operation and advanced operation Chapter 2. NAMES AND FUNCTIONS OF PARTS „...
  • Page 10 Parameters 5-12 „ Parameter setup item list 5-13 Device Information Display 5-16 „ Setup method 5-16 „ Device information display item 5-17 Flow Rate Range 5-18 „ Setup resolution in the analog setup 5-19 Chapter 6. TROUBLESHOOTING „ Alarm code display „...

  • Page 11: Chapter 1. Introduction

    MQV controllers integrate three component technologies: the ultra quick response μF (Micro Flow) thermal flow sensor, made with pro- prietary Azbil Corporation technology, a proportional solenoid valve, and advanced actuator control technology. Integrating these technologies has achieved a high-speed control with low differential pressure.

  • Page 12: X84; Functions

    Chapter 1. INTRODUCTION • User-friendly Runs on a general-purpose 24 V DC power supply, and the MQV's internal power circuit and input/output circuits are isolated. When multiple MQV are driven through the analog inputs and outputs, as with a PLC, they can all use a common power supply even if the PLC's analog modules are not isolated by channel.
  • Page 13 1 to 6 seconds. • Flow rate totalization (function setup C-09 to C-12 ) MQV9020/9050: in 1 mL units in 0.01 L units MQV9500: in 0.1 L units...
  • Page 14 Chapter 1. INTRODUCTION • Event lamp lighting/output (function setup C-07 , C-08 ) Two of the event types listed below can be selected. Output ON delay time can also be set (but delay cannot be set for totalizer pulse output). Integrated flow event output (when the integrated flow event set- •...
  • Page 15 Chapter 1. INTRODUCTION • PV forced zero (function setup C-29 ) This function forcibly sets the detected instantaneous flow rate to 0 (zero) after the delay time elapses when the flow rate setpoint has been set to 0 (zero) or the valve mode has been changed to fully closed.
  • Page 16 Chapter 1. INTRODUCTION • Analog scaling (function setup C-28 ) This function is used to optionally change the flow rate (between 10% FS and 100 % FS) corresponding to 100 % FS analog input/ output (5 V or 20 mA). •...

  • Page 17: X84; Model Selection Guide

    Chapter 1. INTRODUCTION „ Model selection guide z MQV9020/9050 Optional Standard con- Material of Basic Connection Appended functions model trol flowrate Display gas-contact- Description type method Nos. range ing parts 1 2 3 4 5 Digital mass flow controller 9020 0.2–20.0 mL/min (standard)

  • Page 18: X84; Basic Operation And Advanced Operation

    Chapter 1. INTRODUCTION „ Basic operation and advanced operation This device provides two kinds of operations, basic operation and advanced operation. Basic operation is the state of the device during normal use. In basic operation, the contents of the 7-segment display can be changed to show instantaneous flow rate, flow set value, total- ized flow value, or amperage to the valve in normal operation mode.

  • Page 19: Chapter 2. Names And Functions Of Parts

    Chapter 2. NAMES AND FUNCTIONS OF PARTS „ Display OK lamp: Lit when the deviation between the ow set value and instantaneous ow rate is in the allowable range. Set the allowable range in the parameter setup. (For details on how to set parameters, see page 5-12 ALM lamp: Lit when an alarm occurs.
  • Page 20 Chapter 2. NAMES AND FUNCTIONS OF PARTS z Main unit (MQV9020/9050/9500/0005/0010/0050/0200) Connector port: This is used for I/O signals. Use cable with dedicated connector. Jack for AC adapter: Pipe connection port (outlet): Connect dedicated adapter here. This is the port from which Model No.: 81446957-001...

  • Page 21: Chapter 3. Mounting And Wiring

    Chapter 3. MOUNTING AND WIRING WARNING Never allow gases that are within explosion limits (in particular, mixed gases within explosion limits that contain hydrogen) to pass through this device. Doing so might result in an explosion accidents. When using this device for gases that contain hydrogen, be sure to purge the device with an inert gas (such as nitrogen or argon) before use.

