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1200°C HPCVD Furnace with Travel Mechanism OTF-1200X-S-HPCVD
1200°C Tube Furnace for HPCVD
with Internal Travel Mechanism - OTF-1200X-S-HPCVD
Operation Manual
860 South 19th Street, Richmond, CA 94804, USA
Tel: 510-525-3070 Fax: 510-525-4705
Email:
info@mtixtl.com
Web:
www.mtixtl.com
MTI Corporation | www.mtixtl.com
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Summary of Contents for MTI OTF-1200X-S-HPCVD
- Page 1 1200°C HPCVD Furnace with Travel Mechanism OTF-1200X-S-HPCVD 1200°C Tube Furnace for HPCVD with Internal Travel Mechanism - OTF-1200X-S-HPCVD Operation Manual 860 South 19th Street, Richmond, CA 94804, USA Tel: 510-525-3070 Fax: 510-525-4705 Email: info@mtixtl.com Web: www.mtixtl.com MTI Corporation | www.mtixtl.com...
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Page 2: Important Notes
General Warnings MTI will not be responsible for equipment damage, accidents leading to minor or fatal injuries, and etc. caused by the user’s negligence or lack of knowledge. Always read the manual fully beforehand and exercise the best judgment when handling the equipment. -
Page 3: Operating Environment
However, the warranty does NOT cover any equipment damage caused by misuse or negligence. After the expiration of the warranty, MTI will continue to provide technical support and spare parts at a reasonable cost. MTI Corporation | www.mtixtl.com... -
Page 4: Table Of Contents
1200°C HPCVD Furnace with Travel Mechanism OTF-1200X-S-HPCVD Contents Important Notes..................................2 General Warnings ..................................2 Operating Environment ................................3 Warranty ....................................3 1. Introduction ..................................5 2. Specification ..................................5 3. Product Overview ................................. 7 4. Touch Panel ................................... 8 5. -
Page 5: Introduction
1200°C HPCVD Furnace with Travel Mechanism OTF-1200X-S-HPCVD 1. Introduction OTF-1200X-S-UL is a UL certifiable compact and energy saving (1200W power consumption) split tube furnace with a max. working temperature of 1200°C and All electric parts are UL / MET / CSA certified. - Page 6 1200°C HPCVD Furnace with Travel Mechanism OTF-1200X-S-HPCVD Please visit our website for Accessories: You may need a Right Angle Valve & bellows at the vacuum port end to connect a vacuum pump. Optional Parts Anti-Corrosive Digital Gauge up to 10E-5 Torr is optional for CVD application.
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Page 7: Product Overview
1200°C HPCVD Furnace with Travel Mechanism OTF-1200X-S-HPCVD 3. Product Overview Gas Port Gas Port Quartz Tube Pressure Gauge Furnace Feedthrough w/ Thermocouple Touch Control Panel Bellow Heating Indicator Control Panel and Quick Clamp Travel Mechanism Serial Port Furnace Switch KF25 Port... -
Page 8: Touch Panel
1200°C HPCVD Furnace with Travel Mechanism OTF-1200X-S-HPCVD 4. Touch Panel Header Page: This screen appears when the control panel power is turned on. Touch the screen to proceed to control page. Control Page shows information like sample current position and sample temperature reading. The user can also move the sample via the sample transfer mechanism here. -
Page 9: Installation
1200°C HPCVD Furnace with Travel Mechanism OTF-1200X-S-HPCVD The value in mm used in the control page is the position of the sample away from the outer side (the bellow’s side) of the track (not the quartz tube’s side). The traveling range of the sample is 0-100mm When the sample is put the deepest inside the furnace tube, the TC initial position in terms of Absolution Position is 100mm, which means it is 100mm away from the outer side of the track. -
Page 10: Power Connection
However, in countries that use 110V, a 208~240V single phase AC power line needs to be setup. Please see Appendix A for more detail. MTI Corporation will not be responsible for any equipment or property damage that results from improper or incorrect power connections. -
Page 11: Sample Loading And Flange Assembly
1200°C HPCVD Furnace with Travel Mechanism OTF-1200X-S-HPCVD dissipation of heat from the furnace chamber. The insulation of heat stabilizes the heating zone which in turn expends less energy and places less wear on the heating elements. Sample Loading and Flange Assembly 1. - Page 12 1200°C HPCVD Furnace with Travel Mechanism OTF-1200X-S-HPCVD 3. Insert thermocouple into the tube. Fasten it with quick clamp (indicated by red circle) Connect the thermocouple to the furnace. Limit the pressure regulator attached to the gas tank to below 1.1 atm before filling the tube with gas.
