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MTI OTF-1200X-80-II-4CV-PE-SL Operation Manual

Slidable pe-cvd split dual zone tube furnace
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OTF-1200X-80-II-4CV-PE-SL
OTF-1200X-80-II-4CV-PE-SL
SLIDABLE PE-CVD SPLIT DUAL ZONE TUBE FURNACE
With Four Channel Gas Delivery & Oil-less Vacuum System (80mm OD)
OPERATION MANUAL
860 South 19
Street, Richmond, CA 94804, USA
th
TEL: (510) 525 – 3070 FAX: (510) 525 – 4705
Website:
www.mtixtl.com
Email:
info@mtixtl.com
MTI Corporation
www.mtixtl.com
|

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Summary of Contents for MTI OTF-1200X-80-II-4CV-PE-SL

  • Page 1 OTF-1200X-80-II-4CV-PE-SL OTF-1200X-80-II-4CV-PE-SL SLIDABLE PE-CVD SPLIT DUAL ZONE TUBE FURNACE With Four Channel Gas Delivery & Oil-less Vacuum System (80mm OD) OPERATION MANUAL 860 South 19 Street, Richmond, CA 94804, USA TEL: (510) 525 – 3070 FAX: (510) 525 – 4705 Website: www.mtixtl.com...

  • Page 2: Table Of Contents

    OTF-1200X-80-II-4CV-PE-SL TABLE OF CONTENTS IMPORTANT NOTES ................................4 WARNINGS ..................................4 INTRODUCTION ................................. 5 SPECIFICATIONS ................................5-6 PE-CVD STRUCTURE ................................. 7 SYSTEM INSTALLATION ..............................8 TUBE INSTALLATION: 8-11 FLANGE INSTALLATION SEQUENCE: 11-12 BELLOW TUBE & VACUUM INSTALLATION 12 WIRING: 13 QUICK TEST ..................................
  • Page 3 OTF-1200X-80-II-4CV-PE-SL DEFAULT PARAMETERS IN CONTROLLER: 34-35 AUTO-TUNE: 35-36 TIPS FOR AUTOTUNE: 36 TROUBLESHOOTING: 36 MAINTENANCE AND CAUTIONS: 37 APPENDIX I FLOW RATE VS VACUUM LEVEL ......................37 VACUUM PRESSURE LEVEL VS PLASMA IONIZATION ..................38 APPENDIX II CONVERSION FACTOR ........................39-40 MTI Corporation www.mtixtl.com...

  • Page 4: Important Notes

    Thank you for purchasing MTI’s products. This manual contains important operating and safety information. The user is responsible for carefully reading and understanding the contents of this manual prior to operating the equipment. MTI reserves the right to update or upgrade the product without informing customers of the data change(s) in this manual. Please frequently visit www.mtixtl.com...

  • Page 5: Introduction

    INTRODUCTION The OTF-1200X-80-II-4CV-PE-SL is a PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system, which consists of 500W RF plasma source, 2" split tube furnace, 4 channels precision mass flow meter with gas mixing tank, and a high quality oil- less vacuum pump.
  • Page 6 OTF-1200X-80-II-4CV-PE-SL  Working Voltage: 185~245V/50Hz  Max. Output Power: 18W  Controlling Range: Controller 1: 0.1~100 SCCM Controller 2: 1~200 SCCM Mass Flow Controller Controller 3: 1~200 SCCM Controller 4: 1~500 SCCM Gas Mixing  Working Temperature: 5 ~ 45 ºC System ...

  • Page 7: Pe-Cvd Structure

    OTF-1200X-80-II-4CV-PE-SL PE-CVD STRUCTURE Plasma Chamber Mechanical Pressure Gauge for Input Digital Display Vacuum Gauge and Output Gas 1/4’’ Swagelok Gas Inlet Mechanical Pump Inside Needle Valve Mechanical Pump Power Switch 4 Gas Inlets and 1 Mixed Gas Outlet KF25 Bellow Tube for Vacuuming ( all to ¼”...

  • Page 8: System Installation

    Attention: Please read carefully and follow the instructions below when replacing or installing a new tube. The tube can be easily damaged and MTI will not be responsible for any damage incurred from the user’s carelessness. TUBE INSTALLATION 1. Insert the quartz tube into the opening of the flange rack. The tube should be inserted from right side of the furnace.
  • Page 9 OTF-1200X-80-II-4CV-PE-SL 3. Carefully align and pass the tube through the coils in the plasma chamber until its end is barely sticking out on the left side. 4. Install the O-ring, pressing ring and another O-ring on the right side of the tube in that exact order. A 4mm hex key is used here to properly align the O-ring on the tube.
  • Page 10 OTF-1200X-80-II-4CV-PE-SL 5. Once the ring installation is finished, install the flange on the right side and tighten all the screws evenly using a hex key. 6. Put the right angle valve (ball valve) on the end of the flange and seal the joint using a KF25 valve.

  • Page 11: Flange Installation Sequence

    OTF-1200X-80-II-4CV-PE-SL 8. Seal the left flange and tighten all screws evenly. 9. Connect the gas tube onto the Swagelok gas inlet. FLANGE INSTALLATION SEQUENCE The illustration below can be used as a reference for the flange assembly. The sequence in which the parts are installed is shown here.