  • Page 22: X84; Mounting

    Chapter 3. MOUNTING AND WIRING CAUTION Before connecting pipes with Swagelok or VCR connections, check the precautions in the instruction provided by the connecting joint manufacturer. When purchasing a connecting joint, use the following made by Swagelok Co., Ltd: 1/4" Swagelok: SS-400-1-6STSC11 1/4"...
  • Page 23 Chapter 3. MOUNTING AND WIRING (3) Lift up the display from the main unit, and turn it 180° counterclockwise. (4) Put the display back on the main unit, and fasten with the four screws taken off in step (2). (5) To return the display to its original position on the main unit, turn it 180°...
  • Page 24 Chapter 3. MOUNTING AND WIRING z Installing joints (UNF connections) CAUTION When installing joints (UNF connections), secure the lower part of the main unit in a vise or the like gripped between rags to protect the finished surfaces, and turn the joint to tighten. The device may be damaged if the lower main unit is not secured.
  • Page 25 Mount the device horizontally. Do not mount it with the display facing down. Doing so might cause measurement error or equipment failure.  MQV9020/9050/9500/0005/0010/0050/0200 Install the device with two M4 screws using the mounting holes on the base of the device.
  • Page 26 Chapter 3. MOUNTING AND WIRING z Installing the front cover for the separate display unit For models with a separate display, a front cover (decorative frame) can be mounted. Use of this cover makes it possible to hide the mounting screws, improving the appearance. Items needed for installation •...

  • Page 27: X84; Piping

    Chapter 3. MOUNTING AND WIRING „ Piping CAUTION Mount the device horizontally. However, do not mount it with the display fac- ing down. Doing so might cause measurement error or equipment failure. When making the pipe connections, hold the hexagonal part of the connector section and turn the pipe to tighten.

  • Page 28: X84; Wiring

    (with gold contacts). Failure to do so could cause faulty contact, resulting in malfunction. If there is a risk of a power surge caused by lightning, use Azbil Corporation's SurgeNon to prevent possible fire or equipment failure.
  • Page 29 Chapter 3. MOUNTING AND WIRING z Connector signal names Pin No. Signal name Description Notes +5 V (5 mA max.) 5 V DC reference voltage output 5 mA max. FLOW OUT Instantaneous flow rate (PV) or 0 to 5 V/1 to 5 V/0 to 20 mA/ 4 flow rate setpoint (SP) output to 20 mA output A.GND...
  • Page 30 Chapter 3. MOUNTING AND WIRING • Alarm output/event output EV2 OUT Load Load EV1 OUT Load ALM OUT or 6 D.GND Handling Precautions • Take special care that the event and alarm outputs do not exceed the output rating of the device. Additionally, when driving a relay, use an appropriate coil surge absorption diode built-in relay.
  • Page 31 Chapter 3. MOUNTING AND WIRING • External 3-way switching input +5 V A.GND (0 V) MODE INPUT OPEN Handling Precautions • When switching by relay, use an appropriate relay intended for microcurrent use (with gold contacts). Failure to do so could cause faulty contact, resulting in malfunction.
  • Page 32 Chapter 3. MOUNTING AND WIRING z Example of wiring Instantaneous owrate output Internal circuit +5 V (5 mA max.) FLOW OUT A.GND Potentiometer FLOW SP INPUT (5 k ) +5 V MODE INPUT OPEN Event output 2 Event output 1 ALM OUT Alarm output D.GND...
  • Page 33 Sometimes two or more connections must be made to the same pin during wiring. In this case, use a connector terminal block. If you need a 20-core cable for the connectors on the device and connector terminal block, contact the azbil Group or your dealer. Note •...

  • Page 35: Chapter 4. Basic Operation

    • The "L" lamp is labeled "mL" on the MQV9020/9050 or "m " on the MQV0200. The "L/min" lamp is labeled "mL/min" on the MQV9020/9050.
  • Page 36 Chapter 4. BASIC OPERATION z Indicating the flow set value (SP display) If [DISP] key is pressed while the instantaneous flow rate is displayed, the PV lamp goes out, the SP lamp lights and the flow set value (SP) is indicated on the display.
  • Page 37 Chapter 4. BASIC OPERATION • Totalized flow event automatic valve shut-off function When "1: Function enabled" is set for the automatic valve shut-off function in function setup C- 13 , the valve will be automatically closed fully if the totalized flow value reaches the preset value. The threshold value for the totalized flow event is set in the param- eter setup mode.

  • Page 38: Setting The Flow Rate

    Chapter 4. BASIC OPERATION 4 - 2 Setting the Flow Rate Set the flow rate as shown below. Single setup Key input or communications Selection from function setup C-04 Digital setup Key input or communications Multi-setup External contact inputs External 3-way switching input Flow rate setup Selection from function setup C-03 Internal reference 0 to 5 V input...

