Related Manuals for Zeiss 200-mm airlock
Summary of Contents for Zeiss 200-mm airlock
- Page 1 Carl Zeiss Microscopy - Electron and Ion Beam Microscopy 200-mm airlock Optional airlock for field emission scanning electron microscopes Enabling the Nano-Age World ®...
- Page 2 Software programs will fully remain the property of Carl Zeiss Microscopy. No program, documentation or subsequent upgrade thereof may be disclosed to any third party, unless prior written consent of Carl Zeiss Microscopy has been procured to do so, nor may they be copied or otherwise duplicated, even for the customer’s internal needs apart from a single back-up copy for safety purposes.
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Page 3: Table Of Contents
`çåíÉåíë Table of contents 1. About this manual ................. 4 2. Safety summary..................6 2.1. Intended use ....................6 2.2. Prevention of accidents and improper use ..........6 2.3. Safety devices ................... 7 2.3.1. Interlocks ......................7 2.3.2. Error LED ......................7 3. -
Page 4: About This Manual
Read the instructions carefully. Keep the instruction manual nearby the 200-mm airlock and hand it over to future owners of the instrument. This instruction manual is designed for users who have been trained by an authorised Carl Zeiss Microscopy expert to operate the FESEM, the 200-mm airlock is built in. - Page 5 Operating software for ZEISS field emission scanning electron mico- ® SmartSEM scopes Carl Zeiss Microscopy serv- Specially trained service expert, either Carl Zeiss Microscopy staff or ice engineer, NTS/S service authorised service partner of Carl Zeiss Microscopy. staff Operator A trained person, who is assigned to operate the FESEM.
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Page 6: Safety Summary
, AURIGA 60, AURIGA compact The 200-mm airlock allows you to quickly transfer the specimen into the specimen chamber with- out breaking the system vacuum. The use of the airlock minimises possible contamination of the specimen chamber and reduces pumping times thus speeding up the specimen exchange procedure. -
Page 7: Safety Devices
Opening the gate valve is only possible, when the EHT is off and the column chamber valve is closed. 2.3.2 Error LED An error LED is included in the control panel on the front of the 200-mm airlock. The light of the error LED indicates an error state, detected by the airlock interlock system. fj=OMMJãã=~áêäçÅâ|ÉåMNKÑã... -
Page 8: Description
PK=aÉëÅêáéíáçå 3. Description 3.1 Overview Control panel Viewing window Push button with integrated LED Airlock rod Knob Airlock door Airlock handle U=çÑ=PO fj=OMMJãã=~áêäçÅâ|ÉåMNKÑã... -
Page 9: Control Panel
PK=aÉëÅêáéíáçå 3.2 Control panel Push buttons (left) • Transfer Evacuates the airlock and opens the gate valve. Precondition: Stage is in transfer position, air- lock rod is retracted. Stage Ready LED lights permanently. Transfer mode is used to insert the specimen from the airlock into the specimen chamber of the FESEM. -
Page 10: Technical Data
Maximum pumping time: 45 seconds Ventilated with gaseous nitrogen • Suitable for all ZEISS standard sample holders except for wafer holders and mask holders. The 200-mm airlock is labelled with a type plate. The type plate is located at the bottom of the airlock. - Page 11 Fig. 1.1: Schematics of the vacuum system with 200-mm airlock The 200-mm airlock allows you to introduce a specimen (3) while the vacuum of the specimen chamber is maintained. As soon as the airlock chamber is evacuated, the gate valve can be opened.
- Page 12 PK=aÉëÅêáéíáçå In general, you can distinguish the following operation sequences: Operation Sequence Schematics Locking in a specimen Loading the airlock chamber Transferring the specimen from the airlock chamber into the specimen chamber Locking out a specimen Transferring the specimen from the specimen chamber into the airlock chamber Unloading the airlock cham- NO=çÑ=PO...
- Page 13 Changing to store mode 3.5 Customer service For customer service, contact your local Carl Zeiss Microscopy service engineer. A list of Carl Zeiss Microscopy locations and authorised service partners can be found at: http://www.zeiss.com/microscopy 4. Installation The 200-mm airlock is either factory-installed or retrofitted by authorised Carl Zeiss Microscopy service staff.
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Page 14: Operation
- The gate valve opens. - The illumination is turned on in the airlock cham- ber. IMPORTANT The airlock macros can be modified according to your individual requirements. Contact your local Carl Zeiss Microscopy service engineer for assistance. NQ=çÑ=PO fj=OMMJãã=~áêäçÅâ|ÉåMNKÑã... - Page 15 RK=léÉê~íáçå Transfer the sample holder from the specimen chamber into the airlock by using the airlock rod: Insert the airlock rod. Turn the knob clockwise in order to attach the sample holder to the airlock rod. Retract the airlock rod. fj=OMMJãã=~áêäçÅâ|ÉåMNKÑã...
- Page 16 RK=léÉê~íáçå Change to Vent mode: On the control panel, press Vent. Alternatively: On the Airlock panel, click on Vent. The gate valve is closed. The airlock chamber is ventilated with nitrogen. NS=çÑ=PO fj=OMMJãã=~áêäçÅâ|ÉåMNKÑã...
- Page 17 RK=léÉê~íáçå Unloading/ loading the Take hold of the airlock handle (1) and open airlock the airlock door. Exchange the specimen. In case you wish to exchange the whole sample holder: Detach the sample holder from the airlock rod by turning the knob counter-clockwise. Remove the sample holder from the dovetail.
