Azbil Micro Flow MQV9005 User Manual
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Azbil Micro Flow MQV9005 User Manual

Digital mass flow controller standard gas model
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No. CP-SP-1204E
™
Digital Mass Flow Controller
Standard Gas Model
MQV9005/9020/9200/9500
0002/0005/0020/0050/0200/0500
User's Manual
Thank you for purchasing an Azbil
Corporation product.
This manual contains information for
ensuring the correct use of this product.
It also provides necessary information
for installation, maintenance, and
troubleshooting.
This manual should be read by those who
design and maintain equipment that uses
this product. Be sure to keep this manual
nearby for handy reference.

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Summary of Contents for Azbil Micro Flow MQV9005

  • Page 1 Digital Mass Flow Controller Standard Gas Model MQV9005/9020/9200/9500 0002/0005/0020/0050/0200/0500 User’s Manual Thank you for purchasing an Azbil Corporation product. This manual contains information for ensuring the correct use of this product. It also provides necessary information for installation, maintenance, and troubleshooting.
  • Page 2 If you should find an error or omission, please contact the azbil Group. In no event is Azbil Corporation liable to anyone for any indirect, special or consequential damages as a result of using this product. © 2006-2018 Azbil Corporation All Rights Reserved.
  • Page 3 Conventions Used in This Manual  The safety precautions explained in the following section aim to prevent injury to the operator and others, and to prevent property damage. WARNING Warnings are indicated when mishandling this product might result in death or serious injury. CAUTION Cautions are indicated when mishandling this product might result in minor injury to the user, or physical damage...

  • Page 4: Safety Precautions

    For information on whether this device can be used for gases other than the standard compatible gases, be sure to contact the azbil Group in advance. Prevent foreign matter from entering the device. If rust, water droplet, oil mist, or dust in the pipes enters the device, measurement or control error or damage might occur.
  • Page 5 CAUTION The valve on this device cannot completely shut a flow off. If complete shutoff is required, provide a shutoff valve separately. When the external valve is closed, it is necessary also to fully close the valve of the device using either of the following methods: •...
  • Page 6 CAUTION If using Rc connections, take care not to coat with too much sealant. Foreign matter or burrs in the pipes may also cause measurement errors. Do not apply a negative voltage or a voltage exceeding 5 V to the external setup voltage input terminal.

  • Page 7: The Role Of This Manual

    A total of 2 different manuals are available for the MQV. Read them as necessary for your specific requirements. If a manual you require is not available, contact the azbil Group or its dealer. Digital Mass Flow Controller Standard Gas Model MQV9005/9020/9200/9500/0002/0005/0020/0050/0200/0500 Manual No.

  • Page 8: Organization Of This User's Manual

    Organization of This User’s Manual This manual is organized as follows. Chapter 1. INTRODUCTION This chapter briefly describes this device and its features, and gives a model selection guide. Chapter 2. NAMES AND FUNCTIONS OF PARTS This chapter describes the names and functions of this device’s parts. Chapter 3.

  • Page 9: Table Of Contents

    Contents Conventions Used in This Manual Safety Precautions The Role of This Manual Organization of This User’s Manual Chapter 1. INTRODUCTION  Introduction ..............................1-1  Features ................................1-1  Functions ................................1-2  Model selection guide ..........................1-7  Basic operation and advanced operation ..................1-10 Chapter 2.
  • Page 10 5 - 3 Device Information Display ......................... 5-15  Setup method ..............................5-15  Device information display item ......................5-16 5 - 4 Flow Rate Range Change Function and Settings and Display Resolutions After Change of Range ............................... 5-17  Setup resolution in the analog setup....................5-18 Chapter 6.

  • Page 11: Chapter 1. Introduction

    MQV controllers integrate three component technologies: the ultra quick response µF (Micro Flow) thermal flow sensor, made with proprietary Azbil Corporation technology, a proportional solenoid valve, and advanced actuator control technology. Integrating these technologies has achieved a high-speed control with low differential pressure.