  • Page 12: Bellow Tube & Vacuum Installation

    OTF-1200X-80-II-4CV-PE-SL NOTE: Vacuum requires strict cleanliness, please wipe the interiors of tube and flange joint with Dehydrated Alcohol prior to installation. BELLOW TUBE & VACUUM INSTALLATION The picture below shows the connection of the bellow tube to the right angle valve using aKF25 valve: Another KF 25 valve is used to connect the vacuum pump to the other end of the bellow tube.

  • Page 13: Wiring

    OTF-1200X-80-II-4CV-PE-SL WIRING should perform the power connection based the user’s local compliance code for the equipment. Power supply licensed electrician requirement: 208-240VAC, single phase, 50/60Hz, 35A Air-breaker. Two power cable connections needs to be carried out for the PE-CVD system: 1.
  • Page 14 OTF-1200X-80-II-4CV-PE-SL 1-2. Keep vacuum pressure of the tube at 30 mTorr~6 Torr (1 Torr suggested) by adjusting the ball valve (right angle), connect the plasma generator and chamber by the cable (Please refer to later chapter for detail). 1-3. Switch Power to...

  • Page 15: Furnace Test

    OTF-1200X-80-II-4CV-PE-SL 2. FURNACE TEST Controller 1& 2: Used to set up the heating sequence (heating procedures) and modify the parameters. Turn on: Turns on the relay and allow controller work with heating elements Turn off: Turns off the relay and stop communication between controller and heating element Main power switch: Controls the power supply.
  • Page 16 OTF-1200X-80-II-4CV-PE-SL MTI’s Engineer has set up a quick heating program for testing the furnace of the curve below. Please follow these steps in 2-3. order to run the test program: Prompt Input Data Description C 01 Initial Temperature 40 minutes from C01 to C02, heating rate 5 ℃/min...

  • Page 17: Mass Controller Meter Test

    OTF-1200X-80-II-4CV-PE-SL Press green “Turn-on” button. 2-3-1. Press down on “ ” and hold for 2 seconds until “run” is displayed to start running the program. 2-3-2. 2-3-3. Let the entire program finish and check whether it is working or not. Contact us if the program did not run properly.

  • Page 18: System Operation Procedures

    OTF-1200X-80-II-4CV-PE-SL 3-1. Connect N gas to each gas mixing channel and adjust the gas pressure to below 0.15Mpa: 3-2. Switch on the power switch on the gas control panel; all MFC digital LEDs will be on. 3-3. Push the stick switch to “PURGE” position and the MFC will show Max. gas flow rate.

  • Page 19: Operating Sequence

    OTF-1200X-80-II-4CV-PE-SL WARNING: Never place the instrument too close to the side wall or the object obstructs the air vents. Keep the instrument at least 1 meter in distance from the side wall. Operating Sequence 1. Power connection 2. Loading the materials 3.

  • Page 20: Gas Mixing System

    OTF-1200X-80-II-4CV-PE-SL 2. Open the ball valve and turn on the mechanical pump by pressing down the switch on the front panel. 3. Tighten the ball valve when the target vacuum pressure is reached (read from vacuum gauge) and then power off the pump or adjust ball valve to limit tube pressure and gas flow rate at a desired value.

  • Page 21: Mass Flow Controller

    OTF-1200X-80-II-4CV-PE-SL MFC (Mass Flow Controller) 1. Operation 1-1. Gas Purging  Choose a channel, setup the pipe connection and open the related valve below inlet port.  Switch the option to “Vent” and Power on the MFC.  Wait for 15 minutes to warm up the device and then open the gas supply for purging the tube.

  • Page 22: Troubleshooting

    OTF-1200X-80-II-4CV-PE-SL 2. Calibration Use a horological screwdriver to adjust zero point calibration screw to calibrate the MFC when there is no airflow.  Do not charge gas when calibrating.  Do the calibration after 15 minutes for warming up the MFC.

  • Page 23: Plasma Generator

    OTF-1200X-80-II-4CV-PE-SL 5.1 Power supply 5.1 Adjust the power unstable supply Gas flowing unstable 5.2 Circuit or valve 5.2 Check the circuit or change the valve broken 6.1 Change valve Flowing rate retains 6.1 Valve leaks 6.2 Calibrate zero point to when it is set to zero 6.2 Zero point to minus...
  • Page 24 OTF-1200X-80-II-4CV-PE-SL Chamber RF Power Control Panel 2. RF Power Specification Frequency: 13.56MHz±0.005% Power Output: 0~200W (You need spare coil if continue working for long time) Max. Reflection Power: 100W Power Fluctuation: ≤±5W Harmonic component: ≤-50dBc Power Switch Load Capacitance Increase Display 10.
  • Page 25 OTF-1200X-80-II-4CV-PE-SL 3. Connect the chamber and base with the cable 4. Operation 4-1. Turn Power Switch to “ON” and the display will enter into the working interface after 2 seconds. 4-2. Press Menu, use Up or Down button to move to Match Sel option and select “Has match” by pressing the Enter key and then press the Exit key.
  • Page 26 OTF-1200X-80-II-4CV-PE-SL 4-3. After the above setting is done, press “ON” button to generate the plasma; the indicator light will turn green. RF OUT turns green when plasma ionization begins to take place 4-4. When “RF OUT” is on, the plasma chamber will glow due to the plasma being activated. The power output adjustment knob can be turned clock-wise to increase the power output and vice versa to choose the desired plasma output.