  • Page 39: X84; Digital Flow Rate Setup

    Chapter 4. BASIC OPERATION „ Digital flow rate setup Up to eight SP values can be set on this device. The operating proce- dure may vary depending on the number of SP values to be set. z Single setup (number of SPs in function setup C-04 is 1) Follow the procedure below to change the SP value: (1) Press the [DISP] key.
  • Page 40 Chapter 4. BASIC OPERATION Note (Advanced use, direct setup function) • Control can be executed using an SP No. or SP value currently being changed (indicated by blinking display) when the direct setup function is enabled for the instantaneous flow rate direct setup function ON/OFF ( C-2 1 in the function setup).

  • Page 41: X84; Flow Rate Setup By External Contact Input (Advanced Use)

    Chapter 4. BASIC OPERATION „ Flow rate setup by external contact input (Advanced use) When assigning "3: Switching of SP No." at external contact input function assignment C- 10 to C- 12 in the function setup, up to eight SP values can be changed by means of external contact ON and OFF combinations.

  • Page 42: X84; Flow Rate Setup By External 3-Way Switching Input (Advanced Use)

    Chapter 4. BASIC OPERATION „ Flow rate setup by external 3-way switching input (Advanced use) When "2: Switching of SP No." is assigned at external 3-way switching function C-09 in the function setup, three SP values ( SP-0 to SP-2 ) can be changed with the external 3-way switching input as described in the table below.

  • Page 43: X84; Analog Flow Rate Setup

    Chapter 4. BASIC OPERATION „ Analog flow rate setup The SP value (flow set value) can be changed by analog voltage by selecting analog setting as the flow rate setting method in function setup C-03 . For details on how to set up the function, Chapter 5.

  • Page 44: Selecting The Operating Mode

    Chapter 4. BASIC OPERATION 4 - 3 Selecting the Operating Mode „ Operating mode selection Three kinds of valve operating modes are provided, "control mode," "fully closed mode," and "fully open mode." The factory setting is the control mode. The operating mode can be forcibly changed to "fully closed mode" (valve is fully closed) or "fully open mode"...
  • Page 45 Chapter 4. BASIC OPERATION Handling Precautions • When "0: RUN key disabled" is selected for " C-02 : RUN key operation and operating mode selection when power turned ON" in the function setup, the operating mode is not changed even though the RUN key is pressed. •...

  • Page 47: Advanced Operation

    Chapter 5. ADVANCED OPERATION The advanced operation provides three kinds of modes, "Function setup mode," "Parameter setup mode," and "Controller information display mode." „ Setup mode transition operation Normally, when the power is turned ON, the instantaneous flow rate is displayed in the basic operation mode. When keys are operated as described in the diagram below during instantaneous flow rate display, the operation changes to the specified mode.

  • Page 48: Functions

    (1) Press the [DISP] key several times to display the instantaneous flow rate. >> The PV and L/min ("mL/min" on the MQV9020/9050) lamps light. (2) Hold down the and the [ENT] keys for three seconds or more.