  • Page 12: Functions

    The user can set gas type conversion factors for gases other than the standard compatible gases, and for mixed gases. For information on gas type conversion factors for various gases, contact the azbil Group. • Control flow range setting (function setup C-24, C-25) The control flow range can be changed to the desired range (10 to 100 % of the flow range at factory setting) in units of 1 % FS.
  • Page 13 Chapter 1. INTRODUCTION • SP ramp control (function setup C-27) This function is used to set the set value change ramp amount (the rate of change per second) to a constant value for the start of control and for set value changes.
  • Page 14 Chapter 1. INTRODUCTION Flow rate upper or lower limit output (output in comparison with optional • upper or lower limit flow rate set value ) Output mode (The four modes — control / fully open / control or fully open / •...
  • Page 15 Chapter 1. INTRODUCTION • PV display decimal point change (function setup C-38) This function is used to shift the decimal point position of the instantaneous flow rate display one digit left or right. When multiple devices are used side-by- side, the number of digits after the decimal point of the flow rate display can be made uniform.
  • Page 16 Chapter 1. INTRODUCTION Internal reference 0 to 5 V input*/External reference 0 to 20 mA input • External reference 0 to 5 V input/External reference 0 to 20 mA input • External reference 1 to 5 V input/External reference 4 to 20 mA input •...

  • Page 17: Model Selection Guide

    Chapter 1. INTRODUCTION Model selection guide  „ MQV9005/9020 „ Optional Standard Basic Material of functions control Connection Appended model Display gascontacting Description flowrate method type parts range Digital mass flow controller, MQV 9005 0.10 to 5.00 mL/min (standard) *1, *4 9020 0.2 to 20.0 mL/min (standard) *1, *4...
  • Page 18 Chapter 1. INTRODUCTION MQV9200/9500/0002/0005/0020/0050 „ Optional Standard Basic Material of functions control Connection Appended model Display gascontacting Description flowrate method type parts range Digital mass flow controller, MQV 9200 2 to 200 mL/min (standard) *1, *4 9500 0.004 to 0.500 L/min (standard) *1, *4 0002 0.02 to 2.00 L/min (standard)
  • Page 19 Chapter 1. INTRODUCTION MQV0050(J, K)/0200/0500 „ Optional Standard Basic Material of functions control Connection Appended model Display gascontacting Description flowrate method type parts range Digital mass flow controller, MQV 0050 0.4 to 50.0 L/min (standard) *1, *4, *6 0200 2 to 200 L/min (standard) *1, *4 0500 4 to 500 L/min (standard)

  • Page 20: Basic Operation And Advanced Operation

    Chapter 1. INTRODUCTION Basic operation and advanced operation  „ This device provides two kinds of operations, basic operation and advanced operation. Basic operation is the state of the device during normal use. In basic operation, the contents of the 7-segment display can be changed to show instantaneous flow rate, flow set value, totalized flow value, or amperage to the valve in normal operation mode.

  • Page 21: Chapter 2. Names And Functions Of Parts

    Chapter 2. NAMES AND FUNCTIONS OF PARTS Display  „ OK lamp: Lit when the deviation between the ow set value and instantaneous ow rate is in the allowable range. Set the allowable range in the parameter setup. (For details on how to set parameters, P. 5-11 ALM lamp: Lit when an alarm occurs.

  • Page 22: Main Unit (Mqv9005/9020/9200/9500/0002/0005/0020/0050)

    Chapter 2. NAMES AND FUNCTIONS OF PARTS Main unit (MQV9005/9020/9200/9500/0002/0005/0020/0050)  „ Connector port: This is used for I/O signals. Use cable with dedicated connector. Jack for AC adapter: Pipe connection port (outlet): Connect dedicated adapter here. This is the port from which Model No.: 81446957-001 gas is discharged.

  • Page 23: Chapter 3. Mounting And Wiring

    Chapter 3. MOUNTING AND WIRING WARNING Never allow gases that are within explosive limits to pass through this device. Doing so might result in an explosion. If the MQV is to be used for oxygen, make sure that it is a model designed for oxygen use. Even if a device is designed for oxygen gas, do NOT use it for oxygen gas if it has been used for some other gas even once.

