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OTF-1200X-50-4CLV-PE
PECVD Split Tube Furnace
With Four Channel Gas Delivery & Oil-less Vacuum System (Max.1200° C, 10E-3 torr)
OPERATION MANUAL
860 South 19
Street, Richmond, CA 94804, USA
th
TEL: (510) 525 – 3070 FAX: (510) 525 – 4705
Website:
www.mtixtl.com
Email:
info@mtixtl.com
OTF-1200X-80-II-4CV-PE-SL
MTI Corporation
www.mtixtl.com
|
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Summary of Contents for MTI OTF-1200X-50-4CLV-PE
- Page 1 OTF-1200X-50-4CLV-PE PECVD Split Tube Furnace With Four Channel Gas Delivery & Oil-less Vacuum System (Max.1200° C, 10E-3 torr) OPERATION MANUAL 860 South 19 Street, Richmond, CA 94804, USA TEL: (510) 525 – 3070 FAX: (510) 525 – 4705 Website: www.mtixtl.com Email: info@mtixtl.com...
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Page 2: Table Of Contents
ILLUSTRATION OF TEMPERATURE SEGMENT SETTING: 25 CHOOSING A STEP TO START: 26 RUNNING THE PROGRAM: 26 STOPPING THE PROGRAM: 26 TEMPERATURE CONTROLLER PARAMETERS ......................27 MAIN PARAMETERS: 27 FUNCTIONS OF MAIN PARAMETERS: 27-28 PARAMETER SETTING: 28 OTF-1200X-80-II-4CV-PE-SL MTI Corporation www.mtixtl.com... - Page 3 DEFAULT PARAMETERS IN CONTROLLER: 28-29 AUTO-TUNE: 29-30 TIPS FOR AUTOTUNE: 30 TROUBLESHOOTING: 30 MAINTENANCE AND CAUTIONS: 31 APPENDIX I FLOW RATE VS VACUUM LEVEL ......................31 VACUUM PRESSURE LEVEL VS PLASMA IONIZATION ..................32 APPENDIX II CONVERSION FACTOR .......................... 33 OTF-1200X-80-II-4CV-PE-SL MTI Corporation www.mtixtl.com...
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Page 4: Important Notes
Thank you for purchasing MTI’s products. This manual contains important operating and safety information. The user is responsible for carefully reading and understanding the contents of this manual prior to operating the equipment. MTI reserves the right to update or upgrade the product without informing customers of the data change(s) in this manual. Please frequently visit www.mtixtl.com... -
Page 5: Specifications
Quartz Tube: 50mm O.D x ID: 45mm x1050mm Length zone quartz tube Furnace Max. Temperature: 1200 º C furnace Constant Temperature Zone: 200mm Power: Max at 2.5 KW, 15A (23A Air Breaker is required) OTF-1200X-80-II-4CV-PE-SL MTI Corporation www.mtixtl.com... -
Page 6: Pe-Cvd Structure
1/4’’ Swagelok Gas Inlet KF-25 Right Angle Valve RF Power Control Panel 9. 1/4’’ Swagelok Gas Inlet 4 Mass Flow Controllers 10. Digital Pressure Gauge Pressure Gauge OTF-1200 Tube Furnace with Quartz Tube Mechanical Pump Power Switch(Pump inside) OTF-1200X-80-II-4CV-PE-SL MTI Corporation www.mtixtl.com... -
Page 7: System Installation
Attention : Please read carefully and follow the instructions below when replacing or installing a new tube. The tube can be easily damaged and MTI will not be responsible for any damage incurred from the user’s carelessness. FLANGE INSTALLATION The illustration below can be used as a reference for the flange assembly. The sequence in which the parts are installed is shown here. -
Page 8: Wiring
Two power cable connections needs to be carried out for the PE-CVD system: 1. Moveable table’s power will supply electricity for all the power consumable devices excluding furnace and vacuum gauge 2. Furnace power will supply electricity to the furnace and the vacuum gauge. OTF-1200X-80-II-4CV-PE-SL MTI Corporation www.mtixtl.com... -
Page 9: Quick Test
30 seconds. Press “ON” button on the RF Power Panel and the “RF OUT” indication light will be on. 1-4. 1-5. You shall find the plasma glowing in the plasma chamber: Plasma Glowing OTF-1200X-80-II-4CV-PE-SL MTI Corporation www.mtixtl.com... -
Page 10: Furnace Test
Output Indicator 1& 2: Both output indicators will blink when the furnace is being heated up. 2-1. Gently open the top cover and remove the shock absorption sponge (if included). 2-2. Turn the main power switch (lock) to the right to power on the temperature controller. OTF-1200X-80-II-4CV-PE-SL MTI Corporation www.mtixtl.com... - Page 11 SV window displays Stop). If controller is not at this state, press the “ ^ ” key to enter the starting state. MTI’s Engineer has set up a quick heating program for testing the furnace of the curve below. Please follow these steps in 2-3.
