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Summary of Contents for MTI OTF-1200X-III-D5-4
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Page 1: Dual Tubes (5"/4") & Three Zones Cvd Furnace ( 5"+ 4" Upto 1200° C )
OTF-1200X-III-D5-4 OTF-1200X-III-D5-4 Dual Tubes (5"/4") & Three Zones CVD Furnace ( 5"+ 4" upto 1200° C ) Operation manual 860 South 19 Street, Richmond, CA 94804, USA TEL: (510)525-3070 FAX: (510)525-4705 Web site: www.mtixtl.com Email: info@mtixtl.com MTI Corporation www.mtixtl.com... -
Page 2: Table Of Contents
OTF-1200X-III-D5-4 Contents Dual Tubes (5"/4") & Three Zones CVD Furnace ( 5"+ 4" upto 1200° C ) ................1 Safety Notes .....................................3 Warnings ......................................3 Introduction ......................................4 Description ....................................4 Intended Use .....................................4 Principle of Operation ................................4 General Specifications ..................................5 Unpacking ......................................5 Structure ......................................6 Installation ......................................6... -
Page 3: Safety Notes
OTF-1200X-III-D5-4 Safety Notes Important Information This manual contains important operating and safety information. You must carefully read and understand the contents of this manual prior to operation of the equipment. Warnings To avoid electrical shock, this furnace must: 1. Use a properly grounded electrical outlet of correct voltage and current handling capacity. -
Page 4: Introduction
Intended Use The OTF-1200X-III-D5-4 tube furnace is using a high quality fused quartz tube and Fe-Cr-Al heating element to fulfill the general purpose of high temperature heating treatment. For optimum heating element life, please follow the temperature rule below: RT~1100°... -
Page 5: General Specifications
OTF-1200X-III-D5-4 General Specifications Furnace structure Three heating zones: (900mm, 36" in total) Zone 1: 229mm (9") Zone 2: 457mm (18.0") Zone 3: 229 mm (9") Max. 25" (625 mm) long with +/- 1° C accuracy if set three zones at the same temperature. -
Page 6: Structure
OTF-1200X-III-D5-4 Structure DIGITAL VACUUM GAUGE LEFT FLANGE PUMP CONNECTOR Temperature Controller Installation Site Selection 1. Place the vacuum and gas mix/delivery stations side by side on a sturdy surface. 2. Lock the wheels of the vacuum and gas mix/delivery stations. (Press down the pedal on the wheel) 3. -
Page 7: Tube Installation
OTF-1200X-III-D5-4 Euro standard Ground Live wire (L1) Live wire (L2) US standard Ground Live wire (L1) Live wire (L2) The plug does not come with the furnace. Please order it at our website: http://www.mtixtl.com/fuses.aspx. Tube Installation 1. Insert the 130 mm O.D quart tube into the inner flange which is installed on the flange rack. (In the figure 1, we insert the tube from the right side. - Page 8 OTF-1200X-III-D5-4 2. Continue moving the tube passing over the furnace chamber. Try to avoid the tube from scratching the furnace chamber. 3. When the tube is approaching the right inner flange align the tube towards the flange and insert the tube into the inner flange.
- Page 9 OTF-1200X-III-D5-4 MTI Corporation www.mtixtl.com...
- Page 10 OTF-1200X-III-D5-4 5. Put the O-ring, pressing ring and another O-ring in sequence on the right flange. 6. Put the O-ring, pressing ring and another O-ring on the left flange. 7. If the edge of tube is not parallel with the flange, loosen these three bolts in flange rack, adjust the direction then tighten them on both sides of the furnace.
- Page 11 OTF-1200X-III-D5-4 8. Before you install the inner tube. Put the mullite heel block between two tubes close to the flange. This heel block will tile the 100mm O.D a little and help the 130mm O.D tube to stay parallel with the 130mm O.D tube in order to simplify the further installation and operation.
- Page 12 OTF-1200X-III-D5-4 9. Install 5”-4” flange on the left side of the furnace. 10. Insert the 101mm O.D quartz tube into the 130mm O.D quartz tube. The quartz tube is fragile please handle with care. 11. Install the right flange cap.
- Page 13 OTF-1200X-III-D5-4 Attention Please read carefully and follow the instructions below when you try to REMOVE THE RIGHT FLANGE from the tube. Otherwise, the inner tube can be easily damaged by the flange cap. Use an Allen Hex-wrench and position it as the picture showed below.
- Page 14 OTF-1200X-III-D5-4 13. Then install the outer flange on the left. 14. Then press outer flange O-ring and pressing ring. 15. Finally install the left flange cap Installation finished. We attached a installation video with the product. We recommend our customers watching the video prior to the first time installation.