  • Page 24: Mounting

    Chapter 3. MOUNTING AND WIRING CAUTION Before connecting pipes with Swagelok or VCR connections, check the precautions in the instruction provided by the connecting joint manufacturer. When purchasing a connecting joint, use the following made by Swagelok Co., Ltd: 1/4" Swagelok: SS-400-1-6ST (standard) SS-400-1-6STSC11 (oil-inhibited) 1/2"...
  • Page 25 Chapter 3. MOUNTING AND WIRING • Procedure (1) Turn the power OFF. (2) Remove the four screws holding the display. (3) Lift up the display from the main unit, and turn it 180˚ counterclockwise. (4) Put the display back on the main unit, and fasten with the four screws taken off in step (2).
  • Page 26 Chapter 3. MOUNTING AND WIRING Handling Precautions • Do not hold the top part of the main unit with your hand. Doing so might deform the case. Incorrect • Take special care not to damage the connector latches. Installation procedure „...
  • Page 27 Chapter 3. MOUNTING AND WIRING Installing the separate display unit „ For models with a separate display (1) Make mounting holes in the panel according to the panel cutout dimensions. unit: mm Panel cutout dimensions 100 ±0.2 50 ±0.2 M4 (2) 45 ±0.2 90 ±0.2 (2) Mount the display and secure it by tightening the screws.

  • Page 28: Piping

    Chapter 3. MOUNTING AND WIRING Piping  „ CAUTION Mount this device horizontally. However, do not mount with the display facing down. Doing so might cause measurement error or device failure. For the MQV0050(J, K)/0200(J, K)/0500(J, K), use the largest pipe possible in order to reduce pressure loss in the pipes, and do not install any equipment near the device that can cause a large pressure loss.

  • Page 29: Wiring

    Chapter 3. MOUNTING AND WIRING Wiring  „ CAUTION Do not apply a negative voltage or a voltage exceeding 5 V to the external setup voltage input terminal. Doing so might cause malfunction or equipment failure. When using a relay for external contact input and/or external 3-way switching input, always use a relay designed for micro-current use (with gold contacts).
  • Page 30 Chapter 3. MOUNTING AND WIRING Connector signal names „ Pin number Signal name Description Remarks +5 V (5 mA max.) 5 V DC reference voltage outputa 5 mA max. FLOW OUT Instantaneous flow rate (PV) or 0 to 5 V/1 to 5 V/0 to 20 mA/ 4 to 20 mA flow rate setpoint (SP) output output A.GND...
  • Page 31 Chapter 3. MOUNTING AND WIRING • Alarm output/event output Load EV2 OUT Load EV1 OUT Load ALM OUT or 6 D.GND Handling Precautions • Take special care that the event and alarm outputs do not exceed the output rating of the device. Additionally, when driving a relay, use an appropriate coil surge absorption diode built-in relay.
  • Page 32 Chapter 3. MOUNTING AND WIRING • External 3-way switching input +5 V A.GND (0 V) MODE INPUT OPEN Handling Precautions • When switching by relay, use an appropriate relay intended for micro- current use (with gold contacts). Failure to do so could cause faulty contact, resulting in malfunction.
  • Page 33 Chapter 3. MOUNTING AND WIRING Example of wiring „ Instantaneous owrate output Internal circuit +5 V (5 mA max.) FLOW OUT A.GND Potentiometer FLOW SP INPUT (5 kΩ) +5 V MODE INPUT OPEN EV2 OUT Event output 2 EV1 OUT Event output 1 ALM OUT Alarm output...
  • Page 34 Sometimes two or more connections must be made to the same pin during wiring. In this case, use a connector terminal block. If you need a 20-core cable for the connectors on the device and connector terminal block, contact the azbil Group or your dealer.

