Related Manuals for Zeiss NVision 40
Summary of Contents for Zeiss NVision 40
- Page 1 Carl Zeiss SMT – Nano Technology Systems Division NVision 40NVision 40 BA_NVision_40_en01BA_NVision_40_de01 Original Instructions...
- Page 2 Carl Zeiss NTS GmbH reserves the right to amend this document without prior notice as part of continuous up- grades.
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Page 3: Table Of Contents
............. . . 5.2.2 Turn on the NVision 40 . - Page 4 ............. . 5.11 Switch the NVision 40 to standby mode .
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Page 5: Introduction
Carl Zeiss SMT AG holds all copyrights and rights of exploita- tion, including all translations of this material. The license rights for the software provided with this instrument are noted in an agreement that becomes a permanent part of the instrument file. -
Page 6: Safety Information To Prevent Damage To Equipment
FIB is the abbreviation for Focused Ion Beam. The FIB image of the specimen is created using an ion beam. — NVision 40 The NVision 40 is a combination of an SEM and FIB. — SmartSEMr The control software for the NVision 40, that runs under the... -
Page 7: Safety
2.1 Proper use The SEM is designed for microscopic examinations of specimens. The NVision 40 operates with two beams, one electron beam and one ion beam. Both beams can be used independently of each other to generate images using the secondary electrons emitted from the surface of the specimen. -
Page 8: Accident Prevention And Safety
The NVision 40 employs cutting-edge technology and conforms to recognised safety requirements. This ensures the highest le- vel of industrial safety. However, the NVision 40 may still present a hazard to human health and safety and/or damage property if it is used improperly. - Page 9 Check the safety features regularly! High voltage, danger to life! Only qualified and trained service technicians au- thorised by NTS/SMT are permitted to perform work on the electrical system of the NVision 40. WARNING Hazard of poisoning or chemical burns from gases!
- Page 10 X-ray hazard ! X-radiation is generated inside the device during normal operation. Do not make any modifications to the NVision 40 that may reduce the level of X-ray protection. Ne- ver remove the cover panels, particularly those covering the columns and specimen chamber.
- Page 11 Only personnel who are specifically authorised and qualified to do so may work with the NVision Each person who works on the NVision 40 must have read and understood these operating in- structions as well as the documents and operating...
- Page 12 2 Safety IMPORTANT Use the NVision 40 only when it is in good wor- king order, and use the instrument only for its in- tended applications! Add-ons and modifications to the NVision 40 that are not approved by the manufacturer are prohibi-...
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Page 13: Safety Devices
NVision 40. 2.4.2 Master switch Use the master switch [1] to cut all power to the NVision 40 and the devices connected directly to the EMO-Box. This is only re- quired when work needs to be performed with the power fully off. -
Page 14: Emergency Off Button
Only press the emergency OFF button [2] in the event of an emergency to quickly turn the device off. This safely cuts off all mains power to the NVision 40 and/ or all devices connected to the EMO-Box. The button will remain in its depressed position. -
Page 15: Interlock System
2 Safety 2.4.6 Interlock system The interlock system is integrated in the NVision 40 to prevent abnormal operation. WARNING Electrocution and radiation hazards! Disabling interlock system elements is prohibited! The interlock system includes the following: — Cathode head plug switch [4] The cathode head plug switch shows whether the high-voltage plug is plugged in. -
Page 16: Safety Labels On The Instrument
2 Safety 2.5 Safety labels on the instrument Appropriate safety labels on the NVision 40 warn users about possible hazards. Each safety label is affixed at the point where a particular hazard exists. Label Position WARNING HOT SURFACE BURN HAZARD... - Page 17 2 Safety Label Position CAUTION x - rays produced when energised The microscope should be approved by the national regulations. Don‘t take off any parts 347800-0016-000 CAUTION: X–ray radiation is produced in this Scanning Electron Microscope with Focus Ion Beam. The acceleration voltage is limited to 30 kV.
