Table of Contents
Advertisement
Quick Links
Advertisement
Table of Contents
Subscribe to Our Youtube Channel
Related Manuals for MTI OTF-1200X-S-FB
Summary of Contents for MTI OTF-1200X-S-FB
- Page 1 Fluidized Bed Vertical Tube Furnace with 1'' O.D Quartz Tube and Flange for Powder CVD - OTF-1200X-S-FB Operational Manual MTI Corporation 860 South 19 Street, Richmond, CA 94804, USA Tel: 510-525-3070 Fax: 510-525-4705 E-mail: info@mtixtl.com Web site: www.mtixtl.com...
-
Page 2: Table Of Contents
Content Introduction ....................4 Technical Specifications ................4 Furnace Structure ..................4 Operating environment ................4 Instrument features .................. 5 Operation ...................... 7 Tube and flange installations ..............7 How to load the powder ................9 How to introduce the gas ................. 9 General Operation.................. - Page 3 Thank you for purchasing MTI’s products, please read this manual before using the furnace, MTI has no responsibility for any damage caused by customer’s misuse. Notice: The specification data may be different from the data on our website because we keep upgrading the products, if any confusion, please visit MTI’s website at...
-
Page 4: Introduction
Introduction OTF-1200X-S-FB is a Fluidized Bed Vertical Furnace with 1'' O.D Quartz Tube (2'' O.D enlarged central area) for powder CVD applications. It consists a vertical-positioned cylindrical heating chamber which surrounds the quartz tube with a built-in filter right in the lower middle section of the central heating zone. -
Page 5: Instrument Features
1 meter in distance from the side wall. Instrument features OTF-1200X-S-FB is a Fluidized Bed Verticel Furnace with 1'' O.D Quartz Tube (2'' O.D enlarged central area) for powder CVD applications. It consists a vertical positioned cylindrical heating chamber which surrounds the quartz tube with a built-in filter right in the lower middle section of the central heating zone. - Page 6 1200W Power Voltage AC 110V or 220V Single Phase, 50/60 Hz Max. Temperature 1100 Continuous 1000 Temperature Max. Heating Rate <= 20 C /min Tube Size and One quartz tube is included. Main tube with bottom frit and Materials enlarged space for particles processing ...
-
Page 7: Operation
Dimensions 340mm×300mm×1000mm ( W x L x H) Net Weight ~20 Kg (excluding mobile cart) Shipping Weight 200 lbs Warranty One year limited warranty (Consumable parts such as heating elements, processing tubes and o-rings are not covered by the warranty, please order the replacement at related products below.) ... - Page 8 Slide the refractory collar (tube adapter) onto the other side of the tube, please pay attention to its direction, smaller diameter section of the collar should face inward. Slide the inner flange (top flange set) - silicon ring - metal compressing ring - silicon ring and outer flange (top flange set) onto the tube, and then close the inner and outer flange by tightening the three hex screws.
-
Page 9: How To Load The Powder
Now you can try to close the lid, please do not force it if the chamber can't be fully closed. Please try to re-adjust the tube's position before you close the lid again. How to load the powder You may use a funnel to easily load the powder into the tube as shown in the picture below. ... -
Page 10: General Operation
To reduce potential safety issues, do not place flammable and explosive materials around the instrument; No explosion-proof, do not put any flammable and explosive materials into the chamber. Temperature Controller Instruction MTI provide two kinds of temperature controller with same function:... -
Page 11: Temperature Controller Setting
Here, we will introduce the left one: Increase button (END) Furnace Temp. (PV) Decrease button (RUN/PE) Function Program setting/Left Indicating Shift/Auto-tune Light (AT/PROTA/M) Setting Temp. Parameter setting/Start the Program, (SV) view the time running (SET PAR) Temperature Controller Setting Startup state When start the device, the meter type and program version will display for a few seconds, and then enter the normal state. -
Page 12: Temperature Segment Setting
Temperature Segment Setting LTDE programmable smart instrumentation auto-controller allows you to set the temperature profile up to 30 segments. To process this function, follow these steps: Power on the furnace, blinking “End” on the SV window indicates the Normal State; ... -
Page 13: Illustration Of Temperature Segment Setting
for “C04”; By pressing “Set”, into following segments (C05&t05…C06&t06…C07&t07…) for temperature and time setting; Press “Set” to display “Cxx” on PV window (xx could be any values among 01~30); Press“←”, “↑” or “↓” to set “-121” in the last segment in order to shut down the furnace; Illustration of Temperature Segment Setting Setting Example: According to figure I above, all segments was recorded in the following:... -
Page 14: Run The Program
1000 Target temperature of the fourth heat-up stage Keep 25 minutes at 1000 1000 Constant temperature of the fourth stage Cooling time 20 minutes from 1000 to 800 Target temperature of the fifth heat-up stage Keep 25 minutes at 800 Constant temperature of the sixth stage -121 Program end, Out-put power off. -
Page 15: Parameter Function
auto-tune determining Cont Control type setting 3，2 Ploc Lock the setting 1008 to unlock Parameter Function Int (Integral effect) Int is related to the system sustainment, take temperature for example, the larger, the more stable the system is. Like integral time of PID calibration, this parameter is mainly in charge of the integral work during the adjustment process, for instance, the smaller the Int is set, the stronger the system integral effect is, vice versa. -
Page 16: Parameter Setting
Also, this parameter determines result of auto-tune: if it is revised after auto-auto, the auto-tune fails, please revise the value manually and restart auto-tune. Cont (Controlling type) When Cont=2, system starts auto-tune function to work out the value for Int, Pro and Lt, and then system will go to 3.When CtrL=3, adopts advanced AI adjustment, after auto-tune, the system goes to this setting mode, note that you can not startup auto-tune function from the controller panel, for a protection of repeating auto-tune, when you need a re-auto-tune, please set it as 2. -
Page 17: Troubleshooting For Typical Problems
Notice: MTI never suggest you put any noxious, explosive or flammable gas into the tube. Please remember that the inside air pressure ≤ 0.05 Mpa and over pressure use is forbidden when applying quartz tube or corundum tube at high temperature>... - Page 18 Thermocouple may be failure, check and replace the thermocouple; Temperature controller may be broken, check and replace the thermocouple; Real temperature inside the chamber does not match the setting value Temperature sensor may be broken, replace the temperature sensor/thermocouple; Overheated protection alarm ...
Need help?
Do you have a question about the OTF-1200X-S-FB and is the answer not in the manual?
Questions and answers