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Page 13: Vacuum And Gas Flow System
The flanges on MTI furnaces can be readily configured to accept various fittings for vacuum pump connections. Typically, connection to the pump is made by securing stainless steel bellows to either side of the flange by quick locking clamps. -
Page 14: Temperature Control Instructions
7. Temperature Control Instructions Below are the two variants of controllers commonly found on MTI’s heating equipment. Though with different looks, they both share similar features and functions. MTI Corporation | www.mtixtl.com... -
Page 15: Startup
1200°C HPCVD Furnace with Travel Mechanism OTF-1200X-S-HPCVD All of the following functions work on both models of temperature control. Startup Start the controller, and it will display its version and then enter the normal state by displaying ‘End’ on “SV”. -
Page 16: Parameter
1200°C HPCVD Furnace with Travel Mechanism OTF-1200X-S-HPCVD Parameter ① Description Parameter Utility Range Unit/Notice Default Value Enhance Integral Function 1-9999 Enhance Proportion Function 1-9999 Limit Time Factor 1-2000 Second Control Period and Auto-tune Determining Cont Control Type Setting 3, 2... - Page 17 1200°C HPCVD Furnace with Travel Mechanism OTF-1200X-S-HPCVD Also, this parameter determines the result of auto-tune: if it is revised after auto-auto, the auto- tune fails, please revise the value manually and restart auto-tune. Cont (Controlling type) When Cont=2, system starts...
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Page 18: Temperature Controlling Setting
1200°C HPCVD Furnace with Travel Mechanism OTF-1200X-S-HPCVD Temperature controlling setting Temperature controlling setting is used for the researcher to choose right method resulting in successful heating treatment. ① Illustration of program setting: < a. In the “normal state”, press for 1 second, the meter will jump to “Temperature <... - Page 19 1200°C HPCVD Furnace with Travel Mechanism OTF-1200X-S-HPCVD ② Setting Example You could make such a form before you input the data: Prompt Input Data Initial Temperature Running time from C01 to C02 The target temperature in the second segment Running time from C02 to C03...
- Page 20 1200°C HPCVD Furnace with Travel Mechanism OTF-1200X-S-HPCVD Notes: When the desired temperature is over 200 °C, the segments “C01~C03” are necessary; When the desired temperature is over 800 °C, the segments “C01~C05” are necessary. Make sure the cooling rate is 5 °C/min when the furnace temperature is over 800 °C and the cooling rate is 10 °C/min when the furnace temperature is at 400~800 °C.
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Page 21: Maintenance
7. Do not open the furnace when it is being heated above 300 to prevent its insulation materials from cracking. 8. MTI furnaces are only suitable for using with air or inert gas environments. Other flammable or toxic gases, such as H... - Page 22 1200°C HPCVD Furnace with Travel Mechanism OTF-1200X-S-HPCVD 3. Actual temperature inside the chamber does not match the set value The temperature sensor may be broken, replace the temperature sensor/thermocouple. 4. Overheated protection alarm Cool the furnace down, and check if the program setting may be contributing to a higher than usual temperature.
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Page 23: Appendix A: Advanced Power Connection
1200°C HPCVD Furnace with Travel Mechanism OTF-1200X-S-HPCVD Appendix A: Advanced Power Connection The following knowledge may be useful for configuring a single phase 208~240V power line from various electrical panels. A three phase 240V AC electrical panel generally found in most laboratories can be configured to output a single phase 208~240V power line. -
Page 24: Appendix B: Additional Furnace Information
1200°C HPCVD Furnace with Travel Mechanism OTF-1200X-S-HPCVD Attention MTI Corporation will not be responsible for any equipment or property damage that results from improper or incorrect power connections. Appendix B: Additional Furnace Information The Temperature Distribution Across the Heating Zone:... - Page 25 1200°C HPCVD Furnace with Travel Mechanism OTF-1200X-S-HPCVD Another Furnace Heating Example and Actual Result: Heating Rate: Cooling Rate: 10°C/sec (150°C - 250°C); 10°C/sec (950°C - 900°C) 7°C/sec (250°C - 350°C); 7°C/sec (900°C - 850°C); 4°C/sec (350°C - 500°C); 4°C/sec (850°C - 750°C);...
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