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MTI OTF-1200X80-HPV-III-GF Operation Manual

1100 c three zone high pressure tube furnace with gas flow system

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OTF-1200X80-HPV-III-GF
1100° C Three Zone High Pressure Tube Furnace with Gas Flow System
Operation Manual
860 South 19
Street, Richmond, CA 94804, USA
th
TEL: (510) 525 – 3070 FAX: (510) 525 – 4705
Website:
www.mtixtl.com
Email:
info@mtixtl.com
MTI Corporation
www.mtixtl.com
|

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Summary of Contents for MTI OTF-1200X80-HPV-III-GF

  • Page 1 OTF-1200X80-HPV-III-GF 1100° C Three Zone High Pressure Tube Furnace with Gas Flow System Operation Manual 860 South 19 Street, Richmond, CA 94804, USA TEL: (510) 525 – 3070 FAX: (510) 525 – 4705 Website: www.mtixtl.com Email: info@mtixtl.com MTI Corporation www.mtixtl.com...
  • Page 2: Table Of Contents

    Setting up the gas pressure and delivery flow rate ....................28 Setting up the cooling system ..........................29 Running the heating program ..........................29 Turning off the system ............................. 29 Troubleshooting for Typical Problems ............................30 Troubleshooting resources ............................30 MTI Corporation www.mtixtl.com...
  • Page 3: Important Notes

    The prospective user is responsible for carefully reading and understanding the contents of this manual prior to operating the equipment. MTI reserves the right to update or upgrade the product without informing customers of the data change(s) in this manual. Please visit www.mtixtl.com...
  • Page 4: Warranty

    Any defective part(s) will be replaced free of charge during warranty period. However, the warranty does NOT cover any equipment damage caused by misuse or negligence or the part(s). After the expiration of warranty, MTI will continue to provide technical support and spare parts at a reasonable cost.
  • Page 5: Equipment Information

    Page 3 of 32 Equipment Information OTF-1200X80-HPV-III-GF is a high pressure tube furnace with three heating zones and gas flow control system as well as a protective frame. Processing tube is made of Ni based superalloy with 50 mm ID, which can be heated to max.1100° C under high pressure of both oxygen and inert gases with controlled flow rate.
  • Page 6: Structures

    Page 4 of 32 Structures Overall structure Gas supply (not provided) Protection frame Right Flange PC hub Furnace Top Cover Processing Tube PC (optional) Left Flange Water Chiller Control Panel Overall Structure Furnace Control Panel Temperature Controller Heating Off Power Indicator Heating Ready Main Power off/on Computer COMM (Optional)
  • Page 7 Page 5 of 32 Pressure Pressure Pressure Power switch Mass flow controller monitor 3 monitor 2 monitor 1 Control panel (gas delivery system) Relief valve Water hose Left flange Cooling jacket Locking bolts 1/8 thermocouple feedthrough Left flange...
  • Page 8: Gas Diagram

    Page 6 of 32 Gas Diagram...
  • Page 9: Specification

    Page 7 of 32 Specification  Splitable Three heating zone tube furnace with air cooling layer  High quality fibrous insulation and reflective coating for max. Furnace energy saving.  Power: 208 - 240VAC 50/60Hz , 4KW max.  Three heating zones: 150mm + 150mm + 150 mm ...
  • Page 10 IGT to double the yield of shale oil and Notes hydrocarbon gases. MTI High Pressure furnaces with Ni based supper alloy tube is an ideal tool for conducting related experiments. Please click underline to view research paper.
  • Page 11: Equipment Inspection

    Page 9 of 32 Equipment Inspection Once receiving the furnace, please inspect the equipment and all accessories for damage incurred from shipping and check the packing list for missing items. If anything is damaged or missing, please inform us at info@mtixtl.com.
  • Page 12: Power Connection

    Please refer to the illustrations below to get an idea of the connections for the three phase and as well as the single phase 208~240V AC. MTI Corporation will not be responsible for any equipment or property damage that results from improper or incorrect power connections.
  • Page 13 Page 11 of 32 Ground (Live Wire) (Live Wire) (Neutral) AC 110V AC 220V From neutral wire and either one live wire From two live wires Typical Single Phase AC Power in United States...
  • Page 14: Installation

    Page 12 of 32 Installation Properly setting up the tube and flanges prior to heating will ensure the furnace to work under the most ideal conditions. This will insulate the heat from the flanges while simultaneously preventing the dissipation of heat from the furnace chamber. The insulation of heat stabilizes the heating zone which in turn expends less energy and places less wear on the heating elements.
  • Page 15: Water Cooling Flange

    Page 13 of 32 5. 6 tube blocks shall be inserted into both ends of the tube (3 at each side). We suggest insert all tube blocks from the left side furnace. Measure the distance before inserting to make sure the correct position. Tube blocks Processing tube 6.
  • Page 16: Pressure Sensor

    Page 14 of 32 Pressure sensor The system has total three pressure sensors. Two of them are located inside the gas delivery control box. The third one (Pressure sensor 2) is in the right flange which may need user to manually connect it to the power socket in the back panel of furnace. Double check this connection before operation.
  • Page 17: Thermocouple Feedthrough

