MTI OTF-1200X-RTP-II-5 Operation Manual

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OTF-1200X-RTP-II-5

DUAL ZONE FURNACE FOR CSS

Thermal Evaporation Processing Up to 5" Dia. Samples at 800°C

OPERATION MANUAL

860 South 19

Street, Richmond, CA 94804, USA

TEL: (510) 525 – 3070 FAX: (510) 525 – 4705

Website:

www.mtixtl.com

Email:

info@mtixtl.com

MTI Corporation

www.mtixtl.com

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Page 1 OTF-1200X-RTP-II-5 OTF-1200X-RTP-II-5 DUAL ZONE FURNACE FOR CSS Thermal Evaporation Processing Up to 5” Dia. Samples at 800°C OPERATION MANUAL 860 South 19 Street, Richmond, CA 94804, USA TEL: (510) 525 – 3070 FAX: (510) 525 – 4705 Website: www.mtixtl.com Email: info@mtixtl.com...
Page 2: Table Of Contents
OTF-1200X-RTP-II-5 TABLE OF CONTENTS IMPORTANT NOTES ................................3 GENERAL WARNINGS ............................... 3 WARRANTY ..................................3 EQUIPMENT INFORMATION ............................4 INTRODUCTION: 4 SPECIFICATIONS: 4 - 5 FURNACE STRUCTURE: 5 ASSEMBLY & OPERATION INSTRUCTIONS ........................6 EQUIPMENT INSPECTION: 6 OPERATING ENVIRONMENT: 6 WATER COOLING SETUP: 6 –...
Page 3: Important Notes
The prospective user is responsible for carefully reading and understanding the contents of this manual prior to operating the equipment. MTI reserves the right to update or upgrade the product without informing customers of the data change(s) in this manual. Please visit www.mtixtl.com frequently for the latest information and manual.
Page 4: Equipment Information
SEQUIPMENT INFORMATION INTRODUCTION OTF-1200X-RTP-II-5 is a rapid thermal processing furnace with 11" I.D. quartz tube. It is designed for Thermal Evaporating or CSS (Close Spaced Sublimation) film coating circular samples up to 5" Dia. at 800°C. The furnace is heated by two groups of halogen heaters (Top and Bottom) separately with max.
Page 5: Furnace Structure
OTF-1200X-RTP-II-5  Heating: > 8ºC/s ( heating single heater only ) Heating & Cooling Rate  Cooling: > 10ºC/s (600 - 100ºC) Max. Thermocouple Two K-type thermal couples are installed on top and bottom heaters separately Input Voltage 208 - 240VAC, SINGLE PHASE, 50/60Hz Power 3KW;...
Page 6: Assembly & Operation Instructions
Transport of the system should be in an upright position at all times until it is moved to the right place. CAUTION: Do not dispose any of the packing materials or boxes. MTI will not provide extra packing materials in the case of future “return for repair”...
Page 7 OTF-1200X-RTP-II-5 Adaptor for Water Fittings Locate the water fittings on the top and bottom flanges and connect the tubes from the adaptor to them. Water Fittings of Bottom Flange MTI Corporation www.mtixtl.com...
Page 8: Sample Holder Setup
OTF-1200X-RTP-II-5 Water Fittings of Top Flange Attention: Upon completing the water pipeline connections, turn on the water chiller to start the circulation of fluid inside the tubes and inspect for leaky connections. SAMPLE HOLDER SETUP For achieving optimum transfer of heat, highly thermal-conductive AlN plates are placed over the heating lamps of the upper and lower heaters.
Page 9 OTF-1200X-RTP-II-5 Please use the instructions below to set up the AlN plates inside of both heaters: 1) Remove hex screws on the top flange using a 5mm hex wrench. 2) Do this for all three screws on the front and back (6 screws total) to move the flange upward and access the chamber interior.
Page 10 OTF-1200X-RTP-II-5 Attention: For easier access of the bottom heater’s components, please fasten the screws of the top flange and remove the screws from the bottom flange. Then lift the top flange together with the quartz glass shell to expose the heater components at the bottom.
Page 11 OTF-1200X-RTP-II-5 6) Insert the Quartz Holder with the AlN plate into the Support Plate so that its protruding ledge (found at the opening) keeps these two parts suspended. 7) Then slide the Support Plate over the heater to cover up the heating lamps.