- Page 12 Do not let the furnace cool down naturally from a high temperature. A slow cooling rate of 5 ℃/min should be exercised to protect the tube from cracking. Please refer to the Temperature Controller for details on programming temperature profiles on various segments. OTF-1200X-80-II-4CV-PE-SL MTI Corporation www.mtixtl.com...
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Page 13: Mass Controller Meter Test
3. MASS CONTROLLER METER TEST 3-1. Connect N gas to each gas mixing channel and adjust the gas pressure to below 0.15Mpa: OTF-1200X-80-II-4CV-PE-SL MTI Corporation www.mtixtl.com... -
Page 14: System Operation Procedures
5. Close the valves on flange, and start RF power supply (please refer to PLASMA GENERATOR section) to produce plasma glow inside the chamber. OTF-1200X-80-II-4CV-PE-SL MTI Corporation www.mtixtl.com... -
Page 15: Device Operations In Pe-Cvd System
Whenever powering off the pump is needed, tighten the ball valve first and then power off the pump. Gas Mixing System Gas Route This system provides mixing of four gases as shown below: 4 Gas Input Port and 1 Gas Output Port Inside Routes OTF-1200X-80-II-4CV-PE-SL MTI Corporation www.mtixtl.com... -
Page 16: Mass Flow Controller
Connect the gas pipe (Stainless Steel or Plastic) as pictured below, to the gas inlet port: MFC (Mass Flow Controller) OTF-1200X-80-II-4CV-PE-SL MTI Corporation www.mtixtl.com... - Page 17 Take caution to prevent polluted gas, liquid, dust or oil from getting into the MFC at all times Use of a Gas filter is encouraged Change the sealant before charging it with strong corrosive gas OTF-1200X-80-II-4CV-PE-SL MTI Corporation www.mtixtl.com...
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Page 18: Troubleshooting
No display flowing 7.1 Sensor blocked rate when charging gas 7.2 Circuit broken charging gas 7.2 Check the circuit Zero point unstable or 8 Sensor broken 8 Change the sensor slow drift when no gas charging OTF-1200X-80-II-4CV-PE-SL MTI Corporation www.mtixtl.com... -
Page 19: Plasma Generator
Warning: Never open plasma chamber cover during operation, it may cause damage to human skin. Chamber RF Power Control Panel 2. RF Power Specification Frequency: 13.56MHz± 0.005% Power Output: 0~200W (You need spare coil if continue working for long time) Max. Reflection Power: 100W Power Fluctuation: ≤±5W Harmonic component: ≤-50dBc OTF-1200X-80-II-4CV-PE-SL MTI Corporation www.mtixtl.com... - Page 20 4-2. Auto indication under “MATCHING” will be on which means matching controller is in Auto Mode. 4-3. Press “RF Power ON” button and the “RF OUT” indication will be on which means the output works, please be noted that “→P”is forward power and “←P”is reflection power. OTF-1200X-80-II-4CV-PE-SL MTI Corporation www.mtixtl.com...
- Page 21 4-4. When “RF OUT” is on, the plasma chamber will glow due to plasma gas being activated. The power output adjustor can be turned clock-wise to increase the power output and vice versa to choose the proper the brightness of plasma glowing. Clockwise, increase the power Anti-clockwise, decrease the power OTF-1200X-80-II-4CV-PE-SL MTI Corporation www.mtixtl.com...