  • Page 35: Chapter 4. Basic Operation

    Chapter 4. BASIC OPERATION 4 - 1 Switching Displays CAUTION Do not operate the console keys using a sharp object such as a mechanical pencil or screwdriver. Doing so might damage the console. Basic operation  „ Basic operation is used to change the display to instantaneous flow rate (PV), flow set value (SP), totalized flow value, or valve amperage.
  • Page 36 Chapter 4. BASIC OPERATION Indicating the flow set value (SP display) „ If DISP key is pressed while the instantaneous flow rate is displayed, the PV lamp goes out, the SP lamp lights and the flow set value (SP) is indicated on the display. Handling Precautions •...
  • Page 37 Chapter 4. BASIC OPERATION Valve amperage display „ If DISP key is pressed while the totalized flow is displayed, the PV, SP, L and L/ min lamps go out, and the electrical current to the valve ( 0.0 to 1 00.0 [ %]) is indicated on the 7-segment display.

  • Page 38: Setting The Flow Rate

    Chapter 4. BASIC OPERATION 4 - 2 Setting the Flow Rate Set the flow rate as shown below. Single setup Key input or communications Selection from function setup C-04 Digital setup Key input or communications Multi-setup External contact inputs External 3-way switching input Flow set value Selection from function setup C-03 Internal reference 0 to 5 V input Voltage setup...

  • Page 39: Digital Flow Rate Setup

    Chapter 4. BASIC OPERATION Digital flow rate setup  „ Up to eight SP values can be set on this device. The operating procedure may vary depending on the number of SP values to be set. Single setup (number of SPs in function setup C-04 is 1) „...
  • Page 40 Chapter 4. BASIC OPERATION Note (Advanced use, direct setup function) • Control can be executed using an SP No. or SP value currently being changed (indicated by blinking display) when the direct setup function is enabled for the instantaneous flow rate direct setup function ON/OFF ( C-2  ...

  • Page 41: Flow Rate Setup By External Contact Input (Advanced Use)

    Chapter 4. BASIC OPERATION Flow rate setup by external contact input (Advanced use)  „ When assigning "3: Switching of SP No." at external contact input function assignment C- 1 0 to C- 1 2 in the function setup, up to eight SP values can be changed by means of external contact ON and OFF combinations.

  • Page 42: Flow Rate Setup By External 3-Way Switching Input (Advanced Use)

    Chapter 4. BASIC OPERATION Flow rate setup by external 3-way switching input (Advanced use)  „ When "2: Switching of SP No." is assigned at external 3-way switching function C-09 in the function setup, three SP values ( SP-0 to SP-2 ) can be changed with the external 3-way switching input as described in the table below.

  • Page 43: Analog Flow Rate Setup

    Chapter 4. BASIC OPERATION Analog flow rate setup  „ The SP value (flow set value) can be changed by analog voltage by selecting analog setting as the flow rate setting method in function setup C-03 . For details on how to set up the function, Chapter 5.

  • Page 44: Selecting The Operating Mode

    Chapter 4. BASIC OPERATION 4 - 3 Selecting the Operating Mode Operating mode selection  „ Three kinds of valve operating modes are provided, "control mode," "fully closed mode," and "fully open mode." The factory setting is the control mode. The operating mode can be forcibly changed to "fully closed mode"...
  • Page 45 Chapter 4. BASIC OPERATION Handling Precautions • When "0: RUN key disabled" is selected for " C-02 : RUN key operation and operating mode selection when power turned ON" in the function setup, the operating mode is not changed even though the RUN key is pressed. •...

  • Page 47: Chapter 5. Advanced Operation

    Chapter 5. ADVANCED OPERATION The advanced operation provides three kinds of modes, "Function setup mode," "Parameter setup mode," and "Controller information display mode." Setup mode transition operation  „ Normally, when the power is turned ON, the instantaneous flow rate is displayed in the basic operation mode.

  • Page 48: Functions

    Chapter 5. ADVANCED OPERATION 5 - 1 Functions This section describes how to set up functions. Basic operation Advanced operation Power ON DISP key key + ENT key (3 s or more) Instantaneous ow rate display Function setup mode DISP key key (3 s or more) Flow set value display Parameter setup mode...