Page 12 OTF-1200X-RTP-II-5 Attention: Please note that it is NOT necessary to completely remove the screws on the heater when installing or removing the Support Plate. These screws only need to be loosened up to the point that the Support Plate can be easily slid along the top of the heater.
Page 13: Heater Gap Adjustment
OTF-1200X-RTP-II-5 HEATER GAP ADJUSTMENT The gap between both heaters can be adjusted to vary the distance of the sublimation process. Perform this adjustment by using the Gap Adjustment Knob found at the top of the furnace chamber. The ruler on the side of the Gap Adjustment Knob indicates the distance of the gap in millimeters. Use it as an indicator to gauge the...
Page 14: Power Connection
In the case of 110V, a standard US plug will typically be supplied. For 220V, MTI will most likely ship the instrument without a power plug on its cable due to the different plug configurations and electrical codes used by different locations and countries. The cable’s end will be naked with three wires (Live 1, and Live2, and Ground) exposed for the end user to make the appropriate plug...
Page 15 OTF-1200X-RTP-II-5 Typical Single Phase AC Power In US MTI Corporation www.mtixtl.com...
Page 16: General Operation
OTF-1200X-RTP-II-5 GENERAL OPERATION If the furnace is being used for the first time (or use again after a long period of inactivity), please pre-heat the furnace to 300 at least 2 hours to remove moisture inside the chamber. This helps to prevent the furnace refractory ceramics from cracking.
Page 17: Vacuum Pump
OTF-1200X-RTP-II-5  Once the entire experiment is completed, open the furnace chamber to retrieve the sample and shut down the instrument by pressing the “Heating Off” button and then turn the “Main Power On/ Off” knob to the left. Attention: Once the furnace setup is finished, we strongly recommend reading the handbook and follow the instructions listed in the “...
Page 18 OTF-1200X-RTP-II-5 For keeping the working environment cleaned, the exhaust of vacuum pumps can be fitted with traps or filters that help eliminate particles, vapors, oil mist, and etc. into the room. Exhaust Filters Particle Trap Cold Trap for Recovering Condensables Mounting accessories in between the vacuum pump and the processing chamber can also be considered to protect the internals of the vacuum pump from damage.
Page 19: Gas Flow
OTF-1200X-RTP-II-5 Exhaust Gas Cooling Unit Oil Trap GAS FLOW A gas flow mixer integrated with two float meters (16 – 160 mL/ min & 500 – 5000 mL/ min) is supplied with the furnace. The user may independently control each channel by using the small flow rate for reactive gas and the high flow rate for purging gas. The fittings for gas connections can be found on the top or bottom flanges.
Page 20 OTF-1200X-RTP-II-5 Gas Fittings Swagelok type gas fittings are recommended for use with reactive gases because they offer superior and secured connections that minimize leaks. The information below is useful for setting up the gas sources Connect the gas regulator to gas Cylinder. Install a 1/4" tube fitting to the outlet of gas regulator.
Page 21 NOTE: Check the compatibility of the thread type of the 1/4 tube fittings before installation. For most gas regulator in U.S. the 1/4 tube fitting is required to have 1/4 MNPT thread type. For MTI flange system, the 1/4 tube fitting is required to have 1/4 MBSPP thread type.
Page 22: Temperature Control Instructions
OTF-1200X-RTP-II-5 TEMPERATURE CONTROL INSTRUCTIONS TEMPERATURE CONTROLLER 1. Specifications a. Compatible Thermocouple: K、S、R、E、J、T、N; b. Measurement Accuracy: 0.3; c. Power Input: Single phase 220V AC (±10%) / 50~60Hz; d. Power: ≤5W; e. 30 Programmable Segments. f. MET Certified 2. Structure Below are the three variants of controllers commonly found on the furnaces. Though with different looks, they all share similar features and functions.
Page 23: Setting The Temperature Controller
OTF-1200X-RTP-II-5 SETTING THE TEMPERATURE CONTROLLER Start Up State When starting the device, the meter type and program version will display for a few seconds, and then enter the normal state. Blinking “stop” indicates the program is in “normal state”. Displaying Switch a.