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Page 22: Auto Mode
4-7. Trouble Shooting 1. Please check if the fuse is broken if LCD panel has no display at all. The fuse is located next to the power plug as shown in the picture below: OTF-1200X-80-II-4CV-PE-SL MTI Corporation www.mtixtl.com... -
Page 23: Using The Temperature Controller
(Stop) Temperature Startup Turn on the furnace, the model and program modes will display for a few seconds and then enter into the Normal Mode. A blinking “STOP” indicates the program is in the Normal Mode. OTF-1200X-80-II-4CV-PE-SL MTI Corporation www.mtixtl.com... -
Page 24: Display Switching
Power on the furnace, a blinking “STOP” on the SV window indicates the normal mode. Press “←” once to display “C01” on PV window. C by using the “←”, “↑” or “↓” keys. Set initial temperature to 0 OTF-1200X-80-II-4CV-PE-SL MTI Corporation www.mtixtl.com... - Page 25 Press “Setting” to display “Cxx” on PV window (xx could be any values among 01~30). Press“←”, “↑” or “↓” to set “-121” in the last segment in order to shut down the furnace. OTF-1200X-80-II-4CV-PE-SL MTI Corporation www.mtixtl.com...
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Page 26: Illustration Of Temperature Segment Setting
Target temperature of the fifth cooling stage Cooling time 20 minutes from 800-200 Initial temperature of the sixth stage -121 Program ends and output power is turned off. Furnace cools down naturally. (t06 = -121 is an order to stop running) OTF-1200X-80-II-4CV-PE-SL MTI Corporation www.mtixtl.com... -
Page 27: Choosing A Step To Start
It is not suggested for users who are not familiar with the furnace operation to modify any parameters during a program execution. If it is absolutely, the program should be stopped first before making any modifications. OTF-1200X-80-II-4CV-PE-SL MTI Corporation www.mtixtl.com... -
Page 28: Temperature Controller Parameters
When M5=0, the system will cancel integral and intelligent adjustment, leaving only the proportion and differential (PD) function. Speed parameter P: Parameter p has nothing to do with integral function. The bigger the p is, the stronger the proportion and differential function are and vice versa. OTF-1200X-80-II-4CV-PE-SL MTI Corporation www.mtixtl.com... -
Page 29: Parameter Setting
Limit output current below 0 Initial Temp limit LOAL 999.9 Alarm in positive dHAL tolerance dLAC 999.9 Alarm in negative tolerance Adjustment difference The smaller dF, the higher accuracy auto-tune Control type CtrL Reflect controller’s adjustment Speed Output Period OTF-1200X-80-II-4CV-PE-SL MTI Corporation www.mtixtl.com... -
Page 30: Auto-Tune
Auto-Tune In order to get a precise temperature control, users should pay more attention to the parameters of M5, P and t. Actually, MTI’s engineers have already made a strict high temperature pre-heating test (rate: 5℃/min) and fixed on these three parameters according to each furnace’... -
Page 31: Tips For Autotune
If the PV value at 300 ℃ is still less and does not match with setting sensitive at temperature below 300 program (SV) than that of SV, the OPL value may need to ℃ be increased a little. OTF-1200X-80-II-4CV-PE-SL MTI Corporation www.mtixtl.com... -
Page 32: Maintenance And Cautions
MTI Corporation provides one year limited warranty from date the product is shipped out. If you find any defective part, please feel free to contact us for replacement during the warranty period. However, MTI Corp is not responsible for any damage or consequential damage caused by misuse. -
Page 33: Vacuum Pressure Level Vs Plasma Ionization
Mean Free Path of particles will be and hence a longer plasma length can be achieved. Selected RF Power Setting for Different Vacuum Pressures Plasma Length at Vacuum Pressure of 4.08 Torr −3 Plasma Length at Vacuum Pressure of 129x Torr OTF-1200X-80-II-4CV-PE-SL MTI Corporation www.mtixtl.com... -
Page 34: Appendix Ii Conversion Factor
APPENDIX II CONVERSION FACTOR OTF-1200X-80-II-4CV-PE-SL MTI Corporation www.mtixtl.com... - Page 35 Please call or email MTI, assistance will be provided within 48 hours. OTF-1200X-80-II-4CV-PE-SL MTI Corporation www.mtixtl.com...
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