  • Page 49: X84; Function Setup Items

    Chapter 5. ADVANCED OPERATION „ Function setup items The following table shows the function setup items: Display Setup Item and Factory Item Description Remarks item Description Setting Key lock 0: Key lock disabled The key lock can be cancelled even C-0 1 1: Settings other than flow rate while it is enabled.
  • Page 50 Chapter 5. ADVANCED OPERATION Display Setup Item and Factory Item Description Remarks item Description Setting Input range (1) Analog output selection is set Internal reference 0 to 5 V input is C-05 selection at voltage output the setting to use the 5 V-reference of analog setup ( C-06 = 0, 1, 4, or 5).
  • Page 51 Chapter 5. ADVANCED OPERATION Display Setup Item and Factory Item Description Remarks item Description Setting External 3-way 0: Not used External inputs OPEN/GND/5 V are C-0 9 switching function 1: Switching of operating switched as shown below. mode 1 For details on wiring, see page 3-10. 2: Switching of SP No.
  • Page 52 Chapter 5. ADVANCED OPERATION Display Setup Item and Factory Item Description Remarks item Description Setting Automatic valve 0: Function disabled When the totalized flow count C- 13 shut-off when the 1: Function enabled reaches the totalized flow event set- totalized flow event ting, the valve is closed fully.
  • Page 53 Chapter 5. ADVANCED OPERATION Display Setup Item and Factory Item Description Remarks item Description Setting Valve amperage 0: Valve amperage alarm Set up the alarm current value in the C-20 alarm setup disabled parameter setup. 1: Only upper limit alarm 5-2 Parameters (P. 5-12).
  • Page 54 Chapter 5. ADVANCED OPERATION Display Setup Item and Factory Item Description Remarks item Description Setting SP ramp control 0: Function disabled The SP change ramp level (the rate C-27 function 1: SP ramp control 1. of change per second) can be set to (In SP ramp-up: ramp 1, in SP a constant value for control startup ramp-down: ramp 2)
  • Page 55 Chapter 5. ADVANCED OPERATION Display Setup Item and Factory Item Description Remarks item Description Setting Operating dif- 0: Low differential pressure When the setting corresponds to the C-36 ferential pressure (50 ± 50 kPa) actual operating differential pressure, setting for control 1: Standard differential pressure control can be optimized.
  • Page 56 Chapter 5. ADVANCED OPERATION *3. When "4: Switching of analog I/O voltage range" is selected for external 3-way switching func- tion assignment c-09 in the function setup, external 3-way switching input has priority . Additionally, the analog input and output ranges change as shown in the table below according to the input status and the setting status of c-06 .
  • Page 57 Chapter 5. ADVANCED OPERATION *8 If “5, ” “6, ” or “8” (operation mode switching) is selected for one of the external contact input func- tion assignments ( C- 10 to C- 12 ) and if the valve is set to fully closed or fully open mode by external contacts, the operation mode cannot be switched using the [RUN] key.

  • Page 58: Parameters

    Chapter 5. ADVANCED OPERATION 5 - 2 Parameters This section describes parameter setup. Basic operation Advanced operation Power ON [DISP] key key + [ENT ] key (3 s or more) Instantaneous ow rate display Function setup mode [DISP] key key (3 s or more) Flow set value display Parameter setup mode [DISP] key...

  • Page 59: X84; Parameter Setup Item List

    0% FS 0 to 100 % FS E.2.5P upper/ lower limit (0.0) * (0.0 to 1.00) * flow rate setup SP ramp control MQV9020/9050: MQV9020/9050: Sets the flow rate change per raP.1 C-27 slope 1 0.00 0.00 to 99.99 second.
  • Page 60 Chapter 5. ADVANCED OPERATION Related Display Description Factory Setting Setting Range Function Remarks Setup Totalized flow event 0 to 9999 Flow rate totalization E.a.HI setting (first 4 digits) (P. 1-3). PV forced zero func- 3.0 s 0.0 to 999.9 s P.0.Dl C-29 tion delay SP upper limit flow rate...
  • Page 61 Chapter 5. ADVANCED OPERATION *11. This can be set only when "11: Cumulative flow event" has been selected as event output type in c- 07 or c- 08 in the function setup or when "1: Function enabled" has been selected for the automatic valve shut-off function upon occurrence of the cumulative flow event ( c- 13 ).

  • Page 62: Device Information Display

    (1) Press the [DISP] key several times to display the instantaneous flow rate. >> The instantaneous flow rate is displayed and the PV and L/min ("mL/min" on the MQV9020/9050) lamps light. (2) Hold down the [ ▲ ] key for three seconds or more.

  • Page 63: X84; Device Information Display Item

    Full-scale (10 to 100 % of standard Unit: L/min(standard) ("mL/ f.5Cl C- 18, C-24 flow rate range) min(standard)" on the C-25, C-26 MQV9020/9050) Reference 0 to 35 Unit: °C 5.deG C- 19 temperature Communications 0 to 127 "0" means communications c.ad5...

  • Page 64: Flow Rate Range

    ( C-24 or C-25 ). However, the minimum control flow rate is the same as for the standard range. As the range is reduced, the setup and display resolution levels are im- proved as described in the table below. Setup and display resolution levels after changing of range MQV9020 MQV9050 MQV9500 MQV0005...

  • Page 65: X84; Setup Resolution In The Analog Setup

    Chapter 5. ADVANCED OPERATION „ Setup resolution in the analog setup When "1: Analog setup" is selected in C-03 (flow rate setup) and setup is done using an external analog voltage or analog current, a higher resolution can be set than in the digital setup. Analog setup signal Flow rate setup resolution 0 to 5 V or 0 to 20 mA...