Page 24 OTF-1200X-RTP-II-5  Power on the furnace, blinking “STOP” on the SV window indicates the Normal State;  Press “←” once to display “C01” on PV window;  C by using Keystrokes :“←”, “↑” or “↓” ; Set initial temperature to 0 ...
Page 25: Illustration Of Heating Profile Setting
OTF-1200X-RTP-II-5 Attention: The heating profile will stop at the first segment that contains “-121” regardless of whether or not the latter segments have values set in them. ILLUSTRATION OF HEATING PROFILE SETTING Setting Example: Temperature Control Program with 6-segments According to figure I above, all segments were recorded in the follow ing:...
Page 26: Holding The Program
OTF-1200X-RTP-II-5 window again as an indication of the controller returning to the “Normal State”. Then press “↓” and hold for two seconds to display “Run” on SV window;  Furnace will run segment by segment automatically according to the program setting;...
Page 27: Functions Of Main Parameters
OTF-1200X-RTP-II-5 FUNCTIONS OF MAIN PARAMETERS Maintain parameter M5: Like integral time of PID calibration, this parameter is mainly in charge of the integral work during the adjustment process. For instance, the smaller the M5 is set, the stronger the system integral effect is, vice versa. When M5=0, the system will cancel integral and intelligent adjustment, leave only proportion and differential (PD) function.
Page 28: Parameter Setting
OTF-1200X-RTP-II-5 Control type CtrL: (Do follow the default setting, or the system may be unable to work) When CtrL=2, startup auto-tune function, after that, system will go to 3. When CtrL=3, adopts advanced AI adjustment. After auto-tune, the system goes to this setting mode. Note that in this mode, you cannot startup auto-tune function from the panel by holding button, for a protection of repeating auto-tune.
Page 29: Auto-Tune
AUTO - TUNE In order to obtain precise temperature control, customers should pay more attention to the parameters of M5, P and t. Actually, MTI’s engineers have already made a strict high temperature pre-heating test (rate: 5℃/min) and fine-tuned on these three parameters according to each furnace’...
Page 30: Equipment Maintenance & Troubleshooting
Please refer to parameters “M5, P and t” if the temperature offset cannot be eliminated and the difference between PV and SV increases at 300  MTI furnaces are only suitable for using with air or inert gas environments. Other flammable or toxic gases, such as H , Cl and SO , will cause damage to the heating elements.
Page 31 OTF-1200X-RTP-II-5 2) Remove both wire leads of the lamp by loosening the nut from the conductor with a wrench. 3) Next, remove the nut on the plate holding the lamp in place with a wrench so that it can be pull out. Do this only for the plate on the side where the lamp will be pull out from.
Page 32: Quartz Shell Replacement
OTF-1200X-RTP-II-5 QUARTZ SHELL REPLACEMENT 1) With the outer flange cap removed, unscrew the hexagon screws (×6) on the inner flange. 2) Loosen the nuts (×6) on the lead screws around the chamber. 3) Lower the position of the nuts by around 3” on each lead screw 4) Apply pressure on the flange with both hands to push it down.
Page 33 OTF-1200X-RTP-II-5 5) Now remove the silicone O-rings and the stainless steel O-ring. 6) Take off the flange gently 7) Take off the hexagon screws on the bottom of the chamber. 8) Take out the quartz shield and flange together gently.
Page 34: Thermocouple Replacement
OTF-1200X-RTP-II-5 9) Place the quartz shield on the flat surface then take off the flange by following the steps 2~6. CAUTION: The air sealing must be inspected by vacuum or filled inert gas before running the furnace again. THERMOCOUPLE REPLACEMENT The thermocouple may be removed by loosening the nut beneath it with a wrench and then pull it out.
Page 35: Troubleshooting For Typical Problems
2. Ask electricians to check whether or not the 3 phase power supply is balanced and re-distribute the load if necessary. TROUBLESHOOTING RESOURCES  Visit MTI web site link: WWW.MTIXTL.COM for additional information about the instrument  Contact us by Tel:...

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