  • Page 49: Function Setup Items

    Chapter 5. ADVANCED OPERATION Function setup items  „ The following table shows the function setup items: Factory Display Item Item Description Setup Item and Description Remarks Setting Key lock 0: Key lock disabled The key lock can be cancelled even C-0 1 1: Settings other than flow rate while it is enabled.
  • Page 50 Chapter 5. ADVANCED OPERATION Factory Display Item Item Description Setup Item and Description Remarks Setting Analog output 0: 0 to 5 V instantaneous flow The scale can also be changed to the C-06 type and range rate output desired flow rate range. selection 1: 1 to 5 V instantaneous flow For details,...
  • Page 51 Chapter 5. ADVANCED OPERATION Factory Display Item Item Description Setup Item and Description Remarks Setting External contact 0: Not used 3: For details on how to switch three C- 10 1 input function or more SP Nos., Multi- 1: Reset totalized flow count assignment setup (number of SPs in function 2: Stop totalizing flow count...
  • Page 52 Chapter 5. ADVANCED OPERATION Factory Display Item Item Description Setup Item and Description Remarks Setting Operation 0: Control continued and alarm Alarm code displays even if “0” is C- 16 selection at alarm output OFF anytime (alarm selected. occurrence ignored) -1 to -3: Output logic 1 to 3 is inverted 1: Control continued and alarm (ON at all times).
  • Page 53 Chapter 5. ADVANCED OPERATION Factory Display Item Item Description Setup Item and Description Remarks Setting Control dead zone 0: Function disabled Valve operation stops while the C-22 setting 1: Function enabled control flow rate is within the OK judgment range. The OK judgment range can be set in the parameter setup mode.
  • Page 54 Chapter 5. ADVANCED OPERATION Factory Display Item Item Description Setup Item and Description Remarks Setting SP ramp control 0: Function disabled The SP change ramp level (the rate of C-2 7 function change per second) can be set to a 1: SP ramp control 1. constant value for control startup and (In SP ramp-up: ramp 1, setting flow rate changed.
  • Page 55 Chapter 5. ADVANCED OPERATION Factory Display Item Item Description Setup Item and Description Remarks Setting Operational 0: Low differential pressure When the setting corresponds to the C-36 differential (50 ± 50 kPa) actual operating differential pressure, pressure 1: Standard differential pressure control can be optimized.
  • Page 56 Chapter 5. ADVANCED OPERATION *3. When "4: Switching of analog I/O voltage range" is selected for external 3-way switching function assignment c-09 in the function setup, external 3-way switching input takes precedence over others. Additionally, the analog input and output ranges change as shown in the table below according to the input status and the setting status of c-06. External 3-way switching input state Settings in C-06...

  • Page 57: Parameters

    Chapter 5. ADVANCED OPERATION 5 - 2 Parameters This section describes parameter setup. Basic operation Advanced operation Power ON DISP key key + ENT key (3 s or more) Instantaneous ow rate display Function setup mode DISP key key (3 s or more) Flow set value display Parameter setup mode DISP key...

  • Page 58: Parameter Setup Item List

    Chapter 5. ADVANCED OPERATION Parameter setup item list  „ Factory Related No. Display Description Setting Range Remarks Setting Function Setup 0.rnG Flow rate OK judgment (2 % FS) (0.5 to 100 % FS) Unit : L/min (standard) C-0 7 range (mL/min (standard) for C-08...
  • Page 59 Chapter 5. ADVANCED OPERATION Factory Related No. Display Description Setting Range Remarks Setting Function Setup 15 rap. i SP ramp control ramp 1 MQV 9200/9500 : Sets the flow rate change per C-27 0.0 to 999.9 second. MQV 9005/0002/0005: Flow rate unit: L/min 0.000 to 9.999 (standard) 16 rap.2 SP ramp control ramp 2...
  • Page 60 Chapter 5. ADVANCED OPERATION a.L.hy a.h.hy ON(ALM) a. lO a. hi *3. Only items corresponding to the alarm type selected in flow rate alarm setup (c- 15 in the function setup) can be set. *4. These alarms can be set when (1 to 3) is set for flow rate alarm setup type (c- 15) and valve amperage alarm setup type (c-20) in the function setup.