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Page 15: Operation
OTF-1200X-III-D5-4 Operation Operating environment 1. Place the furnace on a dry, hard and flat surface; 2. The furnace is for indoor use with nice ventilation and avoided direct sunlight; 3. Operating temperature: 50° C ～350° C; 4. Relative humidity (no condensing): 10%～85%;... -
Page 16: 518P Temperature Controller
OTF-1200X-III-D5-4 518P Temperature Controller 1. Specification a. Compatible Thermocouple: K、S、R、E、J、T、N; b. Measurement Accuracy: 0.3; c. Power Input: Single phase 220V AC (± 10%) / 50~60Hz; d. Power: ≤5W; f. 30 Programmable Segments. 2. Structure Present value Setting value (Target value) -
Page 17: Displaying Switch
OTF-1200X-III-D5-4 Displaying switch a. In the “normal state” or “program running state”, press “SET” key for 1 second to switch to “executing program segment” (Set executing segment or display the ongoing temperature segment). b. Press “SET” key again for 1second to switch to “running time state” (Display the total running time PV xxxx min. - Page 18 OTF-1200X-III-D5-4 initial temperature to target temperature by using Keystrokes :“←”, “↑” or “↓”; Press “Set” to display “C02” on PV window; Set the actual working temperature for the second segment by using Keystrokes :“←”, “↑” or “↓”; Press “Set” to display “t02” on PV window; Set heat-up time from initial temperature to target temperature by using Keystrokes :“←”, “↑”...
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Page 19: Illustration Of Temperature Segment Setting
OTF-1200X-III-D5-4 Illustration of Temperature Segment Setting Setting Example: Temperature Control Program with 6-segments C01 C02 C04 C05 800° C 200° C 0° C Prompt Input Data Description Initial Temperature Heat-up time 40 minutes from 0-200 C in the first segment... -
Page 20: Choose A Step To Start
OTF-1200X-III-D5-4 Choose a step to start You can choose any steps you want to start after setting temperature segments. W hen controller is in “normal state” (the SV blinks with “stop”), press “Set” key and hold for 1 second to choose the number of But usually you shall run program from “step 1”... -
Page 21: Temperature Controller Parameters
OTF-1200X-III-D5-4 Temperature Controller Parameters Introduction of Main Parameters Parameter Name Parameter Function Setting Range Unit Maintain parameter 1－9999 ° C or definable unit Speed 1－9999 Delay time 1－2000 second CtrL Control type 2，3 Parameter lock 0 or 808 Note: Whenever you want to change the parameters that referred below, please firstly change the value of parameter “Loc”... -
Page 22: Parameter Setting
OTF-1200X-III-D5-4 Control type CtrL: (Do follow the default setting, or the system may be unable to work) When CtrL=2, startup auto-tune function, after that, system will go to 3. When CtrL=3, adopts advanced AI adjustment, after auto-tune, the system goes to this setting mode, note that in this mode, you can not startup auto-tune function from the panel by holding button, for a protection of repeating auto-tune. - Page 23 OTF-1200X-III-D5-4 1 is output from 1 to 10 mA Output type Output lower limit Output upper limit Alarm output definition System function selection “6” means limit output current at global range Addr Communication address bAud 9600 Baud Rate The larger value of dL, the more stable...
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Page 24: Auto-Tune
In order to get a precise temperature control, customer should pay more attention to the parameters of M5, P and t. Actually, MTI‟s engineers have already made a strict high temperature pre-heating test (rate: 5℃/min) and fixed on these three parameters according to each furnace‟ condition before shipping it out. Therefore, we have a confidence of satisfying over 95% customers. -
Page 25: Troubleshooting
OTF-1200X-III-D5-4 Troubleshooting Problems Reason Solution Open Power Lock, no power Fuse (4A) in control panel is Check control panel, and replace fuse indication broken Green Power indictor is off, but Fuse ( 32A) in main power Open furnace front panel and replace... -
Page 26: Maintenance And Cautions
MTI Corporation provides one year limited warranty from date when we shipped out the product. If you find any defective part, please feel free to contact us for replacement during warranty period. -
Page 27: Knowledge On Ac Power Connection
Knowledge on AC Power Connection For power connection, you must follow your local law and let a licensed electrician do it. MTI Corporation is not responsible for any damage caused by wrong power connection. Extra power connection knowledge is not only for you to get a better application of the product, but also for your safety. - Page 28 OTF-1200X-III-D5-4 Phase 2 Phase 1 Phase 0 Ground Wire (Live Wire) (Live Wire) (Neutral Wire) 240 AC from 110 AC from one Power Breaker two live wires neutral and one live wire Caution: Unbalanced three-phase circuits are indicated by abnormally high currents in one or more of the phases.
- Page 29 OTF-1200X-III-D5-4 If you find the current is abnormally high. And also there is no problem with the: 1. Power supply (AC 220V single phase/ 50Hz or AC 220V single phase/ 60Hz) 2. Parameters in the furnace 3. Temperature profile/heating procedure You can: 1.
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