  • Page 67: Chapter 6. Troubleshooting

    Chapter 6. TROUBLESHOOTING „ Alarm code display When a flow rate deviation alarm occurs or when an alarm occurs during selfdiagnostics, the device forcibly switches to the operating mode currently selected for “Operation selection at alarm occurrence” ( c- 16 in the function setup). Additionally, the alarm code and normal display are alternately shown at the upper 4- digit portion of the 7-segment display.
  • Page 68 Chapter 6. TROUBLESHOOTING z Alarm reset operation When the [ENT] key is kept pressed continuously while the instanta- neous flow rate is being displayed, the alarm is reset after 3 seconds have elapsed.

  • Page 69: X84; Troubleshooting Guide

    (1) Press the [DISP] key to display the instantaneous PV display. (The PV and ("mL/min" on the MQV9020/9050) L/min lamps light.) (2) Set the operating mode to the fully closed mode, or set the set- ting flow rate to zero, and fully close the valve.
  • Page 70 Chapter 6. TROUBLESHOOTING Handling Precautions • Perform flow rate zero adjustment with the actual flow rate stabilized to zero after completely replacing the inside of the flow path with the gas to be controlled. Note • Flow rate zero adjustment can be performed by external contact input by selecting “flow rate zero adjustment”...

  • Page 71: Chapter 7. Specifications

    Chapter 7. SPECIFICATIONS „ Individual specifications Please go to the next page.
  • Page 72 Chapter 7. SPECIFICATIONS z MQV9020/9050 Model No. MQV9020 MQV9050 Item Valve type Proportional solenoid valve Valve operation Normally closed when de-energized (N.C.) Standard full-scale flow rate 20.0 mL/min (standard) 50.0 mL/min (standard) Gas types Hydrogen (H ), Helium (He) Gas must be dry and not contain corrosive components (chlorine, sulfur, acid).
  • Page 73 Chapter 7. SPECIFICATIONS Model No. MQV9020 MQV9050 Item Flow rate Display method 7-segment LED, 4 digits display Setup resolution See “Gas type and control range” table (page 7-9). Indication accuracy (1) ±1 % FS ±1 digit (50 % FS < Q ≤ 100 % FS) ±1 % FS ±1 digit...
  • Page 74 Chapter 7. SPECIFICATIONS z MQV9500/0005/0010 Model No. MQV9500 MQV0005 MQV0010 Item Valve type Proportional solenoid valve Valve operation Normally closed when de-energized (N.C.) Standard full-scale flow rate 0.500 L/min (standard) 5.00 L/min (standard) 10.00 L/min (standard) Gas types Hydrogen (H ), Helium (He) Gas must be dry and not contain corrosive components (chlorine, sulfur, acid).
  • Page 75 Chapter 7. SPECIFICATIONS Model No. MQV9500 MQV0005 MQV0010 Item Flow rate Display method 7-segment LED, 4 digits display Setup resolution “Gas type and control range” table (page 7-9). Indication accuracy (1) ±2 % FS ±1 digit (80 % FS < Q ≤ 100 % FS) (at standard tempera- (2) ±1 % FS ±1 digit (40 % FS <...
  • Page 76 Chapter 7. SPECIFICATIONS z MQV0050/0200 Model No. MQV0050 MQV0200 Item Valve type Proportional solenoid valve Valve operation Normally closed when de-energized (N.C.) Standard full-scale flow rate 50.0 L/min (standard) 200 L/min (standard) Gas types Hydrogen (H ), Helium (He) Gas must be dry and not contain corrosive components (chlorine, sulfur, acid). The gas must also be clean, not containing dust or oil mist.
  • Page 77 Chapter 7. SPECIFICATIONS Model No. MQV0050 MQV0200 Item 0 to 99,999,999 L Totalizing Display range 0.01 to 999,999.99 m function Display resolution 0.01m Totalized count (1) Every 500 L (1) Every 2 m backup timing (2) Every hour from the previous backup (3) At the time the RUN key is pressed.

  • Page 78: X84; Korea Certification Mark

    Relationship between differential pressure and flow rate (For Hydrogen) (P. 7-10) *4. For the advisability of using an inlet pressure greater than 0.5 MPa (gauge), contact the azbil Group. *5. The MLP100A100 loader package (sold separately) is needed.