  • Page 27: Auto Mode

    OTF-1200X-80-II-4CV-PE-SL In the manual mode, press Auto/Manual button to switch to manual mode, then use T+, T-, T+, T- buttons to adjust the tuned capacity and load capacity until you get the matching point. Auto Mode Manual Mode 4-5. Please adjust the RF power output to 0 or switch power off before changing the air flow, pressure or other parameter in the plasma chamber.

  • Page 28: Using The Temperature Controller

    OTF-1200X-80-II-4CV-PE-SL 2. If “C0” flashes on LCD display, please check the cable connection. 3. “E1” flashing means the reflection power is over 200W; please rematch the device. “E2” flashing means the device is over 70 ºC please check the vent part and lower the temperature.

  • Page 29: Display Switching

    OTF-1200X-80-II-4CV-PE-SL Model & Program Mode Normal Mode Display Switching a. In “Normal Mode”, press the “Setting” button for 1 second to switch to execute a program segment (set executing segment or display the ongoing temperature segment). b. Press the “Setting” button again for 1second to switch to “Running Time Mode” (Display the total running time PV xxxx min.
  • Page 30 OTF-1200X-80-II-4CV-PE-SL  Press “Setting” to display “t01” on PV window.  Set heat-up time (usually beyond 30 minutes for this segment in case of temperature overshooting) from initial temperature to target temperature by using the “←”, “↑” or “↓” keys.

  • Page 31: Illustration Of Temperature Segment Setting

    OTF-1200X-80-II-4CV-PE-SL Illustration of Temperature Segment Setting Setting Example: Temperature Control Program with 6-segments C01 C02 C04 C05 800°C 200°C 0°C Prompt Input Data Description Initial Temperature Heat-up time 40 minutes from 0-200 C in the first segment Target temperature of the first heat-up stage...

  • Page 32: Choosing A Step To Start

    OTF-1200X-80-II-4CV-PE-SL Choosing a Step to Start The user can choose any step to start from after setting temperature segments. W hen controller is in “Normal Node” (the SV blinks with “STOP”), press the “setting” button and hold for 1 second to choose the number of step to start.

  • Page 33: Temperature Controller Parameters

    OTF-1200X-80-II-4CV-PE-SL Temperature Controller Parameters Main Parameters Parameter Name Parameter Function Setting Range Unit Maintain parameter 1－9999 °C or definable unit Speed 1－9999 Delay time 1－2000 Seconds CtrL Control type 2，3 Parameter lock 0 or 808 Note: Whenever the user wants to change the referred parameters, please change the value of parameter from “Loc” to “808” first in order to unlock the parameter settings.

  • Page 34: Parameter Setting

    OTF-1200X-80-II-4CV-PE-SL Delay time t: It is defined as the time spent when the heating rate reaches to 63.5% of the maximum value with assumption that there is no heat dissipation. Remember, this parameter affects the three functions such as integral, proportion and differential, the smaller t is, the stronger proportion and integral function are but with a weaker differential.

  • Page 35: Auto-Tune

    Auto-Tune In order to get a precise temperature control, users should pay more attention to the parameters of M5, P and t. Actually, MTI’s engineers have already made a strict high temperature pre-heating test (rate: 5℃/min) and fixed on these three parameters according to each furnace’...

  • Page 36: Tips For Autotune

    OTF-1200X-80-II-4CV-PE-SL  The meter will flash with “AT” to indicate the meter is in the “auto-tune state”. The system then begins to oscillate 2-3 times and the meter automatically analyzes the furnace’s temperature controlling period, amplitude, wave type and coefficient of heat preservation at current temperature segment.

  • Page 37: Maintenance And Cautions

    MTI Corporation provides one year limited warranty from date the product is shipped out. If you find any defective part, please feel free to contact us for replacement during the warranty period. However, MTI Corp is not responsible for any damage or consequential damage caused by misuse.

  • Page 38: Vacuum Pressure Level Vs Plasma Ionization

    OTF-1200X-80-II-4CV-PE-SL VACUUM PRESSURE LEVEL VS PLASMA IONIZATION The following pictures illustrate the effect of vacuum pressure has on the ionization of the plasma. The settings on the RF Power control remained the same for the entire test; only the vacuum level was varied. The test was performed by activating the plasma at a low vacuum pressure and then increased the pressure to a high level.

  • Page 39: Appendix Ii Conversion Factor

    OTF-1200X-80-II-4CV-PE-SL APPENDIX II CONVERSION FACTOR MTI Corporation www.mtixtl.com...
  • Page 40 OTF-1200X-80-II-4CV-PE-SL Please call or email MTI, assistance will be provided within 48 hours. MTI Corporation www.mtixtl.com...