- Page 18 RK=léÉê~íáçå Change to Transfer mode: Locking in the specimen On the control panel, press Transfer. Alternatively: Click on Transfer on the Airlock panel. The airlock is evacuated. The gate valve opens. The illumination is turned on in the airlock chamber. Transfer the sample holder from the airlock into the specimen chamber by using the air- lock rod:...
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Page 19: Changing The Specimen Without Using Airlock Macros
- The column chamber valve opens. IMPORTANT The airlock macros can be modified according to your indivdual requirements. Contact your local Carl Zeiss Microscopy service engineer for assistance. 12 Switch on the EHT. 13 Continue working with the FESEM. 5.2 Changing the specimen without using airlock macros The following procedure describes how to manually perform the steps that are included in the air- lock macros. - Page 20 RK=léÉê~íáçå The Airlock panel opens. Click on Close Column Chamber Valve. The column chamber valve is closed to separate gun head area and specimen chamber. CAUTION Risk of damaging FESEM or specimen if specimen stage is at a short working distance. Ensure there is enough space between objective lens and specimen before moving the specimen stage.
- Page 21 RK=léÉê~íáçå Change to Transfer mode: On the control panel, press Transfer. Alternatively: Click on Transfer on the Airlock panel. The airlock is evacuated. The gate valve opens. The illumination is turned on in the airlock chamber. Continue with steps 4 to 10 in section 5.1 fj=OMMJãã=~áêäçÅâ|ÉåMNKÑã...
- Page 22 RK=léÉê~íáçå Change to Vent mode: On the control panel, press Vent. Alternatively: On the Airlock, panel click on Vent. The gate valve is closed. The airlock chamber is ventilated with nitrogen. Click on Open Column Chamber Valve. 10 Switch on the EHT. 11 Continue working with the FESEM.
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Page 23: Storing Specimens In The Airlock
RK=léÉê~íáçå 5.3 Storing specimens in the airlock Insert the specimen into the airlock. Retract the airlock rod. Change to Store mode: Press Store. Alternatively: Click on Store in the Airlock panel. The gate valve closes, while the vacuum in the airlock chamber is maintained. The illumination is turned off. -
Page 24: Removing The Airlock Rod
RK=léÉê~íáçå 5.4 Removing the airlock rod When you do not wish to transfer specimens from the specimen chamber of the FESEM, you can remove the airlock rod from the airlock. Retract the airlock rod. Change to Vent mode. Open the airlock. Remove the sample holder. -
Page 25: Mounting The Airlock Rod
RK=léÉê~íáçå 5.5 Mounting the airlock rod Change to Vent mode. Remove the blind plug. Take the airlock rod and move the white plug to the inner side of the airlock rod. Mount the airlock rod to the orifice. Note the recesses (1) at the orifice. Slightly turn the silver plug clockwise. -
Page 26: Maintenance And Repair
Close chamber door and/or airlock door. is/are open. No compressed air. Check the compressed air supply. Problem in the electrical system. Contact the Carl Zeiss Microscopy service. Transfer LED is flashing per- Stage is not in transfer position. 1. Select Stage/Store-Recall from the menu. manently. -
Page 27: Cleaning The Airlock
The 200-mm airlock is not user-serviceable. In case of a defect contact the Carl Zeiss Microscopy service for assistance. 6.2 Cleaning the airlock Parts required Lint-free cloth If required, use a moistened lint-free cloth to clean the outside of the airlock. -
Page 28: Parts
Use a clean lint-free cloth. 6.4 Parts Part Airlock rod, complete, 200 mm 346054-8022-000 Blind plug 346054-8021-000 Rack for airlock rod 346054-8002-000 7. De-installation and disposal The 200-mm airlock is de-installed and disposed of by authorised Carl Zeiss Microscopy service staff only. OU=çÑ=PO fj=OMMJãã=~áêäçÅâ|ÉåMNKÑã... -
Page 29: Directives And Standards
UK=aáêÉÅíáîÉë=~åÇ=ëí~åÇ~êÇë 8. Directives and standards Denomination: 200-mm airlock This is to declare that the component mentioned above fulfils all the relevant provisions of • Directive 2006/42/EC • Directive 2004/108/EC • Standard EN 60204-1 • Standard EN 61000-6-4 • Standard EN 61000-6-2 •... -
Page 30: Index
VK=fåÇÉñ 9. Index Symbols $Exchange 20 Airlock chamber 11 Airlock door 7 Airlock handle 8 Airlock macro 14 Airlock rod 7 Column chamber valve 11 Control panel 8 Customer service 13 De-installation 29 Disposal 29 Door Open 9 Dovetail 18 Error 9 Error LED 7 Gate valve 10... - Page 31 VK=fåÇÉñ Operator 5 Operator, basic 5 Operator, specially trained 5 Pirani gauge 11 Pumping time 10 Push button 8 Rack 24 Rod Retracted 9 Safety devices 7 Safety instructions 4 Safety symbol 4 Sample holders 10 Service 6 Signal word 4 Specimen chamber 11 Specimen stage 11 Stage Ready 9...
- Page 32 Carl Zeiss Microscopy, LLC One Zeiss Drive Thornwood, NY 10594 microscopy@zeiss.com Plus a worldwide network of distributors www.zeiss.com/microscopy Due to a policy of continuous development, we reserve the right to change specifications without notice. © Carl Zeiss Microscopy GmbH, Oberkochen...