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Page 18: Line Voltage
2 Safety Label Position WARNING Line Voltage Microscope can be damaged Only Zeiss approved equipment should be connected 347800-0005-000 WARNING Nitrogen Hazard Danger of suffocation Ensure area around instrument is sufficiently ventilated 347800-0007-000 CAUTION High leakage current ensure proper grounding... -
Page 19: Transport And Assembly
Wear safety shoes. Wear safety gloves. The complete NVision 40 is delivered in 5 wooden crates and cartons. Crate 1: Base unit with electro-optic column, FIB column Specimen chamber, specimen stage, GIS, lower frame... -
Page 20: Location Requirements
3 Transport and Assembly 3.1 Location requirements IMPORTANT The location for the NVision 40 should be determi- ned and prepared before the instrument is delive- red. Appropriate checks must be made. The NTS/SMT service technician can be of assi- stance with checking the ambient conditions and determining appropriate measures to be taken. -
Page 21: Grounding
Before mains connection establish protective grounding connection. A separate grounding connection (cross-section q4 mm for the NVision 40 must be established directly to the equi- potential bonding bar. (! Chapter 3.2 - Page 24) 3.1.3 Cooling The electron optical lenses, the turbo molecular pump and some parts of the electronic system are water-cooled. -
Page 22: Exhaust Gases
[8] between the main cut-off valve [7] and the pressure re- gulator with 2 pressure reducers [9], and a water solenoid valve [6 that interrupts cooling when the NVision 40 is switched off.! Chapter 3.2 - page 24) IMPORTANT The items can be ordered as a kit from the manu- facturer. -
Page 23: Nitrogen
3 Transport and Assembly 3.1.6 Nitrogen Dry gaseous nitrogen is used to ventilate the chamber when changing specimens. WARNING Suffocation hazard when chamber door is opened due to lack of oxygen! The chamber is filled with nitrogen! Inhaling air with high nitrogen concentrations may lead to unconsciousness due to a lack of oxygen. -
Page 24: Assembly Plan
3 Transport and Assembly 3.2 Assembly plan [10] FIB electronics rack [11] Chamber door controller [12] Static vibration damper [13] Dynamic vibration damper [14] Pre-vacuum pump [15] Power supply [16] Chamber pre-pump [17] GIS cabinet [18] Computer workstation Page 24 of 60 BA_NVision_40_en01... -
Page 25: Assembly And Adjustment
If the NVision 40 is out of operation for an extended period of time, perform maintenance on it and check the safety devices before using it again! To turn the NVision 40 fully off, follow the individual steps descri- bed in chapter 5.11... 5.13. — Chapter 5.11: Switch the NVision 40 to Standby mode —... -
Page 26: Installation
4 Installation IMPORTANT Observe the safety instructions in Chapter 2. Only service technicians from NTS/SMT may connect the NVision 40 components, inspect the main connection or install the MSG. 4.1 Establishing Connections IMPORTANT Read and note the information in the supplier’s... - Page 27 4 Installation Connect lines to the cooling water, nitrogen and compres- sed air. Attach compressed air line either to the angle valve on the vacuum pump Connect compressed air Connect nitrogen Connect dynamic vibration damper Connect static damper Connect pre-vacuum pump (! Manufacturer documentation) Connect the exhaust hose (type of connector varies according to vacuum pump)
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Page 28: Check Main Electric Connection And Attach Connectors
Attach lines to EMO-Box (bottom). Connect mains out for EMO-Box [b.] on the connector ter- minal to the back of the NVision 40 [c.]. Connect the emergency OFF button to one of the connec- tors X13...X16 [d.]. -
Page 29: Install Mgs And Gis
4 Installation 4.3 Install MGS and GIS 4.3.1 Install gas tanks and connect GIS WARNING Hazard of poisoning or chemical burns from gases! Only NTS/SMT service technicians may connect the individual gas tanks and/or GIS. 4.3.2 Connect MGS Connect electronic lines, exhaust lines Electronic connections Flue gas connection for line system Flue gas connection... -
Page 30: Operation
X-ray hazard ! X-radiation is generated inside the device during normal operation. Do not make any modifications to the NVision 40 that may reduce the level of X-ray protection. Ne- ver remove the cover panels, particularly those covering the electron optical column and speci- men chamber. -
Page 31: Initial Start-Up
5.1 Initial start-up IMPORTANT Observe the safety instructions in Chapters 2 and 5. Only qualified and trained service technicians au- thorised by NTS/SMT are permitted to perform in- itial start-up of the NVision 40. BA_NVision_40_en01 Page 31 of 60... -
Page 32: Switching On The Equipment
The pre-vacuum pump may start automatically if the START button is pressed. This will be the case if the NVision 40 had pre- viously been shutdown using the emergency off button as the NVision 40 status (Standby or ON) is the same as at the time shutdown was initiated. -
Page 33: Starting The Smartsemr Program
Turn the on-off switch [3] on the back of the lower frame to on. Open main shut-off valve for cooling water. IMPORTANT If the NVision 40 is equipped with an optional wa- ter solenoid valve, it will be opened automatically. Open main shut-off valve for compressed air. -
Page 34: Transfer The Specimens
5 Operation 5.4 Transfer the specimens SmartSemr is active. The main window [29] is active. Right-click on ”SpecimenChange” [28] and ”Vac Control” . The stage in the specimen chamber drives to the exchange position. The column gate valve of the FIB is closed. The column gate valve of the electro-optic column is closed. -
Page 35: Insert Specimens
5 Operation Remove the specimen holder [40] from the chamber’s spe- cimen stage [41] and place it on the receptacle table in the chamber. Turn the chamber door rod on the black ball in an anti- clockwise direction to release the rod from the specimen holder. - Page 36 5 Operation The chamber needs to be vented before the specimens can be inserted. Open chamber door [42]. The specimen holder [40] can be exchanged. Remove specimen holders [40] from the receptacle [43]. Load specimen containers [40] into specimen holder [44] and tighten laterally with an Allen wrench (size 1.5).