  • Page 79: X84; Gas Type And Control Range

    Chapter 7. SPECIFICATIONS „ Gas type and control range The controllable flow rate range may vary depending on the type of gas. For details, see the tables below. MQV9020 MQV9050 MQV9500 Model No. Control flow Setup/display Control flow Setup/display Control flow...

  • Page 80: X84; Relationship Between Differential Pressure And Flow Rate (For Hydrogen)

    Chapter 7. SPECIFICATIONS „ Relationship between differential pressure and flow rate (For Hydrogen) Condition : the valve is fully open in air. z MQV9020/9050/9500/0005 MQV9020/9050 MQV9500 MQV0005 Di erential pressure (kPa) Di erential pressure (kPa) Di erential pressure (kPa) z MQV0010/0050/0200...

  • Page 81: X84; Relationship Between Differential Pressure And Flow Rate (For Helium)

    Chapter 7. SPECIFICATIONS „ Relationship between differential pressure and flow rate (For Helium) Condition : the valve is fully open in air. z MQV9020/9050/9500/0005 MQV9020/9050 MQV9500 MQV0005 ㈬ Di erential pressure (kPa) Di erential pressure (kPa) Di erential pressure (kPa)

  • Page 82: X84; Optional Parts (Sold Separately)

    Q=C2 • P1 P1: Inlet absolute pressure [kPa (abs)] P2: Outlet absolute pressure [kPa (abs)] (Absolute pressure = gauge pressure + 101.3 kPa) Flow rate [L/min (standard)], ([mL/min] (standard) for MQV9020/9050) C1 and C2: Constant values by model (Hydrogen) MQV9020: C1=2.684, C2=1.340 MQV9050: C1=2.684, C2=1.340...

  • Page 83: X84; External Dimensions

    Chapter 7. SPECIFICATIONS „ External dimensions z Models with integrated display MQV9020B/9050B/9500B/0005B/0010B/0050B/0200B (For MQV9020B/9050B, only 1/4" Swagelok and 1/4" VCR connections apply) Unit: mm ALM EV1 EV2 Digital Mass Flow Controller L/min ▼ ▲ DISP Jack for loader 18.5 2-9/16-18UNF 30 ±...
  • Page 84 Chapter 7. SPECIFICATIONS z Model with separate display MQV9020C/9050C/9500C/0005C/0010C/0050C/0200C (For MQV9020C/9050C, only 1/4" Swagelok and 1/4" VCR connections apply) Main unit Unit: mm Jack for loader 18.5 2-9/16-18UNF 30 ± 30 ± M4 screw (2) depth 5 min. 9/16-18UNF connection type 23.5 23.5 Rc 1/4"...
  • Page 85 Chapter 7. SPECIFICATIONS Separate display unit Unit: mm ALM EV1 EV2 Digital Mass Flow Controller L/min ▼ ▲ DISP Mounting panel cutout dimensions (recommended) 100 ± 50 ± M4(2) 45 ± 90 ± z Cable for connecting display to main unit Unit: mm HIROSE ELECTRIC CO., LTD.
  • Page 86 Chapter 7. SPECIFICATIONS z Front cover for separate display unit 81446858-001 Unit: mm Mask Material: PC/ABS Color: Dark gray Plate Material: SPCC t1 Color: Black 109.6 83.4 M4 cross recessed head machine screws for mounting (2), 7.5 mm long z Cable with dedicated connector 20-wire flat cable 81446681-001 Unit: mm Housing...
  • Page 87 Chapter 7. SPECIFICATIONS z Potentiometer for flow rate setting 81446683-002 • Digital dial Potentiometer Unit: mm Hexagonal nut, M9 16.5 ±1 26±1 Internally toothed washer LOCK 10.5 Mounting screw Mounting hole dimensions Wiring M3xP0.5 3.3 hole 15.2 26 ±1 +0.1 10.3 hole AC adapter 81446957-001...
  • Page 89 Revision History (CP-SP-1205E) Printed Edn. Revised pages Description Dec. 2006 Apr. 2012 Company name changed. Sep. 2017 Overall revision June 2019 Overall revision. 4th ed = 16th Jp ed.
  • Page 90 Specifications are subject to change without notice. (10) 1st edition: Dec. 2006 (U) 4th edition: June 2019 (V)

This manual is also suitable for:

Mqv0050Mqv9050Mqv9500Mqv0200Mqv0005Mqv0010

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