    Page 15 of 32 Pressure Monitor communication port and MFC communication port Back view of the system Temperature controller communication port Front view of the system Thermocouple feedthrough A 1/8” thermocouple feedthrough is in the left flange. User may use it to calibrate the temperature periodically.
  • Page 18: Relief Valve

    Page 16 of 32 Relief valve The relief valve is in the left flange which prevents the processing tube away from damage due to overpressure. The limit is set to 20Mpa (200bar) by manufacturer. It is not allowed to modify or reassemble the relief valve without contacting manufacturer.
  • Page 19: Temperature Controller Instructions

    Page 17 of 32 Temperature Controller Instructions Specification  Compatible Thermocouple: B, S, K, C  Measurement Accuracy: 0.3;  Power Input: Single phase 220V AC (± 10%) / 50~60Hz;  Power: ≤5W;  30 Programmable Segments.  MET Certified Structure Setting the Temperature Controller Start Up State...
  • Page 20: Heating Profile Setting Example

    Page 18 of 32 Displaying Switch A. In the “normal state” or “program running state”, press “SET” key (Button 2) for 1 second to switch to “executing program segment” (Set executing segment or display the ongoing temperature segment). B. Press “SET” key (Button 2) again for 1 second to switch to “running time state” (Display the total running time PV xxxx min.
  • Page 21 Page 19 of 32 4. Press “Set” to display “t01” on PV window; 5. Set heat-up time (Usually beyond 30 minutes for this segment in case of temperature overshooting) from initial temperature to target temperature by using Keystrokes :“←”, “↑” or “↓” ; 6.
  • Page 22: Illustration Of Heating Profile Setting

    Page 20 of 32 Illustration of heating profile setting Setting Example: Temperature Control Program with 6-segments According to figure I above, all segments were recorded in the following chart: Prompt Input Data Description Initial Temperature Heat-up time 40 minutes from 0-200 C in the first segment Target temperature of the first heat-up stage Keep 20 minutes at 200...
  • Page 23: Running The Program

    Page 21 of 32 Running the program  When all the data is input into the temperature program, press both “Set” and “←” together, and “STOP” will show on SV window again as indication of entering “Normal State”. Then press “↓” and hold for two seconds to display “Run”...
  • Page 24: Temperature Controller Parameters

    Page 22 of 32 Temperature Controller Parameters Main Parameter Parameter Name Parameter Function Setting Range Maintain parameter 1-9999 Speed 1-9999 Delay time 1-2000 CtrL Control type 2,3 Parameter lock 0 or 808 Whenever you want to change the parameters referred below, please firstly change the value of parameter “Loc”...
  • Page 25: Parameter Setting

    Page 23 of 32 Control type CtrL: (Do follow the default setting, or the system may be unable to work) When CtrL=2, startup auto-tune function, after that, system will go to 3. When CtrL=3, adopts advanced AI adjustment. After auto-tune, the system goes to this setting mode.
  • Page 26: Auto - Tune

    In order to obtain precise temperature control, customers should pay more attention to the parameters of M5, P and t. Actually, MTI’s engineers have already made a strict high temperature pre-heating test (rate: 5℃/min) and fine-tuned on these three parameters according to each furnace’...
  • Page 27: Manual - Tune

    Page 25 of 32 Manual - Tune 1. Short oscillating period, you can decrease P (priority), increase M5 and t. 2. Long oscillating period, you can increase P (priority) as well as M5 and t. 3. No oscillating but offset is large, decrease M5 (priority), increase P. 4.
  • Page 28: Pressure Monitor Instructions

    The terminal 5, 6 and 7 in the back side of the pressure monitor are associated with the overpressure alarm function. MTI does not provide the cut-off valve or alarm siren with the system. User may connect own protection or alarm devices to the pressure monitor if necessary. Please contact...
  • Page 29: Mfc Controller

    Page 27 of 32 MFC controller Unit SLM Purge Mode Flow rate Auto Mode Unit: SCCM Increase Auto control Decrease Valve off Confirm The MFC controller can be either operated by PC software or manually operated by buttons in front panel. PC control method can be referred to the “PC software” chapter. Basic buttons: Set: Press to enter system menu Auto control: turn on the solenoid valve.
  • Page 30: Operation

    Page 28 of 32 Operation Before starting the operation please keep in mind the pressure limits of the system at different temperature. Strictly follow the pressure limitation chart while operating the furnace. 230 Bar max. at ≤800°C  138 Bar max. at ≤900°C ...
  • Page 31: Setting Up The Cooling System

    Page 29 of 32 7. Slightly adjust the GR2 to set the output gas pressure to 0.5Mpa in pressure monitor 3. Then the system starts to deliver the gas. Note: the output pressure must not be more than 0.8Mpa otherwise it will damage the MFC control module.
  • Page 32: Troubleshooting For Typical Problems

    SV, you may need to temperature below 200℃. increase OPL value a little. Troubleshooting resources  Visit MTI web site link: WWW.MTIXTL.COM for additional information about the instrument through Help and Support  Contact us by Tel:...