- Page 37 5 Operation Close the chamber door [42]. IMPORTANT Before purging (evacuating) the chamber, the ope- rator needs to make sure that the chamber door rod [30] is drawn all the way back and locked with the knob [39]. The green indicator lamp (PROCEED) [32] is lit. Press ”PUMP”...
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Page 38: Activating The Electron Beam
5 Operation 5.6 Activating the electron beam Left-click on ”GUN” [52] (in the status bar). A drop-down menu will be displayed. Left-click ”Gun on”. The cathode will heat up. Left-click on the ”Gun” [51] module. You will see the cathode voltage values. When the cathode start-up procedure is complete, the red X next to the Gun [52] icon in the status bar will become a green check mark. -
Page 39: Set Eucentric Axis With Electron Beam
5 Operation Use the joystick [58] to move the specimen into the range of the SEM. As soon as the specimen is coarsely focussed under the lens, you can begin to adjust the brightness, contrast, working di- stance etc. The settings are described in the upcoming chapters. It may often be necessary to tilt the specimen between 0°... -
Page 40: Switch On Fib High Voltage
5 Operation 5.7.3 Switch on FIB high voltage In the FIB toolbar [60], click on ”FIB Control” [61]. The window ”FIB Control” appears. Click the ”FIB” tab [62]. The ”FIB” menu is activated. Click the field labelled ”On” [63] to start the FIB high vol- tage. -
Page 41: Adjusting The Ion Beam
5 Operation 5.8 Adjusting the ion beam Adjust the brightness, contrast and focus on the hard pa- nel [67] (! Chapter 5.9 Page 42). Use the mouse to select a small window in the screen [68]. The FIB scans through a reduced region. A rapidly vacilla- ting image appears. -
Page 42: Focusing The Ion Beam
5 Operation 5.9 Focusing the ion beam The ion beam can be focussed using the focus dial [71] on the hard panel. Or simply press the Magnification button and focus and move the cursor to the left or right on the ion image while pressing the left mouse button. -
Page 43: Context-Based Help
5.11 Switch the NVision 40 to standby mode Standby mode is the normal status for the NVision 40 once you have finished examining a specimen. The SEM cathode conti- nues to heat and the FIB cathode is turned off. -
Page 44: Turn Off Filament Heating
— Select the ”Gun” [79] tab in the ”SEM Control” window. — If the NVision 40 will not be operated for a short period of time (e.g., overnight), activate the ”Leave Gun On at Shut- down” box [80]. The cathode will continue to heat continuously. -
Page 45: Enable Standby Mode
The ON button is lit. The computer and the instrument’s electronic components are now off. When off, the NVision 40 is powered by a 24 V auxiliary power supply required for restart. The vacuum system is now off. The specimen chamber will be partially ventilated (filled with nitrogen) to keep air or dust from being drawn into the column. -
Page 46: Shutting Down The Nvision 40 Completely
The power supply to the NVision 40 is now cut off. Turn the master switch [1] to the “O” (OFF) position. The NVision 40 is now fully cut off from the mains power. Use a lock to secure the main switch when servicing the unit and unplug the power cable. -
Page 47: Removing Faults
Only qualified and trained service technicians au- thorised by NTS/SMT are permitted to perform work on the electrical system of the NVision 40. Problem Remedy The NVision 40 won’t vent. Check compressed air supply, check nitrogen supply. -
Page 48: Maintenance
Only qualified and trained service technicians au- thorised by NTS/SMT are permitted to perform work on the electrical system of the NVision 40. Risk of injury from hot surfaces during bakeout! Parts of the cover panelling in the upper section of the column may become hot during bakeout, parti- cularly after long bakeout. -
Page 49: Inspection And Service Schedule