  • Page 61: Device Information Display

    Chapter 5. ADVANCED OPERATION Chapter 5. ADVANCED OPERATION 5 - 3 Device Information Display This section describes device information display. Basic operation Advanced operation Power ON key + ENT key DISP key (3 s or more) Instantaneous ow rate display Function setup mode DISP key key (3 s or more)

  • Page 62: Device Information Display Item

    Chapter 5. ADVANCED OPERATION Chapter 5. ADVANCED OPERATION Device information display item  „ Display Related Description Setting Range and Description Remarks Item Function Setup Gas type 0: Conversion factor for each c- 18, c-26 gas type set by the user 1: Air/nitrogen 2: Oxygen 3: Argon...

  • Page 63: Flow Rate Range Change Function And Settings And Display Resolutions After Change Of Range

    Chapter 5. ADVANCED OPERATION 5 - 4 Flow Rate Range Change Function and Settings and Display Resolutions After Change of Range The flow rate range can be reduced to a level of 99 % down to 10 % of the standard range using the flow rate range setup (C-24 or C-25).

  • Page 64: Setup Resolution In The Analog Setup

    Chapter 5. ADVANCED OPERATION Setup resolution in the analog setup  „ When "1: Analog setup" is selected in C-03 (flow rate setup) and setup is done using an external analog voltage or analog current, a higher resolution can be set than in the digital setup.

  • Page 65: Alarm Code Display

    Chapter 6. MAINTENANCE AND TROUBLESHOOTING Alarm code display  „ When a flow rate deviation alarm occurs or when an alarm occurs during self- diagnostics, the device forcibly switches to the operating mode currently selected for “Operation selection at alarm occurrence” ( c-   16 in the function setup). Additionally, the alarm code and normal display are alternately shown at the upper 4-digit portion of the 7-segment display.

  • Page 66: Troubleshooting Guide

    Chapter 6. MAINTENANCE AND TROUBLESHOOTING • If the causes of the alarm are removed, the alarm display turns off automatically. However, when "2, -2: Forced fully closed" or "3, -3: Forced fully open" is selected for c-   16 in the function setup, the alarm display and operating mode at alarm occurrence are retained even if the causes of the alarm are removed.
  • Page 67 Chapter 6. MAINTENANCE AND TROUBLESHOOTING Flow rate zero adjustment „ If a cause of the flow rate does not becoming zero in spite of an actual zero flow rate is that the sensor's zero point has deviated, adjust the flow rate zero point as follows: (1) Press the DISP key to display the instantaneous PV display.

  • Page 69: Chapter 7. Specifications

    Chapter 7. SPECIFICATIONS Specifications  „ Shown on next page.

  • Page 70: Gas Type And Control Range

    Chapter 7. SPECIFICATIONS MQV9005/9020 „ Model No. MQV9005 MQV9020 Item Valve type Proportional solenoid valve Valve operation Normally closed when de-energized (N.C.) Standard full-scale flow rate 5 mL/min(standard) 20 mL/min(standard) Gas types * Air/nitrogen (N ), oxygen (O ), argon (Ar) Gas must be dry and not contain corrosive components (chlorine, sulfur, acid).
  • Page 71 Chapter 7. SPECIFICATIONS Model No. MQV9005 MQV9020 Item Flow rate Display method 7-segment LED, 4 digits display Setup resolution  Gas type and control range (P. 7-11) Indication accuracy ±1 %FS ±1 digit (at standard temperature and differential pressure) Totalizing Display range 0.0 to 9,999,999.9mL 0.00 to 99,999,999 mL function...
  • Page 72 Chapter 7. SPECIFICATIONS MQV9200/9500/0002 „ Model No. MQV9200 MQV9500 MQV0002 Item Valve type Proportional solenoid valve Valve operation Normally closed when de-energized (N.C.) Standard full-scale flow rate 200 mL/min(standard) 0.500 L/min(standard) 2.00 L/min(standard) Gas types Air/nitrogen (N ), oxygen (O ), argon (Ar), carbon dioxide (CO ), natural gas 13A (LNG), 100 % methane (CH...
  • Page 73 Chapter 7. SPECIFICATIONS Model No. MQV9200 MQV9500 MQV0002 Item Flow rate Display method 7-segment LED, 4 digits display Setup resolution  Gas type and control range (P. 7-11) Indication accuracy (1) ±1 %FS ±1 digit (50 %FS < Q ≤ 100 %FS) (at standard temperature and (2) ±0.5 %FS ±1 digit (0 %FS ≤...
  • Page 74 Chapter 7. SPECIFICATIONS MQV0005/0020/0050(B, C) „ Model No. MQV0005 MQV0020 MQV0050 (B, C) Item Valve type Proportional solenoid valve Valve operation Normally closed when de-energized (N.C.) Standard full-scale flow rate 5.00 L/min(standard) 20.0 L/min(standard) 50.0 L/min(standard) Gas types Air/nitrogen (N ), oxygen (O ), argon (Ar), carbon dioxide (CO ), natural...
  • Page 75 Chapter 7. SPECIFICATIONS Model No. MQV0005 MQV0020 MQV0050 (B, C) Item Flow rate Display method 7-segment LED 4 digits display Setup resolution  Gas type and control range (P. 7-11) Indication accuracy (1) ±1 % FS ±1 digit (50 % FS < Q ≤ 100 % FS) (at standard temperature and (2) ±0.5 % FS ±1 digit (0 % FS ≤...
  • Page 76 Chapter 7. SPECIFICATIONS MQV0050(J, K)/0200/0500 „ Model No. MQV0050(J, K) MQV0200 MQV0500 Item Valve type Proportional solenoid valve Valve operation Normally closed when de-energized (N.C.) Standard full-scale flow rate 50.0 L/min(standard) 200 L/min(standard) 500 L/min(standard) Gas types Air/nitrogen (N ), oxygen (O ), argon (Ar), carbon dioxide (CO ), natural gas 13A (LNG), 100 % methane (CH...
  • Page 77 Chapter 7. SPECIFICATIONS Model No. MQV0050(J, K) MQV0200 MQV0500 Item Flow rate Display method 7-segment LED, 4 digits display Setup resolution  Gas type and control range (P. 7-11) Indication accuracy (at standard (1) ±1.5 % FS ±1 digit (80 % FS < Q ≤ 100 % FS) temperature and differential (2) ±1.0 % FS ±1 digit (40 % FS <...

  • Page 78: Relationship Between Differential Pressure And Flow Rate

    45.007 88.9 *3. For air/nitrogen and oxygen (for the oxygen model). For details about accuracy for other gas types, please contact Azbil. Also, analog output accuracy (± 0.3 %) is not included in the control accuracy. *4. Differential pressure required for obtaining full-scale flow rate. (Outlet pressure=0 kPa (gauge)) *5.
  • Page 79 Chapter 7. SPECIFICATIONS Gas type and control range  „ The controllable flow rate range may vary depending on the type of gas. For details, see the tables below. Model No. MQV9005 MQV9020 Control flow Setup/display Control flow rate Setup/display rate range resolution range...
  • Page 80 Chapter 7. SPECIFICATIONS Note • The setup and display resolutions described above can be improved by reducing the flow rate range using flow rate range setup C-24 or C-25 . A still higher resolution can be set using the analog setup ( C-03 = 1). For more information, 5 - 4 Flow Rate Range Change Function and Settings and Display Resolutions After Change of Range (P. 5-17).
  • Page 81 Chapter 7. SPECIFICATIONS MQV0050(J, K)/0200/0500 „ MQV0050(J, K) MQV0200 MQV0500 Outlet pressure condition Outlet pressure condition Outlet pressure condition (1) 150 kPa(gauge) (1) 150 kPa(gauge) (1) 150 kPa(gauge) (2) 50 kPa(gauge) (2) 50 kPa(gauge) (2) 50 kPa(gauge) 0 kPa(gauge) 0 kPa(gauge) 0 kPa(gauge) (4) –50 kPa(gauge) (4) –50 kPa(gauge)

  • Page 82: Optional Parts (Sold Separately)

    Chapter 7. SPECIFICATIONS Relationship between differential pressure and outlet flow rate when valve of MQV0500 is fully closed (air flow under conditions of outlet pressure = 0 kPa (gauge)) Di erential pressure [kPa] Handling Precautions • If this device is used for a gas other than air or if it is operated under conditions different from the outlet pressure, the conversion needs to be made using the equation stated on the previous page.