7.1 Inspection and service schedule Tasks to be performed Frequency Comments Check for cleanliness daily Clean the NVision 40 with clean, dry, lint-free cloth if dirty. Check function of safety devices and covers weekly Contact customer service if neces- sary. -
Page 50: Cathode Replacement
IMPORTANT Observe the safety instructions in Chapters 2 and 7. Only use original replacement parts. Shut down the NVision 40 completely. (! Chapter 5.13 - Page 46) Check the miniature circuit breaker [87] (must be in upper position). Loosen and remove the screws [86]. -
Page 51: Servicing The Msg
8 Customer service IMPORTANT If damage or defects that could endanger people or property are discovered on the NVision 40, shut down the machine immediately and do not use it again until all repairs are completed! Only trained and qualified personnel may perform... -
Page 52: Instrument Log A
8 Customer service Instrument log A " Instrument-No. " Sheet No. " Responsible person Name: Phone: IMPORTANT Instructions, tests, and changes in location must be document in instrument log A. You may copy pages from this instruction manual for the instrument log, but you must number them conse- cutively! Instructions The knowledge of the operating- and maintenance technician has been tested by a competent party... -
Page 53: Instrument Log B
8 Customer service Instrument log B " Instrument-No. " Sheet No. " Responsible person Name: Phone: IMPORTANT Maintenance, repairs and changes in location must be documented in instrument log B. You may copy pages from this instruction manual for the instrument log, but you must number them conse- cutively! Work and modifications carried out Work and modifications carried out... - Page 54 8 Customer service Work and modifications carried out Date Signature Page 54 of 60 BA_NVision_40_en01...
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Page 55: Disposal
Observe the law on marketing, retraction and environ- mentally-friendly disposal of electrical and electronic equipment of 16.03.2005. The NVision 40 has a modular structure. Be care- ful to separate the materials properly when you dispose of the instrument: Dispose of empty gas tanks according to the in- structions of the manufacturer. -
Page 56: Technical Data
10 Technical data 10 Technical data General data Dimensions: Basic instrument W x D x H max. 1300 x 1422 x 2008 mm Electronic rack for FIB W x D x H max. 1120 x 920 x 1870 mm GIS cabinet W X D x H max. -
Page 57: Appendix
11 Appendix Nitrogen Pressure 0,2 ... 0.3 bar Nitrogen use when chamber is open 3 l/min Percentage purity 99,996 % Compressed air Flow <1 l/min Input pressure min. 5 bar max. 6 bar 11 Appendix 11.1 Consumption parts Name FE cathode Demka / FEI 302.102 Ga emitter... -
Page 58: Declaration Of Conformity
12 Declaration of conformity 12 Declaration of conformity Page 58 of 60 BA_NVision_40_en01... -
Page 59: Index
13 Index 13 Index Booster pump, 19, 26, 27, 33 License rights, 5 Brightness, 39 Magnification, 7, 39, 49 Camera icon, 38 Master switch, 46 Chamber door, 15, 34, 35, 36, 37 Microscope column, 14, 19 Chamber door rod, 34, 35, 37 CLOSE button, 35 Nitrogen, 11, 15, 20, 23, 27, 31, 35, 45, 56, 57 Coating, 7... - Page 60 13 Index Tools, 38 Warranty Claims, 5 Water, 15, 20, 22 Water consumption, 21 User Name, User Name, 33 Water filter, 22 Water flow rate, 56, 57 Water solenoid valve, 33 Vac Control, 34 WINDOWS, 6 Vacuum lock, 15 Vibration, 27, 29 Vibration damper, 19 X–ray radiation, 10, 15, 30 Page 60 of 60...
- Page 61 13 Index BA_NVision_40_en01 Page 61 of 60...
- Page 62 13 Index Carl Zeiss NTS GmbH A Carl Zeiss SMT AG Company Carl-Zeiss-Straße 56 D-73447 Oberkochen Germany Tel.: +49 73 64 / 20 44 88 Fax.: +49 73 64 / 20 43 43 info-nts@smt.zeiss.com Carl Zeiss SMT Ltd. 511 Coldhams Lane Cambridge CB1 3JS Tel.: +44 12 23 / 41 41 66...
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