  • Page 83: External Dimensions

    Chapter 7. SPECIFICATIONS External dimensions  „ Models with integrated display „ MQV9005B/9020B/9200B/9500B/0002B/0005B/0020B/0050B Unit: mm ALM EV1 EV2 Digital Mass Flow Controller L/ min DISP Jack for loader 18.5 2-9/16-18UNF ±0.5 ±0.5 M4 screw (2) depth 5 min. 9/16-18UNF connection type 23.5 23.5 Rc 1/4"...
  • Page 84 Chapter 7. SPECIFICATIONS Models with integrated display „ MQV0050J/0200J/0500J Unit: mm Model Digital Mass Flow Controller MQV0050 151 145 102 L/min MQV0200 DISP MQV0500 152 146 103 Jack for loader Jack for AC adapter 2-3/4-16UNF 25.3 ±0.5 ±0.5 (150) M4 screw (4) depth 5 min. Pin Assign Digital Mass Flow...
  • Page 85 Chapter 7. SPECIFICATIONS Model with separate display „ MQV9005C/9020C/9200C/9500C/0002C/0005C/0020C/0050C • Main unit Unit: mm Jack for loader 18.5 2-9/16-18UNF ±0.5 ±0.5 M4 screw (2) depth 5 min. 9/16-18UNF connection type 23.5 23.5 Rc 1/4" pipe coupling (2) (137) Rc 1/4" connection type Pipe coupling made by Swagelok (2) SS-400-1-6ST (25.7)
  • Page 86 Chapter 7. SPECIFICATIONS Model with separate display „ MQV0050K/0200K/0500K • Main unit Unit: mm Model h2 h3 MQV0050 172 151 145 102 45 MQV0200 MQV0500 173 152 146 103 46 42.5 Jack for loader Jack for AC adapter 2-3/4-16UNF 25.3 ±0.5 ±0.5 (150)
  • Page 87 Chapter 7. SPECIFICATIONS • Separate display unit Unit: mm ALM EV1 EV2 Digital Mass Flow Controller L/ min DISP Mounting panel cutout dimensions (recommended) ± ± M4(2) ± ± Cable for connecting display to main unit „ Unit: mm HIROSE ELECTRIC CO., LTD. HIF3BA-16D-2.54R 2000 min.
  • Page 88 Chapter 7. SPECIFICATIONS Front cover for separate display unit 81446858-001 „ Unit: mm Mask Material: PC/ABS Color: Dark gray Plate Material: SPCC t1 109.6 Color: Black 83.4 M4 cross recessed head machine screws for mounting (2), 7.5 mm long Cable with dedicated connector „...
  • Page 89 Chapter 7. SPECIFICATIONS Potentiometer for flow rate setting 81446683-002 „ z Digital dial „ z Potentiometer Unit: mm Hexagonal nut, M9 16.5 ±1 ±1 Internally toothed washer LOCK 10.5 Mounting screw Mounting hole dimensions M3xP0.5 3.3 hole ø 15.2 ±1 +0.1 10.3 ø...
  • Page 91 Revision History of CP-SP-1204E Printed Revised pages Description Apr. 2006 Examples changed. Sep. 2010 ii, iii, iv, Cautions changed and added. 3-1, 3-6, 4-1 MVQ9005 added to Features. 1-6, 1-7, MVQ9005/9020 added. 5-11, 5-14 3-12, 6-1 Handling Precautions added. 7-14 AC adapter output rating changed.
  • Page 92 1. Warranty period and warranty scope 1.1 Warranty period Azbil Corporation’s products shall be warranted for one (1) year from the date of your purchase of the said products or the delivery of the said products to a place designated by you.
  • Page 93 Azbil Corporation’s products every 5 to 10 years unless otherwise specified in specifications or instruction manuals.
  • Page 94 Specifications are subject to change without notice. (10) 1st edition: Apr. 2006 7th edition: Sep. 2018 (V)

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